JPS5493358A - Boat for growing for liquid phase epitaxial - Google Patents
Boat for growing for liquid phase epitaxialInfo
- Publication number
- JPS5493358A JPS5493358A JP15897777A JP15897777A JPS5493358A JP S5493358 A JPS5493358 A JP S5493358A JP 15897777 A JP15897777 A JP 15897777A JP 15897777 A JP15897777 A JP 15897777A JP S5493358 A JPS5493358 A JP S5493358A
- Authority
- JP
- Japan
- Prior art keywords
- storage
- growing
- barrier
- molten liquid
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain the growing layer of good quality without contamination, by providing the molten liquid storage to the boat for epitaxial growing and the barrier slidable containing the semiconductor substrate with a distance from the storage, and by contacting the barrier with the storage with slide on growing.
CONSTITUTION: The storage 3 containing the molten liquid 2 such as Ga, GaAs adding Si being the impurity is formed at the intermediate part of the quartz tube 1 and the barrier 4 is formed at the location apart from the storage 3. In this case, the slide groove 5 is placed lengthwise so that the storage 3 and the barrier 4 are respectively divided into two. Next, in this groove 5, the longitudinal groove 6a for the both sides containing the simiconductor substrate 7 and the semiconductor substrate support body 6 having the intermediate part 6b through the storage 3 are implanted. With this constitution, the quartz tube 1 is heated in the vacuum furnace and atomospheric gas 9 is fed from the gas inlet hole 8 placed at the storage 3 and it is discharged from the exhaust outlet 10. With this condition, the support 6 is slided and the substrate 7 is dipped with the molten liquid 2, performing growing.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897777A JPS5493358A (en) | 1977-12-30 | 1977-12-30 | Boat for growing for liquid phase epitaxial |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897777A JPS5493358A (en) | 1977-12-30 | 1977-12-30 | Boat for growing for liquid phase epitaxial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5493358A true JPS5493358A (en) | 1979-07-24 |
Family
ID=15683503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15897777A Pending JPS5493358A (en) | 1977-12-30 | 1977-12-30 | Boat for growing for liquid phase epitaxial |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5493358A (en) |
-
1977
- 1977-12-30 JP JP15897777A patent/JPS5493358A/en active Pending
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