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JPS522377A - Method of forming an electrode on a semiconductor element - Google Patents

Method of forming an electrode on a semiconductor element

Info

Publication number
JPS522377A
JPS522377A JP50078928A JP7892875A JPS522377A JP S522377 A JPS522377 A JP S522377A JP 50078928 A JP50078928 A JP 50078928A JP 7892875 A JP7892875 A JP 7892875A JP S522377 A JPS522377 A JP S522377A
Authority
JP
Japan
Prior art keywords
electrode
forming
semiconductor element
simiconductor
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50078928A
Other languages
Japanese (ja)
Other versions
JPS5756766B2 (en
Inventor
Katsuhiko Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50078928A priority Critical patent/JPS522377A/en
Publication of JPS522377A publication Critical patent/JPS522377A/en
Publication of JPS5756766B2 publication Critical patent/JPS5756766B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To form a short-circuit-free electrode on a simiconductor element in such a fashion as to form layers composed of films of SiO2 and Si3N4 and bore a hole on them.
COPYRIGHT: (C)1977,JPO&Japio
JP50078928A 1975-06-24 1975-06-24 Method of forming an electrode on a semiconductor element Granted JPS522377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50078928A JPS522377A (en) 1975-06-24 1975-06-24 Method of forming an electrode on a semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50078928A JPS522377A (en) 1975-06-24 1975-06-24 Method of forming an electrode on a semiconductor element

Publications (2)

Publication Number Publication Date
JPS522377A true JPS522377A (en) 1977-01-10
JPS5756766B2 JPS5756766B2 (en) 1982-12-01

Family

ID=13675520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50078928A Granted JPS522377A (en) 1975-06-24 1975-06-24 Method of forming an electrode on a semiconductor element

Country Status (1)

Country Link
JP (1) JPS522377A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965792U (en) * 1982-10-22 1984-05-02 ジヤパン・フイ−ルド株式会社 cleaning equipment

Also Published As

Publication number Publication date
JPS5756766B2 (en) 1982-12-01

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