JPH053536B2 - - Google Patents
Info
- Publication number
- JPH053536B2 JPH053536B2 JP59117425A JP11742584A JPH053536B2 JP H053536 B2 JPH053536 B2 JP H053536B2 JP 59117425 A JP59117425 A JP 59117425A JP 11742584 A JP11742584 A JP 11742584A JP H053536 B2 JPH053536 B2 JP H053536B2
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- beams
- beam structure
- vibrating
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 29
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- MIMUSZHMZBJBPO-UHFFFAOYSA-N 6-methoxy-8-nitroquinoline Chemical compound N1=CC=CC2=CC(OC)=CC([N+]([O-])=O)=C21 MIMUSZHMZBJBPO-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- HJJOHHHEKFECQI-UHFFFAOYSA-N aluminum;phosphite Chemical compound [Al+3].[O-]P([O-])[O-] HJJOHHHEKFECQI-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8315565 | 1983-06-07 | ||
| GB08315565A GB2141231B (en) | 1983-06-07 | 1983-06-07 | Force sensors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6069528A JPS6069528A (ja) | 1985-04-20 |
| JPH053536B2 true JPH053536B2 (fr) | 1993-01-18 |
Family
ID=10543901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59117425A Granted JPS6069528A (ja) | 1983-06-07 | 1984-06-07 | 振動ビーム式力感知器のビーム構造体 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4594898A (fr) |
| EP (1) | EP0130705B1 (fr) |
| JP (1) | JPS6069528A (fr) |
| DE (1) | DE3480425D1 (fr) |
| GB (1) | GB2141231B (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010109787A1 (fr) * | 2009-03-27 | 2010-09-30 | パナソニック株式会社 | Sonde pour grandeur physique |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6255136U (fr) * | 1985-09-27 | 1987-04-06 | ||
| US4751849A (en) * | 1986-06-17 | 1988-06-21 | Paroscientific, Inc. | Force-sensitive resonator load cell |
| GB2196120A (en) * | 1986-10-10 | 1988-04-20 | Gen Electric Co Plc | A resonant element force sensor in a housing affording temperature and pressure compensation |
| IL80550A0 (en) * | 1986-11-07 | 1987-02-27 | Israel Aircraft Ind Ltd | Resonant element force transducer for acceleration sensing |
| US4878385A (en) * | 1988-02-02 | 1989-11-07 | Fisher Controls International, Inc. | Differential pressure sensing apparatus |
| GB2215053B (en) * | 1988-02-13 | 1991-09-11 | Stc Plc | Transducer device |
| GB8806214D0 (en) * | 1988-03-16 | 1988-04-13 | Avery Ltd W & T | Vibrating force sensor |
| FR2638519B1 (fr) * | 1988-11-02 | 1990-12-28 | Asulab Sa | Dispositif de mesure d'une grandeur physique |
| FR2640045B1 (fr) * | 1988-12-02 | 1991-03-08 | Sagem | Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application |
| US5060526A (en) * | 1989-05-30 | 1991-10-29 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with vibrating element |
| US5036715A (en) * | 1989-06-30 | 1991-08-06 | Richard Hanson | Cantilevered force sensing assembly utilizing one or two resonating force sensing devices |
| HU212353B (en) * | 1990-02-22 | 1996-06-28 | Istvan Almasi | Path-frequency signal transducer |
| FR2669426B1 (fr) * | 1990-11-16 | 1993-10-29 | Onera | Transducteur de force a poutre vibrante piezoelectrique pour capteur accelerometrique. |
| US5095763A (en) * | 1990-12-03 | 1992-03-17 | Delatorre Leroy C | Load-sensitive resonator beam transducer |
| US5201224A (en) * | 1991-05-03 | 1993-04-13 | Fmc Corporation | Apparatus and method for sensing unbalance force and location through frequency modulation |
| WO1993010428A1 (fr) * | 1991-11-12 | 1993-05-27 | Masstech Scientific Pty. Ltd. | Jauge de contrainte ou de charge |
| US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
| EP0852708B1 (fr) * | 1995-09-29 | 2001-09-12 | International Business Machines Corporation | Unite de traitement de signal mecanique s'articulant autour d'oscillateurs micromecaniques et de capteurs acoustiques intelligents et dispositifs les utilisant |
| GB0116393D0 (en) * | 2001-07-05 | 2001-08-29 | Druck Ltd | Improved sensor |
| EP1590642B1 (fr) * | 2003-02-05 | 2008-09-03 | Brunel University | Ensemble capteur resonant |
| JP4359757B2 (ja) * | 2003-09-17 | 2009-11-04 | ソニー株式会社 | 情報表示装置 |
| US7032454B2 (en) * | 2004-03-05 | 2006-04-25 | Agilent Technologies, Inc. | Piezoelectric cantilever pressure sensor array |
| US7498728B2 (en) | 2006-06-21 | 2009-03-03 | Pressure Systems, Inc. | Vibrating beam force sensor of improved ruggedness and mountability |
| EP2097745B1 (fr) * | 2006-12-28 | 2012-12-19 | Highland Biosciences Limited | Biocapteur |
| GB0716542D0 (en) * | 2007-08-24 | 2007-10-03 | Highland Biosciences Ltd | Endotoxin biosensor |
| DE102008037572A1 (de) | 2008-01-29 | 2009-08-06 | Werner Turck Gmbh & Co. Kg | Kraftsensor |
| US20130201316A1 (en) | 2012-01-09 | 2013-08-08 | May Patents Ltd. | System and method for server based control |
| JP2014020785A (ja) * | 2012-07-12 | 2014-02-03 | Seiko Epson Corp | 圧力検出デバイス、電子機器、移動体 |
| US10580605B2 (en) | 2015-11-23 | 2020-03-03 | University Of Utah Research Foundation | Very low power microelectromechanical devices for the internet of everything |
| CN111149141A (zh) | 2017-09-04 | 2020-05-12 | Nng软件开发和商业有限责任公司 | 用于收集并使用来自交通工具的传感器数据的方法和装置 |
| DE102017121347A1 (de) | 2017-09-14 | 2019-03-14 | Turck Holding Gmbh | Schlauchdrucksensor für eine Schlauchpumpenanordnung |
| CH718762A1 (de) * | 2021-06-23 | 2022-12-30 | Digi Sens Holding Ag | Schwingbrücke für einen Schwingsaitensensor und Schwingsaitensensor. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149819A (en) * | 1979-05-11 | 1980-11-21 | Yokogawa Hokushin Electric Corp | Power conversion mechanism |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB823847A (en) * | 1955-11-11 | 1959-11-18 | Ferranti Ltd | Improvements relating to transducers |
| US3190129A (en) * | 1961-07-10 | 1965-06-22 | Bosch Arma Corp | Accelerometer and parts therefor |
| GB1181515A (en) * | 1966-05-18 | 1970-02-18 | Solartron Electronic Group | Improvements in or relating to Force-Measuring Apparatus. |
| US3470400A (en) * | 1967-12-21 | 1969-09-30 | Singer General Precision | Single beam force transducer with integral mounting isolation |
| US4071838A (en) * | 1976-02-09 | 1978-01-31 | Diax Corporation | Solid state force transducer and method of making same |
| US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
| US4372173A (en) * | 1980-10-20 | 1983-02-08 | Quartex, Inc. | Resonator force transducer |
| US4446394A (en) * | 1981-09-14 | 1984-05-01 | The Singer Company | Linearizing mechanism for a vibrating beam force transducer |
| GB2115551B (en) * | 1982-02-09 | 1985-11-13 | Itt Ind Ltd | Load sensor |
-
1983
- 1983-06-07 GB GB08315565A patent/GB2141231B/en not_active Expired
-
1984
- 1984-06-05 DE DE8484303760T patent/DE3480425D1/de not_active Expired
- 1984-06-05 EP EP84303760A patent/EP0130705B1/fr not_active Expired
- 1984-06-06 US US06/617,712 patent/US4594898A/en not_active Expired - Lifetime
- 1984-06-07 JP JP59117425A patent/JPS6069528A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149819A (en) * | 1979-05-11 | 1980-11-21 | Yokogawa Hokushin Electric Corp | Power conversion mechanism |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010109787A1 (fr) * | 2009-03-27 | 2010-09-30 | パナソニック株式会社 | Sonde pour grandeur physique |
| JP2010230490A (ja) * | 2009-03-27 | 2010-10-14 | Panasonic Corp | 物理量センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2141231B (en) | 1986-08-06 |
| GB8315565D0 (en) | 1983-07-13 |
| EP0130705B1 (fr) | 1989-11-08 |
| US4594898A (en) | 1986-06-17 |
| DE3480425D1 (en) | 1989-12-14 |
| EP0130705A3 (en) | 1986-02-26 |
| GB2141231A (en) | 1984-12-12 |
| EP0130705A2 (fr) | 1985-01-09 |
| JPS6069528A (ja) | 1985-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |