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JPS5328530A - Method of etching surfaces of solids - Google Patents

Method of etching surfaces of solids

Info

Publication number
JPS5328530A
JPS5328530A JP10267876A JP10267876A JPS5328530A JP S5328530 A JPS5328530 A JP S5328530A JP 10267876 A JP10267876 A JP 10267876A JP 10267876 A JP10267876 A JP 10267876A JP S5328530 A JPS5328530 A JP S5328530A
Authority
JP
Japan
Prior art keywords
solids
etching surfaces
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10267876A
Other languages
Japanese (ja)
Inventor
Sumio Hosaka
Seiya Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10267876A priority Critical patent/JPS5328530A/en
Publication of JPS5328530A publication Critical patent/JPS5328530A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10267876A 1976-08-30 1976-08-30 Method of etching surfaces of solids Pending JPS5328530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10267876A JPS5328530A (en) 1976-08-30 1976-08-30 Method of etching surfaces of solids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10267876A JPS5328530A (en) 1976-08-30 1976-08-30 Method of etching surfaces of solids

Publications (1)

Publication Number Publication Date
JPS5328530A true JPS5328530A (en) 1978-03-16

Family

ID=14333882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10267876A Pending JPS5328530A (en) 1976-08-30 1976-08-30 Method of etching surfaces of solids

Country Status (1)

Country Link
JP (1) JPS5328530A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687665A (en) * 1979-12-20 1981-07-16 Toshiba Corp Ion etching method
JPS5797649A (en) * 1980-12-11 1982-06-17 Nec Corp Manufacture of semiconductor device
JPS589338A (en) * 1981-06-30 1983-01-19 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン Method of removing residue
JPS5893354A (en) * 1981-11-30 1983-06-03 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS61166044A (en) * 1984-12-19 1986-07-26 Fujitsu Ltd Manufacture of semiconductor device
JPS62235485A (en) * 1986-04-04 1987-10-15 Hitachi Ltd ion source device
JPH0336285A (en) * 1989-07-01 1991-02-15 Hitachi Nakaseiki Ltd Ion milling device
JPH072608U (en) * 1984-03-24 1995-01-13 フェスト カーゲー Carriage type feeder

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687665A (en) * 1979-12-20 1981-07-16 Toshiba Corp Ion etching method
JPS6312143B2 (en) * 1979-12-20 1988-03-17 Tokyo Shibaura Electric Co
JPS5797649A (en) * 1980-12-11 1982-06-17 Nec Corp Manufacture of semiconductor device
JPS6161698B2 (en) * 1980-12-11 1986-12-26 Nippon Electric Co
JPS589338A (en) * 1981-06-30 1983-01-19 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン Method of removing residue
JPH0371781B2 (en) * 1981-06-30 1991-11-14 Intaanashonaru Bijinesu Mashiinzu Corp
JPS5893354A (en) * 1981-11-30 1983-06-03 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH033382B2 (en) * 1981-11-30 1991-01-18 Mitsubishi Electric Corp
JPH072608U (en) * 1984-03-24 1995-01-13 フェスト カーゲー Carriage type feeder
JPH0518459B2 (en) * 1984-12-19 1993-03-12 Fujitsu Ltd
JPS61166044A (en) * 1984-12-19 1986-07-26 Fujitsu Ltd Manufacture of semiconductor device
JPS62235485A (en) * 1986-04-04 1987-10-15 Hitachi Ltd ion source device
JPH0336285A (en) * 1989-07-01 1991-02-15 Hitachi Nakaseiki Ltd Ion milling device

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