[go: up one dir, main page]

JPS5339874A - Vacuum pincette - Google Patents

Vacuum pincette

Info

Publication number
JPS5339874A
JPS5339874A JP11368976A JP11368976A JPS5339874A JP S5339874 A JPS5339874 A JP S5339874A JP 11368976 A JP11368976 A JP 11368976A JP 11368976 A JP11368976 A JP 11368976A JP S5339874 A JPS5339874 A JP S5339874A
Authority
JP
Japan
Prior art keywords
vacuum pincette
pincette
vacuum
wafers
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11368976A
Other languages
English (en)
Inventor
Akiyoshi Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11368976A priority Critical patent/JPS5339874A/ja
Publication of JPS5339874A publication Critical patent/JPS5339874A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP11368976A 1976-09-24 1976-09-24 Vacuum pincette Pending JPS5339874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368976A JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368976A JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Publications (1)

Publication Number Publication Date
JPS5339874A true JPS5339874A (en) 1978-04-12

Family

ID=14618677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368976A Pending JPS5339874A (en) 1976-09-24 1976-09-24 Vacuum pincette

Country Status (1)

Country Link
JP (1) JPS5339874A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
US4767142A (en) * 1986-08-01 1988-08-30 Kiyoshi Takahashi Forceps for semiconductor silicon wafer
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US5118153A (en) * 1991-03-06 1992-06-02 H-Square Corporation Hand-operated reciprocating bellows for electronic component pickup
US5169192A (en) * 1991-06-28 1992-12-08 H-Square Corporation Electronic article pickup tool
JPH04133573U (ja) * 1992-04-10 1992-12-11 清 高橋 真空ピンセツト
CN105612029A (zh) * 2013-09-30 2016-05-25 Ub技术源株式会社 利用真空的产品搬运装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
US4767142A (en) * 1986-08-01 1988-08-30 Kiyoshi Takahashi Forceps for semiconductor silicon wafer
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US5118153A (en) * 1991-03-06 1992-06-02 H-Square Corporation Hand-operated reciprocating bellows for electronic component pickup
US5169192A (en) * 1991-06-28 1992-12-08 H-Square Corporation Electronic article pickup tool
JPH04133573U (ja) * 1992-04-10 1992-12-11 清 高橋 真空ピンセツト
CN105612029A (zh) * 2013-09-30 2016-05-25 Ub技术源株式会社 利用真空的产品搬运装置

Similar Documents

Publication Publication Date Title
JPS5431273A (en) Manufacture of semiconductor device
JPS5339874A (en) Vacuum pincette
JPS5421172A (en) Manufacture for semiconductor device
JPS5321574A (en) Contact and separation method of photo mask
JPS5352370A (en) Wafer susceptor
JPS53116077A (en) Etching method
JPS52143639A (en) Operating device for elevator
JPS529961A (en) Process for exhausting air in coating room
JPS524175A (en) Groups iii-v compounds semiconductor device
JPS5429978A (en) Carrier device for semiconductor wafer and mask
JPS5258480A (en) Wafer pick-up device
JPS5222625A (en) Control device of secondary air used for cleaning of exhausted gas
JPS5390763A (en) Semiconductor element and mask for producing semiconductor element
JPS5421171A (en) Manufacture for compound semiconductor device
JPS5315765A (en) Vacuum caontact prevention method of hard mask
JPS52134968A (en) Vacuum cup
JPS53135572A (en) Tool holding adsorption
JPS5267274A (en) Semiconductor wafer transfer equipment
JPS51112279A (en) Semiconductor device
JPS5372567A (en) Semiconductor device
JPS52116574A (en) Device for automatically supplying parts
JPS5288090A (en) Vacuum pincette
JPS535327A (en) Exhaust gas recycling control apparatus
JPS5421173A (en) Manufacture for semiconductor having oxide film
JPS5243184A (en) Method of cutting soft hollow body