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JPS5387179A - Creeping characteristic measuring method - Google Patents

Creeping characteristic measuring method

Info

Publication number
JPS5387179A
JPS5387179A JP179977A JP179977A JPS5387179A JP S5387179 A JPS5387179 A JP S5387179A JP 179977 A JP179977 A JP 179977A JP 179977 A JP179977 A JP 179977A JP S5387179 A JPS5387179 A JP S5387179A
Authority
JP
Japan
Prior art keywords
measuring method
characteristic measuring
creeping characteristic
creeping
decrease
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP179977A
Other languages
Japanese (ja)
Inventor
Saburo Mita
Ryozo Takeuchi
Genji Takahashi
Kimihito Abe
Takeshi Ishizuka
Toshiyuki Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP179977A priority Critical patent/JPS5387179A/en
Publication of JPS5387179A publication Critical patent/JPS5387179A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To accurately quantitatively detect the minute contamination of covered material surface as a decrease in surface resistance.
COPYRIGHT: (C)1978,JPO&Japio
JP179977A 1977-01-11 1977-01-11 Creeping characteristic measuring method Pending JPS5387179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP179977A JPS5387179A (en) 1977-01-11 1977-01-11 Creeping characteristic measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP179977A JPS5387179A (en) 1977-01-11 1977-01-11 Creeping characteristic measuring method

Publications (1)

Publication Number Publication Date
JPS5387179A true JPS5387179A (en) 1978-08-01

Family

ID=11511608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP179977A Pending JPS5387179A (en) 1977-01-11 1977-01-11 Creeping characteristic measuring method

Country Status (1)

Country Link
JP (1) JPS5387179A (en)

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