JPH0518686Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field The present invention relates to a spectroscopic analysis device that measures light absorption and reflection by a sample.

(b) Conventional technology Conventionally, in order to measure the absorption spectrum of light by a sample, light from a light source such as a halogen lamp is made into a narrow beam using a slit and transmitted through the sample, and the transmitted light is then spectralized using a diffraction grating, etc. The light was guided to a spectrometer that included a detector such as a phototube and a phototube for spectroscopic measurements. In addition, to measure the light reflectance and reflection spectrum of the sample surface, a thin optical boom was irradiated onto the sample surface and the reflected light was set on a spectrometer.

(c) Problems to be solved If you try to measure the light absorption and reflection of one sample using the above-mentioned absorption measuring device and reflected light measuring device, you will need two devices, and you will have to transfer the sample. However, there is a problem in that the measurement efficiency is not good. There is also the problem that simply combining absorption and reflection measurement devices increases the size of the device, requires a large installation space, and increases costs.

(d) Means for solving the problem In order to solve the above problem, the present invention has two optical systems that create the first and second light beams that converge at the sample position, and a A rotary table is used to set up the sample at an angle perpendicular to the beam of light or at an angle at which a second beam of light is incident on the sample surface at a constant angle, and a rotary table is used to set up the sample at an angle perpendicular to the beam of light of an optical system that guides the reflected light to a spectrometer;
A spectrometer for spectrally measuring the transmitted light and reflected light was arranged so that the optical axes of the transmitted light and reflected light coincided.

(e) Effect The first and second light beams are selectively (alternately) applied to the sample, and the sample transmitted light and reflected light can be continuously (alternately) measured by operating the rotary table.

(F) Embodiment FIG. 1 is a diagram showing the configuration of an apparatus showing an embodiment of the present invention.

In Fig. 1, 1 is a light source (halogen lamp);
2, 3, 4, 5, 6 are concave mirrors, 7 is a sample, 8 is a rotary table on which the sample is placed, 9, 10 is a shutter, 1
1 is a spectrometer including a spectrometer and a photoelectric detection element. The light from the light source 1 passes through a shutter 9 to create a first beam 21 that is converged at the position of the sample 7 by the concave mirror 2, and a first beam 21 that passes through the shutter 10 and converges at the position of the sample 7 by the concave mirror 3. 2 light beams 22 are created. Shutters 9 and 10 are placed at any position on the optical path between the light source and the sample, and are selectively inserted into the optical path for absorption (transmission) measurement and reflection measurement, respectively. The rotating table 8 can set the sample at an angle perpendicular to the light beam 21 as shown by the solid line in the figure, or at an angle such that the light beam 22 is incident on the sample surface at an angle of 45 degrees as shown by the dotted line. Concave mirrors 4, 5, and 6 are optical systems that guide sample transmitted light and reflected light to spectrometer 11.

When the shutter 9 is opened and the shutter 10 is closed, and the sample surface is orthogonal to the first light beam, the transmitted light from the first light beam transmitted through the sample is guided to the spectrometer 11 for spectroscopic measurement, and the absorption spectrum is determined. It will be done.
Conversely, when the shutter 9 is closed and the shutter 10 is opened, the rotating table is set so that the sample surface is at 45 degrees with the second beam, and the reflected light in the right angle direction is on the same optical axis as the transmitted light. The sample passes through the concave mirror 4, passes through the concave mirrors 5 and 6, and is guided to the spectrometer 11. Depending on the purpose, the angle of incidence of light in most cases of measuring reflected light may not be 45 degrees, or the angle of incidence may be measured other than when the angle of reflection and the angle of incidence are the same (regularly reflected light).

FIG. 2 is a sectional view showing an example of a rotary table used in the measuring device of the present invention. In this figure, 22 is a fixed part fixed to the base 21, 23 is a shaft protruding from the fixed part 22, and an inclined surface 25 that comes into contact with the Teflon ball 24.
and is slidably connected to the rotating part 26. The Teflon ball 24 is pressed against the inclined surface 25 by a push screw 19. 27 is a positioning pin protruding from the rotating part 26. This turntable has positioning pin 2
7 can be manually operated to rotate the part above the rotating part. Above the rotating part 26 are supports 28 and 29 for fixing the sample, and supports 28 and 29 for holding the sample 30.
A spring 31 is mounted between them for fixation. This spring 31 is fixed to the support column 28 with a screw 32.

FIGS. 3a and 3b illustrate the states of the rotary table and the sample in the case of absorption measurement and reflection measurement, respectively. In the case of absorption measurement (FIG. 3a), the sample 30 is
The positioning pin 27 is perpendicular to the positioning post 34.
is in contact with. In the case of reflection measurement (FIG. 3b), the positioning pin 27 comes into contact with the positioning post 35,
The surface of the sample 30 makes an angle of 45 degrees with the incident light 36. The output light 37 is in the same direction in both measurements. Note that the positioning columns 34 and 35 are attached to the base 21.
(as shown in FIG. 2).

(g) Effects The absorption and reflection measurement device of the present invention has a very compact configuration, and absorption and reflection measurements can be performed with one device, and there is no need to reset the sample for both measurements, making the measurement easier. It has excellent effects such as high efficiency.

[Brief explanation of the drawing]

Figure 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram (cross-sectional view) of the main parts thereof, and FIG. 3 is a diagram for explaining the state of the present device. 1... Light source, 2, 3, 4, 5, 6... Concave mirror,
7, 30...sample, 8...turntable, 9,10...
Shutter, 11... Spectrometer, 21, 22... Luminous flux.

Claims (1)

[Scope of utility model registration request] The chemical systems that create the first and second light beams converge at the sample position, and the sample is placed at an angle where the sample surface is perpendicular to the first light beam or at an angle where the second light beam is incident on the sample surface at a constant angle. A rotary table to be installed, an optical system that guides the transmitted light in which the first light beam passes through the sample and the reflected light in which the second light beam is reflected on the sample surface to a spectrometer, and spectrally measures the transmitted light and reflected light. with a spectrometer,
An absorption/reflection measurement device characterized in that the device is arranged so that the optical axes of the transmitted light and the reflected light coincide.