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JPS5269266A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5269266A
JPS5269266A JP14497775A JP14497775A JPS5269266A JP S5269266 A JPS5269266 A JP S5269266A JP 14497775 A JP14497775 A JP 14497775A JP 14497775 A JP14497775 A JP 14497775A JP S5269266 A JPS5269266 A JP S5269266A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
engraving
diffusion
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14497775A
Other languages
Japanese (ja)
Inventor
Takeshi Fukuda
Tadashi Kirisako
Akisuke Mori
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14497775A priority Critical patent/JPS5269266A/en
Publication of JPS5269266A publication Critical patent/JPS5269266A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To make the 2nd small window from the 1st diffusion window by excess engraving SiO2 under poli-Si folm and by engraving all over SiO2 film formed in running process after diffusion.
COPYRIGHT: (C)1977,JPO&Japio
JP14497775A 1975-12-08 1975-12-08 Production of semiconductor device Pending JPS5269266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14497775A JPS5269266A (en) 1975-12-08 1975-12-08 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14497775A JPS5269266A (en) 1975-12-08 1975-12-08 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5269266A true JPS5269266A (en) 1977-06-08

Family

ID=15374593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14497775A Pending JPS5269266A (en) 1975-12-08 1975-12-08 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5269266A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694673A (en) * 1979-12-27 1981-07-31 Hitachi Ltd Semiconductor junction capacity device and manufacture thereof
JPS6142140A (en) * 1984-07-30 1986-02-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming self-aligning structure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495573A (en) * 1972-05-04 1974-01-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495573A (en) * 1972-05-04 1974-01-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694673A (en) * 1979-12-27 1981-07-31 Hitachi Ltd Semiconductor junction capacity device and manufacture thereof
JPS6327867B2 (en) * 1979-12-27 1988-06-06 Hitachi Ltd
JPS6142140A (en) * 1984-07-30 1986-02-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming self-aligning structure
JPH0466099B2 (en) * 1984-07-30 1992-10-22 Intaanashonaru Bijinesu Mashiinzu Corp

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