JPS5596651A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5596651A JPS5596651A JP421679A JP421679A JPS5596651A JP S5596651 A JPS5596651 A JP S5596651A JP 421679 A JP421679 A JP 421679A JP 421679 A JP421679 A JP 421679A JP S5596651 A JPS5596651 A JP S5596651A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cross
- section
- semiconductor device
- inverted trapezoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To readily fabricate and enhance the reliability of a semiconductor device by providing an etching groove having inverted trapezoid at cross section.
CONSTITUTION: A buried layer 2 and an epitaxial layer 3 are sequentially formed on the silicon substrate 1 having a main plane (100), and an SiO2 film 5 is perforated with an opening to execute an atisotropic etching therethrough. The composition and liquid temperature of an etching solution are selected to form a separated groove of inverted trapezoid in cross section at the substrate 1. The thermal strain stress is scattered at the following step by the cross section of inverted trapezoid to thereby prevent substantially the crack of the substrate. Since there is no acute angle portion when connecting metal wires 8 to the substrate, no accident such as fine cracks and irregular thickness of the metal-deposited film occurs in case of V-shaped groove to thus improve the reliability of the semiconductor device.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP421679A JPS5596651A (en) | 1979-01-16 | 1979-01-16 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP421679A JPS5596651A (en) | 1979-01-16 | 1979-01-16 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5596651A true JPS5596651A (en) | 1980-07-23 |
Family
ID=11578414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP421679A Pending JPS5596651A (en) | 1979-01-16 | 1979-01-16 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5596651A (en) |
-
1979
- 1979-01-16 JP JP421679A patent/JPS5596651A/en active Pending
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