JPS52153676A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52153676A JPS52153676A JP6971676A JP6971676A JPS52153676A JP S52153676 A JPS52153676 A JP S52153676A JP 6971676 A JP6971676 A JP 6971676A JP 6971676 A JP6971676 A JP 6971676A JP S52153676 A JPS52153676 A JP S52153676A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- face
- etching
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To prevent undesired etching on Si face by etching Si3N4 after covering the face of Si and poly-Si with SiO2.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6971676A JPS52153676A (en) | 1976-06-16 | 1976-06-16 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6971676A JPS52153676A (en) | 1976-06-16 | 1976-06-16 | Production of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52153676A true JPS52153676A (en) | 1977-12-20 |
Family
ID=13410825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6971676A Pending JPS52153676A (en) | 1976-06-16 | 1976-06-16 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52153676A (en) |
-
1976
- 1976-06-16 JP JP6971676A patent/JPS52153676A/en active Pending
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