JPH0876349A - Photomask, production of ink-jet recording head using the same and ink-jet recording head - Google Patents

Abstract

PURPOSE: To provide a photomask having excellent dimensional stability, high reliability and long service life. CONSTITUTION: The photomask 1 mostly consists of a rectangular copper plate 2 as a metal plate and an Al film 3 as a metal film formed by sputtering on the one surface of the copper plate 2. The copper plate 2 is provided with a line of holes 4, for example, having 90μm diameter, in the center part along the longitudinal direction. These holes are about 250 in number with 210μm pitch and formed by etching. Thereby, the Al film 3 is formed on the one surface of the copper plate 2 to about 0.2 to 0.4μm thickness in the area except for the holes 4. By using a copper plate having good thermal conductivity as the metal plate and by forming an Al film having high reflectance for the wavelength of KrF laser (248nm wavelength) on the surface of the plate, a photomask having high accuracy which can endure the irradiation of high power laser light is produced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser mask for processing which is preferably used for forming an ejection port of an ink jet recording head, a method for manufacturing an ink jet recording head using the same, and an ink jet recording head.

The term "recording" as used herein includes ink application and the like (printing) to all ink supports that receive ink such as cloth, thread, paper and sheet material. It includes a printer as its output device, and the present invention can be applied to these.

[0003]

2. Description of the Related Art Conventionally, as a processing laser mask, a mask made of a heat-resistant metal plate such as Ni or SUS, or a quartz plate on which Cr is vapor-deposited, is subjected to etching or machining. The produced photomask is used.

In the recent laser processing performed using such a photomask, higher speed processing and higher accuracy are required. That is, one of the factors for increasing the speed is to increase the output of the laser, and in order to improve the accuracy, it is necessary to improve the accuracy of the photomask.

When the photomask is irradiated with a high-power laser, the temperature of the photomask rises, and in the metal mask as described above, the photomask thermally expands, causing dimensional changes in the photomask.

Therefore, the conventional photomask has a disadvantage that it lacks reliability in terms of dimensional stability when used in laser processing using a high-power laser.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned drawbacks and to provide a long-life photomask having excellent dimensional stability and high reliability.

[0008]

In order to achieve the above object, the invention according to claim 1 is a photomask, which is a metal plate having a processed pattern shape, and which is formed on the metal plate, and And a metal film having a high reflectance for irradiation light.

Here, the invention of claim 2 is the same as claim 1.
In the photomask described, the metal plate may have a high thermal conductivity.

The invention according to claim 3 is the photomask according to claim 1 or 2, wherein the metal film is
It may have a high reflectance for the ultraviolet light which is the irradiation light.

According to a fourth aspect of the present invention, there is provided a method of manufacturing an ink jet recording head, wherein a substrate on which an ejection energy generating element for generating ejection energy used for ejecting ink is formed, and the substrate is bonded. As a result, a top plate having a concave portion for forming an ink liquid path corresponding to a portion where the ejection energy element is disposed, and an ejection port for communicating ink with the ink liquid channel to eject ink are formed. In a method of manufacturing an inkjet recording head including an outlet forming member, the top plate and the outlet forming member are integrated, and when the outlet is formed by irradiating excimer laser light from the recess side. Claims 1 to 3
The photomask according to any one of 1 to 3 is used.

Here, the invention according to claim 5 is the invention according to claim 4.
In the manufacturing method of the inkjet recording head described,
The top plate and the discharge port forming member may be integrally formed.

According to a sixth aspect of the present invention, there is provided an ink jet recording head, which is manufactured by the method for manufacturing an ink jet recording head according to the fourth or fifth aspect.

Here, the invention according to claim 7 is the invention according to claim 6.
In the inkjet recording head described, the ejection energy generating element may have a form in which thermal energy is applied to the ink.

According to an eighth aspect of the invention, in the ink jet recording head according to the seventh aspect, the ejection energy generating element may be an electrothermal converter.

According to a ninth aspect of the present invention, in the ink jet recording head according to the eighth aspect, the electrothermal converter may generate thermal energy for film boiling the ink.

[0017]

In the photomask of the present invention, by providing a metal film having a high reflectance with respect to the irradiation light on a metal plate having a processing pattern shape, high heat generated by irradiation of a high-power laser beam during processing is prevented. Since the influence can be avoided, the dimensional stability of the processed pattern shape provided on the metal plate can be maintained. Therefore, it is possible to form the ejection port of the inkjet recording head with high precision by laser processing using this high precision photomask. Further, according to the ink jet recording head in which the ink ejection port is formed with high accuracy, the amount and the ejection speed of the ink droplet can be stably obtained, so that the ejection performance such as the accuracy of the ejection droplet landing position and the recording density is improved. It is possible to obtain a high quality recorded image.

[0018]

Embodiments of the photomask of the present invention will be described below with reference to the drawings.

FIG. 1A is a schematic sectional view showing an embodiment of the photomask of the present invention, and FIG. 1B is a schematic plan view of FIG.

In FIGS. 1A and 1B, 1 is a photomask. As shown in (a), this photomask 1 is roughly composed of a rectangular copper plate 2 as a metal plate and an Al film 3 as a metal film formed on one surface of the copper plate 2 by sputtering. In the copper plate 2, holes 250 having a diameter of 90 μ are formed in a straight line at the central portion in the longitudinal direction by etching about 250 holes 4 with a pitch of 210 μ. For this reason, the Al film 3 is formed on one surface of the copper plate 2 excluding the hole 4 to have a thickness of about 0.2 to 0.4 μ.

Here, the reason why the Al film is used as the metal film will be described with reference to Table 1. Table 1 shows S in addition to Al
US304, Ni measurement value of reflectance for irradiation light having a wavelength of 248 nm (value when total reflection is 100), Cu
The data on the coefficient of thermal expansion and the thermal conductivity of the metal to be measured (Al, SUS304, Ni) including is shown. As is clear from Table 1, a copper plate, which is a metal having good thermal conductivity, was used as the metal plate, and K was used on the surface of the copper plate.
By forming an Al film having a high reflectance with respect to the wavelength of the rF laser (wavelength of 248 nm), a highly accurate photomask that can withstand high-power laser irradiation can be manufactured. Al has a thermal expansion coefficient of SUS30.
4. Larger than Ni, with a reflectance of SUS30
4, it is also understood that it is larger than Ni. That is, it can be said that large thermal expansion does not occur if the metal material does not become high in heat because of its high reflectance even when irradiated with laser light.

[0022]

[Table 1]

When the photomask 1 having such a structure is used to perform fine perforation processing on the resin film surface, even if an optical system with a reduction ratio of 1/3 is used, the photomask surface can be formed by the KrF laser. Energy of 100 mJ / cm ² or more is required.

FIG. 2 shows a conventional photomask (SUS, N
9 is a graph showing changes in laser irradiation time and mask temperature during i) and use of the photomask 1 of this example. The mask thickness t is 200 μm, the irradiation conditions are KrF laser (248 nm), and the output is 250 mJ / cm ² , 2
Irradiation was performed with 00 PPS, and the irradiation area was set to 2 mm × 20 mm.

As a result, when 250 holes were simultaneously drilled, the temperature of the conventional photomask (Ni) was raised by 15 ° C. and the temperature of the mask of the present invention was raised by 2 ° C. The total length of each photomask is 52500μ (250 pieces x 210
μ) and the conventional mask (Ni) have a coefficient of thermal expansion of 13.3
Since it is × 10 ^-6 / ° C, the expansion amount is 13.3 × 10 ^-6 ×
52500 μ × 15 ° C. = 10.47 μ, while in the photomask of this embodiment (Al film on Cu plate), Al
Has a large coefficient of thermal expansion, but since the reflectance is large and the temperature rise of the mask is small, the expansion amount is 16.8 × 10 ⁻⁶ × 52.
It becomes 500μ × 2 ° C. = 1.76μ. The photomask of this example is a high-precision photomask with a small thermal expansion.

Next, an embodiment of the ink jet recording head of the present invention manufactured by using the above photomask at the manufacturing stage will be described.

FIG. 3 is a schematic perspective view showing an embodiment of the ink jet recording head of the present invention. The ink jet recording head according to this embodiment has an integrated ink tank,
In addition, it can be detachably attached to an inkjet recording device described later. This ink jet recording head is provided with recesses (hereinafter,
(Grooves), further, a top plate (detailed later) integrally formed with the orifice plate 10, an electrothermal converter (hereinafter referred to as a discharge heater) for generating discharge energy, and an electric signal is supplied to the discharge heater. The recording head main body (not shown) is configured by bonding an Al wiring for the above to a substrate (hereinafter, heater board) formed on the Si substrate by a film forming technique.

In the figure, reference numeral 600 denotes a sub ink tank arranged adjacent to the main body of the recording head, and the sub ink tank 600 and the main body are supported by lids 300 and 800. Furthermore, 1000 is the cartridge body,
Reference numeral 1100 is a lid member of the cartridge body 1000.
An ink tank is built in the cartridge body 1000, and ink is appropriately supplied to the sub ink tank 600.

FIG. 4 is a schematic diagram showing a state in which an orifice plate integrally formed with a top plate is irradiated with excimer laser light from the ink liquid path side to perform orifice processing.
The same elements as those shown in the previous figure are designated by the same reference numerals, and the description thereof will be omitted. In FIG. 4, 5 is Kr
A laser oscillation device that oscillates F excimer laser light,
6 is a wavelength of 248 nm emitted from the laser oscillator 5,
It is a pulsed laser beam with a pulse width of about 15 nanoseconds.
Is a synthetic quartz lens for focusing the laser beam 6. The above-mentioned photomask 1 is used as a projection mask capable of blocking the laser beam 6 in order to form a predetermined orifice in the orifice plate 10 formed integrally with the top plate 8. Since this photomask 1 protects the copper plate 2 having the processed shape pattern by the Al film 3 having a high reflectance with respect to the KrF excimer laser light (wavelength 248 nm), the mask itself is prevented from becoming highly heated and a predetermined pattern is formed. Is excellent in dimensional stability, and by using this, orifices having a predetermined pitch and size can be formed with high precision.

5A and 5B show a heater board 9 according to an embodiment of the ink jet recording head of the present invention.
2A is a plan view and FIG. 2B is a partially enlarged view of FIG.

In FIG. 5, 101 is a heater board main body, 103 is a discharge heater portion, and 104 is a terminal for electrical connection to the outside by wire bonding. Further, 102 is a temperature sensor, which is the discharge heater unit 1.
The discharge heater unit 103 is formed by the same film forming process as 03. The discharge heater unit 103 includes the discharge heater 15
And the wiring 106. Reference numeral 108 is a heat retaining heater for heating the head.

The temperature sensor 102, like the other parts,
Since it is formed by a film forming process similar to that of semiconductors, it is extremely highly accurate, and its conductivity changes with temperature, such as aluminum, titanium, tantalum, tantalum pentoxide, and niobium, which are the constituent materials of other parts. Can be formed with. For example, among these, titanium is a material that can be disposed between the heating resistance layer and the electrode constituting the electrothermal conversion element in order to enhance the adhesion between the electrodes, and tantalum is used as the cavitation resistance of the protective layer on the heating resistance layer. A material that can be placed on top of it to enhance it. In addition, the line width is increased to reduce the process variation, and the meandering shape is used to increase the resistance to reduce the influence of wiring resistance and the like.

Similarly, the heat retention heater 108 is made of the same material (for example, HfB2) as the heating resistance layer of the discharge heater 15.
However, it may be formed by using other material forming the heater board, such as aluminum, titanium, tantalum, or the like.

FIG. 6 is a schematic perspective view showing a structural example of the top plate 8 in this embodiment. The top plate 8 of this example has a desired number of ink liquid passage grooves 14 and corresponding ink ejection ports (orifices) 11 formed in the orifice plate 10 (only two are shown in the figure for simplification). ) And the orifice plate 10 is integrally provided.
The top plate 8 is made of a resin such as polysulfone, polyether sulfone, polyphenylene oxide, or polypropylene having excellent ink resistance, and is integrally molded together with the orifice plate 10 in a mold.

Next, a method of forming the ink liquid passage groove 14 and the orifice 11 will be described.

Regarding the ink liquid passage groove, it is possible to form the liquid passage groove 14 on the top plate 8 by molding a resin with a mold in which a fine groove having an opposite pattern is formed by a method such as cutting.

Regarding the formation of the orifices, the molding is carried out without the orifices 11 in the mold, and the positions where the orifices should be formed are shown in FIG. 4 from the ink liquid passage side of the orifice plate 10 (the upper right side in FIG. 6). The excimer laser light is irradiated by the laser oscillation device 5 shown in FIG. 1 to remove and evaporate the resin to form the orifice 11.

The details of the orifice formation are shown in FIG. Figure 7
FIG. 4 is a schematic diagram showing an incident angle of excimer laser light with which a predetermined position of the orifice plate 10 is irradiated. The excimer laser light 6 is applied to the orifice plate 10 from the ink liquid path 14 side through the photomask 1 described above. Further, the excimer laser light 6 is absorbed at one side θ1 = 2 degrees with respect to the optical axis 13, and is irradiated with the optical axis 13 inclined by θ2 = 10 degrees from the vertical direction with respect to the orifice plate 10.

As described above, by irradiating the laser beam from the ink liquid path side, the cross-sectional area of the tapered orifice becomes a shape that decreases in the ink ejection direction. Here, the excimer laser light used in this embodiment will be described.

This excimer laser is a laser capable of oscillating ultraviolet light, has high intensity and good monochromaticity, has directivity, can perform short pulse oscillation, and has a very large energy density by focusing with a lens. It has advantages such as

The excimer laser oscillator discharge-excites a mixed gas of a rare gas and a halogen to generate a short pulse (15
It is a device capable of oscillating ultraviolet light of up to 35 nanoseconds,
F laser, XeCl laser, and ArF laser are often used. The oscillation energy of these is several 100 mJ / pulse, and the pulse repetition frequency is 30 to 1000 Hz.

When the polymer resin surface is irradiated with high-intensity short-pulse ultraviolet light such as this excimer laser light, the irradiated portion is instantaneously decomposed and scattered with plasma emission and impact noise.
process (APD) process occurs, which allows processing of the polymer resin.

In this way, when the processing accuracy by the excimer laser is compared with that by another laser, for example, when a polyimide (PI) film is irradiated with laser light as an excimer laser and other YAG laser light and CO2 laser light, Since the wavelength that absorbs PI light is in the UV region, a clean hole is opened by the KrF laser, but the YAG laser light that is not in the UV region opens the hole, but the edge surface is rough, and the infrared CO2 laser light surrounds the hole. A crater will be generated.

Metals such as SUS, opaque ceramics, Si, etc. are not affected by the irradiation of excimer laser light in the atmosphere of the atmosphere, and thus can be used as a mask material in processing by excimer laser.

FIG. 8 is a schematic perspective view of the head main body of the ink jet recording head of the present invention constructed by joining the above-mentioned heater board 9 and top plate 8. As shown in FIG.
The heater board 9 having the discharge heater 15 and the like is abutted against and joined to an orifice plate 10 having an orifice already formed by laser processing using the photomask 1 to obtain a recording head main body.

9 and 10 show another structural example of the top plate 8 in the ink jet recording head of the present invention. FIG. 9 is a schematic perspective view, and FIG. 10 is an XX plane of FIG. FIG. The top plate 8 in this example is formed integrally with the orifice plate 10. The orifice 11 is opened in the vertical direction with respect to the inclined surface of the orifice plate 10, and is 45 degrees (= θ2) from the ink liquid passage groove 14.
Is doing. In this way, when the orifice 11 is formed by irradiating the laser light from the ink liquid path side, it is necessary to change the irradiation angle appropriately according to the shape of the top plate or the like.

In the above-mentioned orifice forming method, the orifice plate and the top plate were integrally formed, and the orifice was formed before joining to the heater board. However, the orifice is formed after joining. Of course, it is okay.

The main body of the ink jet recording head described above can be obtained in the cartridge form shown in FIG. 3, and can be applied to the ink jet recording apparatus shown in FIG.

In FIG. 11, reference numeral 80 denotes the cartridge shown in FIG. 3, and this cartridge 80 has a pressing member 81.
The carriage 15 is fixed on the carriage 15 by means of which the carriage 15 can reciprocate in the longitudinal direction (main scanning direction) along the shaft 21. Positioning with respect to the carriage 15 can be performed by, for example, a hole provided in the lid and a dowel provided on the carriage 15 side. Further, the electrical connection may be achieved by connecting the connector on the carriage 15 to the connection pad provided on the wiring board.

The ink ejected from the recording head reaches the recording medium 18 whose recording surface is regulated by the platen 19 at a minute distance from the recording head and forms an image on the recording medium 18.

An ejection signal corresponding to image data is supplied to the recording head from an appropriate data supply source through the cable 16 and a terminal connected to the cable 16. Cartridge 80
Can be provided in a number of 1 to 2 (only two are shown in the figure) depending on the ink color to be used.

Further, in FIG. 11, 17 is a carriage motor for scanning the carriage 15 along the shaft 21, and 22 is a wire for transmitting the driving force of the motor 17 to the carriage 15. A feed motor 20 is connected to the platen roller 19 to convey the recording medium 18.

(Others) The present invention is particularly provided with a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for ejecting ink even in the ink jet recording system. The present invention brings about excellent effects in a recording head and a recording apparatus of the type in which the state of ink is changed by the heat energy. This is because such a system can achieve high density recording and high definition recording.

Regarding the typical structure and principle thereof, see, for example, US Pat. No. 4,723,129 and US Pat. No. 4,740.
What is done using the basic principles disclosed in 796 is preferred. This method is a so-called on-demand type,
It can be applied to any of the continuous type, but especially in the case of the on-demand type, it can be applied to the sheet holding the liquid (ink) or the electrothermal converter arranged corresponding to the liquid path. By applying at least one drive signal corresponding to the recording information and giving a rapid temperature rise exceeding nucleate boiling, heat energy is generated in the electrothermal converter, and film boiling is caused on the heat acting surface of the recording head. Liquid (ink) corresponding to this drive signal in a one-to-one correspondence
It is effective because bubbles can be formed inside. The liquid (ink) is ejected through the ejection opening by the growth and contraction of the bubble to form at least one droplet. It is more preferable to make this drive signal into a pulse shape because bubbles can be immediately and appropriately grown and contracted, so that liquid (ink) ejection with excellent responsiveness can be achieved. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

As the constitution of the recording head, in addition to the combination constitution of the ejection port, the liquid passage, and the electrothermal converter (the straight liquid passage or the right-angled liquid passage) as disclosed in the above-mentioned respective specifications. US Pat. No. 4,558,333, US Pat. No. 4,558,333, which discloses a configuration in which a heat acting portion is arranged in a bending region.
The structure using the specification of No. 59600 is also included in the present invention. In addition, Japanese Unexamined Patent Publication No. 59-123670 discloses a configuration in which a common slit is used as a discharge portion of the electrothermal converter for a plurality of electrothermal converters, and an opening for absorbing a pressure wave of thermal energy is provided. The effect of the present invention is effective even if the configuration corresponding to the ejection portion is disclosed in JP-A-59-138461. That is, according to the present invention, recording can be surely and efficiently performed regardless of the form of the recording head.

Further, the present invention can be effectively applied to a full-line type recording head having a length corresponding to the maximum width of a recording medium which can be recorded by the recording apparatus. Such a recording head may have a configuration that satisfies the length by a combination of a plurality of recording heads or a configuration as one recording head integrally formed.

In addition, even in the case of the serial type as in the above example, the recording head fixed to the apparatus main body, or the electrical connection with the apparatus main body and the ink from the apparatus main body by being attached to the apparatus main body. The present invention is also effective when a replaceable chip-type recording head that can be supplied or a cartridge-type recording head in which an ink tank is integrally provided in the recording head itself is used.

Further, as the constitution of the recording apparatus of the present invention, it is preferable to add ejection recovery means for the recording head, preliminary auxiliary means, etc. because the effects of the present invention can be further stabilized. Specifically, heating is performed by using a capping unit, a cleaning unit, a pressure or suction unit for the recording head, an electrothermal converter or a heating element other than this, or a combination thereof. Examples thereof include a preliminary heating unit for performing the discharge and a preliminary discharge unit for performing discharge different from the recording.

Regarding the type and number of recording heads to be mounted, for example, only one is provided corresponding to a single color ink, or a plurality of inks having different recording colors and densities are supported. A plurality of pieces may be provided. That is, for example, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but it may be either the recording head is integrally formed or a plurality of combinations may be used. The present invention is also extremely effective for an apparatus provided with at least one of full-color recording modes by color mixing.

In addition, in the above-described embodiments of the present invention, the ink is described as a liquid, but an ink that solidifies at room temperature or lower and that softens or liquefies at room temperature may be used. Or, in the inkjet method, it is common to control the temperature of the ink itself within the range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is within the stable ejection range. Sometimes, a liquid ink may be used. In addition, the temperature rise due to thermal energy is positively prevented by using it as the energy of the state change from the solid state of the ink to the liquid state, or in order to prevent the evaporation of the ink, it is solidified and heated in the standing state. You may use the ink liquefied by. In any case, by applying heat energy such as ink that is liquefied by applying heat energy according to the recording signal and liquid ink is ejected or that begins to solidify when it reaches the recording medium. The present invention can be applied to the case where an ink having a property of being liquefied for the first time is used. In this case, the ink is
JP-A-54-56847 or JP-A-60-7
As described in Japanese Patent No. 1260, it may be configured to face the electrothermal converter in a state of being held as a liquid or a solid in the concave portion or the through hole of the porous sheet. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

In addition, as the form of the ink jet recording apparatus of the present invention, in addition to the one used as an image output terminal of information processing equipment such as a computer, a copying apparatus combined with a reader or the like, and a facsimile apparatus having a transmitting / receiving function can be used. It may be a form or the like.

[0062]

As described above, according to the photomask of the present invention, a metal film having a high reflectance for irradiation light is provided on a metal plate having a processing pattern shape. Since the influence of high heat generated by the irradiation of the laser beam can be avoided, it is possible to maintain the dimensional stability of the processing pattern shape provided on the metal plate. Therefore, it is possible to form the ejection port of the inkjet recording head with high precision by laser processing using this high precision photomask. Further, according to the ink jet recording head in which the ink ejection port is formed with high accuracy, the amount and the ejection speed of the ink droplet can be stably obtained, so that the ejection performance such as the accuracy of the ejection droplet landing position and the recording density is improved. It is possible to obtain a high quality recorded image.

[Brief description of drawings]

1A and 1B show an embodiment of a photomask of the present invention, in which FIG. 1A is a sectional view and FIG. 1B is a plan view.

FIG. 2 is a graph showing changes in laser irradiation time and mask temperature when the conventional photomask and the photomask shown in FIG. 1 are used.

FIG. 3 is a schematic perspective view showing an embodiment of the inkjet recording head of the present invention.

FIG. 4 is a schematic diagram showing how an orifice plate integrally formed with a top plate is irradiated with excimer laser light from the ink liquid path side to perform orifice processing.

5A and 5B show the structure of a heater board according to an embodiment of the inkjet recording head of the present invention, wherein FIG. 5A is a plan view and FIG. 5B is a partially enlarged view of FIG.

FIG. 6 is a schematic perspective view showing a configuration example of a top plate according to an embodiment of the inkjet recording head of the present invention.

FIG. 7 is a schematic diagram showing an incident angle of excimer laser light with which a predetermined position of an orifice plate is irradiated.

FIG. 8 is a schematic perspective view of a head main body of an inkjet recording head of the present invention configured by joining a heater board and a top plate.

FIG. 9 is a schematic perspective view showing another configuration example of the top plate in the inkjet recording head of the present invention.

10 is a schematic cross-sectional view taken along the line XX of FIG.

FIG. 11 is a schematic perspective view showing an example of an inkjet recording apparatus in which an embodiment of the inkjet recording head of the present invention can be mounted.

[Explanation of symbols]

 1 Photomask 2 Copper Plate (Metal Plate) 3 Al Film (Metal Film) 4 Hole (Processing Pattern Shape) 5 Excimer Laser Oscillator 6 Excimer Laser Light 7 Focusing Lens 8 Top Plate 9 Heater Board 10 Orifice Plate

Claims (9)

[Claims] 1. A photomask comprising: a metal plate having a processed pattern shape; and a metal film formed on the metal plate and having a high reflectance for irradiation light. 2. The photomask according to claim 1, wherein
The photomask, wherein the metal plate has high thermal conductivity. 3. The photomask according to claim 1, wherein the metal film has a high reflectance for ultraviolet light which is irradiation light. 4. A substrate on which an ejection energy generating element for generating ejection energy used for ejecting ink is formed, and an ink liquid corresponding to a portion where the ejection energy element is arranged by bonding to the substrate. In a method for manufacturing an ink jet recording head, which comprises a top plate having a recess for forming a passage, and an ejection port forming member in which an ejection port for ejecting ink is formed in communication with the ink liquid channel, The photo according to any one of claims 1 to 3, when the discharge port is formed by irradiating excimer laser light from the recess side after the top plate and the discharge port forming member are integrated. A method for manufacturing an ink jet recording head, which comprises using a mask. 5. The method of manufacturing an inkjet recording head according to claim 4, wherein the top plate and the ejection port forming member are integrally formed. 6. An inkjet recording head manufactured by the method for manufacturing an inkjet recording head according to claim 4. 7. The ink jet recording head according to claim 6, wherein the ejection energy generating element has a form in which thermal energy is applied to the ink. 8. The ink jet recording head according to claim 7, wherein the ejection energy generating element is an electrothermal converter. 9. The ink jet recording head according to claim 8, wherein the electrothermal converter generates thermal energy for film boiling the ink.