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DE3480425D1 - Beam structure for piezoelectric vibrating beam force or pressure sensors - Google Patents

Beam structure for piezoelectric vibrating beam force or pressure sensors

Info

Publication number
DE3480425D1
DE3480425D1 DE8484303760T DE3480425T DE3480425D1 DE 3480425 D1 DE3480425 D1 DE 3480425D1 DE 8484303760 T DE8484303760 T DE 8484303760T DE 3480425 T DE3480425 T DE 3480425T DE 3480425 D1 DE3480425 D1 DE 3480425D1
Authority
DE
Germany
Prior art keywords
pressure sensors
piezoelectric vibrating
force
beam structure
vibrating beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484303760T
Other languages
English (en)
Inventor
Richard George Kirman
Roger Martin Langdon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Application granted granted Critical
Publication of DE3480425D1 publication Critical patent/DE3480425D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
DE8484303760T 1983-06-07 1984-06-05 Beam structure for piezoelectric vibrating beam force or pressure sensors Expired DE3480425D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08315565A GB2141231B (en) 1983-06-07 1983-06-07 Force sensors

Publications (1)

Publication Number Publication Date
DE3480425D1 true DE3480425D1 (en) 1989-12-14

Family

ID=10543901

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484303760T Expired DE3480425D1 (en) 1983-06-07 1984-06-05 Beam structure for piezoelectric vibrating beam force or pressure sensors

Country Status (5)

Country Link
US (1) US4594898A (de)
EP (1) EP0130705B1 (de)
JP (1) JPS6069528A (de)
DE (1) DE3480425D1 (de)
GB (1) GB2141231B (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255136U (de) * 1985-09-27 1987-04-06
US4751849A (en) * 1986-06-17 1988-06-21 Paroscientific, Inc. Force-sensitive resonator load cell
GB2196120A (en) * 1986-10-10 1988-04-20 Gen Electric Co Plc A resonant element force sensor in a housing affording temperature and pressure compensation
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
US4878385A (en) * 1988-02-02 1989-11-07 Fisher Controls International, Inc. Differential pressure sensing apparatus
GB2215053B (en) * 1988-02-13 1991-09-11 Stc Plc Transducer device
GB8806214D0 (en) * 1988-03-16 1988-04-13 Avery Ltd W & T Vibrating force sensor
FR2638519B1 (fr) * 1988-11-02 1990-12-28 Asulab Sa Dispositif de mesure d'une grandeur physique
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
US5036715A (en) * 1989-06-30 1991-08-06 Richard Hanson Cantilevered force sensing assembly utilizing one or two resonating force sensing devices
HU212353B (en) * 1990-02-22 1996-06-28 Istvan Almasi Path-frequency signal transducer
FR2669426B1 (fr) * 1990-11-16 1993-10-29 Onera Transducteur de force a poutre vibrante piezoelectrique pour capteur accelerometrique.
US5095763A (en) * 1990-12-03 1992-03-17 Delatorre Leroy C Load-sensitive resonator beam transducer
US5201224A (en) * 1991-05-03 1993-04-13 Fmc Corporation Apparatus and method for sensing unbalance force and location through frequency modulation
WO1993010428A1 (en) * 1991-11-12 1993-05-27 Masstech Scientific Pty. Ltd. Force or load sensors
US5962786A (en) * 1995-09-26 1999-10-05 Onera (Office National D'eudes Et De Recheres Aerospatiales) Monolithic accelerometric transducer
EP0852708B1 (de) * 1995-09-29 2001-09-12 International Business Machines Corporation Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
EP1590642B1 (de) * 2003-02-05 2008-09-03 Brunel University Resonanzsensorbaugruppe
JP4359757B2 (ja) * 2003-09-17 2009-11-04 ソニー株式会社 情報表示装置
US7032454B2 (en) * 2004-03-05 2006-04-25 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor array
US7498728B2 (en) 2006-06-21 2009-03-03 Pressure Systems, Inc. Vibrating beam force sensor of improved ruggedness and mountability
EP2097745B1 (de) * 2006-12-28 2012-12-19 Highland Biosciences Limited Biosensor
GB0716542D0 (en) * 2007-08-24 2007-10-03 Highland Biosciences Ltd Endotoxin biosensor
DE102008037572A1 (de) 2008-01-29 2009-08-06 Werner Turck Gmbh & Co. Kg Kraftsensor
JP5487672B2 (ja) * 2009-03-27 2014-05-07 パナソニック株式会社 物理量センサ
US20130201316A1 (en) 2012-01-09 2013-08-08 May Patents Ltd. System and method for server based control
JP2014020785A (ja) * 2012-07-12 2014-02-03 Seiko Epson Corp 圧力検出デバイス、電子機器、移動体
US10580605B2 (en) 2015-11-23 2020-03-03 University Of Utah Research Foundation Very low power microelectromechanical devices for the internet of everything
CN111149141A (zh) 2017-09-04 2020-05-12 Nng软件开发和商业有限责任公司 用于收集并使用来自交通工具的传感器数据的方法和装置
DE102017121347A1 (de) 2017-09-14 2019-03-14 Turck Holding Gmbh Schlauchdrucksensor für eine Schlauchpumpenanordnung
CH718762A1 (de) * 2021-06-23 2022-12-30 Digi Sens Holding Ag Schwingbrücke für einen Schwingsaitensensor und Schwingsaitensensor.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB823847A (en) * 1955-11-11 1959-11-18 Ferranti Ltd Improvements relating to transducers
US3190129A (en) * 1961-07-10 1965-06-22 Bosch Arma Corp Accelerometer and parts therefor
GB1181515A (en) * 1966-05-18 1970-02-18 Solartron Electronic Group Improvements in or relating to Force-Measuring Apparatus.
US3470400A (en) * 1967-12-21 1969-09-30 Singer General Precision Single beam force transducer with integral mounting isolation
US4071838A (en) * 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
JPS596370B2 (ja) * 1979-05-11 1984-02-10 横河電機株式会社 力変換機構
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4446394A (en) * 1981-09-14 1984-05-01 The Singer Company Linearizing mechanism for a vibrating beam force transducer
GB2115551B (en) * 1982-02-09 1985-11-13 Itt Ind Ltd Load sensor

Also Published As

Publication number Publication date
GB2141231B (en) 1986-08-06
GB8315565D0 (en) 1983-07-13
EP0130705B1 (de) 1989-11-08
US4594898A (en) 1986-06-17
EP0130705A3 (en) 1986-02-26
GB2141231A (en) 1984-12-12
EP0130705A2 (de) 1985-01-09
JPS6069528A (ja) 1985-04-20
JPH053536B2 (de) 1993-01-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition