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JPS54585A - Automatic angle setting device - Google Patents

Automatic angle setting device

Info

Publication number
JPS54585A
JPS54585A JP6560377A JP6560377A JPS54585A JP S54585 A JPS54585 A JP S54585A JP 6560377 A JP6560377 A JP 6560377A JP 6560377 A JP6560377 A JP 6560377A JP S54585 A JPS54585 A JP S54585A
Authority
JP
Japan
Prior art keywords
setting device
angle setting
automatic angle
automatic
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6560377A
Other languages
Japanese (ja)
Other versions
JPS5729848B2 (en
Inventor
Keiichi Yokota
Kuniyuki Matsuba
Mamoru Shibata
Masakatsu Nagase
Youichi Kurono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TERUMETSUKU KK
Original Assignee
TERUMETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TERUMETSUKU KK filed Critical TERUMETSUKU KK
Priority to JP6560377A priority Critical patent/JPS54585A/en
Publication of JPS54585A publication Critical patent/JPS54585A/en
Publication of JPS5729848B2 publication Critical patent/JPS5729848B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Control Of Position Or Direction (AREA)
JP6560377A 1977-06-02 1977-06-02 Automatic angle setting device Granted JPS54585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6560377A JPS54585A (en) 1977-06-02 1977-06-02 Automatic angle setting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6560377A JPS54585A (en) 1977-06-02 1977-06-02 Automatic angle setting device

Publications (2)

Publication Number Publication Date
JPS54585A true JPS54585A (en) 1979-01-05
JPS5729848B2 JPS5729848B2 (en) 1982-06-25

Family

ID=13291750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6560377A Granted JPS54585A (en) 1977-06-02 1977-06-02 Automatic angle setting device

Country Status (1)

Country Link
JP (1) JPS54585A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105347A (en) * 1979-02-07 1980-08-12 Sanyo Electric Co Ltd Apparatus for scribing single-crystal wafer
JPS5864043A (en) * 1981-10-13 1983-04-16 Nippon Telegr & Teleph Corp <Ntt> Positioning device for disc-shaped plate
JPS6081613A (en) * 1983-10-11 1985-05-09 Hitachi Ltd Matching device of water
JPH0231443A (en) * 1988-07-21 1990-02-01 Hitachi Ltd Wafer alignment method
JPH0312946A (en) * 1989-06-10 1991-01-21 Tokyo Electron Ltd Wafer prealignment method
JP2011216789A (en) * 2010-04-01 2011-10-27 Nikon Corp Position detecting device, superposition device, position detecting method, and method of manufacturing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05
JPS51102467A (en) * 1975-03-05 1976-09-09 Nippon Electric Co

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05
JPS51102467A (en) * 1975-03-05 1976-09-09 Nippon Electric Co

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105347A (en) * 1979-02-07 1980-08-12 Sanyo Electric Co Ltd Apparatus for scribing single-crystal wafer
JPS6157701B2 (en) * 1979-02-07 1986-12-08 Sanyo Electric Co
JPS5864043A (en) * 1981-10-13 1983-04-16 Nippon Telegr & Teleph Corp <Ntt> Positioning device for disc-shaped plate
JPS6320380B2 (en) * 1981-10-13 1988-04-27 Nippon Telegraph & Telephone
JPS6081613A (en) * 1983-10-11 1985-05-09 Hitachi Ltd Matching device of water
JPH0231443A (en) * 1988-07-21 1990-02-01 Hitachi Ltd Wafer alignment method
JPH0312946A (en) * 1989-06-10 1991-01-21 Tokyo Electron Ltd Wafer prealignment method
JP2011216789A (en) * 2010-04-01 2011-10-27 Nikon Corp Position detecting device, superposition device, position detecting method, and method of manufacturing device

Also Published As

Publication number Publication date
JPS5729848B2 (en) 1982-06-25

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