JPH0766077A - Laminated electronic component - Google Patents
Laminated electronic componentInfo
- Publication number
- JPH0766077A JPH0766077A JP23244093A JP23244093A JPH0766077A JP H0766077 A JPH0766077 A JP H0766077A JP 23244093 A JP23244093 A JP 23244093A JP 23244093 A JP23244093 A JP 23244093A JP H0766077 A JPH0766077 A JP H0766077A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- ground
- signal
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003985 ceramic capacitor Substances 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 4
- 230000011664 signaling Effects 0.000 abstract 4
- 239000003990 capacitor Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003405 preventing effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、ノイズフィルタ等とし
て用いられ、複数チャンネルの信号用電極が内蔵された
積層貫通形セラミックコンデンサ等の積層電子部品に係
り、特にそのクロスト−ク防止構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multilayer electronic component such as a multilayer through-type ceramic capacitor which is used as a noise filter or the like and has a plurality of channels of signal electrodes built therein, and more particularly to a crosstalk preventing structure thereof.
【0002】[0002]
【従来の技術】積層貫通形セラミックコンデンサは、信
号用内部電極とグランド用内部電極とを重ねて焼成し、
側面に信号用外部電極とグランド用外部電極を形成して
なる。このような積層貫通形コンデンサは、共振周波数
が高いため、近来の高周波化に応えられるものである。
そしてこのような積層貫通形コンデンサとして、内部に
複数のチャンネル用の信号用内部電極を形成したもの
が、例えば特公平4−37567号公報に提案されてい
る。2. Description of the Related Art A multilayer feedthrough type ceramic capacitor has a signal internal electrode and a ground internal electrode stacked and fired.
A signal external electrode and a ground external electrode are formed on the side surface. Since such a multilayer feedthrough capacitor has a high resonance frequency, it can meet the recent demand for higher frequencies.
As such a multilayer feedthrough capacitor, a capacitor having signal internal electrodes for a plurality of channels formed therein is proposed in, for example, Japanese Patent Publication No. 4-37567.
【0003】[0003]
【発明が解決しようとする課題】しかし、このような従
来構造の積層貫通形コンデンサでは、小型化を図るた
め、異なるチャンネルの信号用内部電極どうしの間隔を
狭くすると、信号用内部電極どうしの間でクロスト−ク
が発生し、また、特性が劣化するという問題点があっ
た。However, in the multilayer feedthrough capacitor having such a conventional structure, if the distance between the signal internal electrodes of different channels is narrowed in order to reduce the size of the capacitor, the signal internal electrodes will be separated from each other. However, there is a problem that crosstalk occurs and the characteristics are deteriorated.
【0004】本発明は、上記した実情に鑑み、複数のチ
ャンネルの信号用内部電極を有する積層貫通形セラミッ
クコンデンサ等の積層電子部品において、信号用内部電
極どうしの間でのクロスト−クや、特性の劣化を防止で
き、小型化が図れる構造の積層電子部品を提供すること
を目的とする。In view of the above situation, the present invention provides a multilayer electronic component such as a multilayer feedthrough ceramic capacitor having a plurality of channels of signal internal electrodes, a crosstalk between the signal internal electrodes, and characteristics. It is an object of the present invention to provide a laminated electronic component having a structure capable of preventing deterioration of the device and achieving miniaturization.
【0005】[0005]
【課題を解決するための手段】本発明は、上記目的を達
成するため、前記各信号用内部電極の間に、グランド用
内部電極と信号用内部電極との間の誘電体より低誘電率
の誘電体を設けたことを特徴とする。さらに本発明は、
前記低誘電率の誘電体内にグランド用内部電極を通した
ことを特徴とする。In order to achieve the above-mentioned object, the present invention has a dielectric constant lower than that of a dielectric between a ground internal electrode and a signal internal electrode between each signal internal electrode. A feature is that a dielectric is provided. Further, the present invention is
The internal electrode for ground is passed through the low dielectric constant dielectric body.
【0006】[0006]
【作用】本発明においては、信号用内部電極間の低誘電
率の誘電体により、信号用内部電極間の容量結合が弱ま
り、クロストークが防止される。低誘電率の誘電体にグ
ランド用内部電極を通したものにおいては、その内部電
極によりシールド作用も加わり、クロストーク防止作用
が向上する。In the present invention, the dielectric material having a low dielectric constant between the signal internal electrodes weakens the capacitive coupling between the signal internal electrodes and prevents crosstalk. In the case where a grounding internal electrode is passed through a dielectric having a low dielectric constant, the internal electrode also has a shielding effect and improves the crosstalk preventing effect.
【0007】[0007]
【実施例】図1(A)は本発明による積層電子部品の一
実施例である積層貫通形コンデンサを示す斜視図、同
(B)はその等価回路図である。また、図2(A)は図
1(A)のX−X断面図、図2(B)は図2(A)のY
−Y断面図である。これらの図に示すように、本実施例
の積層貫通形コンデンサ1は、セラミックでなる誘電体
2の内部に、これを貫通する例えば銀あるいは銀−パラ
ジウム等の導体でなる上下2層のグランド用内部電極
3、3と、該グランド用内部電極3、3間に誘電体2を
介して挟まれるグランド用内部電極3と同様の材質の導
体でなる第1、第2の信号用内部電極4、5とを有す
る。本実施例は、該第1の信号用内部電極4と第2の信
号用内部電極5との間に、誘電体2より低誘電率の誘電
体7を、積層によりグランド用内部電極3、3間にわた
って形成している。そしてそれぞれの内部電極の露出端
部に接続させて外部電極A〜Fを該誘電体1、7の外面
に形成したものである。なお、主たる誘電体2として
は、例えば比誘電率が10以上の酸化チタン系、チタン
酸カルシウム系、チタン酸ストロンチウム系、チタン酸
バリウム系その他のものが用いられ、低誘電率の誘電体
7としては、比誘電率が10以下のアルミナやケイ酸マ
グネシウム系のもの等を用いることができる。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1A is a perspective view showing a multilayer feedthrough capacitor which is an embodiment of a multilayer electronic component according to the present invention, and FIG. 1B is an equivalent circuit diagram thereof. 2A is a cross-sectional view taken along line XX of FIG. 1A, and FIG. 2B is Y of FIG.
It is a -Y sectional view. As shown in these figures, the multilayer feedthrough capacitor 1 according to the present embodiment is provided with a dielectric 2 made of ceramic, and two upper and lower ground layers made of a conductor such as silver or silver-palladium penetrating the dielectric 2. Internal electrodes 3 and 3, and first and second signal internal electrodes 4 made of the same material as the ground internal electrode 3 sandwiched between the ground internal electrodes 3 and 3 via a dielectric 2. 5 and. In this embodiment, a dielectric 7 having a lower dielectric constant than the dielectric 2 is provided between the first signal internal electrode 4 and the second signal internal electrode 5, and the ground internal electrodes 3 and 3 are laminated. It has formed over the course of. The external electrodes A to F are formed on the outer surfaces of the dielectrics 1 and 7 by connecting to the exposed ends of the respective internal electrodes. It should be noted that, as the main dielectric 2, for example, titanium oxide-based, calcium titanate-based, strontium titanate-based, barium titanate-based, and others having a relative dielectric constant of 10 or more are used, and the low dielectric constant dielectric 7 is used. Can be made of alumina or magnesium silicate having a relative dielectric constant of 10 or less.
【0008】次に、図3により本実施例の積層貫通形コ
ンデンサの製造工程を1個分について説明する。まず、
セラミック等の誘電体シ−トまたは印刷により誘電体2
aを形成し(a)、その上に導体ぺ−ストでなるグラン
ド用内部電極3を印刷する(b)。この場合、該グラン
ド用内部電極3は、誘電体2aの全長にわたって形成す
る。次に主たる誘電体2bとこれより低誘電率の誘電体
7aとを並べてシートまたは印刷により同時または別々
に積層する工程(c)、(d)を、グランド用内部電極
3と信号用内部電極4、5との間隔に相当する厚みにな
るまで繰り返す。Next, one manufacturing process of the multilayer feedthrough capacitor of this embodiment will be described with reference to FIG. First,
Dielectric sheet 2 such as ceramic sheet or printed by printing
a is formed (a), and the grounding internal electrode 3 made of a conductor paste is printed thereon (b). In this case, the grounding internal electrode 3 is formed over the entire length of the dielectric 2a. Next, the steps (c) and (d) in which the main dielectric 2b and the dielectric 7a having a lower dielectric constant are arranged side by side or simultaneously by sheet or printing are carried out. Repeat until the thickness is equivalent to the distance from 5.
【0009】次に、これらの誘電体2bの上に第1、第
2の信号用内部電極4、5を積層する(e)。その後、
前記(c)、(d)の工程と同様に、低誘電率の誘電体
7bと主たる誘電体2cとを積層する工程(f)、
(g)を(c)、(d)の工程数と同数繰り返す。次
に、該誘電体2c、7bに重ねてグランド用内部電極3
を形成し(h)、その上に上面被覆用の誘電体2dを積
層する(i)。Next, the first and second signal internal electrodes 4, 5 are laminated on these dielectrics 2b (e). afterwards,
Similar to the steps (c) and (d), the step (f) of stacking the low dielectric constant dielectric 7b and the main dielectric 2c,
(G) is repeated as many times as the number of steps of (c) and (d). Next, the internal electrodes 3 for ground are stacked on the dielectrics 2c and 7b.
Is formed (h), and the dielectric 2d for covering the upper surface is laminated thereon (i).
【0010】このようにして得られた積層体を圧着し、
多数取りの場合には1個分ずつに切断した後、焼成し、
さらに、図1(A)に示すように、焼付けやメッキ等に
より外部電極A〜Gを形成する。すなわち、第1の信号
用内部電極4の露出端部にそれぞれ接続させて信号用外
部電極A、Bを形成し、第2の信号用内部電極5の露出
端部にそれぞれ接続させて信号用外部電極C、Dを形成
し、グランド用内部電極3の露出端部3a、3aにそれ
ぞれ接続させて電極E、Fを形成する。The laminate thus obtained is pressure bonded,
In case of taking a large number of pieces, cut into pieces and fire.
Further, as shown in FIG. 1A, the external electrodes A to G are formed by baking, plating, or the like. That is, the signal external electrodes A and B are formed by connecting to the exposed ends of the first signal internal electrode 4, respectively, and are connected to the exposed ends of the second signal internal electrode 5 respectively. The electrodes C and D are formed and are connected to the exposed ends 3a and 3a of the internal electrode 3 for ground to form electrodes E and F, respectively.
【0011】このように作製された積層貫通形コンデン
サにおいては、第1の信号用内部電極4とその上下に対
向するグランド用内部電極3、3との間で、図1(B)
の等価回路図に示す貫通形コンデンサC1が形成され、
第2の信号用内部電極5とその上下に対向するグランド
用内部電極3、3との間で貫通形コンデンサC2が形成
される。また、第1の信号用内部電極4と第2の信号用
内部電極5との間に低誘電率の誘電体7が介在する。In the multilayer feedthrough capacitor thus manufactured, the first signal inner electrode 4 and the ground inner electrodes 3 and 3 which are vertically opposed to the first signal inner electrode 4 are connected to each other as shown in FIG.
The feedthrough capacitor C1 shown in the equivalent circuit diagram of
A feedthrough capacitor C2 is formed between the second signal internal electrode 5 and the ground internal electrodes 3 and 3 which are vertically opposed to the second signal internal electrode 5. Further, a dielectric 7 having a low dielectric constant is interposed between the first signal inner electrode 4 and the second signal inner electrode 5.
【0012】このように、隣接する信号用内部電極4、
5間に低誘電率の誘電体7を介在させることにより、こ
れらの信号用内部電極4、5間の容量による結合が実質
的に無くなり、これらの間のクロスト−クが防止され、
また、内部電極4、5間の作用による特性の劣化を防止
できる。As described above, the adjacent signal internal electrodes 4,
By interposing the dielectric 7 having a low dielectric constant between 5 and 5, the coupling due to the capacitance between these signal internal electrodes 4 and 5 is substantially eliminated, and crosstalk between them is prevented.
In addition, it is possible to prevent deterioration of characteristics due to the action between the internal electrodes 4 and 5.
【0013】図4(A)は本発明による積層電子部品の
他の実施例である積層貫通形コンデンサを示す斜視図、
同(B)はその等価回路図である。また、図5(A)は
図4(A)のW−W断面図、図5(B)は図5(A)の
Z−Z断面図である。本実施例においては、信号用内部
電極4、5の間に横並びにグランド用内部電極6を、低
誘電率の誘電体7に通して設けたものである。グランド
用内部電極6は、その両端を外部電極G、Hを介してグ
ランド用内部電極3に接続される。FIG. 4A is a perspective view showing a multilayer feedthrough capacitor which is another embodiment of the multilayer electronic component according to the present invention,
(B) is an equivalent circuit diagram thereof. 5A is a WW cross-sectional view of FIG. 4A, and FIG. 5B is a ZZ cross-sectional view of FIG. 5A. In this embodiment, the horizontal internal electrodes 6 are provided between the signal internal electrodes 4 and 5 through the low dielectric constant dielectric 7. Both ends of the ground internal electrode 6 are connected to the ground internal electrode 3 via the external electrodes G and H.
【0014】本実施例のものは、図6の工程図中、
(e)に示すように、図3の工程における信号用内部電
極4、5の形成工程において、同時にグランド用内部電
極6を形成することによって作製される。また、グラン
ド用内部電極3には、外部電極G、Hに接続するための
突部3bが形成される。In this embodiment, in the process chart of FIG.
As shown in (e), it is manufactured by simultaneously forming the grounding internal electrode 6 in the process of forming the signal internal electrodes 4 and 5 in the process of FIG. Further, the ground internal electrode 3 is formed with a protrusion 3b for connecting to the external electrodes G and H.
【0015】本実施例においては、図4(B)に示すよ
うに、信号用内部電極4、5とグランド用内部電極6と
の間にコンデンサC3、C4が形成された形となり、こ
れによりさらに信号用内部電極4、5間のクロストーク
防止効果が高まる。In the present embodiment, as shown in FIG. 4B, capacitors C3 and C4 are formed between the signal inner electrodes 4 and 5 and the ground inner electrode 6, which further increases the capacitance. The crosstalk prevention effect between the signal internal electrodes 4 and 5 is enhanced.
【0016】なお、上記実施例においては、信号用内部
電極が2本(2チャンネル)の場合を示したが、同じ層
に3本以上の信号用内部電極を形成してチャンネル数を
増やす場合には、各信号用内部電極どうしの間にそれぞ
れグランド用内部電極を形成すればよい。また、図3の
製造工程または図6の製造工程中、(b)〜(g)の工
程を繰り返すことにより、より多数のチャンネルの積層
貫通形コンデンサを作製することができる。In the above embodiment, the case where the number of signal internal electrodes is two (two channels) is shown, but when the number of channels is increased by forming three or more signal internal electrodes in the same layer. In this case, the ground inner electrode may be formed between the respective signal inner electrodes. Further, by repeating the steps (b) to (g) in the manufacturing process of FIG. 3 or the manufacturing process of FIG. 6, a multilayer feedthrough capacitor having a larger number of channels can be manufactured.
【0017】本発明は、インダクタ等を積層構造で組合
わせたものや、基板としてIC等電子部品を搭載するも
のにも適用できる。また、グランド用電極3は必ずしも
誘電体2内に埋設する必要はなく、例えば樹脂層によっ
てグランド用電極3を保護する構造でもよい。The present invention can be applied to a combination of inductors and the like in a laminated structure, and a board on which an electronic component such as an IC is mounted. Further, the ground electrode 3 does not necessarily have to be embedded in the dielectric 2, but may have a structure in which the ground electrode 3 is protected by a resin layer, for example.
【0018】[0018]
【発明の効果】請求項1によれば、小型化に伴い信号用
内部電極どうしの間隔が狭くなっても、隣接する信号用
内部電極間に介在させた低誘電率の誘電体により、信号
用内部電極間のクロスト−クが防止されると共に、特性
の劣化を防止することができる。また、積層電子部品の
小型化に寄与することができる。請求項2によれば、低
誘電率の誘電体に加えて、グランド用内部電極を信号用
内部電極間に介在させたので、さらにクロストーク防止
効果が高まる。According to the first aspect of the present invention, even if the distance between the signal internal electrodes becomes narrower due to the miniaturization, the signal dielectric is interposed by the low dielectric constant dielectrics interposed between the adjacent signal internal electrodes. It is possible to prevent crosstalk between the internal electrodes and prevent deterioration of characteristics. In addition, it is possible to contribute to miniaturization of the laminated electronic component. According to the second aspect, in addition to the dielectric having a low dielectric constant, the ground internal electrode is interposed between the signal internal electrodes, so that the crosstalk prevention effect is further enhanced.
【図1】(A)は該実施例の斜視図、(B)はその等価
回路図である。FIG. 1A is a perspective view of the embodiment, and FIG. 1B is an equivalent circuit diagram thereof.
【図2】(A)は図1(A)のX−X断面図、(B)は
図2(A)のY−Y断面図である。2A is a sectional view taken along line XX of FIG. 1A, and FIG. 2B is a sectional view taken along line YY of FIG. 2A.
【図3】本実施例の製造工程を示す図である。FIG. 3 is a diagram showing a manufacturing process of the present embodiment.
【図4】(A)は該実施例の斜視図、(B)はその等価
回路図である。4A is a perspective view of the embodiment, and FIG. 4B is an equivalent circuit diagram thereof.
【図5】(A)は図4(A)のW−W断面図、(B)は
図5(A)のZ−Z断面図である。5A is a WW sectional view of FIG. 4A, and FIG. 5B is a ZZ sectional view of FIG. 5A.
【図6】図4、図5に示す実施例の製造工程を示す図で
ある。FIG. 6 is a diagram showing a manufacturing process of the embodiment shown in FIGS. 4 and 5;
1 貫通形コンデンサ 2 誘電体 3 グランド用内部電極 4、5 信号用内部電極 6 グランド用内部電極 7 誘電体2より誘電率の低い誘電体 A〜H 外部電極 C1〜C4 コンデンサ 1 Through Type Capacitor 2 Dielectric 3 Internal Electrode for Ground 4, 5 Internal Electrode for Signal 6 Internal Electrode for Ground 7 Dielectric with Lower Permittivity than Dielectric 2 A to H External Electrodes C1 to C4 Capacitors
Claims (2)
体と前記信号用内部電極に誘電体を介して対向するグラ
ンド用電極とを有する積層電子部品において、前記各信
号用内部電極の間に、グランド用内部電極と信号用内部
電極との間の誘電体より低誘電率の誘電体を設けたこと
を特徴とする積層電子部品。1. A laminated electronic component having a plurality of channels of signal internal electrodes, a dielectric, and a ground electrode facing the signal internal electrodes with a dielectric interposed between the signal internal electrodes. A laminated electronic component characterized in that a dielectric having a dielectric constant lower than that of the dielectric between the ground internal electrode and the signal internal electrode is provided.
内にグランド用内部電極を通したことを特徴とする積層
電子部品。2. The laminated electronic component according to claim 1, wherein an internal electrode for ground is passed through the dielectric having a low dielectric constant.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23244093A JP3304171B2 (en) | 1993-08-25 | 1993-08-25 | Multilayer feedthrough capacitor array |
Applications Claiming Priority (1)
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JP23244093A JP3304171B2 (en) | 1993-08-25 | 1993-08-25 | Multilayer feedthrough capacitor array |
Publications (2)
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JPH0766077A true JPH0766077A (en) | 1995-03-10 |
JP3304171B2 JP3304171B2 (en) | 2002-07-22 |
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JP23244093A Expired - Fee Related JP3304171B2 (en) | 1993-08-25 | 1993-08-25 | Multilayer feedthrough capacitor array |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003100552A (en) * | 2001-09-20 | 2003-04-04 | Murata Mfg Co Ltd | Three-terminal ceramic capacitor |
US8320100B2 (en) | 2009-04-13 | 2012-11-27 | Sony Corporation | Varactor element and electronic device |
KR101401269B1 (en) * | 2006-12-13 | 2014-06-19 | 티디케이가부시기가이샤 | Feedthrough capacitor array |
-
1993
- 1993-08-25 JP JP23244093A patent/JP3304171B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003100552A (en) * | 2001-09-20 | 2003-04-04 | Murata Mfg Co Ltd | Three-terminal ceramic capacitor |
JP4682491B2 (en) * | 2001-09-20 | 2011-05-11 | 株式会社村田製作所 | 3-terminal ceramic capacitor |
KR101401269B1 (en) * | 2006-12-13 | 2014-06-19 | 티디케이가부시기가이샤 | Feedthrough capacitor array |
US8320100B2 (en) | 2009-04-13 | 2012-11-27 | Sony Corporation | Varactor element and electronic device |
Also Published As
Publication number | Publication date |
---|---|
JP3304171B2 (en) | 2002-07-22 |
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