JPS49115665A - - Google Patents
Info
- Publication number
- JPS49115665A JPS49115665A JP48026165A JP2616573A JPS49115665A JP S49115665 A JPS49115665 A JP S49115665A JP 48026165 A JP48026165 A JP 48026165A JP 2616573 A JP2616573 A JP 2616573A JP S49115665 A JPS49115665 A JP S49115665A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2616573A JPS5539901B2 (en) | 1973-03-07 | 1973-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2616573A JPS5539901B2 (en) | 1973-03-07 | 1973-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49115665A true JPS49115665A (en) | 1974-11-05 |
| JPS5539901B2 JPS5539901B2 (en) | 1980-10-14 |
Family
ID=12185926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2616573A Expired JPS5539901B2 (en) | 1973-03-07 | 1973-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539901B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53110165U (en) * | 1977-02-10 | 1978-09-02 | ||
| JPS54585A (en) * | 1977-06-02 | 1979-01-05 | Terumetsuku Kk | Automatic angle setting device |
| JPS5441078A (en) * | 1977-09-08 | 1979-03-31 | Kobatoron Kk | Device for inspecting semiconductor |
| JPS55105347A (en) * | 1979-02-07 | 1980-08-12 | Sanyo Electric Co Ltd | Apparatus for scribing single-crystal wafer |
| JPS5642342A (en) * | 1979-09-14 | 1981-04-20 | Jeol Ltd | Facing device of wafer |
| JPS5818713A (en) * | 1981-07-25 | 1983-02-03 | Nippon Kogaku Kk <Nikon> | Positioning device for discoid object |
| JPS58210633A (en) * | 1982-06-01 | 1983-12-07 | Nec Corp | Automatic wafer positioning apparatus |
| JPS59150840U (en) * | 1983-03-30 | 1984-10-09 | 中浦 一彦 | Concrete mixer for joints |
| JPS6187352A (en) * | 1985-09-27 | 1986-05-02 | Hitachi Ltd | Orientation flat positioning device |
| JPH02112259A (en) * | 1988-10-21 | 1990-04-24 | Shin Etsu Handotai Co Ltd | Position detector device for orientation flat mark |
-
1973
- 1973-03-07 JP JP2616573A patent/JPS5539901B2/ja not_active Expired
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53110165U (en) * | 1977-02-10 | 1978-09-02 | ||
| JPS5914726Y2 (en) * | 1977-02-10 | 1984-05-01 | 富士通株式会社 | optical rotary transducer |
| JPS5729848B2 (en) * | 1977-06-02 | 1982-06-25 | ||
| JPS54585A (en) * | 1977-06-02 | 1979-01-05 | Terumetsuku Kk | Automatic angle setting device |
| JPS567294B2 (en) * | 1977-09-08 | 1981-02-17 | ||
| JPS5441078A (en) * | 1977-09-08 | 1979-03-31 | Kobatoron Kk | Device for inspecting semiconductor |
| JPS55105347A (en) * | 1979-02-07 | 1980-08-12 | Sanyo Electric Co Ltd | Apparatus for scribing single-crystal wafer |
| JPS6157701B2 (en) * | 1979-02-07 | 1986-12-08 | Sanyo Electric Co | |
| JPS5642342A (en) * | 1979-09-14 | 1981-04-20 | Jeol Ltd | Facing device of wafer |
| JPS5818713A (en) * | 1981-07-25 | 1983-02-03 | Nippon Kogaku Kk <Nikon> | Positioning device for discoid object |
| JPS58210633A (en) * | 1982-06-01 | 1983-12-07 | Nec Corp | Automatic wafer positioning apparatus |
| JPS59150840U (en) * | 1983-03-30 | 1984-10-09 | 中浦 一彦 | Concrete mixer for joints |
| JPS6187352A (en) * | 1985-09-27 | 1986-05-02 | Hitachi Ltd | Orientation flat positioning device |
| JPH02112259A (en) * | 1988-10-21 | 1990-04-24 | Shin Etsu Handotai Co Ltd | Position detector device for orientation flat mark |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5539901B2 (en) | 1980-10-14 |