JPH0613635A - Solar cell and solar cell module - Google Patents

Abstract

PURPOSE:To provide a thin film solar cell having uniform and excellent characteristics over a large area. CONSTITUTION:In a p-i-n type or p-n type solar cell built up on a substrate, a p-type or n-type semiconductor layer 105 formed on a light receiving side is made of non-single-crystal material and the sheet resistance of the semiconductor layer 105 is not less than 10OMEGA/(square) and not larger than 500OMEGA/(square).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solar cell, and more particularly to a structure of a solar cell which is uniform and has good characteristics over a large area.

The present invention relates to a solar cell module, and more particularly to a solar cell module attached to a building or structure such as a roof of a house.

[0003]

2. Description of the Related Art First, a conventional technique relating to the solar cell of the present invention will be described. A solar cell, which is a photoelectric conversion element that converts sunlight into electric energy, has been attracting attention as alternative energy for oil. Conventionally, a solar cell that has been developed and put into practical use is to control valence electrons of a silicon wafer and form a layer having a conductivity type opposite to the conductivity type of the valence-controlled wafer on the wafer. Pn
A single crystal silicon solar cell provided with a junction, a structure in which a valence-controlled layer, a neutral layer, and a layer having a conductivity type opposite to that of the valence-controlled layer are laminated on a substrate. Having pin type amorphous silicon solar cell, n type Cd
II-VI group solar cell using S and p-type CdTe, n-type G
III-V group solar cells using aAs and p-type GaAs can be cited. In such a solar cell, it is usually practiced to prevent reflection of light on the surface of the solar cell and effectively utilize sunlight by laminating an antireflection layer on the light incident side. In single crystal silicon solar cells, SiO ₂ , TiO ₂ , TaO _5, etc. are used as the material for such an antireflection layer. On the other hand, in a pin type or pn type solar cell using amorphous silicon,
The specific resistance ρ of the p-layer or the n-layer as the surface layer is 10 ² Ωcm
And 0.1 to 1 Ωcm of a single crystal silicon solar cell
Since it has a higher resistance than the sheet resistance Rs, the sheet resistance Rs becomes large, and a structure in which currents flow in parallel on the surface of the p layer or n layer cannot be used. A desirable value of the sheet resistance Rs is usually about 100Ω / □, though it depends on the grid design. Therefore, it is common to stack a transparent conductive film having a low sheet resistance Rs on the p-layer or the n-layer on the light incident side. Such a transparent conductive film is designed to simultaneously function as an antireflection film. Materials having such functions include ITO and S which are oxides of indium and tin.
nO ₂ , In ₂ O _{3 and the} like are preferably used. For the method for producing these transparent conductive films, a suitable method is selected depending on the shape and size of the substrate, the mass production scale, desired electrical characteristics and optical characteristics, and the sputtering method, electron beam method, The vapor deposition method, the ion plating method, etc. are used industrially. When stacking such a transparent conductive film on a solar cell, the spectral sensitivity of an amorphous silicon thin film solar cell is usually 500 nm.
Since it takes a maximum value for a wavelength of from 600 nm to 600 nm, the thickness of the transparent conductive film is designed so that the reflectance becomes minimum at this wavelength and the film effectively functions as an antireflection layer. Although this thickness depends on the refractive index of the transparent conductive film material, it is approximately several 1
It is 00Å. Furthermore, the specific resistance ρ required for the transparent conductive film is 10 ⁻² Ωcm or less from the relationship between the desired sheet resistance Rs as the collector electrode and the suitable thickness as the antireflection layer.

Next, a first conventional technique relating to the solar cell module of the present invention will be described. Direct light energy,
Photovoltaic devices that convert electric energy, that is, solar cells, have been in the limelight in recent years because exhaustion of energy resources has become a problem because inexhaustible sunlight is the main energy source. A photovoltaic power generation system using a solar cell is a pollution-free and noise-free clean energy, and is expected to be applied to various fields. This includes, for example, electrical products such as clocks and calculators, unmanned radio relays, power generation systems on roofs of houses, large-scale power generation systems for electric power, and the like.

In particular, as a power generation system on the roof, it has been considered to mount a solar cell panel which is generally commercially available on the roof, but in this case, a special mounting jig is required, and a specialized mounting jig is required. However, there was a problem that it required a lot of construction work, and that the aesthetics of the house was impaired. Therefore, a solar cell roof tile in which a solar cell is formed on a roof tile-shaped substrate has already been disclosed in, for example, JP-A-60-31259. By laying this solar cell tile on the roof in place of the conventional roof tile, the aesthetic appearance is not spoiled and a special mounting jig is not required.

FIG. 23 shows a conventional example of such a solar cell roof tile. The solar cell module 701 shown here forms and supports the thin-film solar cell 703 on the roof tile substrate 702, and when mounted on the roof of a house, a plurality of solar cell modules 701 are connected in series or in parallel. They are lined up on the roof while connected to.

Next, the second prior art relating to the solar cell module of the present invention will be described. Nowadays, environmental problems are becoming more important on a global scale, and expectations for solar cells as a clean energy source have become extremely high. However, since the output voltage of a normal solar cell unit is as low as 0.7 V in the case of a solar cell composed of only one layer of amorphous silicon,
When used as a module, several to several hundreds must be connected in series. For this reason, various means have been conventionally used.

For example, in constructing the solar cell module as described above, as shown in FIG. 24, a lead wire 7 is connected to the collector electrode 4 of the solar cell by soldering, and the lead wire is further connected to the conductive substrate 1. Are connected to each solar cell in series by welding or soldering.

However, this method is very time-consuming, and a relatively thick conductor wire must be used in order to reduce the resistance of the conductor wire, which raises the manufacturing cost of the solar cell module. Therefore, as a method of connecting solar cells in series without using a conductor to form a module, Japanese Patent Laid-Open No.
For example, the one described in 195185 was proposed. Here, as shown in FIGS.
0a and 10b are bonded via the conductive adhesive layer 17 to connect them in series, so that no conductor wire is required.
It is considered that the wiring portion between the batteries is hidden under the battery, so that the dead area of the battery is eliminated and the gap between the batteries is also reduced, so that the light receiving surface of the solar cell module is increased and the conversion efficiency is improved.

Next, a third conventional technique relating to the solar cell module of the present invention will be described. In recent years, solar energy has attracted attention as one of the so-called clean energies that does not deplete like fossil energy such as petroleum and coal, and does not destroy the environment such as air pollution and carbon dioxide gas generation, while serious energy problems are being called for. Are gathering.

Above all, solar cell power generation is expected as an alternative energy to replace conventional methods such as thermal power, nuclear power, and diesel power generation in the future.

There are various materials for this solar cell, but a large number of materials using silicon are commercially available.
These are roughly classified into crystalline silicon solar cells using single crystal silicon and polycrystalline silicon, and amorphous silicon solar cells.

The crystalline silicon solar cell has a higher conversion efficiency, which represents the ability to convert light (solar) energy into electric energy, than the amorphous silicon solar cell, but on the other hand, the element itself is weak against stress and cracks. Since it is easy, it requires a strong sealing structure and frame. At present, there is a feature that the cost per unit amount of electric power is high.

On the other hand, amorphous silicon solar cells have lower conversion efficiency than crystalline silicon solar cells at present, but they have high light absorption and can be formed by depositing a relatively thin film. And that various materials such as glass, stainless steel, and polyimide sheet can be selected as the substrate by utilizing the amorphous property.
Further, it has a feature that it can be easily enlarged. Further, it is said that the manufacturing cost may be relatively low as compared with the crystal system, and it is expected to spread widely in the future from general household level to large-scale power plant level.

Except for those used as parts for calculators and the like, the solar cell modules currently on the market are roughly classified into relatively small ones having an outer shape of about 10 cm square and 3
It is divided into large ones of 0 cm or more.

The small ones are for outdoor and indoor use, while the large ones are mainly intended for outdoor use.
It is often used on the ground or on the roof of a building or on the wall. In particular, when it is installed on the roof of a building, it has been customary in many cases to build a metal frame on the roof and install the solar cell module on the frame.

[0017]

The problem (first problem) of the prior art relating to the solar cell of the present invention will be described below. The transparent conductive film has to be thin as described above, but it is very difficult to produce it on a large-area substrate with a uniform thickness in a mass production apparatus, which causes a loss in yield. ing. In addition, a higher quality substrate can usually produce a higher quality transparent conductive film. However, in the case of a configuration in which the transparent conductive film is produced after each pin layer is formed on a substrate such as stainless steel, p formed previously, In order to prevent the temperature of each of the i and n layers from being adversely affected by the temperature, it is required to keep the substrate temperature as low as possible during the production of the transparent conductive film. Also,
It is said that In contained in the transparent conductive film diffuses into amorphous silicon and adversely affects the solar cell characteristics.

The solar cell of the present invention has a pi deposited on a substrate.
It is an object of the present invention to solve the above-mentioned problems in an n-type or pn-type solar cell and to provide a solar cell that is uniform over a large area and has good characteristics.

Next, the problem (second problem) of the first conventional technique relating to the solar cell module of the present invention will be described.

When attempting to install the solar cell roof tile as shown in the conventional example on the roof of an existing house, there are the following problems. That is, it is necessary to replace all the old roof tiles that have been laid so far, and all the existing roof tiles are wasted, resulting in a very high price. Also, when exchanging roof tiles, it is necessary to electrically connect each solar cell roof tile,
The construction required a considerable amount of time, and if there was a poor connection at one place, it would not work properly, and there were difficulties in terms of construction. On the other hand, when manufacturing a solar cell roof tile, a solar cell is formed on the roof tile, so that special manufacturing equipment is required, resulting in high cost of the solar cell roof tile itself. Furthermore, since it becomes a part of building materials, it is necessary to secure a certain degree of mechanical strength in the solar cell module itself in consideration of the operators who handle it, which also contributes to the high cost. It was

The present inventor has conducted extensive studies to overcome the above-mentioned problems in the conventional outdoor solar cell module and achieve the above-mentioned object of the present invention. Applying a unit with a high quality semiconductor solar cell to an outdoor solar cell module facilitates the construction when it is installed on the roof of an existing house, and is extremely advantageous in practical use such as the protection effect of the solar cell. It was possible to find out.

The present invention has been made based on the above-mentioned circumstances, solves the problems of the conventional outdoor solar cell module, and does not impair the aesthetics of a house, and moreover, can be easily applied to a roof or the like. It is an object of the present invention to provide an inexpensive outdoor solar cell module that can be attached.

Next, the problem (third problem) in the second prior art relating to the solar cell module of the present invention will be described.

In the method described above, since the conductive adhesive layer 17 is directly connected to the collecting electrode lead-out portion on the surface of the battery, the strength of the connecting portion is weak and when the solar cell module is subjected to bending stress, the semiconductor layer May be peeled off from the conductive substrate and broken, or the bonded portion may be separated.
In addition, such a structure has a drawback that a large amount of expensive conductive adhesive must be used.

The present invention has been made to overcome the above drawbacks, and an object thereof is to provide a highly efficient, inexpensive, and robust solar cell module.

The problem (fourth problem) in the third prior art relating to the solar cell module of the present invention will be described.

The pedestal for installing the solar cells on the roof as described above is required to have a structure having sufficient strength for safety, and further, it is required to satisfy the legal regulations concerning buildings. There is a problem that the price of the gantry body and the installation cost increase.

At present, there are many cases where a structure in which a metal frame is combined is installed and used on the roof as a gantry, but these are not designed in consideration of the landscape and cause the disturbance of the landscape of the area. There is a problem that becomes. In addition, when installing multiple solar cell modules on the roof, the method of connecting the wiring of each output cable outside the module is often not considered as a system, which makes the connection of output cables complicated. There is also the problem of spoiling the landscape.

As one of the methods for solving these problems, a method of directly mounting the solar cell on the roof material is considered. This method is effective in that it eliminates the need for a gantry, but it often requires a protective cover to protect the output cable and the output connecting member from rainwater, moisture, and other external environments. However, there are few protective covers designed with no visual discomfort with the roof, and there is still the problem of spoiling the landscape.

Further, if this protective cover projects beyond the light receiving surface of the solar cell module, a new problem may occur due to the shadow created by the protective cover.

FIG. 27 is a plan view showing an example of a conventional solar cell installed on a roof. In the figure, 501 is the maximum unit of solar cell elements connected in parallel (hereinafter referred to as parallel solar cell element). In this conventional example, 13 parallel solar cell elements 501 are connected in series to the solar cell panel 21.
Then, eight solar cell panels 1 are further connected in series to form one solar cell module.

In the figure, 23 is a seam cover member (protective cover) that protects the connection portions of these solar cell panels 21, and 30 is a shade produced by the seam cover member 23 blocking the incident light. As shown in the figure, in this example, the parallel solar cell elements 501 are arranged such that their longitudinal directions are arranged in a direction parallel to the longitudinal direction of the seam cover member 23 and are electrically connected in series. However, in this arrangement method, as shown in the figure, all of the five parallel solar cell elements 501 are shaded, and the output from the parallel solar cell elements 501 at that portion can hardly be expected. As a result, not only the output current decreases due to the decrease in the amount of incident light, but also the output voltage decreases. Therefore, for example, when the output of the solar cell is to be directly charged to the storage battery, the output voltage does not exceed the charging voltage of the storage battery, and therefore the output of the entire solar cell module is not 0, but is not charged. The problem arises.

FIG. 28 is a diagram showing a schematic configuration in the case of charging a storage battery with such a solar cell module. If the output of one solar cell panel 21 is 25 W,
If it is 16V, 8 sheets will have 16 × 8 = 128V, which is a sufficient voltage to charge the storage battery for 120V. However, as shown in FIG.
When the output of 5 out of 3 parallel solar cell elements 501 is 0 V, the output of one solar cell panel 1 is 16 × (1
3-5) / 13 = about 9.85V. If this occurs with respect to eight solar cell panels 21, about 9.
Only 85 × 8 = 78.8V is output, which makes it impossible to charge the storage battery for 120V.

[0034]

In order to solve the first problem described above and to achieve the object of the present invention, the solar cell of the present invention is a pin type or pn type solar cell deposited on a substrate. And the p-type or n-type semiconductor layer located on the light incident side is a non-single crystal, and the sheet resistance of the semiconductor layer is 10
It is characterized in that it is Ω / □ or more and 500 Ω / □ or less.
Further, it is preferable that the semiconductor layer is made of a non-single crystal having a grain size of 300 Å or more.

The term "non-single crystal" means microcrystals, polycrystals, and amorphouss excluding single crystals.

In order to solve the above-mentioned second problem and to achieve the object of the present invention, the first solar cell module of the present invention is an amorphous semiconductor solar cell provided on a flexible substrate. The unit, a lead portion for independently taking out electric power from each of the solar cell units, and the light incident surface of all of the solar cell units on the flexible substrate, which are provided with a required space, are continuously formed. A front laminate sheet which is formed to be larger than the area of all the solar cell units and continuously covers the entire surface on the side opposite to the light incident surface of all the solar cell units and is formed to be larger than the area of all the solar cell units. And the uncured hot sheet that is wholly or partially provided on the surface of the back laminated sheet opposite to the solar cell side. It comprises a and preparative adhesive, said adhesive surface is brought into close contact with the surface of a building or structure by applying a heat curing treatment, characterized by being configured to be attached.

In the solar cell module provided by the present invention, the solar cell unit may be a unit cell or a plurality of cells connected in series or in parallel. Further, the solar cell unit may have any configuration as long as it is an amorphous solar cell that can be formed on a flexible substrate. Examples include crystalline silicon germanium solar cells, amorphous silicon carbon solar cells, and stacked solar cells of these.

Examples of the flexible substrate provided by the present invention include metal substrates such as stainless steel, aluminum and copper, and polymer substrates such as polyamide, polyimide and PET.

The front laminate sheet provided by the present invention is any material that protects the surface of the solar cell mechanically, electrically, and chemically, waterproofs it, and is transparent to visible light. However, for example, a fluororesin such as a PVF film, a FEP film, a PFA film, a VDF film, and an ETFE film, a filling material such as glass fiber, a hot-melt adhesive sheet such as EVA, polyamide, polyester, and thermoplastic rubber is used. Examples include composite materials.

The back laminate sheet provided by the present invention may be any material that protects the surface of the solar cell mechanically, electrically and chemically and is waterproof, such as polyethylene film, polypropylene film,
Plastic films such as polystyrene film, polyvinyl chloride film, polyvinylidene chloride film, polyvinyl alcohol film, fluororesin film, polycarbonate film, acetate film, polyester film, polyamide film, hydrochloric acid rubber film, ionomer film, polyimide film, polyurethane film, etc. Examples thereof include filler materials such as glass fibers, carbon fibers and organic synthetic fibers, and composite materials using a hot melt adhesive sheet such as EVA, polyamide, polyester and thermoplastic rubber.

The above-mentioned hot melt adhesive provided by the present invention is, for example, in the form of a sheet, and its composition may be any adhesive as long as it is liquefied and further cured by overheat treatment. Examples include EVA hot melt adhesives, polyamide hot melt adhesives, polyester hot melt adhesives, and thermoplastic rubber hot melt adhesives.

In order to solve the above-mentioned third problem and to achieve the object of the present invention, the second solar cell module of the present invention is provided with a conductive substrate and a photoelectric conversion active region provided on the substrate. A solar cell module in which a plurality of solar cells each including a semiconductor layer that constitutes the above, a transparent conductive film provided on the semiconductor layer, and a plurality of collector electrodes provided on the transparent conductive film are connected in series. In, the collector electrode of one solar cell and the conductive substrate of the other solar cell are bonded via a conductive adhesive and an insulating adhesive to form a series connection of the solar cells, It is characterized in that the semiconductor layer, the transparent conductive film, and the collector electrode in the portion in contact with the insulating adhesive are removed.

As the conductive substrate used in the present invention, stainless steel, aluminum, copper, titanium, carbon sheet or the like is used. Further, Ti, Cr, Mo, W, Al, Ag, Ni or the like is applied as the material of the metal electrode layer, and resistance heating vapor deposition, electron beam vapor deposition, sputtering method or the like is adopted as the forming method.

The semiconductor layer as the photoelectric conversion member has a pi
n-junction amorphous silicon, pn-junction polycrystalline silicon, Cu
A compound semiconductor such as InSe ₂ / Cds can be used.
When the semiconductor layer is amorphous silicon, it is formed by plasma CVD using silane gas or the like, in the case of polycrystalline silicon, it is formed into a sheet of molten silicon, and when it is CuInSe ₂ / Cds, it is It is laminated and formed by methods such as beam evaporation, sputtering, and electrodeposition (deposition by electrolytic decomposition of electrolyte solution).

The material used for the transparent electrode is In ₂ O.
₃ , SnO ₂ , In ₂ O ₃ —SnO ₂ , ZnO, TiO
₂ , Cd ₂ SnO ₄ , crystalline semiconductor layers doped with high-concentration impurities, etc., and the formation methods thereof include resistance heating evaporation, electron beam evaporation, sputtering method, spray method, CVD method, impurity diffusion method, etc. .

In order to form the solar cell module of the present invention, in order to secure a sufficient bonding margin, a part of the semiconductor layer, the transparent conductive film, and the collecting electrode of the solar cell formed of the above-mentioned material is used. Parts must be removed. For this purpose, a physical method such as grinder or sandblast, or a chemical method such as etching can be employed. The larger the area to be removed, the higher the adhesive strength, but at the same time, the performance of the solar cell module is degraded, so it is necessary to determine it in consideration of the application and size of the module.

In the solar cell module, the surface of the semiconductor layer, the transparent conductive film and the current collecting electrode removed is coated with an insulating adhesive using a dispenser, a brush or the like. The transparent conductive film and the collecting electrode are coated with a conductive adhesive and directly bonded to the conductive substrate of another solar cell.
At this time, the conductive adhesive and the insulating adhesive may be mixed with each other to some extent, but it is desirable to prevent them from being mixed as much as possible in terms of electrical performance and mechanical strength.
In addition, the fact that the insulating adhesive slightly spills out around the removed portion does not cause any problem, and rather, a short circuit due to the conductive adhesive between the upper collector electrode and the lower conductive substrate of the same solar cell is caused. Effective because it interferes. In applying the conductive adhesive, special attention must be paid to the fact that if the conductive adhesive is applied to the edge portion of the solar cell, the short circuit described above is likely to occur. Therefore, for example, if an adhesive called an anisotropic conductive adhesive that has conductivity only in a specific direction is used, this can be prevented.

As the conductive adhesive, a liquid adhesive composed of a conductive substrate such as gold, silver, copper, carbon or nickel and an organic binder such as a phenol-based, acrylic-based or epoxy-based adhesive, and a solid tape. The form can be used.

Any insulating adhesive may be used as long as it can strongly adhere metal and can be applied thinly. If possible, epoxy, acrylic, and phenol adhesives are desirable.

In order to solve the above-mentioned fourth problem and achieve the object of the present invention, the solar cell module of the third aspect of the present invention is adjacent to a plurality of rectangular plate-shaped members on which solar cell panels are mounted. A joint cover member that protects the connecting portion of the rectangular plate-shaped member and the connection portion of the solar cell, and a plurality of joint cover pressing members that press down the joint cover member, and configures the solar cell panel. The longitudinal direction of the maximum units of the solar cell elements connected in parallel in parallel to each other so as to be a direction substantially perpendicular to the longitudinal direction of the seam cover member, the maximum units are electrically connected in series. Characterize.

Further, the solar cell panel is characterized in that at least the surface protection material, the back surface protection material, and the solar cell element are vacuum laminated using an adhesive. In addition, the solar cell panel, a bonding member and /
Alternatively, it is characterized in that it is directly fixed to the rectangular plate member with an adhesive.

[0052]

The operation of the solar cell of the present invention will be described below.

In the solar cell of the present invention, since the microcrystalline or polycrystalline semiconductor layer has a low sheet resistance Rs and good characteristics, it can function as a transparent conductive film and has a large area. It is not necessary to use a material such as ITO, which is difficult to manufacture uniformly over the entire length and which may cause a problem of diffusion. Therefore, by the layer structure of the above-mentioned thin-film solar cell, it is possible to replace the transparent conductive film, which is a constituent element of a solar cell conventionally devised and put into practical use, with a microcrystalline or polycrystalline semiconductor layer. is there. That is, when using a glass substrate, first,
A layer structure for depositing a valence-controlled microcrystalline or polycrystalline semiconductor layer, and then depositing an intrinsic layer, a valence-controlled layer of a conductivity type opposite to the valence-controlled layer; To do. In this case, a metal collector electrode may be formed to reduce the resistance component in the surface layer. Moreover, you may form an antireflection layer as needed. In the case of using a metallic substrate, a first doping layer is deposited, and then a second sheet having an intrinsic value and a second valence electron controlled opposite to the first doping layer is used. A crystalline or polycrystalline semiconductor layer is stacked. Furthermore, a metal electrode of aluminum, chromium, silver, or the like is deposited as a current collecting electrode for lowering the resistance of the surface layer. Further, an antireflection layer may be formed if necessary.
When using an insulating substrate such as a plastic film or ceramics, first, a metal thin film such as aluminum is deposited on the substrate to form a lower electrode. After that, it can be manufactured by the method described above.

Needless to say, the present invention can be applied to a structure in which these pin structures or pn structures are laminated in two layers or three layers.

Further, the thickness of the microcrystalline or polycrystalline semiconductor layer may be designed so that the reflection of incident light is minimized so that the semiconductor layer also serves as an antireflection layer.

In the method for forming the microcrystalline or polycrystalline semiconductor layer, the most suitable method is selected according to the layer structure and the type of substrate used, and it can withstand high temperatures like glass and ceramics. When using a substrate, a thermal CVD method can be used. In the case of stainless steel or a plastic film substrate, a method of growing microcrystalline silicon at a low temperature is used. Examples of such a film forming method include RF plasma CVD method, microwave plasma CVD method and ECR method. The HR-CVD method disclosed in JP-A-60-41047 can be used. Since the crystal grain size of the film deposited by the above-mentioned method is small, when the conductivity is not sufficient, the crystal grain size can be grown by an appropriate method. As such a method, there is a laser annealing method or the like.

By the way, in the HR-CVD method, active species generated by decomposing a compound containing silicon and halogen in the film formation space and a chemical for film formation that chemically interacts with the active species. This is a method to form a deposited film of silicon on a substrate by introducing active species generated from substances separately and chemically reacting them, and the excitation energy generated inside or outside the film formation space is generated. Through the means, it is possible to form crystalline silicon while heat treating the deposited film being deposited. Further, by using the HR-CVD method as disclosed in Japanese Patent Laid-Open No. 63-57778, good quality p-type and n-type can be obtained.
Microcrystalline silicon and polycrystalline silicon films of the type can be produced, and using these, solar cells with high conversion efficiency have been obtained.

Activation space (A) in HR-CVD method
As the compound containing silicon and halogen to be introduced into, for example, a compound in which a part or all of hydrogen atoms of a chain or cyclic silane compound is replaced with a halogen atom is used. Specifically, for example, Si _u Y _{2u + 2} (u is an integer of 1 or more, Y is F, Cl, Br or I), a chain halogen silicon, Si _v H _x Y _y (v is an integer of 3 or more, and Y is as defined above) And a chain or cyclic compound represented by Si _u H _x Y _y (u and Y have the above-mentioned meanings, and x + y = 2u or 2u + 2).

Specifically, for example, SiH ₄ , SiF ₄ ,
(SiF ₂ ) ₅ , (SiF ₂ ) ₆ , (SiF ₂ ) ₄ , S
i ₂ F ₆ , Si ₃ F ₈ , SiHF ₃ , SiH ₂ F ₂ , S
i ₂ H ₂ F ₄ , Si ₂ H ₃ F ₃ , SiCl ₄ , (SiC
l ₂ ) ₅ , SiBr ₄ , (SiBr ₂ ) ₅ , SiC
l ₆ , SiHCl ₃ , SiHBr ₂ , SiH ₂ Cl ₂ ,
Among them, those in a gas state or easily gasifiable such as SiCl ₃ F ₃ are given. These silicon compounds may be used alone or in combination of two or more.

The compound containing a component serving as a valence electron control agent as a constituent is in a gas state at room temperature and atmospheric pressure, or is a gas at least under the conditions for forming a deposited film, and is easily vaporized by an appropriate vaporizer. It is preferable to select the compound to be obtained.

In the case of obtaining a deposited film of silicon, a compound containing an element of Group III or V of the periodic table can be effectively used as a source gas. Specifically, as a compound containing a group III, BX ₃ , B ₂ H ₆ , B ₄ H ₁₀ , B _{5
H 9, B 5 H 11,} B 6 H 10, B (CH 3) 3, B (C 2
H ₅ ) ₃ , B ₆ H ₁₂ , AlX ₃ , Al (CH ₃ ) ₂ C
_{l, Al (CH 3) 3} , Al (OCH 3) 2 Cl, Al
(CH ₃ ) Cl ₂ , Al (C ₂ H ₅ ) ₃ , Al (OC _{2
H 5) 3, Al (CH} 3) 3 Cl 3, Al (i-C 4 H
₉ ) ₅ , Al (C ₃ H ₇ ) ₃ , Al (OC ₄ H ₉ ) ₃ ,
GaX ₃ , Ga (OCH ₃ ) ₃ , Ga (OC
₂ H ₅ ) ₃ , Ga (OC ₃ H ₇ ) ₃ , Ga (C
_{H 3) 3, Ga 2 H} 6, GaH (C 2 H 5) 2, Ga
(OC ₂ H ₅ ), (C ₂ H ₅ ) ₂ , In (CH ₃ ) ₃ ,
Examples of compounds containing In (C ₃ H ₇ ) ₃ , In (C ₄ H ₉ ) ₃ and V elements include NH ₃ HN ₃ , N ₂ H ₅ N ₃ and N.
₂ H ₄ , NH ₄ N ₃ , PX ₃ , P (OCH ₃ ) ₃ , P
(OC ₂ H ₅ ) ₃ , P (C ₃ H ₇ ) ₃ , P (OC
₄ H ₉ ) ₃ , P (CH ₃ ) ₃ , P (C ₂ H ₅ ) ₃ , P
(C ₃ H ₇ ) ₃ , P (C ₄ H ₉ ) ₃ , P (OC
_{H 3) 3, P (OC} 2 H 5) 3, P (OC 3 H 7) 3,
P (OC ₄ H ₉ ) ₃ , P (SCN) ₃ , P ₂ H ₄ , PH
₃ , AsH ₃ , AsX ₃ , As (OCH ₃ ) ₃ , As
(OC ₂ H ₅ ) ₃ , As (OC ₃ H ₇ ) ₃ , As (OC
₄ H ₉ ) ₃ , As (CH ₃ ) ₃ , As (CH ₃ ) ₃ , A
_{s (C 2 H 5) 3} , As (C 6 H 5) 3, SbX 3, S
b (OCH ₃ ) ₃ , Sb (OC ₂ H ₅ ) ₃ , Sb (OC
₃ H ₇ ) ₃ , Sb (OC ₄ H ₉ ) ₃ , Sb (C
_{H 3) 3, Sb (C} 3 H 7) 3, Sb (C 4 H 9) 3 and the like.

In the above, X is halogen (F, Cl, B
r, I) is shown.

Of course, these starting materials may be used alone or in combination of two or more.

When the above-mentioned raw material is in a gaseous state at room temperature and atmospheric pressure, the amount introduced into the film formation space or the activation space is controlled by a mass flow controller, and when it is in a liquid state, Ar, He, etc. Noble gas or hydrogen gas as a carrier gas is gasified by using a bubbler that can control the temperature as needed, and when it is in a solid state, a rare gas such as Ar or He or a hydrogen gas is heated as a carrier gas. Gasification is performed using a sublimation furnace, and the introduction amount is controlled mainly by controlling the carrier gas flow rate and temperature. In the HR-CVD method, hydrogen gas or a mixed gas of hydrogen gas and a rare gas is used to generate excited hydrogen atoms. When the microwave plasma is not stable only with hydrogen gas or when plasma does not occur, it is effective to appropriately mix a rare gas. HR
The rare gas used in the CVD method is He, N
Suitable examples include e, Ar, Kr, Xe, and Rn.

Substrates preferably used in the present invention are metal, glass, ceramics, plastic films and the like. In the case of a metal substrate, for example, a material that is industrially stably supplied, inexpensive, and easy to process is preferable, such as stainless steel or aluminum. Regarding the shape, the shape may be a square shape that is easy to use in terms of production and handling as a product, and in the case of continuous production on an industrial scale, the metal substrate is a long sheet formed in a sheet shape. It is desirable that the substrate can be wound into a roll and is sufficiently flexible. Therefore, the thickness of the substrate is 1 mm to 100 mm.
About μm is preferable. Further, as the insulating substrate, glass and ceramics are preferably used in terms of heat resistance and workability. In the case of a glass substrate, a material that has good transparency and does not react with the semiconductor layer during film formation or during use is preferable. As such a material, 7059 glass manufactured by Corning Inc. is used. In the case of a ceramic substrate, so-called new ceramics such as alumina and zirconia are preferably used. Polyester as the plastic substrate,
Polyethylene, polycarbonate, polypropylene, polyamide and the like are preferably used. Surface treatment of these substrate materials, in order to effectively photoelectrically convert the irradiated light,
It is an important step to improve the bonding as a semiconductor, and it is used after being subjected to treatment such as mechanical polishing or electrolytic polishing, if necessary, to make it a smooth surface or a rough surface. . The photovoltaic generation layer includes an amorphous semiconductor layer having n-type conductivity, an intrinsic amorphous semiconductor layer, and a p-type amorphous semiconductor layer.
A pin-type structure in which amorphous semiconductor layers having type conductivity are stacked is preferable, and a stacked structure in which these layers are stacked in two or three layers may be used. For each layer, a tetrahedral amorphous semiconductor such as amorphous silicon, amorphous silicon germanium, or amorphous silicon carbide is used. For the amorphous semiconductor layer, a suitable film forming method is adopted in view of desired electrical physical characteristics and various points of use. For example, plasma CV
D method, reactive sputtering method, ion plating method, photo CVD method, thermal CVD method, MOCVD method, MBE
Methods have been tried, and some of these methods have been adopted and commercialized as the most suitable method for forming semiconductor devices. In particular, a plasma CVD method is used in which SiH ₄ gas is decomposed by plasma. In this case, the doping layer is formed by decomposing SiH ₄ gas and PH ₃ gas as a doping agent or B ₂ H ₆ gas by plasma. Since the doping layer is a dead layer that does not contribute to the generation of photocurrent, it is required that the absorption of light is small, and in order to increase the electromotive force generated by light, the p-layer has a Fermi layer. The closer the level is to the valence band, the better, and the closer to the conduction band in the n-layer, the better. For this reason, it is generally performed that microcrystals capable of efficient doping are used. Also,
By microcrystallizing the doping layer, the series resistance of the cell can be reduced.

In the structure of the solar cell of the present invention, the sheet resistance Rs of microcrystalline silicon is comparable to that of the conventional transparent electrode, but the desired physical properties of such microcrystalline silicon were confirmed by the following experiments. did. (Experiment) FIG. 8 shows an apparatus suitable for producing a microcrystalline film and a polycrystalline film by the HR-CVD method. In the figure, 201
Is a film forming chamber, and the substrate 203 is placed on the substrate holder 202. 204 is a heater for heating the substrate,
Electric power is supplied through the lead wire 205 to generate heat. 206 is an exhaust pipe for exhausting gas, and 207 is a vacuum pump.
Reference numerals 208 to 212 are microwave energy supply systems for exciting the source gas, 208 is a microwave power source, 209 is a directional coupler and power monitor for monitoring microwave power, and 210 is a stub tuner. , 211 are rectangular waveguides, and 212 is a cylinder for preventing microwave leakage. Reference numerals 213 and 214 are coaxial reaction tubes for decomposing the raw material gas. 220 to 270 are gas supply systems. 220 and 2 respectively
30, 240, 250 are gas supply cylinders, 221, 2
31, 241, 251 are regulators, 222, 23
2,242,252,224,234,244,254
Is a valve, 223, 233, 243, 253 are mass flow controllers, 260 and 270 are gas supply pipes.

A p-type silicon film was formed as follows using the apparatus shown in FIG. First, a Corning 7059 substrate 203 having a size of 5 cm × 5 cm is mounted on the substrate holder 2.
02, and the film forming chamber 201 using the vacuum pump 207.
The inside was evacuated to about 10 ⁻⁶ Torr. Next, after the substrate 203 is heated and held at 350 ° C. by the substrate heating heater 204 to stabilize the substrate temperature, the gas supply cylinder 240 is used to supply SiF ₄ gas of 10 sccm and the gas supply cylinder 25.
From 0, 10 sccm of BF ₃ gas (diluted with 10% hydrogen) was introduced into the reaction tube 213 through the gas introduction tube 260. On the other hand, 100 scc of H ₂ gas from the gas supply cylinder 220
m and gas supply cylinder 230 from Ar gas 10 scc
m was introduced into the reaction tube 214 through the gas introduction tube 270.

With the internal pressure of the film forming chamber 201 kept at 0.4 Torr, 100 W of power was applied from the microwave power source 208. Plasma was generated in the reaction tubes 213 and 214, and a thin film of silicon was deposited on the substrate 203.

Simultaneously with the start of film formation, an energy density of 0.5 J / cm was obtained from a ruby laser (wavelength 694 nm, beam diameter 10 mm) (not shown) installed above the film formation chamber 201.
^{2. The} substrate surface was irradiated with laser light with a pulse width of 40 ns, and the substrate holder was scanned in the XY direction at a speed of 1 cm / sec to form a film for about 15 minutes. Removed completion of the film formation obtained after the sample as S-1, 1J / cm ² to Erunegi density of ruby laser by changing the substrate using a method similar to that described ^{above, 1.5J / cm 2, 2J /} cm 2,
The film formation was carried out in place of 2.51 J / cm ² , and the respective samples were designated as S-2, S-3, S-4 and S-5. About each of the obtained deposited film samples, electron beam diffraction method (hereinafter referred to as RHEE
When the crystallinity of the deposited film was evaluated by (denoted as D), all had good crystallinity. X for each sample
Approximately 1 when the crystal grain size was determined by the Scherrer method by line diffraction.
It was from 00 angstroms to about 2000 angstroms. The relationship between the laser energy density and the crystal grain size is shown in FIG. Each sample was measured by the 4-probe method, and the sheet resistance Rs (Ω / □) was calculated. The relationship between the crystal grain size and the sheet resistance Rs is shown in FIG. From FIG. 6, when the particle size is 300 angstroms or more, the sheet resistance Rs is about 100Ω.
It can be seen that the resistance value can be used as a transparent electrode because of less than / □.

Next, using the above-mentioned p-type silicon layer, FIG.
A solar cell having the layer structure shown in 1 was manufactured as follows, and then the electrical characteristics were measured.

First, a lower electrode 102 was deposited on a stainless steel (SUS304) substrate 101 of 30 cm square having a mirror-polished surface by using an evaporator not shown. Then, it is placed in a glow discharge plasma reaction chamber (not shown) and SiH ₄
Gas and PH ₃ gas were introduced to deposit 400 liters of n layer 103. After the gas supply was stopped, the reaction chamber was evacuated and Si
Introduce H ₄ gas and H ₂ gas to form i layer 104 at 4000 Å
Deposited. After the gas supply was stopped, the reaction chamber was evacuated to a vacuum, the substrate 101 was vacuum-transported to the deposition apparatus of FIG. 8, and then the p layer 105 was deposited to 700 Å by the above-mentioned HR-CVD method. The energy density of the ruby laser at this time is 0.
It was set to 5 J / cm ² . After film formation, the sample is taken out and etched by a dry etching device (not shown) to 1 cm x 1 c
10 sub-cells each having a size of m are prepared vertically and horizontally, for a total of 1
Then, the sheet resistance of the p-layer was measured using the 4-probe method. Next, the sample is transferred to another vapor deposition device (not shown),
Aluminum collector electrode 10 by electron beam evaporation method
Formed 7. Furthermore, the sputtering device (not shown)
An O ₂ antireflection layer 108 was deposited by about 700Å. The obtained sample was It was set to 1.

Next, the energy density of the ruby laser is set to 1
J / cm ² , 1.5 J / cm ² , ² J / cm ² , 2.5
The film was formed by changing the film to J / cm ² , and each sample was N
o. 1-2, No. 1-3, No. 1-4, No. 1-
It was set to 5. Next, as a comparative sample, a conventional solar cell shown in FIG. 9 was produced in the same procedure as above. First, the substrate 301
Lower electrode 302, n layer 303, i layer 304, p layer 3 on top
It is deposited in the order of 05 and IT is performed by using a sputtering device (not shown).
About 700 Å of O layer 306 was deposited. After that, prepare a sample in the same way as described above, divide into 100 subcells,
It was set to R-1.

The above sample was irradiated with a sunlight spectrum of AM-1 at an intensity of 100 mW / cm ² using a pseudo solar light source (hereinafter called a simulator) using a xenon lamp, and the solar cell characteristics were measured. The relationship between the sheet resistance and the conversion efficiency is shown in FIG. The conversion efficiency showed the average value standardized by the average value of the comparative sample R-1. From FIG. 7, it was found that when the sheet resistance was 10 Ω / □ or more and 500 Ω / □ or less, the solar cell characteristics were better than those of the conventional ones.

Next, the operation of the first solar cell module of the present invention will be described. The first solar cell module of the present invention can be manufactured at low cost because the module itself does not require mechanical strength and can remain flexible. In addition, even if the solar cell module becomes very large, it can be folded into the size of a unit module, which makes it very easy to pack it as a product, transport it to the installation site, and make it easier for workers to lift it to the roof. Is obtained. Further, since it has no adhesive force unless heat is applied, it is possible to easily perform alignment when mounting on a roof.
In addition, since the solar cell module can be attached to the surface of the building by simply applying heat like ironing clothes, the installation work becomes very easy, and further, between the adjacent unit modules, Since it is continuously covered with the laminate sheet, it is structurally advantageous in preventing the intrusion of moisture, and can be completely waterproofed, and deterioration of the characteristics of the solar cell can be suppressed.

Next, the operation of the second solar cell module of the present invention will be described.

In the second solar cell module of the present invention, the solar cells are adhered to each other and connected in series by using a conductive adhesive and an insulative adhesive in combination, and a portion where the insulative adhesive contacts is collected. The electrode and the semiconductor layer are removed. For this reason, the substrates can be bonded to each other with a strong and inexpensive insulating adhesive, the semiconductor layers are not peeled off by bending, and the batteries are not separated from each other. In addition, the expensive conductive adhesive can be saved, the process of electrically connecting the solar cells in series can be simplified, and the manufacturing cost of the solar cell module can be reduced. Further, a space for connecting the solar cells to each other by a conductive wire is not required, and the condensing surfaces of the solar cells can be densely arranged, so that the module efficiency can be expected to be improved.

Next, the operation of the third solar cell module of the present invention will be described.

In the third solar cell module of the present invention, the longitudinal direction of the maximum unit (parallel solar cell element) of the electrically connected solar cell elements constituting the solar cell is defined as the longitudinal direction of the joint cover member. Are formed so as to be arranged in a substantially vertical direction, so that even if a shadow occurs due to the seam cover member, it is less likely to cover the whole one of the parallel solar cell element units.

Further, since the connecting portion is stored inside the joint cover member, the design is beautifully organized. Further, by integrally forming the solar cell panel by vacuum laminating, it is possible to easily fix the solar cell panel to the rectangular plate member using a joining member such as eyelets or an adhesive.

[0080]

EXAMPLES The solar cell of the present invention will be described below in more detail with reference to Examples, but the present invention is not limited to these Examples. Example 1 A solar cell having a layer structure using the glass substrate shown in FIG. 2 was manufactured as follows. First, Corning 7059 glass substrate 101 with a size of 30 cm square
Is placed on the substrate holder 202 of the deposition apparatus of FIG. 8, and the film forming chamber 201 is set to about 10 ⁻⁶ Torr by using the vacuum pump 207.
Exhausted to r. Next, the p-layer 106 of 2000 Å was prepared with the ruby laser energy density of 1.5 J / cm ² . After the film formation, the inside of the film formation chamber 201 was evacuated to a vacuum, and similarly to the experimental example, it was vacuum transferred to a glow discharge plasma reaction chamber (not shown) to deposit the p layer 105, the i layer 104, and the n layer 103 in this order. The sample is taken out and transferred to another vapor deposition device, and the lower electrode 1
02 is formed, and vertical 10 is formed in a grid-like position by etching.
No. 1 and No. 10 laterally divided into 100 1 cm × 1 cm subcells, and the obtained sample was It was set to 2.

Next, as a comparative sample, ITO was replaced with about 2000 Å by using a sputtering device (not shown) instead of the p layer 106.
After the deposition, the p layer 105 and the i layer 10 are formed by the same procedure as above.
4, the n layer 103 was deposited in this order to form the lower electrode 102, which was divided into 10 vertical and 10 horizontal 1 cm × 1 cm subcells, and designated as R-1.

This sample was irradiated with light of AM-1 and 100 mW / cm ² from the glass substrate 101 side using a simulator, and the characteristics of each solar cell were measured. Table 1 shows the results of the average value and the variation. Exchange efficiency is comparative sample R-
A value of 1 is standardized. It can be seen that the solar cell characteristics of the obtained sample are better than those of the comparative sample, and the variation is small and the solar cell can be uniformly deposited on a large area.

[0083]

[Table 1] (Example 2) In Example 1, a PH ₃ gas (20% H ₂ gas diluted) filled in a gas supply cylinder (not shown) was used in place of the BF ₃ gas, and the solar cell of FIG. Was prepared as follows.

The n-type microcrystalline silicon layer 106 was formed under the same film forming conditions except that PH ₃ gas (20% H ₂ gas diluted) was introduced at a flow rate of 4 sccm and the ruby laser energy density was set to 1.5 J / cm ^2. Is deposited and after film formation, the film formation chamber 20
After evacuating the inside of the chamber 1 to a vacuum, as in Example 1, the sample was vacuum-conveyed to a glow discharge plasma reaction chamber (not shown) and SiH ₄ gas and PH
₃ gas is introduced to n layer 103, i layer 104, p layer 105
Were deposited in this order. The sample was taken out and transferred to another vapor deposition apparatus to form an aluminum collector electrode 107, and thereafter, by etching, it was divided into 10 vertical and 10 horizontal 1 cm × 1 cm subcells in a grid-like position. It was set to 2.

Next, as a comparative sample, the microcrystalline silicon layer 1 was used.
Instead of 06, a sputtering apparatus (not shown) was used to deposit about 2000 liters of ITO, and then the n-layer 10 was formed by the same procedure as above.
3, the i layer 104, and the p layer 105 are deposited in this order, and the current collecting electrode 1
No. 07 was formed, and it was divided into 10 cells in the vertical direction and 10 cells in the horizontal direction to form a subcell of 1 cm × 1 cm, and designated as R-2. For this sample, AM-1 and 100 were used from the glass substrate 101 side using a simulator.
The characteristics of each solar cell were measured by irradiating with light of mW / cm ² . Table 2 shows the average value of the conversion efficiency and the result of the variation. The conversion efficiency is normalized by the value of the comparative sample R-2. It can be seen that the solar cell characteristics of the obtained sample are better than those of the comparative sample, and the variation is small and the solar cell can be uniformly deposited on a large area.

[0086]

[Table 2] (Example 3) Next, a solar cell having the layer structure shown in FIG. 2 was produced as follows. In this case, as the film forming apparatus, the apparatus shown in FIG. 8 was used, but a thin film was deposited by the thermal CVD method without microwave discharge.

First, a Corning 7059 glass substrate 101 of 30 cm square is placed on the substrate holder 202 of the film forming apparatus shown in FIG.
7 was used to evacuate to about 10 ⁻⁶ Torr. Then, the substrate 203 was heated and held at 600 ° C. by the substrate heating heater 204. After the substrate temperature became stable, 100 sccm of H ₂ gas from the gas supply cylinder 220 and SiH ₄ gas filled in the gas supply cylinder (not shown) were introduced into the film forming chamber 201 through the gas introduction pipes 270 and 260. .
The internal pressure of the film forming space 201 was kept at 8 Torr to deposit a silicon thin film.

After film formation for about 30 minutes, film formation chamber 20
The inside of 1 is evacuated and transported to an ion implanter (not shown), and 3 × 10 ²⁰ B ⁺ ions per 1 cm ² are transferred to 25 ke
Then, the p-type silicon layer 106 was formed by implanting V. After that, thermal annealing is performed, the sample is transported to a glow discharge plasma reaction chamber (not shown), and i is processed in the same manner as in Example 1.
A layer 104 and an n layer 103 were deposited. The sample is taken out and transferred to a vapor deposition device (not shown) to form an aluminum current collector electrode 107 by an electron beam method, and then 1 cm × 1 by etching.
The sample was separated into 100 sub-cells each having a size of 100 cm, and the obtained sample was It was set to 3. This sample was irradiated with light of AM-1 at 100 mW / cm ² from the glass substrate side using a simulator to measure solar cell characteristics. The obtained characteristics were standardized with the characteristics of the comparative sample R-1 produced in Example 1, and the results are shown in Table 3. From Table 3, it can be seen that the solar cell characteristics of the sample are good and uniform characteristics can be obtained over a large area.

[Table 3] In the first to third embodiments described above, the pin-junction type solar cell is taken up, but the present invention can be applied to a pn-junction type solar cell. For example, in the case of FIG. 3, the substrate 1
01 is made of stainless steel, the n layer can be made of thin-film polycrystalline silicon using the liquid phase method, and the p layer can be made in the same manner as in Example 1.

The present invention can also be implemented in a solar cell having a structure in which the antireflection film 108 is removed as shown in FIG.

Next, an embodiment of the first solar cell module of the present invention will be described in detail with reference to the drawings.

FIG. 10, FIG. 11 and FIG. 12 show the outdoor solar cell module of the present invention, in particular, the roof solar cell module. In the figure, reference numeral 406 denotes the entire roof solar cell module of the present invention, an amorphous solar cell unit 401 is provided on the flexible substrate, and each solar cell unit 401 is externally provided. A lead portion 402 for extracting electric power is provided.

Such an amorphous solar cell unit 401
The front laminated sheet 403 for mechanically, electrically, and chemically protecting the light incident surface of the device, waterproofing it, and transmitting the incident light is arranged with a plurality of the solar cell units 401 at a required interval. It is formed in such a size that it covers them in the opened state. Further, the back side laminated sheet 404 for mechanically, electrically and chemically protecting the surface of the amorphous solar cell unit 401 on the side opposite to the light incident surface and for waterproofing covers the back side of these units 401. As described above, the entire solar cell unit is stacked on the front laminated sheet 403, and the entire solar cell unit is shielded from the outside except the outlet of the lead portion. Then, an uncured hot-melt adhesive sheet 405 which is wholly or partially uncured is provided on the surface of the rear laminate sheet 404 opposite to the solar cell side, and the solar cell module thus configured is It is designed to adhere to the outer surface of buildings such as the roof of a house.

The solar cell module having the structure shown in FIG. 10 can be folded into each amorphous solar cell unit as shown in FIG.

The embodiments of the outdoor solar cell module of the present invention will be specifically described below. However, the technical scope of the present invention is not limited thereby. (Embodiment 1) If the solar cell module configured as described above is mounted on the roof of a house, a tandem amorphous silicon solar cell of 30 cm x 120 cm is used for the amorphous solar cell unit 401. Dimensionally advantageous. Here, the solar cell module 406
Is composed of 10 amorphous solar cell units 401. The front laminated sheet 403 is made of PV.
A laminated structure of F film / glass fiber is used, and EVA film is used as an adhesive. Rear laminating sheet 404
Is a laminated structure of glass fiber / vinyl chloride film,
EVA film is used as an adhesive. A polyamide adhesive sheet is used as the hot melt adhesive 405.

To mount the solar cell module 406 on the roof, set it on the roof, align it, and then heat and blow the adhesive sheet 405 in contact with the surface of the roof by heating and blowing. Blow hot air with a vessel. Therefore, the construction is much easier than the conventional one. After construction, the output power of the solar cell module was measured on a sunny day and was about 230 W. The solar cell module was left outdoors for a further month, but no peeling of the laminate sheet or deterioration of the characteristics was observed. (Embodiment 2) Similar to Embodiment 1, when the solar cell module 406 of the present invention is attached to an outdoor advertisement signboard, the amorphous solar cell unit 401 is 30 cm × 60.
cm triple type amorphous silicon / amorphous silicon / amorphous silicon germanium solar cells are preferably used. The solar cell module 406 is
It is composed of five units 401. The front laminate sheet 403 has a laminated structure of Tefcel film / glass fiber, and EVA film is used as an adhesive. The rear laminated sheet 404 has a laminated structure of carbon fiber / vinyl chloride film and uses an EVA film as an adhesive. Further, as the hot melt adhesive 405, a polyamide adhesive sheet is used.

When the solar cell module 406 is attached to an outdoor advertisement signboard, the solar cell module 406 is set on the back surface of the signboard, aligned, and then hot air is blown by a heating blower. As a result, the adhesive is heated and cured, so that the solar cell module 406 can be attached to the signboard very easily.

After mounting on a signboard, the output power of the solar cell module was measured in fine weather and it was about 70 W. Then, the solar cell module was left outdoors for another month, but no peeling of the laminate sheet or deterioration of characteristics was observed. (Embodiment 3) As in Embodiment 1, when the solar cell module 406 of the present invention is attached to the roof of an automobile,
The amorphous solar cell unit 401 has a size of 30 cm × 60
A cm type single type amorphous silicon solar cell is used. The solar cell module 406 is composed of three units 401. The front laminate sheet 403 has a laminated structure of Tedlar film / glass fiber, and EVA film is used as an adhesive. The rear laminated sheet 404 has a laminated structure of carbon fiber / vinyl chloride film and uses an EVA film as an adhesive. A polyester adhesive sheet is used as the hot melt adhesive 405.

When the solar cell module 406 is attached to the roof of an automobile, the solar cell module 406 is set and aligned, and then heat is transferred to the adhesive through the laminate sheet by a heating iron to cure the adhesive. Therefore, also in this case, the construction can be performed very easily.

After mounting on a car, the output power of the solar cell module was measured in fine weather and was about 40 W. Then, the solar cell module was left outdoors for another month, but no peeling of the laminate sheet or deterioration of characteristics was observed.

Next, an embodiment of the second solar cell module of the present invention will be described in detail with reference to the drawings.

The present invention will be described in detail with reference to the embodiments shown in FIGS. 13 to 16. (Embodiment 1) A solar cell module according to the present invention is
For example, a photoelectric conversion active semiconductor layer 2 made of amorphous silicon is formed on a stainless steel substrate 1 having a thickness of 0.2 mm, a transparent conductive film 3 is further formed of indium oxide, and a collector electrode 4 is formed thereon. The solar cell 10a (10 cm × 10 cm) attached to another cell 10b
The conductive adhesive 5 and the insulating adhesive 6 applied alternately are bonded and connected in series. The adhesive width W in this case is 5 mm, the conductive adhesive is a silver paste manufactured by Fujikura Kasei Co., Ltd., and the insulating adhesive is
An epoxy adhesive manufactured by ThreeBond Co., Ltd. is used.
Curing is performed at room temperature and left for 5 minutes. The adhesive width W
, The higher the strength, the larger the mutual overlap between the substrates and the lower the utilization factor of the substrate surface. Therefore, it must be determined in consideration of this point. The current collecting electrode and the amorphous silicon semiconductor layer at the portion where the insulating adhesive contacts are
It was previously removed by a grinder before adhesion, and the insulating adhesive strongly adheres the substrates of the two solar cells to each other. Further, the conductive adhesive electrically connects the collector electrode (+ pole) of the solar cell 10a and the conductive substrate (− pole) of the solar cell 10b. A gap of, for example, about 0.5 mm may be formed between the adhesives so that the conductive adhesive and the insulating adhesive do not mix with each other. Further, the edge portion is protected by the above-mentioned insulating adhesive by about 0.5 mm so that the upper electrode and the lower electrode of the solar cell are not shortened by the conductive adhesive. In addition,
The collector electrode and the like are not removed from the lower surface of the insulating adhesive at this edge portion. This is because, if it is a little, even if there is a collecting electrode on the lower surface of the insulating adhesive, it suffices to bond the conductive substrates to each other with most of the insulating adhesive. It is more important. This state is shown in FIG.

The substrate thus constructed is
When the power generation efficiency was measured before and after pressing it against a cm pipe by bending 100 times, the efficiency at this time was 5.0%.
No change was observed and no separation of the joints was observed compared to before the bending operation.

(Comparative Example) As a comparative example, a module in which a battery is connected and a module in which the semiconductor layer and the collector electrode at the insulating adhesive site and the current collecting electrode are adhered without using the conductive adhesive alone are produced, A bending test similar to the above was tried.

The former module was broken by bending several times to ten and several times, and in the latter module, most of the semiconductor layers were peeled off and broken by bending several tens of times. Of course, the broken one lost the electromotive force and was no longer functioning as a solar cell module. (Embodiment 2) Next, a case where an acrylic adhesive is used as the insulating adhesive and a cheaper carbon-based paste is used as the conductive adhesive will be described. As a cure, leave at room temperature for 1 minute. As a result, when a bending test similar to the above was conducted, there was no change in efficiency as compared with the case where the silver paste was used. According to this, it is clear that a module can be made without using an expensive silver paste, and thus, it seems that the manufacturing cost can be further reduced. (Embodiment 3) Further, with the same material as the first embodiment,
The module was constructed by halving the amount of silver paste used. Even with such a structure in which the conductive adhesive was saved, the efficiency of the solar cell was 5.0%, which is the same as that in the first example. Generally, when the solar cell module is large,
In order to maintain the strength, it is necessary to make the bonding width large. In that case, if this embodiment is adopted, it is expected that the effect of saving the conductive adhesive will be great.

Next, an embodiment of the third solar cell module of the present invention will be described in detail with reference to the drawings. Example 1 An example of the present invention will be described below.

However, the present invention is not limited to the following solar cell manufacturing method, structure, outer shape, process and procedure, and roofing material, structure, outer shape, process and procedure. FIG. 17
FIG. 4 is a partial perspective view of the solar cell module of this embodiment, and in the figure, 501 is the maximum unit of solar cell elements electrically connected in parallel (parallel solar cell element). Further, 21 is a solar cell panel configured by connecting these parallel solar cell elements 501 in series, and 22 is a rectangular plate member for mounting the solar cell panel 21, 23
Is a seam cover member for protecting the connection part of each solar cell panel 21. Further, 24 is a seam cover pressing member, 2
5 is an eyelet as a joining member, 26 is an output cable, 2
Reference numeral 7 is an output connection member such as a connector.

FIG. 18 is a plan view showing the entire solar cell module of this embodiment. As shown in FIG. 18, the solar cell module of this embodiment is the maximum unit electrically connected in parallel. Thirteen parallel solar cell elements 501 are arranged with their longitudinal directions substantially perpendicular to the longitudinal direction of the seam cover member 23, and these thirteen solar cells are electrically connected in series to form one solar cell panel. 21 and further, eight solar cell panels 21 are electrically connected in series.

In this embodiment, as shown in FIG.
Even if the shadow 30 is formed by the seam cover member 23, the entire area of one parallel solar cell element 501 is not covered. Therefore, even if the output current of each parallel solar cell element 501 decreases, the output voltage does not decrease,
As a whole, the expected output voltage can be obtained.

As the solar cell used in this embodiment, an amorphous solar cell element was used, and an amorphous silicon thin film was formed on a stainless steel substrate by RF glow discharge method. After depositing n, i, and p in this order and vapor-depositing the transparent electrode, it is separated into small parts, comb-shaped electrodes are attached, and each small part is electrically connected in parallel, and the length is about 100 mm and the width is about 300.
The parallel solar cell element 501 having a size of mm was used. Next, 13 solar cells are arranged in the longitudinal direction so as to be adjacent to each other with an interval of about 1 mm, and electrically connected in series using a copper tape to form one solar cell panel 21, and eight solar cell panels 21 are manufactured. did.

Further, in the present embodiment, considering that finally eight solar cell panels 21 are electrically connected in series,
When the solar cell is joined to the roofing material, the solar cell panel 2
Wiring on the back surface of the solar cell panel 21 using the above-mentioned copper tape so that the cathode can be installed in the part where the element on the lower left end of 1 is not formed and the output terminal of the anode can be installed in the same part on the lower right end. gave. At that time, a polyester tape was used to insulate the stainless steel substrate and the copper tape.

As the front and back surface protective material of the above solar cell panel 21, a sheet-shaped Tedlar film having a thickness of 100 μm, a length of 1500 mm and a width of 320 mm, the surface of which was previously plasma-treated, and a sheet-shaped adhesive were used. E
About 1 using VA (ethylene vinyl acetate)
It was vacuum laminated at 00 ° C. to obtain one solar cell panel 21.

Then, output terminals are provided at the left and right ends of the blank portion (the portion where the elements are not formed) of the solar cell panel 21, and the output cable 26 has a sectional area of 1.25 mm ² .
A copper cable having a length of 1 m was soldered to each of the plus and minus output terminals, and the soldered portion was insulated and waterproofed using silicon rubber. A 2P waterproof connector of 100V, 15A of a male type on the positive side and a female type on the negative side was attached as an output connecting member 27 to the other end of the output cable 26. The maximum output of one solar cell panel 21 thus manufactured was about 25W.

Next, the following roofing materials were prepared.
First, the rectangular plate-shaped member 22 is made of a steel plate having one surface treated with galvalume, and has a thickness of 0.35 mm and a length of 3000 m.
m, width of about 350 mm. As shown in FIG. 20, eight pieces were used, each of which was bent about 15 mm from the end of the two opposite sides so that the cross section in the short-side direction had a “U” shape.

The seam cover member 23 is a rectangular plate member 22.
Bend a plate-shaped steel sheet of the same material as the above with a thickness of 0.35 mm, a length of 3000 mm, and a width of 90 mm to form a "U" shape with a cross-sectional width of about 30 mm in the lateral direction as shown in FIG. 19 (b). Further, 9 pieces were used in which the side in the longitudinal direction was bent inward by about 5 mm from the end. However, the ends in the longitudinal direction of these members are formed in a lid shape as shown in FIG.

The seam cover pressing member 24 is made of the same material as the rectangular plate member 22 and the seam cover member 23 and has a thickness of 0.35.
2 mm, length 100 mm, width 85 mm
Thirty-six pieces each of which was bent from both ends by 30 mm so as to have a cross section in the short-side direction as in No. 1 and further bent by 15 mm outward and further by about 5 mm inward were used.

The procedure for joining the solar cell panel 21 and the rectangular plate member 22 will be described below.

On the surface of the prepared rectangular plate member 22, one solar cell panel 21 prepared in advance,
However, the above-mentioned parallel connection of approximately 10 cm in length and 30 cm in width
Of the parallel solar cell elements 501 are arranged so that the longitudinal direction (lateral direction) thereof is substantially perpendicular to the longitudinal direction of the rectangular plate-shaped member 22, and the solar cell 21 in the bent portion of the rectangular plate-shaped member 22. As shown in FIG. 20, notches 601 through which the output cables 26 pass are provided at the portions corresponding to the output cables 26, and the output cables 26 are exposed to the outside.

Next, a commercially available silicon-based adhesive is applied to the surface of the Tedlar as the back surface protective material to adhere the solar cell panel 21 to the surface of the rectangular plate-like member 22, and then the laminated solar cell panel 21. The rectangular plate member 22 and the solar cell panel 21 were joined to the four corners of the portion other than the solar cell element by using eyelets 25 having a diameter of about 10 mm.

These roofing materials and solar cells were bent at a length of 3 m and a width of 15 m, which is similar to a roof, on a slanted wooden plate in which the longitudinal direction of the rectangular plate member 22 is aligned with the vertical direction of the roof. Were oriented upward and were arranged and fixed so as to have an interval of 25 mm between each of the adjacent rectangular plate members 22. Thereafter, one seam cover pressing member 24 was arranged and fixed at a ratio of about 1000 mm in the longitudinal direction of the gaps.

The male and female waterproof connectors as the output connecting member 27 of the solar cell are arranged in the space between the adjacent rectangular plate-like members 22, and are connected to the male type and the adjacent female type and female type for series connection. I fitted the male type next to it.

Finally, the above-mentioned joint cover member 23 is fitted into these joint cover pressing members 24 from above,
The seam of the roofing material was formed, and the solar cell module of the present invention was completed. FIG. 22 is a sectional view showing the structure of this joint portion.

The numerical values such as the length and thickness of the members of this embodiment are not limited to these. (Experimental Example 1) Using the solar cell module having the arrangement of the solar cell elements of the present invention manufactured in Example 1, an experiment was conducted to confirm the effectiveness of the arrangement of the parallel solar cell elements 501 of the present invention. In the solar cell element used in this experimental example, an amorphous silicon thin film was formed on a stainless steel substrate in the same manner as in Example 1 from the substrate side by using the RF glow discharge method.
After depositing p, n, i, p in this order and depositing a transparent electrode,
Separate into small parts, attach comb-shaped electrodes, and connect each small part electrically in parallel, about 100 mm in length and 300 mm in width.
The parallel solar cell element 501 was used.

In this experimental example, the unit 501 of the parallel solar cell element is arranged so that its longitudinal direction is substantially perpendicular to the longitudinal direction of the seam cover member 23, as shown in FIG. Then, a total of 13 sheets were electrically connected in series, and 8 sets were prepared as one set.

Hereinafter, the materials and procedures for the vacuum lamination of the above solar cell elements, the materials for the output terminals, the output cables and the waterproof connectors, and the attachment were the same as in Example 1. The output of each solar cell panel 21 was about 25W.

This experiment was carried out in December, when the sun's altitude was the lowest throughout the year, and therefore the shadow produced by the object was the longest. First, the wooden board and the solar cell module simulating the roof of Example 1 were installed on a flat ground with no obstacles in the surroundings with the solar cells inclined 30 degrees with respect to the horizontal plane and the solar cells facing south. Then, the output of the solar cells connected in series in Example 1 was changed to 120 V equipped with a backflow prevention means as shown in FIG.
The battery was connected to a storage battery system, and the voltage and current charged were constantly measured and recorded. At the same time, it was visually observed how the parallel solar cell elements 501 each having a length of about 10 cm and a width of about 30 cm, which constitute the individual solar cell panel 21 used this time, were covered by the shadow formed by the seam cover member 23.

As a result, it was not observed that one of the above-mentioned parallel solar cell elements 501 completely covered the area of one sheet by the shadow formed by the seam cover member 23, and the output of the solar cell drastically remarkably increased. No decrease is observed,
The original purpose was achieved. (Comparative Example 1) As a comparative example to Experimental Example 1, a solar cell module in which the arrangement of parallel solar cell elements 501 is different from the arrangement of the present invention was prototyped, and the same experiment as in Experimental Example 1 was performed. In this experiment, the maximum unit 501 of the solar cell elements electrically connected in parallel of each solar cell panel 21 was arranged so that the longitudinal direction of the maximum unit 501 was parallel to the longitudinal direction of the seam cover member 23.

Parallel solar cell element 501 used in this comparative example
The same as that used in Experimental Example 1 is used, and as shown in FIG. 27, 5 pieces are arranged so that the longitudinal direction thereof is parallel to the longitudinal direction of the seam cover member 23, and 4 pieces are similarly arranged on the side thereof.
Sheets, 4 sheets on the side of each sheet, and the distance between them is about 1 m.
A total of 13 sheets were arranged so that m, and these 13 sheets were electrically connected in series to form a solar cell panel 21, and 8 sets were prepared as one set.

Hereinafter, the materials and procedures for the vacuum lamination of the above solar cell elements, the materials for the output terminals, the output cables and the waterproof connectors, and the attachment were the same as in Experimental Example 1. The output of each solar cell panel 21 was about 25W. The same number of roofing materials as those used in Experimental Example 1 were used.

These roofing materials and solar cells were tested in Experimental Example 1
The same method as in Experimental Example 1 was used to fix on a wooden board simulating the same roof as above, 8 solar cell panels were connected in series, and finally the joint cover 23 was fitted to complete the solar cell module.

Next, using this solar cell module,
Similar to Experimental Example 1, in December, the wooden board and the solar cell module simulating the roof were inclined 30 degrees with respect to the horizontal plane,
In addition, the solar cells were installed on flat ground without obstacles with the solar cells facing south.

Then, the output of the solar cell module produced in this comparative example was connected to a 120 V storage battery system equipped with the backflow prevention means shown in FIG. 28, which was the same as in Experimental Example 1, and the charged voltage and current were constantly measured. Recorded. At the same time,
The manner in which a shadow was formed by the seam cover 23 formed on the light receiving surface of the unit 501 of each parallel solar cell element was visually observed.

As a result, the shadow of the seam cover 23 is different from that of each rectangular plate-shaped member 22 except for about 2 hours before and after the midnight sun.
One solar cell panel 21 above completely covers at least one unit 501 of the above-mentioned parallel solar cell elements, and correspondingly, the electric power charged in the storage battery decreases, and further charging is performed. It was also observed if it was not done.

This is the unit 50 of the parallel solar cell device described above.
Since one or more sheets are completely covered by the shadow formed by the seam cover member 23, not only the output current but also the output voltage is significantly reduced, and it becomes difficult to satisfy the charging voltage of the storage battery system. It indicates that.

[0134]

As described in detail above, according to the solar cell of the present invention, in the thin film pin type or pn type solar cell deposited on the substrate, the semiconductor on which the valence electron is controlled on the light incident side. The layer is made of non-single crystal, and the sheet resistance Rs of the semiconductor layer is
Is 10 Ω / □ or more and 500 Ω / □ or less, a thin-film solar cell that is uniform and has good characteristics over a large area can be manufactured. The semiconductor layer is preferably a non-single crystal having a grain size of 300 Å or more.

Further, according to the first solar cell module of the present invention, the module itself does not require mechanical strength,
Since it can remain flexible, it can be manufactured at low cost. In addition, even if the solar cell module becomes very large, it can be folded into the size of a unit module, which makes it very easy to pack it as a product, transport it to the installation site, and make it easier for workers to lift it to the roof. Is obtained. Furthermore, since it does not have adhesive strength unless heat is applied,
Positioning can be done easily when installing on the roof. Also, the solar cell module can be attached to the surface of the building by simply applying heat like ironing clothes, so that the installation work is very easy. Since it is covered with a laminate sheet, it is structurally advantageous in preventing the intrusion of water, and can be completely waterproofed, and deterioration of the characteristics of the solar cell can be suppressed.

Further, according to the second solar cell module of the present invention, in order to connect the solar cells to each other in series, they are adhered together by using a conductive adhesive and an insulative adhesive and Since the current collecting electrode and the semiconductor layer in the region where the conductive adhesive is in contact are removed, the substrates can be bonded to each other with a strong and inexpensive insulating adhesive, and peeling of the semiconductor layer due to bending can be avoided. In addition, the solar cells are not separated from each other. Moreover, it saves expensive conductive adhesive and simplifies the process of connecting solar cells in series.
It is possible to reduce the manufacturing cost of solar cell modules. Further, unlike the conventional case, there is no need for a space for electrically connecting the solar cells to each other with a conductive wire, and the light-receiving surfaces of the solar cells can be closely arranged, so that module efficiency can be expected to be improved. In particular, it has a great effect on strength and reduction of manufacturing cost, so that its industrial value is extremely large.

Further, according to the third solar cell module of the present invention, since the frame for installing the solar cell module is not required, not only the cost for the frame is unnecessary, but also the installation work on the roof is simplified, Worker safety is also improved.

In addition to eliminating the need for a gantry,
By storing the output cable and the output connecting member inside the seam cover member of the roof material, the output cable and the output connecting member are beautifully designed and the adverse effect on the landscape of the area can be eliminated.

Further, the fact that the output cable and the output connecting member are housed inside the joint cover member of the roof material enables long-term protection of the output cable and the output connecting member from the external environment such as rainwater and snow. Yes, it helps prevent electric leakage, electric shock, and disconnection.

In each of the solar cells, the longitudinal direction of the maximum unit (parallel solar cell element) of the solar cell elements electrically connected in parallel is a direction substantially perpendicular to the longitudinal direction of the seam cover member of the roof material. By placing it on the roof, it is prevented that the shadow created by the roof cover seam cover member completely covers at least one light-receiving surface of each parallel solar cell element, resulting in a significant decrease in the output of the solar cell module. You can

Further, in the above solar cell, at least the surface protective material, the back surface protective material, and the amorphous silicon solar cell element are vacuum-laminated with an adhesive, whereby the adhesive is applied to the surface of the back surface protective material. It is possible to apply or use eyelets or the like in the blank portion other than the solar cell element, and it is possible to obtain an effect that it becomes easy to bond to the rectangular plate member.

In addition, by this vacuum laminating process,
Since the durability against the external environment is sufficiently satisfied and a strong frame is not required, the production process of the solar cell can be reduced, and as a result, the productivity can be improved and the production cost can be reduced.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a configuration of a solar cell of the present invention.

FIG. 2 is a diagram schematically showing the configuration of the solar cell of the present invention.

FIG. 3 is a diagram schematically showing the configuration of the solar cell of the present invention.

FIG. 4 is a diagram schematically showing the configuration of the solar cell of the present invention.

FIG. 5 is a diagram showing the relationship between the energy density of a laser beam and the grain size of fine crystals.

FIG. 6 is a diagram showing the relationship between the grain size of microcrystals and sheet resistance.

FIG. 7 is a diagram showing a relationship between sheet resistance and conversion efficiency.

FIG. 8 is a diagram schematically showing a film forming apparatus suitable for producing the solar cell of the present invention.

FIG. 9 is a diagram schematically showing a configuration of a conventional solar cell.

FIG. 10 is a schematic plan view showing an embodiment of the solar cell module of the present invention.

11 is a schematic cross-sectional view of the solar cell module of FIG.

12 is a schematic cross-sectional view when the solar cell module of FIG. 10 is folded.

FIG. 13 is a plan view of an embodiment of the module according to the present invention.

14 is a vertical cross-sectional view taken along the line AA ′ of FIG.

FIG. 15 is a cross-sectional view taken along the line BB ′ of FIG.

FIG. 16 is an enlarged view of an adhesive surface.

FIG. 17 is a schematic perspective view showing the installation state of the roof material and the solar cell according to the embodiment of the present invention.

FIG. 18 is a schematic plan view of a solar cell module according to an example of the present invention.

FIG. 19 is a schematic perspective view showing a cross section of a surface perpendicular to the outer shape and the longitudinal direction of the joint cover member in the roofing material used in the examples.

FIG. 20 is a schematic perspective view showing the outer shape of a rectangular plate-shaped member of the roofing material used in the examples.

FIG. 21 is a schematic perspective view showing the outer shape of a joint cover pressing member of the roofing material used in the examples.

FIG. 22 is a schematic cross-sectional view showing the structure of each roof member used in the example and the connection portion of each solar cell.

FIG. 23 is a schematic perspective view showing a conventional roof solar cell module.

FIG. 24 is a plan view showing a conventional solar cell module.

FIG. 25 is a side view of a conventional example in which substrates of a solar cell are bonded to each other.

FIG. 26 is a plan view of a conventional example in which substrates of a solar cell are bonded to each other.

FIG. 27 is a schematic plan view showing a solar cell module according to a conventional arrangement.

FIG. 28 is a diagram for explaining an example of a storage battery charging system using a solar cell module.

[Explanation of symbols]

101, 301 substrate, 102, 302 lower electrode,
103, 303 n-type semiconductor layer, 104, 304 i
Type semiconductor layer, 105, 305 p type semiconductor layer, 306
Transparent conductive film, 107, 307 collector electrode, 108
Anti-reflection film, 201 film forming chamber, 202 substrate holder, 203 substrate, 204 substrate heating heater,
205 conducting wire, 206 exhaust pipe, 207 vacuum pump, 208 microwave power source, 209 power monitor, 210 tuner, 211 rectangular waveguide, 2
12 cylinders, 213, 214 reaction tubes, 220, 23
0,240,250 gas supply cylinders, 221,23
1, 241, 251 Regulator, 222, 232,
242,252 valves, 223,233,243,2
53 Mass Flow Controller, 224, 234, 2
44,254 valves, 260,270 gas supply pipes,
401 amorphous solar cell unit, 402 lead part, 403 front laminating sheet, 404 rear laminating sheet, 405 hot melt adhesive sheet,
406 Outdoor solar cell module, 1 conductive substrate, 2 semiconductor layer, 3 transparent conductive film, 4 current collecting electrode, 5 conductive adhesive, 6 insulating adhesive, 7 connecting wire, 8 upper electrode extraction part, 9 Lower electrode extraction part, 10a, 10b solar cell, 17 conductive adhesive layer, 21 solar cell panel, 22 rectangular plate member, 23
Seam cover member, 24 seam cover pressing member, 25
Joining member (eyelet), 26 output cable, 27
Output connection member (connector), 28 roof or structure, 30 shade by seam cover member, 501 solar cell element of maximum unit electrically connected in parallel (parallel solar cell element) 601 Notch through which an output cable is passed.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Nobuyoshi Takehara 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (10)

[Claims] 1. In a pin-type or pn-type solar cell deposited on a substrate, the p-type or n-type semiconductor layer located on the light incident side is a non-single crystal, and the sheet resistance of the semiconductor layer is Is 10 Ω / □ or more and 500 Ω / □ or less, a solar cell. 2. The semiconductor layer is made of a non-single crystal having a grain size of 300 angstroms or more.
The solar cell according to. 3. A flexible substrate, an amorphous semiconductor solar cell unit provided on the flexible substrate, a lead portion for independently taking out electric power from each of the solar cell units,
A front laminate sheet continuously provided over a light incident surface of all of the solar cell units on the flexible substrate, which is provided at a required interval, and is formed to have a larger area than all the solar cell units, and a solar cell unit. All the surface on the side opposite to all the light incident surface is continuously covered and the rear laminated sheet formed to be larger than the area of all the solar cell units, and the entire surface on the surface opposite to the solar cell side of the rear laminated sheet. A partially or partially provided uncured hot melt adhesive, which is attached by adhering the adhesive surface to the surface of a building or structure and subjecting it to thermosetting treatment. A solar cell module characterized by being configured. 4. A conductive substrate, a semiconductor layer forming a photoelectric conversion active region provided on the substrate, a transparent conductive film provided on the semiconductor layer, and a transparent conductive film provided on the transparent conductive film. In a solar cell module in which a plurality of solar cells composed of a plurality of current collecting electrodes are connected in series, the current collecting electrode of one solar cell and the conductive substrate of the other solar cell are electrically conductive adhesive and insulating. The solar cell is characterized by being bonded via an adhesive to form a series connection of the solar cells, and removing the semiconductor layer, the transparent conductive film and the collecting electrode at the portion in contact with the insulating adhesive. Battery module. 5. The solar cell module according to claim 4, wherein the semiconductor layer is made of amorphous silicon. 6. The solar cell module according to claim 4, wherein the conductive substrate is stainless steel, and an epoxy adhesive or an acrylic adhesive is used as the insulating adhesive. 7. The solar cell module according to claim 5, wherein the conductive substrate is stainless steel, and an epoxy adhesive or an acrylic adhesive is used as the insulating adhesive. 8. A plurality of rectangular plate-shaped members on which a solar cell panel is mounted, a joint cover member for protecting a joint between the adjacent rectangular plate-shaped members and a connecting portion of the solar cell panel, and the joint cover member. And a plurality of seam cover pressing members to hold down, constituting the solar cell panel, the longitudinal direction of the maximum unit of the solar cell elements electrically connected in parallel, the longitudinal direction of the seam cover member substantially. A solar cell module, which is arranged in a vertical direction and in which the maximum units are electrically connected in series. 9. The solar cell panel according to claim 8, wherein at least the surface protection material, the back surface protection material, and the solar cell element are vacuum-laminated using an adhesive. Solar cell module. 10. The solar cell module according to claim 8, wherein the solar cell panel is directly fixed to the rectangular plate member by a bonding member and / or an adhesive.