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JPS5516457A - Gap detecting method - Google Patents

Gap detecting method

Info

Publication number
JPS5516457A
JPS5516457A JP8949978A JP8949978A JPS5516457A JP S5516457 A JPS5516457 A JP S5516457A JP 8949978 A JP8949978 A JP 8949978A JP 8949978 A JP8949978 A JP 8949978A JP S5516457 A JPS5516457 A JP S5516457A
Authority
JP
Japan
Prior art keywords
wafer
mask
gap
holder
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8949978A
Other languages
English (en)
Inventor
Eitaro Kawaguchi
Kazuo Minowa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8949978A priority Critical patent/JPS5516457A/ja
Publication of JPS5516457A publication Critical patent/JPS5516457A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP8949978A 1978-07-24 1978-07-24 Gap detecting method Pending JPS5516457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8949978A JPS5516457A (en) 1978-07-24 1978-07-24 Gap detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8949978A JPS5516457A (en) 1978-07-24 1978-07-24 Gap detecting method

Publications (1)

Publication Number Publication Date
JPS5516457A true JPS5516457A (en) 1980-02-05

Family

ID=13972447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8949978A Pending JPS5516457A (en) 1978-07-24 1978-07-24 Gap detecting method

Country Status (1)

Country Link
JP (1) JPS5516457A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716885U (ja) * 1980-06-24 1982-01-28
JPS58103136A (ja) * 1981-12-16 1983-06-20 Nippon Kogaku Kk <Nikon> 基板の傾き設定装置
JPS59107515A (ja) * 1982-12-13 1984-06-21 Hitachi Ltd Ｘ線露光装置
JPS62277726A (ja) * 1986-05-27 1987-12-02 Canon Inc 平行出し装置
JPS62279629A (ja) * 1986-05-28 1987-12-04 Hitachi Ltd プロキシミテイ方式の露光装置
US5210514A (en) * 1990-08-17 1993-05-11 Tdk Corporation Coil device
WO2012028166A1 (de) 2010-09-03 2012-03-08 Ev Group E. Thallner Gmbh Vorrichtung und verfahren zur verringerung eines keilfehlers

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716885U (ja) * 1980-06-24 1982-01-28
JPS616463Y2 (ja) * 1980-06-24 1986-02-26
JPS58103136A (ja) * 1981-12-16 1983-06-20 Nippon Kogaku Kk <Nikon> 基板の傾き設定装置
JPH035652B2 (ja) * 1981-12-16 1991-01-28 Nippon Kogaku Kk
JPS59107515A (ja) * 1982-12-13 1984-06-21 Hitachi Ltd Ｘ線露光装置
JPH0454963B2 (ja) * 1982-12-13 1992-09-01 Hitachi Ltd
JPS62277726A (ja) * 1986-05-27 1987-12-02 Canon Inc 平行出し装置
JPS62279629A (ja) * 1986-05-28 1987-12-04 Hitachi Ltd プロキシミテイ方式の露光装置
US5210514A (en) * 1990-08-17 1993-05-11 Tdk Corporation Coil device
WO2012028166A1 (de) 2010-09-03 2012-03-08 Ev Group E. Thallner Gmbh Vorrichtung und verfahren zur verringerung eines keilfehlers
US9194700B2 (en) 2010-09-03 2015-11-24 Ev Group E. Thallner Gmbh Device and method for reducing a wedge error

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