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JPS5360638A - Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation - Google Patents

Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation

Info

Publication number
JPS5360638A
JPS5360638A JP13607076A JP13607076A JPS5360638A JP S5360638 A JPS5360638 A JP S5360638A JP 13607076 A JP13607076 A JP 13607076A JP 13607076 A JP13607076 A JP 13607076A JP S5360638 A JPS5360638 A JP S5360638A
Authority
JP
Japan
Prior art keywords
pattern formation
beamexposure
photosensitive material
accelerated particle
accelerated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13607076A
Other languages
Japanese (ja)
Inventor
Akira Yoshikawa
Haruo Nagai
Osamu Ochi
Kazuko Nakano
Nobuhiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13607076A priority Critical patent/JPS5360638A/en
Priority to GB23768/77A priority patent/GB1529037A/en
Priority to FR7717445A priority patent/FR2354577A1/en
Priority to US05/804,659 priority patent/US4127414A/en
Publication of JPS5360638A publication Critical patent/JPS5360638A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Glass Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Abstract

PURPOSE: To obtain high resolution degree and also prevent pinholes by laminating specific amorphous calcogenide layer and a thin silver layer on substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP13607076A 1976-06-08 1976-11-12 Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation Pending JPS5360638A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13607076A JPS5360638A (en) 1976-11-12 1976-11-12 Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation
GB23768/77A GB1529037A (en) 1976-06-08 1977-06-03 Image-forming materials having a radiation sensitive chalcogenide coating and a method of forming images with such materials
FR7717445A FR2354577A1 (en) 1976-06-08 1977-06-07 MATERIAL AND METHOD FOR FORMING A SEVERE PATTERN BY IRRADIATION, ESPECIALLY WITH A VIEW TO THE MANUFACTURE OF SEMICONDUCTOR ELEMENTS AND INTEGRATED CIRCUITS
US05/804,659 US4127414A (en) 1976-06-08 1977-06-08 Pattern-forming materials having a radiation sensitive chalcogenide layer and a method of forming patterns with such materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13607076A JPS5360638A (en) 1976-11-12 1976-11-12 Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation

Publications (1)

Publication Number Publication Date
JPS5360638A true JPS5360638A (en) 1978-05-31

Family

ID=15166507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13607076A Pending JPS5360638A (en) 1976-06-08 1976-11-12 Photosensitive material for pattern formation for accelerated particle beamexposure and pattern formation

Country Status (1)

Country Link
JP (1) JPS5360638A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466343A (en) * 1977-11-07 1979-05-28 Asahi Chem Ind Co Ltd Forming method for noble metal pattern
JPS55149941A (en) * 1979-05-04 1980-11-21 Western Electric Co Article production process

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495324A (en) * 1972-04-29 1974-01-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495324A (en) * 1972-04-29 1974-01-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466343A (en) * 1977-11-07 1979-05-28 Asahi Chem Ind Co Ltd Forming method for noble metal pattern
JPS6145550B2 (en) * 1977-11-07 1986-10-08 Asahi Chemical Ind
JPS55149941A (en) * 1979-05-04 1980-11-21 Western Electric Co Article production process
JPH0262853B2 (en) * 1979-05-04 1990-12-26 Ei Teii Ando Teii Tekunorojiizu Inc

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