JPH09235157A - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JPH09235157A JPH09235157A JP8042531A JP4253196A JPH09235157A JP H09235157 A JPH09235157 A JP H09235157A JP 8042531 A JP8042531 A JP 8042531A JP 4253196 A JP4253196 A JP 4253196A JP H09235157 A JPH09235157 A JP H09235157A
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- containing compound
- boron
- dielectric
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- Compositions Of Oxide Ceramics (AREA)
Abstract
(57)【要約】
【課題】AgやCu等の導体金属と同時に焼成するため
900〜1050℃の低温で焼成でき、高周波領域にお
いて高い比誘電率とQ値を有し、かつ共振周波数の温度
特性にも優れ、高周波電子部品や回路基板のより一層の
小型化と高性能化が実現できる誘電体磁器組成物を提供
する。
【解決手段】組成式が(1−x)MgTiO3 −xCa
TiO3 (但し、式中xは重量比を表し、0.01≦x
≦0.15)で表される主成分100重量部に対して、
硼素含有化合物をB2 O3 換算で3〜30重量部、カリ
ウム含有化合物をK2 CO3 換算で1〜25重量部添加
してなるものである。
(57) Abstract: Since it is fired at the same time as a conductor metal such as Ag or Cu, it can be fired at a low temperature of 900 to 1050 ° C., has a high relative permittivity and a Q value in a high frequency region, and has a resonance frequency temperature. Provided is a dielectric ceramic composition which is excellent in characteristics and can realize further miniaturization and high performance of high-frequency electronic components and circuit boards. A composition formula (1-x) MgTiO 3 -xCa
TiO 3 (where x represents a weight ratio, and 0.01 ≦ x
≦ 0.15), based on 100 parts by weight of the main component,
The boron-containing compound is added in an amount of 3 to 30 parts by weight in terms of B 2 O 3 , and the potassium-containing compound is added in an amount of 1 to 25 parts by weight in terms of K 2 CO 3 .
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高周波領域で使用
する電子回路基板や電子部品等に適用される誘電体磁器
組成物に関するもので、例えば、共振器,フィルタ,コ
ンデンサ,LCフィルター等に好適に用いられる誘電体
磁器組成物である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition applied to electronic circuit boards and electronic parts used in a high frequency region, and is suitable for, for example, resonators, filters, capacitors and LC filters. It is a dielectric ceramic composition used for.
【0002】[0002]
【従来の技術】従来より誘電体材料として各種誘電体セ
ラミックスが電子回路基板や電子部品等に広く使用され
ており、近年、携帯電話に代表される移動体通信等の高
周波機器の発展と普及に伴い、高周波領域で使用する電
子回路基板や電子部品として誘電体セラミックスが積極
的に利用されるようになってきた。2. Description of the Related Art Conventionally, various dielectric ceramics have been widely used as a dielectric material in electronic circuit boards, electronic parts, etc., and in recent years, they have become popular in the development and popularization of high frequency equipment such as mobile communication represented by a mobile phone. Along with this, dielectric ceramics have been actively used as electronic circuit boards and electronic components used in the high frequency region.
【0003】前記誘電体セラミックスからなる電子回路
基板等と導体を同時焼成するに際しては、基板上に印刷
された導体が誘電体セラミックスの焼成温度で溶融する
ことがないように、該導体には、アルミナ,ステアタイ
ト,フォルステライト等の誘電体セラミックスの焼成温
度よりも高い融点を有する、例えば、Pt,Pd,W,
Mo等の金属が用いられていた。When simultaneously firing an electronic circuit board or the like made of the dielectric ceramics and a conductor, the conductor is printed on the substrate so that the conductor does not melt at the firing temperature of the dielectric ceramics. It has a melting point higher than the firing temperature of dielectric ceramics such as alumina, steatite, and forsterite, for example, Pt, Pd, W,
Metals such as Mo have been used.
【0004】しかしながら、前記金属は導通抵抗が大き
いことから、従来の電子回路基板では、共振回路やフィ
ルタのQ値が小さくなってしまい、導体線路の伝送損失
が大きくなる等の問題があった。However, since the metal has a large conduction resistance, the conventional electronic circuit board has a problem that the Q value of the resonance circuit and the filter becomes small and the transmission loss of the conductor line becomes large.
【0005】そこで係る問題を解消するために導通抵抗
の小さいAgやCu等の金属を導体として採用し、低温
で同時焼成できる誘電体セラミックスが種々提案されて
いる。更に、最近の高周波電子回路基板に対する小型化
と高性能化の要求に応えるために、特定の周波数領域で
比誘電率εrを高くすることにより共振回路やフィルタ
の小型化を可能とし、また、誘電体セラミックスのQ値
を高くすることにより、共振回路やフィルタのQ値も高
くすることができて低損失となることから、各種の複合
誘電体が提案されている。In order to solve such a problem, various dielectric ceramics have been proposed which employ a metal such as Ag or Cu having a low conduction resistance as a conductor and can be co-fired at a low temperature. Furthermore, in order to meet the recent demands for miniaturization and high performance of high-frequency electronic circuit boards, it is possible to miniaturize the resonance circuit and the filter by increasing the relative permittivity εr in a specific frequency range, and By increasing the Q value of the body ceramics, the Q values of the resonance circuit and the filter can also be increased, resulting in low loss. Therefore, various composite dielectrics have been proposed.
【0006】従来、例えば、特開平4−292460号
公報に開示された誘電体磁器組成物は、アノーサイト
(CaO・Al2 O3 ・2SiO2 )−チタン酸カルシ
ウム系のガラスとTiO2 からなるもので、銀の融点以
下で低温焼成できるため導体としてAgやCu等の金属
と同時焼成できるものであった。Conventionally, for example, the dielectric ceramic composition disclosed in Japanese Patent Laid-Open No. 4-292460 comprises anorthite (CaO.Al 2 O 3 .2SiO 2 ) -calcium titanate glass and TiO 2. However, since it can be fired at a low temperature below the melting point of silver, it can be fired simultaneously with a metal such as Ag or Cu as a conductor.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、特開平
4−292460号公報に開示された誘電体磁器組成物
では、比誘電率εrが4〜6GHzの高周波領域の測定
では16未満と低く、高周波電子回路基板の小型化には
限界があった。However, in the dielectric ceramic composition disclosed in Japanese Patent Laid-Open No. 4-292460, the relative permittivity εr is as low as less than 16 when measured in the high frequency region of 4 to 6 GHz, which is a high frequency electron. There was a limit to the miniaturization of circuit boards.
【0008】また、この誘電体磁器組成物は、6GHz
の測定周波数でQ値が330程度と低いため、共振回路
のQ値が低いものであった。This dielectric ceramic composition is 6 GHz.
Since the Q value at the measurement frequency was as low as about 330, the Q value of the resonance circuit was low.
【0009】従来、低損失(高Q値)で誘電率の温度係
数の小さい誘電体磁器組成物として、MgO−CaO−
TiO2 の3成分系組成の磁器組成物が知られている。
この組成物は誘電率が20程度、7乃至8GHzにおけ
るQ値が8000程度、比誘電率の温度係数τfが0近
傍の値を有し、優れた誘電特性を有する。Conventionally, as a dielectric ceramic composition having a low loss (high Q value) and a small temperature coefficient of dielectric constant, MgO-CaO-
A porcelain composition having a three-component composition of TiO 2 is known.
This composition has a dielectric constant of about 20, a Q value at 7 to 8 GHz of about 8000, and a temperature coefficient τf of the relative dielectric constant in the vicinity of 0, and has excellent dielectric properties.
【0010】しかしながら、この組成物は焼成温度が1
300℃以上と高く、内部導体としてAg(融点962
℃)等を用いることができなかった。However, this composition has a firing temperature of 1
As high as 300 ° C or higher, Ag as internal conductor (melting point 962
℃) could not be used.
【0011】[0011]
【発明の目的】本発明は上記課題に鑑みなされたもの
で、900〜1050℃の比較的低温でAgやCu等の
導体金属と同時に焼成でき、誘電体セラミックスの比誘
電率εrやQ値が高く、かつ共振周波数の温度係数τf
が比較的小さい等の特徴を有し、高周波電子回路基板の
小型化と高性能化を実現できる誘電体磁器組成物の提供
を目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and can be fired simultaneously with a conductor metal such as Ag or Cu at a relatively low temperature of 900 to 1050 ° C., and the relative permittivity εr and Q value of the dielectric ceramics can be improved. High and resonant frequency temperature coefficient τf
It is an object of the present invention to provide a dielectric porcelain composition having features such as relatively small size and capable of realizing miniaturization and high performance of a high frequency electronic circuit board.
【0012】[0012]
【課題を解決するための手段】本発明の誘電体磁器組成
物は、組成式が(1−x)MgTiO3 −xCaTiO
3 (但し、式中xは重量比を表し、0.01≦x≦0.
15)で表される主成分100重量部に対して、硼素含
有化合物をB2 O3 換算で3〜30重量部、カリウム含
有化合物をK2 CO3 換算で1〜25重量部添加含有し
てなるものである。The dielectric ceramic composition of the present invention has a composition formula of (1-x) MgTiO 3 -xCaTiO 3 .
3 (where x represents a weight ratio, and 0.01 ≦ x ≦ 0.
15 to 100 parts by weight of the main component represented by the formula (1), a boron-containing compound is added in an amount of 3 to 30 parts by weight in terms of B 2 O 3 , and a potassium-containing compound is added in an amount of 1 to 25 parts by weight in terms of K 2 CO 3. It will be.
【0013】[0013]
【作用】本発明の誘電体磁器組成物は、900〜105
0℃の比較的低温で焼成できるためAgやCu等の導体
金属と同時に焼成できるものであり、誘電体セラミック
スとしての比誘電率εrやQ値が高く、かつ共振周波数
の温度係数τfを比較的小さくすることができるため、
高周波電子回路基板の小型化と高性能化を実現できる。The dielectric ceramic composition of the present invention is 900 to 105
Since it can be fired at a relatively low temperature of 0 ° C., it can be fired at the same time as a conductor metal such as Ag or Cu, has a high relative permittivity εr or Q value as a dielectric ceramic, and has a relatively high temperature coefficient τf of the resonance frequency. Because it can be made smaller,
It is possible to realize the miniaturization and high performance of the high frequency electronic circuit board.
【0014】従来のMgO−CaO−TiO2 系にさら
に硼素乃至硼素含有化合物を配合して、低温焼成化を図
ることも考えられるが、MgTiO3 −CaTiO3 系
に硼素乃至硼素含有化合物だけを配合した場合には、そ
の配合量が少ないと焼成温度を十分に低下させることが
できず、Ag等の融点温度以下の温度で焼結させること
ができない。It is conceivable to further mix boron or a boron-containing compound in the conventional MgO-CaO-TiO 2 system to achieve low temperature firing, but only the boron or boron-containing compound is mixed in the MgTiO 3 -CaTiO 3 system. In this case, if the compounding amount is small, the firing temperature cannot be lowered sufficiently, and the sintering cannot be performed at a temperature below the melting point temperature of Ag or the like.
【0015】また、硼素乃至硼素含有化合物の配合量が
多いと焼成温度は低下するが、硼素乃至硼素含有化合物
は、焼成時等の高温下でMgTiO3 −CaTiO3 系
と反応するので、配合量が多すぎた場合には、焼成後に
おいて未反応のMgTiO3−CaTiO3 の残存量が
少なくなってしまい、例えば500以上の高いQ値を維
持することができない。従って、従来のMgO−CaO
−TiO2 系にさらに硼素乃至硼素含有化合物のみを添
加した組成物では、低い焼成温度と高周波領域における
誘電特性が共に優れた電子部品用の誘電体磁器組成物を
得ることは困難であった。Further, if the content of boron or the compound containing boron is large, the firing temperature is lowered, but the content of boron or the compound containing boron reacts with the MgTiO 3 --CaTiO 3 system at a high temperature during firing. If the amount is too large, the amount of unreacted MgTiO 3 —CaTiO 3 remaining after firing becomes small, and a high Q value of, for example, 500 or more cannot be maintained. Therefore, conventional MgO-CaO
It has been difficult to obtain a dielectric porcelain composition for electronic parts which is excellent in both the low firing temperature and the dielectric properties in the high frequency region with a composition obtained by adding only boron or a boron-containing compound to the —TiO 2 system.
【0016】即ち、MgTiO3 −CaTiO3 系にお
いては、硼素含有化合物の添加による組成物の焼結温度
低下効果と焼成後の磁器組成物の誘電特性向上効果とは
背反関係にあり、硼素添加のみの組成物では低い焼成温
度と高いQ値等の優れた誘電特性とを共に備えた組成物
を得ることが困難であった。That is, in the MgTiO 3 -CaTiO 3 system, the effect of lowering the sintering temperature of the composition by the addition of the boron-containing compound and the effect of improving the dielectric properties of the porcelain composition after firing are in a trade-off relationship. It was difficult to obtain a composition having both a low firing temperature and excellent dielectric properties such as a high Q value.
【0017】一方、MgTiO3 −CaTiO3 にK等
のアルカリ金属含有化合物のみを添加した場合には、例
え添加量を増加させても組成物の焼結温度を低下させる
ことは殆どできず、例えば950℃以下で焼結できる組
成物を得ることはできない。On the other hand, when only an alkali metal-containing compound such as K is added to MgTiO 3 --CaTiO 3 , the sintering temperature of the composition can hardly be lowered even if the amount added is increased. It is not possible to obtain a composition that can be sintered below 950 ° C.
【0018】これに対し、本発明によれば硼素含有化合
物とK化合物とを、各々特定量比で組み合わせ添加配合
したので、前記硼素含有化合物とMgTiO3 −CaT
iO3 との過度の反応が抑制され、且つ、硼素含有化合
物のみを添加した場合にくらべてさらに焼結温度を低下
させることができる。On the other hand, according to the present invention, since the boron-containing compound and the K compound are combined and added in a specific amount ratio, respectively, the boron-containing compound and MgTiO 3 -CaT are added.
Excessive reaction with iO 3 is suppressed, and the sintering temperature can be further lowered as compared with the case where only the boron-containing compound is added.
【0019】本発明は、上記した特定の組み合わせ配合
組成により、従来困難とされていた誘電体磁器組成物の
焼結温度の低温度化と、Q値,τf等の誘電特性の高性
能化を同時に達成することができ、Ag,Cu等の金属
導体との同時焼成が可能であるとともに、高性能でかつ
小型化された電子部品等に好適に用いられる誘電体磁器
組成物を提供できる。The present invention makes it possible to lower the sintering temperature of the dielectric porcelain composition, which has been heretofore difficult, and to improve the dielectric properties such as Q value and τf, by using the above specific combination composition. It is possible to provide a dielectric ceramic composition which can be simultaneously achieved and can be simultaneously fired with a metal conductor such as Ag or Cu, and which is suitable for high performance and downsized electronic parts.
【0020】[0020]
【発明の実施の形態】本発明の誘電体磁器組成物は、組
成式が(1−x)MgTiO3 −xCaTiO3 (但
し、式中xは重量比を表し、0.01≦x≦0.15)
で表される主成分100重量部に対して、硼素含有化合
物をB2 O3 換算で3〜30重量部、カリウム含有化合
物をK2 CO3 換算で1〜25重量部添加含有してなる
ものである。The dielectric ceramic composition of the present invention DETAILED DESCRIPTION OF THE INVENTION, composition formula (1-x) MgTiO 3 -xCaTiO 3 ( however, where x represents the weight ratio, 0.01 ≦ x ≦ 0. 15)
A boron-containing compound is added in an amount of 3 to 30 parts by weight in terms of B 2 O 3 and a potassium-containing compound is added in an amount of 1 to 25 parts by weight in terms of K 2 CO 3 with respect to 100 parts by weight of the main component represented by Is.
【0021】ここで、CaTiO3 の重量比xを0.0
1≦x≦0.15としたのは、CaTiO3 の重量比x
が0.01未満の場合には、共振周波数の温度係数τf
がマイナス側に大きくずれ、また、前記重量比xが0.
15を越える場合には共振周波数の温度係数τfがプラ
ス側に大きくずれるからである。よって、CaTiO3
の重量比xは0.01〜0.15に特定され、とりわけ
誘電体磁器の共振周波数の温度係数τfの観点からは
0.03〜0.10が好ましい。Here, the weight ratio x of CaTiO 3 is 0.0.
1 ≦ x ≦ 0.15 is because the weight ratio of CaTiO 3 is x
Is less than 0.01, the temperature coefficient of resonance frequency τf
Is greatly deviated to the negative side, and the weight ratio x is 0.
This is because if it exceeds 15, the temperature coefficient τf of the resonance frequency is largely deviated to the plus side. Therefore, CaTiO 3
The weight ratio x is specified to be 0.01 to 0.15, and in particular, 0.03 to 0.10. Is preferable from the viewpoint of the temperature coefficient τf of the resonance frequency of the dielectric ceramic.
【0022】本発明の誘電体磁器組成物は、主成分10
0重量部に対して、硼素含有化合物をB2 O3 換算で3
〜30重量部、カリウム含有化合物をK2 CO3 換算で
1〜25重量部添加してなるものであるが、このように
主成分100重量部に対して、硼素含有化合物をB2 O
3 換算で3〜30重量部添加したのは、硼素含有化合物
が3重量部よりも少ない場合には、誘電体磁器組成物の
焼成温度が1100℃でも緻密化せず、逆に30重量部
を越える場合にはMgTiO3 −CaTiO3の結晶相
がBと反応して変化し、磁器特性が劣化するからであ
る。よって、硼素含有化合物の添加量は、主成分100
重量部に対して3〜30重量部に特定され、とりわけ誘
電体磁器のQ値の観点からは5〜15重量部が望まし
い。硼素含有化合物としては、金属硼素,B2 O3 ,コ
レマナイト,CaB2 O4 がある。The dielectric ceramic composition of the present invention comprises a main component 10
Relative to 0 parts by weight, the boron-containing compound in terms of B 2 O 3 3
30 parts by weight, but in which potassium-containing compound obtained by adding 1 to 25 parts by weight K 2 CO 3 terms, thus with respect to 100 parts by weight of the main component, a boron-containing compound B 2 O
3 to 30 parts by weight in terms of 3 is added, when the boron-containing compound is less than 3 parts by weight, it does not become densified even if the firing temperature of the dielectric ceramic composition is 1100 ° C. This is because if it exceeds, the crystal phase of MgTiO 3 —CaTiO 3 reacts with B and changes, and the porcelain characteristics deteriorate. Therefore, the amount of the boron-containing compound added is 100
It is specified to 3 to 30 parts by weight with respect to parts by weight, and particularly 5 to 15 parts by weight is desirable from the viewpoint of the Q value of the dielectric ceramics. Examples of the boron-containing compound include metallic boron, B 2 O 3 , colemanite, and CaB 2 O 4 .
【0023】また、MgTiO3 −CaTiO3 系組成
物に硼素含有化合物のみを添加した場合も、上記と同様
に、その添加量がB2 O3 換算で3重量%未満と少ない
場合には1100℃でも緻密化せず、また、添加量がB
2 O3 換算で30重量%より多い場合には、1100℃
でも緻密化しないか、あるいは緻密化しても、組成物中
のMgTiO3 −CaTiO3 の殆どが硼素化合物と反
応してしまい、未反応のMgTiO3 −CaTiO3 結
晶が少なくなり、このため、Q値が500以下に低下し
てしまう。Also, when only the boron-containing compound is added to the MgTiO 3 —CaTiO 3 type composition, when the addition amount is as small as less than 3% by weight in terms of B 2 O 3 , the temperature is 1100 ° C. However, it was not densified, and the addition amount was B
1100 ° C when more than 30% by weight in terms of 2 O 3
However, even if not densified or even densified, most of MgTiO 3 —CaTiO 3 in the composition reacts with the boron compound, and unreacted MgTiO 3 —CaTiO 3 crystals are reduced. Is reduced to 500 or less.
【0024】さらに、主成分100重量部に対して、カ
リウム含有化合物をK2 CO3 換算で1〜25重量部添
加したのは、カリウム含有化合物がK2 CO3 換算で1
重量部よりも少ない場合には焼成温度が1100℃でも
緻密化せず、AgやCuとの同時焼成ができず、逆に2
5重量部を越える場合にはMgTiO3 −CaTiO3
の結晶相が変化し、磁器特性が劣化するからである。よ
って、カリウム含有化合物の添加量は、主成分100重
量部に対して、K2 CO3 換算で1〜25重量部に特定
され、とりわけ誘電体磁器のQ値の観点からは5〜15
重量部が望ましい。カリウム含有化合物としては、金属
K,K2 CO3 ,KCl,KF,KOHがある。Furthermore, with respect to 100 parts by weight of the main component, the potassium-containing compound was added to 25 parts by weight K 2 CO 3 terms are potassium-containing compound with K 2 CO 3 in terms of 1
When the amount is less than the weight part, even if the firing temperature is 1100 ° C., densification does not occur, and co-firing with Ag or Cu cannot be performed.
If the amount exceeds 5 parts by weight, MgTiO 3 —CaTiO 3
This is because the crystal phase of is changed and the porcelain characteristics are deteriorated. Therefore, the addition amount of the potassium-containing compound is specified to be 1 to 25 parts by weight in terms of K 2 CO 3 with respect to 100 parts by weight of the main component, and particularly 5 to 15 from the viewpoint of the Q value of the dielectric porcelain.
Parts by weight are desirable. As the potassium-containing compound, there are metals K, K 2 CO 3 , KCl, KF, and KOH.
【0025】また、本発明においては、誘電体特性に悪
影響を及ばさない範囲でSi,Zn,Mn、Li等の酸
化物を添加しても良く、この場合、更に低温焼成が可能
となる。さらに、粉砕ボールから少量の金属元素が混入
する場合もあるが、特性上問題はない。本発明の誘電体
磁器組成物では、特には、組成式が(1−x)MgTi
O3 xCaTiO3 (但し、式中xは重量比を表し、
0.03≦x≦0.10)で表される主成分100重量
部に対して、硼素含有化合物をB2 O3 換算で5〜15
重量部、カリウム含有化合物をK2 CO3 換算で5〜1
5重量部添加してなることが望ましい。Further, in the present invention, oxides such as Si, Zn, Mn and Li may be added within a range that does not adversely affect the dielectric characteristics, and in this case, further low temperature firing becomes possible. Further, a small amount of metal element may be mixed from the crushed balls, but there is no problem in characteristics. In the dielectric ceramic composition of the present invention, in particular, the composition formula is (1-x) MgTi
O 3 xCaTiO 3 (where x represents a weight ratio,
0.03 ≦ x ≦ 0.10), based on 100 parts by weight of the main component, a boron-containing compound is added in an amount of 5 to 15 in terms of B 2 O 3.
5 parts by weight of a potassium-containing compound in terms of K 2 CO 3
It is desirable to add 5 parts by weight.
【0026】本発明における硼素含有化合物は、主成分
の構成元素であるMg,Ti,Caの一部と反応しガラ
ス相を生成し、(Mg,Ca)TiO3 粒子の間の粒界
に、あるいは(Mg,Ca)TiO3 粒子,MgTiO
3 粒子,CaTiO3 粒子の間の粒界に存在することに
なる。硼素については焼結体をX線マイクロアナライザ
−(EPMA)により観察することにより粒界に存在す
ることを確認した。カリウムについてはどこに存在する
か現在のところ確認されていない。しかし、カリウムを
全く添加しない場合、主成分中のMg,Ca,Tiが粒
界中のBの側に拡散し、ガラス相を形成していたが、カ
リウムを添加することによって、その拡散の割合が少な
くなった。この結果からカリウムは硼素とともに粒界に
存在していると推定している。本発明では、焼結体中
に、(Mg,Ca)TiO3 相が多く存在することが最
も最適であり、次に、MgTiO3 相とCaTiO3 相
が多く存在することが良い。The boron-containing compound in the present invention reacts with a part of the main constituent elements Mg, Ti, Ca to form a glass phase, and at the grain boundaries between (Mg, Ca) TiO 3 particles, Alternatively, (Mg, Ca) TiO 3 particles, MgTiO
It exists at the grain boundary between the three particles and the CaTiO 3 particles. Regarding the boron, it was confirmed that it was present at the grain boundaries by observing the sintered body with an X-ray microanalyzer (EPMA). Where potassium exists is currently unknown. However, when potassium was not added at all, Mg, Ca, and Ti in the main component were diffused to the B side in the grain boundary to form a glass phase. Has decreased. From this result, it is presumed that potassium exists together with boron at the grain boundary. In the present invention, it is most optimal that the sintered body has a large amount of (Mg, Ca) TiO 3 phase, and next, it is preferable that a large amount of the MgTiO 3 phase and the CaTiO 3 phase exist.
【0027】本発明の誘電体磁器組成物は、例えば、M
gTiO3 、CaTiO3 の各原料粉末を所定量となる
ように秤量し、混合粉砕し、これを1000〜1300
℃の温度で1〜3時間仮焼する。この仮焼により(M
g,Ca)TiO3 を生成する。得られた仮焼物に硼素
含有化合物粉末とカリウム含有化合物粉末を所定量とな
るように秤量し、混合粉砕し、プレス成形等により成形
した後、大気中において脱バインダー処理し、この後、
大気中または窒素雰囲気中、900〜1050℃におい
て0.5〜2.0時間焼成することにより得られる。The dielectric ceramic composition of the present invention is, for example, M
Each raw material powder of gTiO 3 and CaTiO 3 is weighed so as to have a predetermined amount, mixed and pulverized, and this is 1000 to 1300.
Calcination is performed at a temperature of ℃ for 1 to 3 hours. By this calcination (M
g, Ca) produces TiO 3 . The obtained calcined product is weighed so that the boron-containing compound powder and the potassium-containing compound powder are in a predetermined amount, mixed and pulverized, and molded by press molding or the like, and then debinding in the atmosphere, and thereafter,
It is obtained by firing at 900 to 1050 ° C. for 0.5 to 2.0 hours in the air or a nitrogen atmosphere.
【0028】本発明の誘電体磁器組成物は、共振器,コ
ンデンサ,フィルタまたはこれらを内蔵した基板等、特
に高周波用途に適した電子部品に最適であり、これらの
電子部品内に同時焼成して形成される内部導体として
は、Ag,Cu,Au,Niおよびこれらを含む合金が
使用され、導通抵抗がより低いという点からAgおよび
Cuが望ましい。特に内部導体としてAgを用いる場合
には、低温での同時焼成が可能であり、電極酸化を防止
するための還元炉を使用しなくても良い。The dielectric porcelain composition of the present invention is most suitable for electronic parts particularly suitable for high frequency applications, such as a resonator, a capacitor, a filter or a substrate having these built therein. Ag, Cu, Au, Ni and alloys containing these are used as the internal conductor to be formed, and Ag and Cu are desirable from the viewpoint of lower conduction resistance. In particular, when Ag is used as the internal conductor, it is possible to perform simultaneous firing at low temperature, and it is not necessary to use a reducing furnace for preventing electrode oxidation.
【0029】[0029]
実施例1 先ず、純度99%以上のMgTiO3 、CaTiO3 の
各原料粉末を表1に示す重量比となるように秤量し、該
原料粉末に媒体として水を加えて24時間、ボールミル
にて混合した後、該混合物を乾燥し、次いで該乾燥物を
1200℃の温度で1時間仮焼した。Example 1 First, raw material powders of MgTiO 3 and CaTiO 3 having a purity of 99% or more were weighed so that the weight ratio shown in Table 1 was obtained, water was added to the raw material powder as a medium, and the mixture was mixed with a ball mill for 24 hours. After that, the mixture was dried and then the dried product was calcined at a temperature of 1200 ° C. for 1 hour.
【0030】得られた仮焼物にB2 O3 粉末とK2 CO
3 粉末を表1に示す割合となるように秤量し、ジルコニ
アボールを用いたボールミルにて24時間、混合した
後、バインダーとしてポリビニルアルコールを1重量%
加えてから造粒し、該造粒物を約1t/cm2 の加圧力
でプレス成形し直径約12mm、高さ10mmの円柱状
の成形体を得た。B 2 O 3 powder and K 2 CO were added to the obtained calcined product.
3 powders were weighed so as to have the ratio shown in Table 1 and mixed in a ball mill using zirconia balls for 24 hours, and then 1% by weight of polyvinyl alcohol was used as a binder.
After the addition, granulation was carried out, and the granulated product was press-molded under a pressure of about 1 t / cm 2 to obtain a cylindrical molded body having a diameter of about 12 mm and a height of 10 mm.
【0031】[0031]
【表1】 [Table 1]
【0032】その後、前記成形体を大気中、400℃の
温度で4時間加熱して脱バインダー処理し、引き続いて
大気中において表1に示す各温度で60分間焼成した。Thereafter, the molded body was heated in the air at a temperature of 400 ° C. for 4 hours to remove the binder, and subsequently fired in the air at each temperature shown in Table 1 for 60 minutes.
【0033】かくして得られた円柱体の両端面を平面研
磨し、誘電体特性評価用試料を作製した。Both end faces of the thus obtained cylindrical body were flat-polished to prepare a sample for dielectric property evaluation.
【0034】誘電体特性の評価は、前記評価用試料を用
いて誘電体円柱共振器法により、共振周波数を6〜8G
Hzに設定して各試料の比誘電率εrと8GHzにおけ
る1/tanδ、即ちQ値を測定するとともに、−40
〜+85℃の温度範囲における共振周波数の温度係数τ
fを測定した。これらの結果を表1に示した。The dielectric characteristics are evaluated by using a dielectric cylinder resonator method using the above-mentioned evaluation sample and setting the resonance frequency to 6 to 8 G.
The relative permittivity εr of each sample and 1 / tan δ at 8 GHz, that is, the Q value is measured at -40 Hz
Temperature coefficient τ of resonance frequency in the temperature range of ~ + 85 ° C
f was measured. The results are shown in Table 1.
【0035】表1によれば、本発明の誘電体磁器組成物
では、900〜1050℃の比較的低温で焼成でき、さ
らに比誘電率εrが18.5以上、Q値が1510以
上、かつ共振周波数の温度係数τfが±25以内の優れ
た特性を有することが判る。According to Table 1, the dielectric ceramic composition of the present invention can be fired at a relatively low temperature of 900 to 1050 ° C., the relative permittivity εr is 18.5 or more, the Q value is 1510 or more, and the resonance is obtained. It can be seen that the temperature coefficient τf of the frequency has excellent characteristics within ± 25.
【0036】尚、得られた焼結体を炭酸ナトリム中でア
ルカリ溶融し、この溶融物を塩酸溶液に溶解する。そし
て、溶液中のMg,Ca,Ti,BをICP発光分光分
析にて、Kを原子吸光分析にて定量分析し、Mg,C
a,Tiを本発明の組成式で表し、BをB2 O3 換算、
KをK2 CO3 換算し、本発明の組成の範囲内であるこ
とを確認した。The obtained sintered body is alkali-melted in sodium carbonate, and this melt is dissolved in a hydrochloric acid solution. Then, Mg, Ca, Ti, and B in the solution are quantitatively analyzed by ICP emission spectroscopic analysis and K by atomic absorption spectrometry.
a and Ti are represented by the composition formula of the present invention, B is converted into B 2 O 3 ,
K was converted into K 2 CO 3 and confirmed to be within the range of the composition of the present invention.
【0037】実施例2 実施例1における表1のNo.12として得られた誘電体
粉体を用い、アクリル系のバインダーを玉石(ジルコニ
ア)とともにポリポットの中に投入し、純水を加えて2
4時間ボールミルにて混合した。ついで、かかる混合物
を脱泡した後、引き上げ法により厚さ100μmのグリ
ーンテープに成形した。そして、このえられたグリーン
テープに、印刷用Agペーストを用いて、導体パターン
を印刷した。次いで、この導体パターンを印刷したグリ
ーンテープを挟み込むように、34枚のグリーンテープ
を温度100℃,圧力300kgf/cm2 の条件で積
層圧着した。Example 2 Using the dielectric powder obtained as No. 12 in Table 1 in Example 1, an acrylic binder was put in a polypot together with cobblestone (zirconia), and pure water was added to add 2.
Mixed in a ball mill for 4 hours. Then, after defoaming the mixture, a green tape having a thickness of 100 μm was formed by a lifting method. Then, a conductor pattern was printed on the obtained green tape by using Ag paste for printing. Then, 34 green tapes were laminated and pressure bonded under the conditions of a temperature of 100 ° C. and a pressure of 300 kgf / cm 2 so as to sandwich the green tape on which the conductor pattern was printed.
【0038】そして、その積層物を所定の大きさに切断
した後、空気中において900℃の温度で2時間焼成す
ることにより、図1,2に分解斜視図で表した構造のス
トリップライン型共振器及びフィルタを作製した。After cutting the laminate into a predetermined size, the laminate is fired in air at a temperature of 900 ° C. for 2 hours to obtain a stripline resonance having a structure shown in exploded perspective views in FIGS. A container and a filter were prepared.
【0039】尚、図1のストリップライン型共振器を構
成する誘電体磁器1は3層構造を有しており、導体との
同時焼成によって一体化するものである。誘電体磁器1
の一つの層に共振用電極2が形成され、また、他の層に
アース電極3が形成され、さらに、誘電体磁器1の表面
には入出力電極4とアース電極3が設けられるととも
に、側面にまで延長されている。側面のアース電極3に
共振用電極2の一端が接続されている。図2はフィルタ
であり、符号については図1と同様である。The dielectric ceramic 1 constituting the stripline resonator shown in FIG. 1 has a three-layer structure, and is integrated by simultaneous firing with a conductor. Dielectric porcelain 1
The resonance electrode 2 is formed on one layer of the above, the ground electrode 3 is formed on the other layer, and the input / output electrode 4 and the ground electrode 3 are provided on the surface of the dielectric ceramic 1 and Has been extended to. One end of the resonance electrode 2 is connected to the ground electrode 3 on the side surface. FIG. 2 shows a filter, and reference numerals are the same as those in FIG.
【0040】かくして得られたストリップライン型共振
器及びフィルタについてネットワークアナライザ(HP
8719C)を用いて、その共振器特性およびフィル
タ特性を測定した結果、共振器のQ値は150(1.9
GHz)であり、中心周波数1.9GHz、挿入損失
0.8dBのフィルタが得られた。The stripline resonator and the filter thus obtained are analyzed by a network analyzer (HP
As a result of measuring the resonator characteristic and the filter characteristic using the 8719C), the Q value of the resonator is 150 (1.9).
GHz), a center frequency of 1.9 GHz, and an insertion loss of 0.8 dB was obtained.
【0041】一方、本発明と同様の厚さの共振器,フィ
ルタで、誘電体磁器材料を、従来の特開平4−2924
60号公報に開示されたアノーサイト−チタン酸カルシ
ウム系のガラスとTiO2 からなる系(εr16,Q値
330)を用いた場合、共振器のQ値は120(1.9
GHz)であり、挿入損失1.0dBであった。この結
果より、本発明の誘電体磁器組成物を用いた電子部品で
は、従来よりも共振器のQ値が高く、挿入損失が低いこ
とが判る。On the other hand, in a resonator and a filter having the same thickness as that of the present invention, a dielectric ceramic material is used as in the conventional Japanese Unexamined Patent Publication No. 4-2924.
When the system (εr16, Q value 330) composed of anorthite-calcium titanate type glass and TiO 2 disclosed in JP-A-60 is used, the Q value of the resonator is 120 (1.9).
GHz) and the insertion loss was 1.0 dB. From this result, it is understood that the electronic component using the dielectric ceramic composition of the present invention has a higher Q value of the resonator and a lower insertion loss than the conventional one.
【0042】[0042]
【発明の効果】本発明の誘電体磁器組成物では、組成式
が(1−x)MgTiO3 −xCaTiO3 (但し、式
中xは重量比を表し、0.01≦x≦0.15)で表さ
れる主成分100重量部に対して、硼素含有化合物をB
2 O3 換算で3〜30重量部、カリウム含有化合物をK
2 CO3 換算で1〜25重量部添加したので、900〜
1050℃の比較的低温で焼成することができることに
よりAgやCu等の導体金属と同時に焼成することがで
き、高周波領域において高い比誘電率を有するととも
に、Q値も高く、かつ、共振周波数の温度特性にも優
れ、高周波電子回路基板のより一層の小型化と高性能化
が実現できる。In the dielectric ceramic composition of the present invention, composition formula (1-x) MgTiO 3 -xCaTiO 3 ( however, where x represents the weight ratio, 0.01 ≦ x ≦ 0.15) For 100 parts by weight of the main component represented by
3 to 30 parts by weight in terms of 2 O 3 , K containing potassium-containing compound
Since 1 to 25 parts by weight in terms of 2 CO 3 is added, 900 to
Since it can be fired at a relatively low temperature of 1050 ° C., it can be fired at the same time as a conductor metal such as Ag or Cu, has a high relative permittivity in a high frequency region, and has a high Q value and a resonance frequency temperature. It has excellent characteristics and can realize further miniaturization and higher performance of high-frequency electronic circuit boards.
【図1】本発明の実施例において作製した誘電体共振器
の分解斜視図である。FIG. 1 is an exploded perspective view of a dielectric resonator manufactured in an example of the present invention.
【図2】本発明の実施例において作製したフィルタの分
解斜視図である。FIG. 2 is an exploded perspective view of a filter manufactured in the example of the present invention.
1・・・誘電体磁器 2・・・共振用電極 3・・・アース電極 4・・・入出力電極 1 ... Dielectric porcelain 2 ... Resonance electrode 3 ... Ground electrode 4 ... Input / output electrode
───────────────────────────────────────────────────── フロントページの続き (72)発明者 磯山 伸治 鹿児島県国分市山下町1番4号 京セラ株 式会社総合研究所内 (72)発明者 井本 晃 鹿児島県国分市山下町1番4号 京セラ株 式会社総合研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinji Isoyama 1-4 Yamashita-cho, Kokubun-shi, Kagoshima Prefecture Kyocera Stock Company Research Institute (72) Inventor Akira Imoto 1-4 Yamashita-cho, Kokubun-shi, Kagoshima Kyocera Corporation Shikisha Research Institute
Claims (1)
TiO3 (但し、式中xは重量比を表し、0.01≦x
≦0.15)で表される主成分100重量部に対して、
硼素含有化合物をB2 O3 換算で3〜30重量部、カリ
ウム含有化合物をK2 CO3 換算で1〜25重量部添加
含有してなることを特徴とする誘電体磁器組成物。1. A composition formula of (1-x) MgTiO 3 -xCa
TiO 3 (where x represents a weight ratio, and 0.01 ≦ x
≦ 0.15), based on 100 parts by weight of the main component,
A dielectric ceramic composition comprising a boron-containing compound in an amount of 3 to 30 parts by weight in terms of B 2 O 3 and a potassium-containing compound in an amount of 1 to 25 parts by weight in terms of K 2 CO 3 .
Priority Applications (1)
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JP04253196A JP3377903B2 (en) | 1996-02-29 | 1996-02-29 | Dielectric porcelain composition |
Publications (2)
Publication Number | Publication Date |
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JPH09235157A true JPH09235157A (en) | 1997-09-09 |
JP3377903B2 JP3377903B2 (en) | 2003-02-17 |
Family
ID=12638669
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