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JPS5339882A - Production of vertical field effect transistor - Google Patents

Production of vertical field effect transistor

Info

Publication number
JPS5339882A
JPS5339882A JP11508076A JP11508076A JPS5339882A JP S5339882 A JPS5339882 A JP S5339882A JP 11508076 A JP11508076 A JP 11508076A JP 11508076 A JP11508076 A JP 11508076A JP S5339882 A JPS5339882 A JP S5339882A
Authority
JP
Japan
Prior art keywords
production
field effect
effect transistor
vertical field
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11508076A
Other languages
Japanese (ja)
Inventor
Shuji Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11508076A priority Critical patent/JPS5339882A/en
Publication of JPS5339882A publication Critical patent/JPS5339882A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To produce a vertical FET of a large hFE without decreasing drain saturation current by making grating-form P type gate layers in the N epitaxial layer on an N type substrate and making gate lead-out layers by covering said layer with an N epitacial layer.
COPYRIGHT: (C)1978,JPO&Japio
JP11508076A 1976-09-24 1976-09-24 Production of vertical field effect transistor Pending JPS5339882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11508076A JPS5339882A (en) 1976-09-24 1976-09-24 Production of vertical field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11508076A JPS5339882A (en) 1976-09-24 1976-09-24 Production of vertical field effect transistor

Publications (1)

Publication Number Publication Date
JPS5339882A true JPS5339882A (en) 1978-04-12

Family

ID=14653678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11508076A Pending JPS5339882A (en) 1976-09-24 1976-09-24 Production of vertical field effect transistor

Country Status (1)

Country Link
JP (1) JPS5339882A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153169A (en) * 1984-01-23 1985-08-12 Agency Of Ind Science & Technol ballistic transistor
JP2002299350A (en) * 2001-03-30 2002-10-11 Denso Corp Silicon carbide semiconductor device and its manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153169A (en) * 1984-01-23 1985-08-12 Agency Of Ind Science & Technol ballistic transistor
JP2002299350A (en) * 2001-03-30 2002-10-11 Denso Corp Silicon carbide semiconductor device and its manufacturing method

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