JPH10173013A - EB tester - Google Patents

Abstract

(57) [Summary] [PROBLEMS] An EB tester characterized by having a water cooling and a tilt stage function. SOLUTION: The EB tester device provides a means for cooling a semiconductor of several tens of watts or more and a means for facilitating observation of a lower wiring.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an EB tester device.

[0002]

2. Description of the Related Art Since an EB tester is a cooling system of an air cooling type, it is impossible to cool a semiconductor device having a power consumption of several tens of watts or more. Further, in a semiconductor device having a multilayer wiring structure, an observing electron beam (EB) cannot be applied to the lower wiring because the upper wiring becomes an obstacle. Furthermore, FIB (Focused Ion
In the case of performing processing for observation with a Beam) device or the like, processing from the direction perpendicular to the surface of the semiconductor device to the lower wiring is complicated and the yield is low. For this reason, it is becoming difficult to measure a high-power semiconductor device having a multilayer wiring structure.

[0003]

SUMMARY OF THE INVENTION The present invention provides a means for cooling a semiconductor of several tens of watts or more and a means for facilitating observation of a lower wiring in an EB tester device.

[0004]

[Means for Solving the Problems]

 1) The semiconductor holding stage has a water cooling function.

2) A stage with a tilt function is provided.

According to the present invention, 1) cooling water is forcibly circulated in a stage to reduce a rise in temperature due to power consumption during operation of a semiconductor device.

2) The stage is tilted at an arbitrary angle while holding the wafer.

[0008] 3) In a tilted state, a processing beam of the FIB device is irradiated to expose a desired lower layer wiring from a cross-sectional direction.

4) A section of a desired lower wiring is irradiated with an electron beam for observing a potential and measured.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION

Cooling function 1) As shown in FIG. 1, a cooling device provided with a pump for circulating pure water using pure water as a cooling medium is provided.

2) The thermal resistance between the stage and the wafer can be reduced to 0.6 c / w at a flow rate of 2-3 m / sec.

3) With the above, the temperature rise can be increased to 60c even with a semiconductor device of 100 watts, and even if the room temperature 25c is considered
85c, and the semiconductor device temperature can be cooled to a practical range.

Stage with tilt function 1) As shown in FIG. 2, a lower layer wiring to be observed is
The inclination direction of the stage is changed between the cross-section processing by the IB device and the irradiation of the observation electron beam.

2) As described above, the measurement of the lower wiring can be easily performed.

3) If the stage angle at the time of FIB processing is properly selected, the processing amount can be reduced and the processing time can be reduced as compared with the case where processing is performed from a direction perpendicular to the wafer surface.

Angle fixed stage 1) As shown in FIG. 3, by providing an electron lens, an FIB beam and an electron beam can be irradiated at an arbitrary angle.
Thereby, the same function as having the stage with the tilt function can be realized.

[0017]

【The invention's effect】

1) For a semiconductor device of several tens of watts or more, measurement and analysis using an EB tester can be performed.

2) The potential of the signal wiring in the lower layer can be measured from the cross-sectional direction by an EB tester.

[Brief description of the drawings]

FIG. 1 is an explanatory view of an embodiment of a stage with a water cooling function.

FIG. 2 is an explanatory diagram of an embodiment of a stage with a tilt function.

FIG. 3 is an explanatory view of an embodiment provided with an electronic lens.

Claims (1)

[Claims] 1. An EB tester having a water cooling and tilt stage function.