JPS55115047U - - Google Patents
Info
- Publication number
- JPS55115047U JPS55115047U JP1420679U JP1420679U JPS55115047U JP S55115047 U JPS55115047 U JP S55115047U JP 1420679 U JP1420679 U JP 1420679U JP 1420679 U JP1420679 U JP 1420679U JP S55115047 U JPS55115047 U JP S55115047U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420679U JPS55115047U (en) | 1979-02-06 | 1979-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420679U JPS55115047U (en) | 1979-02-06 | 1979-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55115047U true JPS55115047U (en) | 1980-08-13 |
Family
ID=28833698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1420679U Pending JPS55115047U (en) | 1979-02-06 | 1979-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55115047U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185773A (en) * | 1982-04-21 | 1983-10-29 | Toshiba Corp | Dry etching method |
| JPS5929435A (en) * | 1982-08-11 | 1984-02-16 | Hitachi Ltd | Sample support device |
| JPS60115226A (en) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | Substrate temperature control method |
| JPS6395644A (en) * | 1986-10-13 | 1988-04-26 | Nippon Telegr & Teleph Corp <Ntt> | Electrostatic chuck |
| JPH02110926A (en) * | 1989-09-27 | 1990-04-24 | Hitachi Ltd | Temperature control of specimen and device thereof |
| JPH02110927A (en) * | 1989-09-27 | 1990-04-24 | Hitachi Ltd | Specimen holding device |
| JPH02119131A (en) * | 1989-09-27 | 1990-05-07 | Hitachi Ltd | Temperature controlling method for sample and its equipment |
| JPH0373453U (en) * | 1989-11-22 | 1991-07-24 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512520U (en) * | 1974-06-24 | 1976-01-09 |
-
1979
- 1979-02-06 JP JP1420679U patent/JPS55115047U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512520U (en) * | 1974-06-24 | 1976-01-09 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185773A (en) * | 1982-04-21 | 1983-10-29 | Toshiba Corp | Dry etching method |
| JPS5929435A (en) * | 1982-08-11 | 1984-02-16 | Hitachi Ltd | Sample support device |
| JPS60115226A (en) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | Substrate temperature control method |
| JPS6395644A (en) * | 1986-10-13 | 1988-04-26 | Nippon Telegr & Teleph Corp <Ntt> | Electrostatic chuck |
| JPH02110926A (en) * | 1989-09-27 | 1990-04-24 | Hitachi Ltd | Temperature control of specimen and device thereof |
| JPH02110927A (en) * | 1989-09-27 | 1990-04-24 | Hitachi Ltd | Specimen holding device |
| JPH02119131A (en) * | 1989-09-27 | 1990-05-07 | Hitachi Ltd | Temperature controlling method for sample and its equipment |
| JPH0373453U (en) * | 1989-11-22 | 1991-07-24 |