JP3411190B2 - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JP3411190B2 JP3411190B2 JP17384297A JP17384297A JP3411190B2 JP 3411190 B2 JP3411190 B2 JP 3411190B2 JP 17384297 A JP17384297 A JP 17384297A JP 17384297 A JP17384297 A JP 17384297A JP 3411190 B2 JP3411190 B2 JP 3411190B2
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- JP
- Japan
- Prior art keywords
- weight
- parts
- containing compound
- terms
- alkali metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 title claims description 39
- 229910052573 porcelain Inorganic materials 0.000 title claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 59
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 24
- 229910052796 boron Inorganic materials 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 22
- 229910052783 alkali metal Inorganic materials 0.000 claims description 18
- 150000001340 alkali metals Chemical class 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 229910000288 alkali metal carbonate Inorganic materials 0.000 claims description 9
- 150000008041 alkali metal carbonates Chemical class 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- 238000005245 sintering Methods 0.000 description 12
- 238000010304 firing Methods 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017682 MgTi Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910021540 colemanite Inorganic materials 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、マイクロ波領域で
好適に使用されるとともに、低温焼成可能な誘電体磁器
組成物、特に、複数の誘電体層が積層され、誘電体層の
間に銀または銅を主成分とする内部導体を有する積層
体、例えば、共振器、コンデンサ、フィルタ等の電子部
品やそれらを内蔵した基板等に適する誘電体磁器組成物
に関するものである。TECHNICAL FIELD The present invention relates to a dielectric ceramic composition suitable for use in a microwave region and capable of being fired at a low temperature, in particular, a plurality of dielectric layers are laminated, and a silver layer is provided between the dielectric layers. Also, the present invention relates to a dielectric ceramic composition suitable for a laminated body having an internal conductor containing copper as a main component, for example, electronic components such as a resonator, a capacitor, a filter, and a substrate containing them.
【0002】[0002]
【従来の技術】従来より誘電体材料として各種誘電体セ
ラミックスが電子回路基板や電子部品等に広く使用され
ており、近年、携帯電話に代表される移動体通信等の高
周波機器の発展と普及に伴い、高周波領域で使用する電
子回路基板や電子部品として、誘電体セラミックスが積
極的に利用されるようになってきている。2. Description of the Related Art Conventionally, various dielectric ceramics have been widely used as a dielectric material in electronic circuit boards, electronic parts, etc., and in recent years, they have become popular in the development and popularization of high frequency equipment such as mobile communication represented by a mobile phone. Along with this, dielectric ceramics have been actively used as electronic circuit boards and electronic components used in the high frequency region.
【0003】従来、低誘電損失(Q値が高い)で、共振
周波数の温度係数の小さい誘電体磁器組成物として、M
gO・CaO・TiO2 の3成分組成の磁器組成物が知
られている。この組成物は比誘電率が20程度、7〜8
GHzにおけるQ値が8000程度、共振周波数の温度
係数τfが0近傍の値と優れた誘電特性を有する。Conventionally, M has been used as a dielectric ceramic composition having a low dielectric loss (high Q value) and a small temperature coefficient of resonance frequency.
A porcelain composition having a three-component composition of gO / CaO / TiO 2 is known. This composition has a relative dielectric constant of about 20 and 7 to 8
It has excellent dielectric properties such that the Q value at GHz is about 8000 and the temperature coefficient τf of the resonance frequency is near 0.
【0004】しかしながら、この組成物は1300℃以
上の高温で焼結する必要があり、この材料を積層体、例
えば、共振器用の誘電体磁器として使用した場合、パタ
ーンを形成する導体は前記誘電体磁器の焼結温度にて溶
融することなく、かつ酸化することがない高価な貴金属
であるパラジウム(融点1555℃)またはその合金を
使用する必要があり、コスト高になるという問題があっ
た。However, this composition needs to be sintered at a high temperature of 1300 ° C. or higher, and when this material is used as a laminated body, for example, a dielectric ceramic for a resonator, the conductor forming the pattern is the above-mentioned dielectric. It is necessary to use palladium (melting point 1555 ° C.), which is an expensive noble metal that does not melt at the sintering temperature of the porcelain and does not oxidize, or an alloy thereof, which causes a problem of high cost.
【0005】そこで、MgO・CaO・TiO2 の3成
分組成に対して、硼素含有化合物、およびリチウム含有
化合物を添加し、900〜1050℃の低温焼成化を図
ったものが知られている(特開平8−208330号公
報)。Therefore, it is known that a boron-containing compound and a lithium-containing compound are added to a three-component composition of MgO, CaO, and TiO 2 to achieve low temperature firing at 900 to 1050 ° C (special characteristics). Kaihei 8-208330).
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記特
開平8−208330号公報の誘電体磁器組成物は、硼
素含有化合物、リチウム含有化合物を添加したことによ
って導体としてAgやCu等の電極材料と同時焼成でき
るものの、反面、十分なQ値が得られないという問題が
あった。However, the dielectric ceramic composition disclosed in the above-mentioned Japanese Patent Laid-Open No. 8-208330 has a boron-containing compound and a lithium-containing compound added thereto, so that it can be used as a conductor simultaneously with an electrode material such as Ag or Cu. Although it can be fired, there is a problem that a sufficient Q value cannot be obtained.
【0007】本発明は上記課題に鑑みなされたもので、
900〜1050℃の比較的低温でAgやCu等の内部
導体と同時に焼成でき、比誘電率εrが高く、共振周波
数の温度係数τfが比較的小さく、かつ十分Q値が高い
等の特徴を有し、高周波電子部品や基板の小型化と高性
能化を実現できる誘電体磁器組成物を提供することを目
的とする。The present invention has been made in view of the above problems,
It has the features that it can be fired at the same time as an internal conductor such as Ag or Cu at a relatively low temperature of 900 to 1050 ° C, has a high relative permittivity εr, has a relatively small temperature coefficient τf of resonance frequency, and has a sufficiently high Q value. However, it is an object of the present invention to provide a dielectric ceramic composition that can realize miniaturization and high performance of high-frequency electronic components and substrates.
【0008】[0008]
【課題を解決するための手段】本発明の誘電体磁器組成
物は、金属元素としてMg、Ca、Tiを含有する複合
酸化物であって、これらの金属元素酸化物の重量比によ
る組成式をaMgO・bCaO・cTiO2 と表した
時、前記a、b、cが25.0≦a≦35.0、0.3
≦b≦ 7.0、60.0≦c≦70.0、a+b+c
=100を満足する主成分と、該主成分100重量部に
対して、硼素含有化合物をB2 O3 換算で3〜20重量
部、アルカリ金属含有化合物をアルカリ金属炭酸塩換算
で1〜10重量部、Sn含有化合物およびZr含有化合
物のうち少なくとも1種を酸化物換算で合計0.3〜
3.5重量部含有してなることを特徴とする。The dielectric porcelain composition of the present invention is a composite oxide containing Mg, Ca, and Ti as metal elements, and the composition formula based on the weight ratio of these metal element oxides is shown. When expressed as aMgO · bCaO · cTiO 2 , the above a, b, c are 25.0 ≦ a ≦ 35.0, 0.3
≤ b ≤ 7.0, 60.0 ≤ c ≤ 70.0, a + b + c
= Main component which satisfies the 100, with respect to the main component 100 parts by weight, 1 to 10 weight boron-containing compound from 3 to 20 parts by weight terms of B 2 O 3, the alkali metal-containing compound with an alkali metal carbonate terms Part, at least one kind of Sn-containing compound and Zr-containing compound in total of 0.3 to oxide equivalent.
It is characterized by containing 3.5 parts by weight.
【0009】また、本発明の誘電体磁器組成物は、金属
元素としてMg、Ca、Tiを含有する複合酸化物であ
って、その組成式が(100−x)MgTiO3 −xC
aTiO3 (但し、式中xは重量比を表し、1≦x≦1
5)で表される主成分と、該主成分100重量部に対し
て、硼素含有化合物をB2 O3 換算で3〜20重量部、
アルカリ金属含有化合物をアルカリ金属炭酸塩換算で1
〜10重量部、Sn含有化合物およびZr含有化合物の
うち少なくとも1種を酸化物換算で合計0.3〜3.5
重量部含有してなることを特徴とする。The dielectric porcelain composition of the present invention is a composite oxide containing Mg, Ca, and Ti as metal elements, and its composition formula is (100-x) MgTiO 3 -xC.
aTiO 3 (where x represents a weight ratio, 1 ≦ x ≦ 1
5) a main component represented by, with respect to the main component 100 parts by weight, 3 to 20 parts by weight of a boron-containing compound in terms of B 2 O 3,
1 for alkali metal-containing compound in terms of alkali metal carbonate
-10 parts by weight, at least one kind of Sn-containing compound and Zr-containing compound in total of 0.3 to 3.5 in terms of oxide.
It is characterized by containing parts by weight.
【0010】[0010]
【作用】本発明の誘電体磁器組成物では、900〜10
50℃の比較的低温でAgやCu等を主成分とする導体
金属と同時に焼成でき、誘電体磁器の比誘電率εrやQ
値が高く、かつ共振周波数の温度係数τfを比較的小さ
くすることができ、高周波電子回路基板や電子部品の小
型化と高性能化を実現できる。In the dielectric ceramic composition of the present invention, 900 to 10
It can be fired at a relatively low temperature of 50 ° C at the same time as a conductor metal mainly composed of Ag, Cu, etc., and has a relative permittivity εr or Q of a dielectric ceramic.
The value is high, the temperature coefficient τf of the resonance frequency can be made relatively small, and the high-frequency electronic circuit board and electronic parts can be downsized and the performance can be improved.
【0011】特に、本発明の誘電体磁器組成物では、S
n含有化合物およびZr含有化合物のうち少なくとも1
種を酸化物換算で合計0.3〜3.5重量部含有せしめ
たので、これらを含有しない場合よりもQ値を大きく向
上することができる。Particularly, in the dielectric ceramic composition of the present invention, S
At least one of n-containing compound and Zr-containing compound
Since the total amount of the seeds is 0.3 to 3.5 parts by weight in terms of oxide, the Q value can be greatly improved as compared with the case where these are not contained.
【0012】[0012]
【発明の実施の形態】本発明の誘電体磁器組成物は、金
属元素としてMg、Ca、Tiを含有する複合酸化物で
あって、これらの金属元素酸化物の重量比による組成式
をaMgO・bCaO・cTiO2 と表した時、a、
b、cが25.0≦a≦35.0、0.3≦b≦7.
0、60.0≦c≦70.0、a+b+c=100を満
足する主成分100重量部に対して、硼素含有化合物を
B2 O3 換算で3〜20重量部、アルカリ金属含有化合
物をアルカリ金属炭酸塩換算で1〜10重量部、Sn、
Zr含有化合物の少なくとも1種類を酸化物換算で合計
0.3〜3.5重量部添加含有してなるものである。BEST MODE FOR CARRYING OUT THE INVENTION The dielectric ceramic composition of the present invention is a composite oxide containing Mg, Ca, and Ti as metal elements, and the composition formula based on the weight ratio of these metal element oxides is aMgO. When expressed as bCaO · cTiO 2 , a,
b and c are 25.0 ≦ a ≦ 35.0 and 0.3 ≦ b ≦ 7.
0, 60.0 ≦ c ≦ 70.0, 3 to 20 parts by weight of a boron-containing compound in terms of B 2 O 3 and 100 parts by weight of a main component satisfying a + b + c = 100, and an alkali metal-containing compound as an alkali metal 1 to 10 parts by weight of carbonate, Sn,
It contains at least one Zr-containing compound in a total amount of 0.3 to 3.5 parts by weight in terms of oxide.
【0013】本発明において、組成式におけるMgOの
重量比aを25≦a≦35、CaOの重量比bを、0.
3≦b≦7としたのは、MgOの重量比aが25重量%
未満の場合やCaOの重量比bが7重量%を越える場合
には、共振周波数の温度係数τfが正に大きくなりすぎ
てしまうからである。In the present invention, the weight ratio a of MgO in the composition formula is 25 ≦ a ≦ 35, and the weight ratio b of CaO is 0.
3 ≦ b ≦ 7 is because the weight ratio a of MgO is 25% by weight.
This is because the temperature coefficient τf of the resonance frequency becomes too large positively when the weight ratio b of CaO is less than 7% or when the weight ratio b of CaO exceeds 7% by weight.
【0014】逆に、MgOの重量比aが35重量%を越
える場合やCaOの重量比bが0.3重量%未満の場合
には、共振周波数の温度係数τfが負に大きくなりすぎ
てしまうからである。よって、MgOの重量比aとCa
Oの重量比bは、25.0≦a≦35.0、0.3≦b
≦7.0に特定され、とりわけ誘電体磁器の共振周波数
の温度係数τfの観点からは28.0≦a≦34.0、
0.4≦b≦6.5が好ましい。On the contrary, when the MgO weight ratio a exceeds 35% by weight or when the CaO weight ratio b is less than 0.3% by weight, the temperature coefficient τf of the resonance frequency becomes too negative. Because. Therefore, MgO weight ratio a and Ca
The weight ratio b of O is 25.0 ≦ a ≦ 35.0, 0.3 ≦ b
≦ 7.0, especially from the viewpoint of the temperature coefficient τf of the resonance frequency of the dielectric ceramic, 28.0 ≦ a ≦ 34.0,
0.4 ≦ b ≦ 6.5 is preferable.
【0015】さらに、TiO2 の重量比cを60≦c≦
70としたのは、TiO2 の重量比cが60重量%未満
あるいは70重量%を越える場合にはQ値が低下するか
らである。よって、TiO2 の重量比cは60≦c≦7
0に特定され、とりわけ誘電体磁器のQ値の観点から6
4≦c≦68が好ましい。Further, the weight ratio c of TiO 2 is 60 ≦ c ≦
The reason for setting 70 is that the Q value decreases when the weight ratio c of TiO 2 is less than 60% by weight or exceeds 70% by weight. Therefore, the weight ratio c of TiO 2 is 60 ≦ c ≦ 7.
Specified as 0, especially from the viewpoint of the Q value of dielectric porcelain 6
4 ≦ c ≦ 68 is preferable.
【0016】また、出発原料をMgTiO3 とCaTi
O3 にすることにより、さらにQ値を向上させ、温度係
数の制御が容易となる。つまり、(100−x)MgT
iO3 −xCaTiO3 (但し、式中xは重量比を表わ
し、1≦x≦15)で表される主成分100重量部に対
して、硼素含有化合物をB2 O3 換算で3〜20重量
部、アルカリ金属含有化合物をアルカリ金属炭酸塩換算
で1〜10重量部、Sn、Zr含有化合物の少なくとも
1種類を酸化物換算で合計0.3〜3.5重量部含有し
た場合である。The starting materials are MgTiO 3 and CaTi.
The use of O 3 further improves the Q value and facilitates control of the temperature coefficient. That is, (100-x) MgT
3 to 20 parts by weight of the boron-containing compound in terms of B 2 O 3 with respect to 100 parts by weight of the main component represented by iO 3 -xCaTiO 3 (where x represents a weight ratio, 1 ≦ x ≦ 15). Parts, 1 to 10 parts by weight of the alkali metal-containing compound in terms of alkali metal carbonate, and a total of 0.3 to 3.5 parts by weight of at least one of Sn and Zr-containing compounds in terms of oxide.
【0017】ここで、主成分中のCaTiO3 の重量比
を1≦x≦15としたのは、CaTiO3 の重量比が1
重量%未満の場合には、共振周波数の温度係数τfがマ
イナス側に大きくずれ、また、前記重量比が15重量%
を越える場合には共振周波数の温度係数τfがプラス側
に大きくずれるからである。よって、CaTiO3 の重
量比xは1〜15重量%に特定され、とりわけ、誘電体
磁器の共振周波数の温度係数τfの観点からは1〜10
重量%が好ましい。Here, the weight ratio of CaTiO 3 in the main component is set to 1 ≦ x ≦ 15, because the weight ratio of CaTiO 3 is 1.
When it is less than wt%, the temperature coefficient τf of the resonance frequency is largely deviated to the negative side, and the weight ratio is 15 wt%.
This is because the temperature coefficient τf of the resonance frequency is greatly deviated to the plus side when the value exceeds. Therefore, the weight ratio x of CaTiO 3 is specified to be 1 to 15% by weight, and particularly 1 to 10 from the viewpoint of the temperature coefficient τf of the resonance frequency of the dielectric ceramic.
Weight percent is preferred.
【0018】また、本発明では、上記主成分に対して、
硼素含有化合物をB2 O3 換算で3〜20重量部、アル
カリ金属含有化合物を該アルカリ金属炭酸塩換算で1〜
10重量部、Sn、Zr含有化合物の少なくとも1種類
を酸化物換算で合計0.3〜3.5重量部添加含有して
なるものであるが、このように主成分100重量部に対
して、硼素含有化合物をB2 O3 換算で3〜20重量部
添加したのは、B2 O3 の添加量が3重量部未満の場合
には1100℃でも焼結せず、AgまたはCuとの同時
焼成ができなくなり、逆に20重量部を越える場合には
結晶相が変化し、Q値が低下するするからである。Further, in the present invention, with respect to the above main component,
The boron-containing compound is 3 to 20 parts by weight in terms of B 2 O 3 , and the alkali metal-containing compound is 1 to 1 in terms of the alkali metal carbonate.
10 parts by weight, at least one of Sn and Zr-containing compounds is added in a total amount of 0.3 to 3.5 parts by weight in terms of oxide, and is added to 100 parts by weight of the main component as described above. the boron-containing compound was added 3 to 20 parts by weight terms of B 2 O 3, when the added amount of B 2 O 3 is less than 3 parts by weight does not 1100 ° C. But sintering simultaneously with Ag or Cu This is because the firing becomes impossible and, conversely, when the amount exceeds 20 parts by weight, the crystal phase changes and the Q value decreases.
【0019】よって、硼素含有化合物の添加量は、主成
分に対してB2 O3 換算で3〜20重量部に特定され、
とりわけ誘電体磁器のQ値の観点からは3〜15重量部
が望ましい。硼素含有化合物としては、金属硼素、B2
O3 、コレマナイト、CaB2 O4 等がある。Therefore, the addition amount of the boron-containing compound is specified to be 3 to 20 parts by weight in terms of B 2 O 3 with respect to the main component,
Particularly, from the viewpoint of the Q value of the dielectric porcelain, 3 to 15 parts by weight is desirable. Examples of the boron-containing compound include metallic boron and B 2
There are O 3 , colemanite, CaB 2 O 4 and the like.
【0020】また、アルカリ金属含有化合物を該アルカ
リ金属炭酸塩換算で1〜10重量部添加したのは、アル
カリ金属含有化合物、例えばリチウム含有化合物の添加
量が1重量部未満の場合には1100℃でも焼結せず、
AgまたはCuとの同時焼成ができなくなり、逆に、1
0重量部を越える場合には結晶相が変化し、Q値が低下
するからである。よって、アルカリ金属含有化合物の添
加量は、主成分100重量部に対してアルカリ金属炭酸
塩換算、例えばLi2 CO3 換算で1〜10重量部に特
定され、とりわけ誘電体磁器のQ値の観点からは3〜7
重量部が望ましい。The alkali metal-containing compound is added in an amount of 1 to 10 parts by weight in terms of the alkali metal carbonate, which is 1100 ° C. when the addition amount of the alkali metal-containing compound, for example, the lithium-containing compound is less than 1 part by weight. But without sintering,
Simultaneous firing with Ag or Cu is not possible, on the contrary, 1
This is because if it exceeds 0 parts by weight, the crystal phase changes and the Q value decreases. Therefore, the addition amount of the alkali metal-containing compound is specified to be 1 to 10 parts by weight in terms of alkali metal carbonate, for example, Li 2 CO 3 with respect to 100 parts by weight of the main component, and particularly in view of the Q value of the dielectric porcelain. From 3 to 7
Parts by weight are desirable.
【0021】アルカリ金属としては、Li、Na、Kを
例示することができ、この中でもLiが特に望ましい。
アルカリ金属含有化合物としては、上記アルカリ金属の
炭酸塩,酸化物等を例示することができる。Examples of the alkali metal include Li, Na and K, and among these, Li is particularly desirable.
Examples of the alkali metal-containing compound include carbonates and oxides of the above alkali metals.
【0022】そして、本発明においては、硼素含有化合
物とアルカリ金属含有化合物を同時に添加含有すること
に特徴があるが、その理由について説明する。上記主成
分に対して硼素含有化合物のみを配合した場合には、そ
の配合量が少ないと焼成温度を十分に低下させることが
できず、AgまたはCuの融点温度以下の温度で焼結さ
せることができない。The present invention is characterized in that the boron-containing compound and the alkali metal-containing compound are added and contained at the same time. The reason for this will be explained. When only the boron-containing compound is blended with the above main component, if the blending amount is too small, the firing temperature cannot be lowered sufficiently and the sintering may be performed at a temperature not higher than the melting point temperature of Ag or Cu. Can not.
【0023】また、配合量が多いと焼結温度は低下する
が、硼素含有化合物は、焼成時等の高温下で主成分のM
gTiO3 −CaTiO3 系と反応するので、配合量が
多すぎた場合は、焼成後においてMgTiO3 −CaT
iO3 の残存量が少なくなり、高いQ値を維持すること
ができない。従って、硼素含有化合物のみを添加した場
合には、低い焼結温度と高周波領域における誘電特性が
共に優れた誘電体磁器組成物を得ることができないから
である。Although the sintering temperature is lowered when the compounding amount is large, the boron-containing compound is a main component of M at a high temperature such as during firing.
Since reacts with gTiO 3 -CaTiO 3 system, if the amount is too large, MgTiO 3 -cat after firing
The residual amount of iO 3 decreases, and a high Q value cannot be maintained. Therefore, when only the boron-containing compound is added, it is not possible to obtain a dielectric ceramic composition having excellent low sintering temperature and excellent dielectric properties in a high frequency region.
【0024】即ち、硼素含有化合物のみを添加した場合
は、その添加量がB2 O3 換算で3重量部未満では焼結
温度が1050℃以下にはならない。また、B2 O3 換
算で20重量部よりも多い場合には焼結温度を1050
℃以下に低下できるが、硼素含有化合物は焼成時等高温
下において上述したようにMgTiO3 −CaTiO3
と反応するため、Q値が低下してしまうからである。That is, when only the boron-containing compound is added, if the addition amount is less than 3 parts by weight in terms of B 2 O 3 , the sintering temperature does not fall below 1050 ° C. If the amount of B 2 O 3 is more than 20 parts by weight, the sintering temperature is 1050.
℃ can be reduced below, MgTiO 3 -CaTiO 3 as a boron-containing compounds described above in the firing or the like high temperatures
This is because the Q value decreases because it reacts with.
【0025】この組成物の場合、硼素含有化合物の添加
による組成物の焼結温度低下効果と焼成後の磁器組成物
の誘電特性向上効果とは背反関係にあり、硼素含有化合
物のみを添加した組成物では、低い焼結温度と高いQ値
等の優れた誘電特性とを共に備えた組成物を得ることが
困難である。In the case of this composition, the effect of lowering the sintering temperature of the composition by the addition of the boron-containing compound and the effect of improving the dielectric properties of the porcelain composition after firing are in a trade-off relationship. However, it is difficult to obtain a composition having both a low sintering temperature and excellent dielectric properties such as a high Q value.
【0026】一方、主成分にLi,Na,K等のアルカ
リ金属含有化合物のみを添加した場合には、たとえ添加
量を増加させたとしても、組成物の焼結温度を低下させ
ることが殆どできず、1050℃以下で焼結できる組成
物を得ることができない。On the other hand, when only the alkali metal-containing compound such as Li, Na and K is added to the main component, the sintering temperature of the composition can be almost lowered even if the addition amount is increased. Therefore, a composition that can be sintered at 1050 ° C. or lower cannot be obtained.
【0027】これに対して、硼素含有化合物とアルカリ
金属含有化合物とを、各々特定量比で組み合わせ添加配
合した本発明の組成物では、硼素含有化合物とMgTi
O3−CaTiO3 系等との過度の反応が抑制され、か
つ、硼素含有化合物のみの添加の場合と比較してさらに
焼結温度を低下させることができると同時にQ値の低下
を抑制できる。On the other hand, in the composition of the present invention in which the boron-containing compound and the alkali metal-containing compound are combined and added at specific ratios, the boron-containing compound and MgTi
Excessive reaction with O 3 —CaTiO 3 system and the like can be suppressed, and the sintering temperature can be further reduced as compared with the case where only the boron-containing compound is added, and at the same time, the Q value can be prevented from lowering.
【0028】そして、本発明の誘電体磁器組成物では、
主成分100重量部に対して、Sn含有化合物およびZ
r含有化合物のうち少なくとも1種を酸化物換算で合計
0.3〜3.5重量部含有するものである。ここで、S
n、Zr含有化合物の少なくとも1種類を酸化物換算で
合計0.3〜3.5重量部含有したのは、この範囲外で
は、添加効果があまりないか、あるいはSn、Zr含有
化合物をしない場合よりも逆にQ値が低下するからであ
り、とりわけ誘電体磁器のQ値の観点からは0.5〜
3.0重量部が望ましい。And, in the dielectric ceramic composition of the present invention,
Sn-containing compound and Z based on 100 parts by weight of the main component
At least one of the r-containing compounds is contained in a total amount of 0.3 to 3.5 parts by weight in terms of oxide. Where S
A total of 0.3 to 3.5 parts by weight of at least one of the n and Zr-containing compounds in terms of oxide is contained outside the range, when the addition effect is not so great, or when the Sn and Zr-containing compound is not used. On the contrary, the Q value decreases, and from the viewpoint of the Q value of the dielectric ceramic, 0.5 to
3.0 parts by weight is desirable.
【0029】尚、本発明においては、誘電特性に悪影響
を及ぼさない範囲でSi、Zn、Mn等の酸化物を添加
含有しても良く、この場合さらに低温焼成が可能とな
る。In the present invention, oxides such as Si, Zn and Mn may be added and contained within a range that does not adversely affect the dielectric properties, and in this case, low temperature firing becomes possible.
【0030】本発明の誘電体磁器組成物は、例えば、M
gCO3 、CaCO3 、TiO2 の各原料粉末を所定量
となるように秤量し、混合粉砕し、これを1100〜1
300℃の温度で大気中で1〜3時間仮焼する。得られ
た仮焼物に、例えばB2 O3とLi2 CO3 、Sn
O2 、ZrO2 の各粉末を所定量となるように秤量し、
混合粉砕し、プレス成形やドクターブレード法等の周知
の方法により所定形状に成形した後、大気中等の酸化性
雰囲気または窒素雰囲気中等の非酸化性雰囲気におい
て、900〜1050℃において0.5〜2.0時間焼
成することにより得られる。The dielectric ceramic composition of the present invention is, for example, M
Raw material powders of gCO 3 , CaCO 3 , and TiO 2 were weighed so as to have predetermined amounts, mixed and pulverized, and 1100 to 1
Calcination is performed in the air at a temperature of 300 ° C. for 1 to 3 hours. The obtained calcined product is mixed with, for example, B 2 O 3 , Li 2 CO 3 and Sn.
Each powder of O 2 and ZrO 2 is weighed to a predetermined amount,
After mixed and pulverized and molded into a predetermined shape by a well-known method such as press molding or doctor blade method, 0.5 to 2 at 900 to 1050 ° C. in an oxidizing atmosphere such as air or a non-oxidizing atmosphere such as nitrogen atmosphere. It is obtained by firing for 0.0 hours.
【0031】[0031]
実施例1
先ず、純度99%以上のMgCO3 、CaCO3 、Ti
O2 の各原料粉末を表1、2に示す量となるように秤量
し、該原料粉末に媒体として純水を加えて24時間、Z
rO2 ボールを用いたボールミルにて混合した後、該混
合物を乾燥し、次いで該乾燥物を大気中において120
0℃の温度で1時間仮焼した。Example 1 First, MgCO 3 , CaCO 3 , and Ti having a purity of 99% or more
Each raw material powder of O 2 was weighed so that the amounts shown in Tables 1 and 2 were obtained, and pure water was added to the raw material powder as a medium for 24 hours.
After mixing in a ball mill with rO 2 balls, the mixture is dried and then the dried product is dried in air at 120
It was calcined at a temperature of 0 ° C. for 1 hour.
【0032】得られた仮焼物にB2 O3 粉末とLi2 C
O3 、SnO2 、ZrO2 粉末を表1、2に示す割合と
なるように秤量し、上記ボールミルにて24時間、混合
した後、バインダーとしてポリビニルアルコールを1重
量%加えてから造粒し、該造粒物を約1ton/cm2
の加圧力でプレス成形して直径約12mm、高さ10m
mの円柱状の成形体を作製した。B 2 O 3 powder and Li 2 C were added to the obtained calcined product.
O 3 , SnO 2 , and ZrO 2 powders were weighed so as to have the ratios shown in Tables 1 and 2, and mixed in the above ball mill for 24 hours, and then 1% by weight of polyvinyl alcohol was added as a binder and then granulated, Approximately 1 ton / cm 2 of the granulated product
12mm in diameter and 10m in height after press molding
A cylindrical molded body of m was produced.
【0033】その後、前記成形体を大気中、400℃の
温度で4時間加熱して脱バインダー処理し、引き続き大
気中において表1、2に示す各温度で60分間焼成し
た。かくして得られた円柱体の両端面を平面研磨し、誘
電体特性評価用試料を作製した。Thereafter, the molded body was heated in the air at a temperature of 400 ° C. for 4 hours to remove the binder, and subsequently fired in the air at each temperature shown in Tables 1 and 60 for 60 minutes. Both end surfaces of the thus obtained cylindrical body were flat-polished to prepare a sample for dielectric property evaluation.
【0034】誘電体特性の評価は、前記評価用試料を用
いて誘電体円柱共振器法により、共振周波数を6〜8G
Hzに設定して各試料の比誘電率εrと7GHzにおけ
る1/tanδ、即ちQ値を測定するとともに、−40
〜+85℃の温度範囲における共振周波数の温度係数τ
fを測定した。その結果を表1、2に記載した。The dielectric characteristics are evaluated by using a dielectric cylinder resonator method using the above-mentioned evaluation sample and setting the resonance frequency to 6 to 8 G.
And the relative permittivity εr of each sample and 1 / tan δ at 7 GHz, that is, the Q value, are measured at -40 Hz.
Temperature coefficient τ of resonance frequency in the temperature range of + 85 ° C
f was measured. The results are shown in Tables 1 and 2.
【0035】[0035]
【表1】 [Table 1]
【0036】[0036]
【表2】 [Table 2]
【0037】表1、2によれば、本発明の誘電体磁器組
成物では、900〜1050℃の比較的低温で焼成で
き、さらに、比誘電率εrが18以上であり、Sn
O2 、ZrO2 を含有しない試料よりもQ値を向上で
き、しかも7GHzにおけるQ値が3000以上を満足
し、さらに共振周波数の温度係数τfが±40ppm/
℃以内の優れた特性を有することが判る。尚、試料No.
58はLi2 CO3 の代わりにNa2 CO3 を用いた。According to Tables 1 and 2, the dielectric ceramic composition of the present invention can be fired at a relatively low temperature of 900 to 1050 ° C., and has a relative dielectric constant εr of 18 or more, and Sn.
The Q value can be improved as compared with the sample containing neither O 2 nor ZrO 2 , and the Q value at 7 GHz satisfies 3000 or more, and the temperature coefficient τf of the resonance frequency is ± 40 ppm /
It can be seen that it has excellent properties within ℃. Sample No.
In 58, Na 2 CO 3 was used instead of Li 2 CO 3 .
【0038】実施例2
先ず、純度99%以上のMgTiO3 、CaTiO3 の
各原料粉末を表3に示す量となるように秤量し、該原料
粉末に媒体として純水を加えて24時間、ZrO2 ボー
ルを用いたボールミルにて混合した後、該混合物を乾燥
し、次いで該乾燥物を大気中1200℃の温度で1時間
仮焼した。Example 2 First, raw material powders of MgTiO 3 and CaTiO 3 having a purity of 99% or more were weighed so that the amounts shown in Table 3 were obtained, and pure water was added to the raw material powder as a medium for 24 hours. After mixing with a ball mill using two balls, the mixture was dried, and then the dried product was calcined in the atmosphere at a temperature of 1200 ° C. for 1 hour.
【0039】得られた仮焼物にB2 O3 とLi2 C
O3 、SnO2 、ZrO2 粉末を表3に示す割合となる
ように秤量し、上記ボールミルにて24時間、混合した
後、バインダーとしてポリビニルアルコールを1重量%
加えてから造粒し、該造粒物を約1ton/cm2 の加
圧力でプレス成形して直径約12mm、高さ10mmの
円柱状の成形体を作製した。B 2 O 3 and Li 2 C were added to the obtained calcined product.
O 3 , SnO 2 , and ZrO 2 powders were weighed so that the ratios shown in Table 3 were obtained and mixed in the above ball mill for 24 hours, and then 1% by weight of polyvinyl alcohol was used as a binder.
After the addition, granulation was carried out, and the granulated product was press-molded under a pressure of about 1 ton / cm 2 to produce a cylindrical molded body having a diameter of about 12 mm and a height of 10 mm.
【0040】その後、前記成形体を大気中、400℃の
温度で4時間加熱して脱バインダー処理し、引き続き表
3に示す各温度で大気中60分間焼成した。かくして得
られた円柱体の両端面を平面研磨し、誘電体特性評価用
試料を作製した。誘電体特性の評価を、上記と同様にし
て求め、その結果を表3に記載した。Thereafter, the molded body was heated in the air at a temperature of 400 ° C. for 4 hours to remove the binder, and subsequently fired at the respective temperatures shown in Table 3 in the air for 60 minutes. Both end surfaces of the thus obtained cylindrical body were flat-polished to prepare a sample for dielectric property evaluation. Evaluation of the dielectric properties was performed in the same manner as above, and the results are shown in Table 3.
【0041】[0041]
【表3】 [Table 3]
【0042】この表3によれば、本発明の誘電体磁器組
成物では、1050℃以下の比較的低温で焼成でき、比
誘電率εrが19以上、Q値がSnO2 、ZrO2 を含
有しない試料よりも高く、しかもQ値を4000以上と
することができ、さらに共振周波数の温度係数τfが±
30以内の優れた特性を有することが判る。According to Table 3, the dielectric ceramic composition of the present invention can be fired at a relatively low temperature of 1050 ° C. or lower, the relative dielectric constant εr is 19 or more, and the Q value does not include SnO 2 and ZrO 2. It is higher than the sample and the Q value can be 4000 or more, and the temperature coefficient τf of the resonance frequency is ±
It can be seen that it has excellent characteristics within 30.
【0043】[0043]
【発明の効果】本発明の誘電体磁器組成物では、所定の
組成からなる主成分100重量部に対して、硼素含有化
合物をB2 O3 換算で3〜20重量部、アルカリ金属含
有化合物をアルカリ金属炭酸塩換算で1〜10重量部、
Sn、Zr含有化合物の少なくとも1種を酸化物換算で
合計0.3〜3.5重量部添加含有したので、1050
℃以下の比較的低温でAgやCu等の導体金属と同時に
焼成でき、高周波領域において高い比誘電率を有すると
ともに、SnO2 、ZrO2 を含有しない場合よりもQ
値を高くすることができ、電子部品や基板のより一層の
小型化と高性能化を実現できる。In the dielectric ceramic composition of the present invention, 3 to 20 parts by weight of a boron-containing compound in terms of B 2 O 3 and 100 parts by weight of a main component having a predetermined composition, and an alkali metal-containing compound are added. 1 to 10 parts by weight in terms of alkali metal carbonate,
Since at least one of Sn and Zr-containing compounds was added in an amount of 0.3 to 3.5 parts by weight in terms of oxide, the content was 1050.
℃ can relatively low temperature co-fired with the conductive metal such as Ag and Cu in the following, which has a high dielectric constant at high frequencies, than in the case containing no SnO 2, ZrO 2 Q
The value can be increased, and electronic components and boards can be made even smaller and have higher performance.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平8−208330(JP,A) 特開 平6−349334(JP,A) 特開 昭62−216107(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01B 3/12 C04B 35/46 ─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-8-208330 (JP, A) JP-A-6-349334 (JP, A) JP-A-62-216107 (JP, A) (58) Field (Int.Cl. 7 , DB name) H01B 3/12 C04B 35/46
Claims (2)
る複合酸化物であって、これらの金属元素酸化物の重量
比による組成式を aMgO・bCaO・cTiO2 と表した時、前記a、b、cが 25.0≦a≦35.0 0.3≦b≦ 7.0 60.0≦c≦70.0 a+b+c=100 を満足する主成分と、該主成分100重量部に対して、
硼素含有化合物をB2 O3 換算で3〜20重量部、アル
カリ金属含有化合物をアルカリ金属炭酸塩換算で1〜1
0重量部、Sn含有化合物およびZr含有化合物のうち
少なくとも1種を酸化物換算で合計0.3〜3.5重量
部含有してなることを特徴とする誘電体磁器組成物。1. A Mg as the metal element, Ca, a composite oxide containing Ti, when expressed as aMgO · bCaO · cTiO 2 the formula by weight ratio of the metal element oxides, wherein a, b and c are 25.0 ≦ a ≦ 35.0 0.3 ≦ b ≦ 7.0 60.0 ≦ c ≦ 70.0 a + b + c = 100, and 100 parts by weight of the main component. ,
The boron-containing compound is 3 to 20 parts by weight in terms of B 2 O 3 , and the alkali metal-containing compound is 1 to 1 in terms of alkali metal carbonate.
A dielectric ceramic composition containing 0 part by weight, at least one of Sn-containing compounds and Zr-containing compounds in a total amount of 0.3 to 3.5 parts by weight in terms of oxide.
る複合酸化物であって、その組成式が(100−x)M
gTiO3 −xCaTiO3 (但し、式中xは重量比を
表し、1≦x≦15)で表される主成分と、該主成分1
00重量部に対して、硼素含有化合物をB2 O3 換算で
3〜20重量部、アルカリ金属含有化合物をアルカリ金
属炭酸塩換算で1〜10重量部、Sn含有化合物および
Zr含有化合物のうち少なくとも1種を酸化物換算で合
計0.3〜3.5重量部含有してなることを特徴とする
誘電体磁器組成物。2. A composite oxide containing Mg, Ca, and Ti as metal elements, the composition formula of which is (100-x) M.
gTiO 3 —xCaTiO 3 (where x represents a weight ratio, 1 ≦ x ≦ 15), and the main component 1
Relative to 100 parts by weight, 3 to 20 parts by weight of a boron-containing compound in terms of B 2 O 3, 1 to 10 parts by weight of alkali metal-containing compound with an alkali metal carbonate terms of Sn-containing compound and Zr-containing compound of at least A dielectric porcelain composition comprising a total of 0.3 to 3.5 parts by weight in terms of oxide.
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