[go: up one dir, main page]

JPS54109488A - Analyzing method and device of optically scattered image information - Google Patents

Analyzing method and device of optically scattered image information

Info

Publication number
JPS54109488A
JPS54109488A JP1329378A JP1329378A JPS54109488A JP S54109488 A JPS54109488 A JP S54109488A JP 1329378 A JP1329378 A JP 1329378A JP 1329378 A JP1329378 A JP 1329378A JP S54109488 A JPS54109488 A JP S54109488A
Authority
JP
Japan
Prior art keywords
test piece
optical system
optical
information
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1329378A
Other languages
English (en)
Inventor
Tomoya Ogawa
Kazuo Moriya
Masane Suzuki
Kenji Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Optical Co Ltd filed Critical Fuji Photo Optical Co Ltd
Priority to JP1329378A priority Critical patent/JPS54109488A/ja
Priority to DE2904787A priority patent/DE2904787C2/de
Priority to DE7903488U priority patent/DE7903488U1/de
Publication of JPS54109488A publication Critical patent/JPS54109488A/ja
Priority to US06/291,935 priority patent/US4411525A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

Landscapes

  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1329378A 1978-02-08 1978-02-08 Analyzing method and device of optically scattered image information Pending JPS54109488A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1329378A JPS54109488A (en) 1978-02-08 1978-02-08 Analyzing method and device of optically scattered image information
DE2904787A DE2904787C2 (de) 1978-02-08 1979-02-08 Verfahren zur zerstörungsfreien Untersuchung einer Probe
DE7903488U DE7903488U1 (de) 1978-02-08 1979-02-08 Vorrichtung zur Analyse der Abbildung einer Probe
US06/291,935 US4411525A (en) 1978-02-08 1981-08-11 Method of analyzing an object by use of scattering light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1329378A JPS54109488A (en) 1978-02-08 1978-02-08 Analyzing method and device of optically scattered image information

Publications (1)

Publication Number Publication Date
JPS54109488A true JPS54109488A (en) 1979-08-28

Family

ID=11829138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1329378A Pending JPS54109488A (en) 1978-02-08 1978-02-08 Analyzing method and device of optically scattered image information

Country Status (3)

Country Link
US (1) US4411525A (ja)
JP (1) JPS54109488A (ja)
DE (2) DE2904787C2 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069534A (ja) * 1983-09-26 1985-04-20 Rikagaku Kenkyusho 反応過程観測装置
JPS61213652A (ja) * 1985-03-19 1986-09-22 Mitsui Mining & Smelting Co Ltd 光散乱画像情報解析装置
JPS61213651A (ja) * 1985-03-19 1986-09-22 Mitsui Mining & Smelting Co Ltd 赤外線トモグラフイ−装置
JPS61223537A (ja) * 1985-03-29 1986-10-04 Hitachi Cable Ltd 半導体結晶板の立体像
JPS6332356A (ja) * 1985-07-26 1988-02-12 ベブ・カ−ル・ツアイス・イエ−ナ 蛍光信号の解析と画像表示のための装置
JPH01102342A (ja) * 1987-10-16 1989-04-20 Rikagaku Kenkyusho 蛍光顕微分光装置
JP2012181135A (ja) * 2011-03-02 2012-09-20 Kobelco Kaken:Kk 内部欠陥検査装置および内部欠陥検査方法

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1234913B (it) * 1982-07-15 1992-06-02 Carboloy Spa Sistema di illuminazione per visione elettronica ad alta risoluzione e suo metodo di realizzazione.
US4684256A (en) * 1983-12-30 1987-08-04 Nitto Electric Industrial Co., Ltd. Apparatus and method for continuously measuring polarizing property
US4732479A (en) * 1985-10-18 1988-03-22 Canon Kabushiki Kaisha Particle analyzing apparatus
US4867558A (en) * 1987-06-22 1989-09-19 Gte Government Systems Corporation Method of remotely detecting submarines using a laser
US4867564A (en) * 1987-06-22 1989-09-19 Gte Government Systems Corporation Apparatus for and method of remotely sensing sub-surface water temperatures
US4847198A (en) * 1987-10-07 1989-07-11 The Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations Detection and indentification of bacteria by means of ultra-violet excited resonance Raman spectra
JP2604607B2 (ja) * 1987-12-09 1997-04-30 三井金属鉱業株式会社 欠陥分布測定法および装置
US4997273A (en) * 1989-07-28 1991-03-05 Gte Government Systems Corporation Remote method of measuring subsurface water temperatures
US4962319A (en) * 1989-07-28 1990-10-09 Gte Government Systems Corporation Remote subsurface water temperature measuring apparatus with Brillouin scattering
US4973853A (en) * 1989-07-28 1990-11-27 Gte Government Systems Corporation Remote subsurface water temperature measuring apparatus with Brillouin scattering
US5009500A (en) * 1989-07-28 1991-04-23 Gte Government Systems Corporation Remote method of measuring subsurface water temperatures
US4948958A (en) * 1989-08-01 1990-08-14 Gte Government Systems Corporation Remote subsurface water temperature measuring apparatus with brillouin scattering
US4986655A (en) * 1989-11-30 1991-01-22 Gte Government Systems Corporation Apparatus for measuring diffuse attenuation coefficient of sea water
US4986656A (en) * 1989-11-30 1991-01-22 Gte Government Systems Corporation Method of remotely measuring diffuse attenuation coefficient of sea water
US5262644A (en) * 1990-06-29 1993-11-16 Southwest Research Institute Remote spectroscopy for raman and brillouin scattering
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
US5920388A (en) * 1996-10-15 1999-07-06 Research Electro-Optics, Inc. Small particle characteristic determination
FI117909B (fi) * 1999-11-12 2007-04-13 Teknillinen Korkeakoulu Näytteen analysoiminen Raman-spektroskopiassa
US7684134B2 (en) * 2003-01-21 2010-03-23 The General Hospital Corporation Microscope objectives
US7330250B2 (en) * 2004-05-18 2008-02-12 Agilent Technologies, Inc. Nondestructive evaluation of subsurface damage in optical elements
WO2009073649A1 (en) 2007-12-04 2009-06-11 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
US10620118B2 (en) * 2012-02-27 2020-04-14 Steris Instrument Management Services, Inc. Systems and methods for identifying optical materials
FR2998967A1 (fr) * 2012-12-03 2014-06-06 Univ Lorraine Appareil et methode de spectroscopie
DE102015003019A1 (de) * 2015-03-06 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur optischen Detektion einer Bewegung in einer biologischen Probe mit räumlicher Ausdehnung
CN105353115B (zh) * 2015-10-21 2017-05-31 中国科学院上海光学精密机械研究所 免疫层析试纸条散射光场空间分布的测量装置及方法
CN111351794B (zh) * 2018-12-20 2021-12-10 上海微电子装备（集团）股份有限公司 一种物体表面检测装置及检测方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2253410A5 (ja) * 1973-12-03 1975-06-27 Inst Nat Sante Rech Med
DE2444644A1 (de) * 1974-09-18 1976-04-08 Dihaco Diamanten Handels Co Verfahren und vorrichtung zur ermittlung und groessenbestimmung von einschluessen in edelsteinen
DE2508523C3 (de) * 1975-02-27 1984-02-09 Battelle-Institut E.V., 6000 Frankfurt Verfahren zur Analyse von biologischen Zellen oder strukturierten Partikeln ähnlicher Größenordnung
FR2356931A1 (fr) * 1976-07-02 1978-01-27 Anvar Microsonde microscope optique moleculaire a effet raman excitee par laser

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069534A (ja) * 1983-09-26 1985-04-20 Rikagaku Kenkyusho 反応過程観測装置
JPH0564292B2 (ja) * 1983-09-26 1993-09-14 Rikagaku Kenkyusho
JPS61213652A (ja) * 1985-03-19 1986-09-22 Mitsui Mining & Smelting Co Ltd 光散乱画像情報解析装置
JPS61213651A (ja) * 1985-03-19 1986-09-22 Mitsui Mining & Smelting Co Ltd 赤外線トモグラフイ−装置
JPS61223537A (ja) * 1985-03-29 1986-10-04 Hitachi Cable Ltd 半導体結晶板の立体像
JPS6332356A (ja) * 1985-07-26 1988-02-12 ベブ・カ−ル・ツアイス・イエ−ナ 蛍光信号の解析と画像表示のための装置
JPH01102342A (ja) * 1987-10-16 1989-04-20 Rikagaku Kenkyusho 蛍光顕微分光装置
JP2012181135A (ja) * 2011-03-02 2012-09-20 Kobelco Kaken:Kk 内部欠陥検査装置および内部欠陥検査方法

Also Published As

Publication number Publication date
DE7903488U1 (de) 1979-09-06
DE2904787A1 (de) 1979-08-09
DE2904787C2 (de) 1987-04-23
US4411525A (en) 1983-10-25

Similar Documents

Publication Publication Date Title
JPS54109488A (en) Analyzing method and device of optically scattered image information
ATE225946T1 (de) Vorrichtung und verfahren zum schalten von optischen signalen
DE3776205D1 (de) Vorrichtung zum pruefen von bauteilen aud transparentem material auf oberflaechenfehler und einschluesse.
GB1324323A (en) Automatic focusing of an optical image
EP0249800A3 (en) Apparatus for illuminating components of transparent material used in the inspection for defects
KR920008467A (ko) 분절체의 표면지형 측정장치 및 방법
KR930008449A (ko) 이물검사장치
KR960702606A (ko) 광 산란을 사용하여 입자의 크기를 결정하기 위한 장치 및 방법(Apparatus and method for determining the size of particles using light scattering)
JPS5674219A (en) Three-dimensional display device
JPS55112502A (en) Plate automatic examination unit
JPS57161813A (en) Optical head driver
ATE25290T1 (de) Vorrichtung zur bestimmung des brechungsindexprofils optischer fasern und vorformen optischer fasern.
JPS53149043A (en) Optical scanning for laser beam scanner
JPS57154206A (en) Focusing device
JPS52113750A (en) Scanning optical system having beam detecting optics for information
JPS57176017A (en) Spectral microscope device using optical fiber
KR830010360A (ko) 광 집속장치
JPS5454057A (en) Projecting apparatus
Ledley et al. SPIDAC: specimen input to digital automatic computer
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS5694742A (en) Electronic beam exposure device
JPS54106253A (en) Automatic focusing device
JPS5424042A (en) Optical identifying device
JPS5526458A (en) Spot size measuring system of laser beam
GB894953A (en) Device for inspecting reflective surfaces having a rectilinear generatrix