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JPH11312754A5 - - Google Patents

Info

Publication number
JPH11312754A5
JPH11312754A5 JP1998118742A JP11874298A JPH11312754A5 JP H11312754 A5 JPH11312754 A5 JP H11312754A5 JP 1998118742 A JP1998118742 A JP 1998118742A JP 11874298 A JP11874298 A JP 11874298A JP H11312754 A5 JPH11312754 A5 JP H11312754A5
Authority
JP
Japan
Prior art keywords
base member
wafer
groove
resin layer
sealing resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998118742A
Other languages
Japanese (ja)
Other versions
JPH11312754A (en
JP4033969B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP11874298A priority Critical patent/JP4033969B2/en
Priority claimed from JP11874298A external-priority patent/JP4033969B2/en
Publication of JPH11312754A publication Critical patent/JPH11312754A/en
Publication of JPH11312754A5 publication Critical patent/JPH11312754A5/ja
Application granted granted Critical
Publication of JP4033969B2 publication Critical patent/JP4033969B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Claims (2)

複数のボンディングパッドを有する半導体チップと、
表面に溝を有し、前記表面に前記チップを搭載するベース部材と、
前記チップ及び前記溝内をモールドした封止樹脂層と、
前記ボンディングパッドに接合して形成され、前記封止樹脂層の表面に露出させたバンプと、
を備えたことを特徴とする半導体パッケージ。
a semiconductor chip having a plurality of bonding pads;
a base member having a groove on a surface thereof, the base member having the chip mounted on the surface thereof;
a sealing resin layer that molds the chip and the inside of the groove;
a bump formed in contact with the bonding pad and exposed on the surface of the sealing resin layer;
A semiconductor package comprising:
表面に溝を有するベース部材を準備する工程と、
前記ベース部材にウェハ処理を終えたウェハを搭載する工程と、
前記ウェハのボンディングパッドに接合するバンプを形成する工程と、
前記ベース部材上で前記ウェハを切断してチップ分割する工程と、
前記ウェハ及び前記溝内を封止樹脂層によりモールドする工程と、
前記封止樹脂層で覆われた前記ウェハをフルカッティングしてバッケージ分割する工程と、
を備えたことを特徴とする半導体パッケージの製造方法。
providing a base member having a groove on a surface thereof;
a step of mounting a processed wafer on the base member;
forming bumps to bond to the bonding pads of the wafer;
cutting the wafer on the base member to separate it into chips;
molding the wafer and the inside of the groove with a sealing resin layer;
a step of dividing the wafer covered with the sealing resin layer into packages by full cutting;
A method for manufacturing a semiconductor package, comprising:
JP11874298A 1998-04-28 1998-04-28 Semiconductor package, manufacturing method thereof and wafer carrier Expired - Fee Related JP4033969B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11874298A JP4033969B2 (en) 1998-04-28 1998-04-28 Semiconductor package, manufacturing method thereof and wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11874298A JP4033969B2 (en) 1998-04-28 1998-04-28 Semiconductor package, manufacturing method thereof and wafer carrier

Publications (3)

Publication Number Publication Date
JPH11312754A JPH11312754A (en) 1999-11-09
JPH11312754A5 true JPH11312754A5 (en) 2005-09-22
JP4033969B2 JP4033969B2 (en) 2008-01-16

Family

ID=14743949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11874298A Expired - Fee Related JP4033969B2 (en) 1998-04-28 1998-04-28 Semiconductor package, manufacturing method thereof and wafer carrier

Country Status (1)

Country Link
JP (1) JP4033969B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101328552B1 (en) 2007-11-16 2013-11-13 삼성전자주식회사 Non-volatile memory devices and methdos of forming the same
TWI387076B (en) * 2008-04-24 2013-02-21 相豐科技股份有限公司 Package structure of integrated circuit component and manufacturing method thereof

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