JPS5583264A - Method of fabricating mos semiconductor device - Google Patents
Method of fabricating mos semiconductor deviceInfo
- Publication number
- JPS5583264A JPS5583264A JP15835278A JP15835278A JPS5583264A JP S5583264 A JPS5583264 A JP S5583264A JP 15835278 A JP15835278 A JP 15835278A JP 15835278 A JP15835278 A JP 15835278A JP S5583264 A JPS5583264 A JP S5583264A
- Authority
- JP
- Japan
- Prior art keywords
- source
- layer
- substrate
- region
- entire surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15835278A JPS5583264A (en) | 1978-12-19 | 1978-12-19 | Method of fabricating mos semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15835278A JPS5583264A (en) | 1978-12-19 | 1978-12-19 | Method of fabricating mos semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5583264A true JPS5583264A (en) | 1980-06-23 |
Family
ID=15669768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15835278A Pending JPS5583264A (en) | 1978-12-19 | 1978-12-19 | Method of fabricating mos semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5583264A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162457A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Semiconductor memory unit |
US5093276A (en) * | 1984-12-11 | 1992-03-03 | Seiko Epson Corporation | Semiconductor device and method of production |
US5190886A (en) * | 1984-12-11 | 1993-03-02 | Seiko Epson Corporation | Semiconductor device and method of production |
US5264721A (en) * | 1989-04-29 | 1993-11-23 | Fujitsu Limited | Insulated-gate FET on an SOI-structure |
US6130463A (en) * | 1999-02-01 | 2000-10-10 | Mitsubishi Denki Kabushiki Kaisha | Field effect transistor and method of manufacturing same |
-
1978
- 1978-12-19 JP JP15835278A patent/JPS5583264A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162457A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Semiconductor memory unit |
US5093276A (en) * | 1984-12-11 | 1992-03-03 | Seiko Epson Corporation | Semiconductor device and method of production |
US5190886A (en) * | 1984-12-11 | 1993-03-02 | Seiko Epson Corporation | Semiconductor device and method of production |
US5264721A (en) * | 1989-04-29 | 1993-11-23 | Fujitsu Limited | Insulated-gate FET on an SOI-structure |
US6130463A (en) * | 1999-02-01 | 2000-10-10 | Mitsubishi Denki Kabushiki Kaisha | Field effect transistor and method of manufacturing same |
US6475844B1 (en) * | 1999-02-01 | 2002-11-05 | Mitsubishi Denki Kabushiki Kaisha | Field effect transistor and method of manufacturing same |
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