JPS5578235A - Sensor and its manufacture - Google Patents
Sensor and its manufactureInfo
- Publication number
- JPS5578235A JPS5578235A JP15240178A JP15240178A JPS5578235A JP S5578235 A JPS5578235 A JP S5578235A JP 15240178 A JP15240178 A JP 15240178A JP 15240178 A JP15240178 A JP 15240178A JP S5578235 A JPS5578235 A JP S5578235A
- Authority
- JP
- Japan
- Prior art keywords
- film
- supermicro
- metal oxide
- particles
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002245 particle Substances 0.000 abstract 8
- 229910044991 metal oxide Inorganic materials 0.000 abstract 3
- 150000004706 metal oxides Chemical class 0.000 abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000011859 microparticle Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Landscapes
- Non-Adjustable Resistors (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To obtain the sensor which can detect gas and water vapor in high sensitivity, by forming oxide supermicro particle film on the insulating support providing electrode and forming Pd supermicro particle film on the film under inactive gas atmosphere.
CONSTITUTION: The electrodes 2, 3 of pair are formed on the insulation substrate 1 of glass and ceramic, and the supermicro particle film 4 of metal oxide such as Sn, Ti, Zn and Ni is formed with vacuum evaporation method. Pd microparticle film or Pd supermicro particles and the hybrid film 5 with the said metal oxide supermicro particles are evaporated on the film 4 under inactive gas atmosphere to obtain the sensor for gas and water content detection. The film thickness of the Pd supermicron particle film 5 is around several μm and the average particle diameter is several tens to hundreds of Å the same as the metal oxide supermicron particles.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53152401A JPS588743B2 (en) | 1978-12-08 | 1978-12-08 | Gas/humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53152401A JPS588743B2 (en) | 1978-12-08 | 1978-12-08 | Gas/humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5578235A true JPS5578235A (en) | 1980-06-12 |
| JPS588743B2 JPS588743B2 (en) | 1983-02-17 |
Family
ID=15539698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53152401A Expired JPS588743B2 (en) | 1978-12-08 | 1978-12-08 | Gas/humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS588743B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
| US4423407A (en) * | 1981-02-27 | 1983-12-27 | Dart Industries Inc. | Apparatus and method for measuring the concentration of gases |
| US4441073A (en) * | 1980-12-22 | 1984-04-03 | Electric Power Research Institute, Inc. | Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus |
| JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
| US4731226A (en) * | 1985-06-24 | 1988-03-15 | Figaro Engineering Inc. | Gas sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62288361A (en) * | 1986-06-06 | 1987-12-15 | Nissan Motor Co Ltd | Fuel injection pump |
-
1978
- 1978-12-08 JP JP53152401A patent/JPS588743B2/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4441073A (en) * | 1980-12-22 | 1984-04-03 | Electric Power Research Institute, Inc. | Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus |
| US4423407A (en) * | 1981-02-27 | 1983-12-27 | Dart Industries Inc. | Apparatus and method for measuring the concentration of gases |
| JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
| JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
| US4731226A (en) * | 1985-06-24 | 1988-03-15 | Figaro Engineering Inc. | Gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS588743B2 (en) | 1983-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5778519A (en) | Production of electrochromic display element | |
| JPS5578235A (en) | Sensor and its manufacture | |
| MY127663A (en) | Method for analyzing impurities within silicon wafer | |
| US4988539A (en) | Method of manufacturing a gas detection sensor, and the resulting sensor | |
| Porstendörfer et al. | Size distributions of latex particles | |
| JPS57192846A (en) | Humidity sensor and manufacture thereof | |
| JPS55158678A (en) | Manufacture of solar cell | |
| JPS55158549A (en) | Production of sensor | |
| JPS55159147A (en) | Production of sensor | |
| JPS5270751A (en) | Manufacture of electrode of gas discharge panel | |
| GB949330A (en) | Improvements in target electrodes and methods of manufacture | |
| JPS6030893B2 (en) | How to manufacture the sensor | |
| JPS5722547A (en) | Gas sensing element | |
| JPS5687851A (en) | Sensor | |
| JPS5614408A (en) | Manufacture of solid electrolyte | |
| JPS5527953A (en) | Method of fabricating senser | |
| JPS55158547A (en) | Sensor | |
| JPS6436762A (en) | Manufacture of transparent conductive film | |
| JPS5583843A (en) | Humidity sensor | |
| JPH06213853A (en) | Manufacture of gas detecting element | |
| JP2926874B2 (en) | Combustible gas detection element | |
| JPS5722549A (en) | Gas sensor and manufacture thereof | |
| JPS55159150A (en) | Production of sensor | |
| JPS55122142A (en) | Carbon monoxide detector | |
| JPS5542049A (en) | Hydrogen gas detecting element |