JPH0430576Y2 - - Google Patents

Description

[Detailed description of the invention] Purpose of the invention Industrial application field This invention is an optical system used in reflection measurement and ATR measurement, in which focused light is incident on a sample or optical component while changing the angle of incidence. Regarding the system,
In particular, the present invention relates to a variable incident/exit angle optical system that can easily and reliably change the incident/exit angle by simply rotating a minimum number of rotating mirrors without moving the sample or optical components.

Conventional technology Figures 1 and 2 show typical examples of conventionally used optical systems for ATR measurement with variable input and output angles. In Fig. 1, M ₁ to _{M 4} are plane mirrors, S is the sample, I〓 is the incident light, and I〓 is the output light. In order to change the angle of incidence on the sample S, the plane mirrors M ₁ and M ₃ are The plane mirrors M ₂ , M ₄ and the sample S are rotated, and the plane mirrors M 2 and M 4 and the sample S are translated,
The optical path is changed from a solid line to a dotted line.

In Fig. 2, M ₁ to _{M 3} are plane mirrors, P is a semi-cylindrical prism, I〓, I〓〓 are input and output lights, and in this optical system, as the plane mirror M ₃ rotates, the plane mirrors M ₁ ,
By moving M ₂ to M ₁ ′, M ₂ ′, and further to M ₁ ″ and M ₂ ″, the angle of incidence on the prism P can be changed.
In this system, the prism P is also rotated to match the optical path, and the number of reflections is one.

Problems to be Solved by the Invention In conventional optical systems with variable entrance and exit angles as described above, a mechanical linkage mechanism is usually used to simultaneously move and rotate multiple optical components and samples. However, in an optical system using a link mechanism, the parts and assembly become complicated, resulting in high costs.In addition, a long window is provided in the base portion for attachment, making it difficult to perform a gas seal. Furthermore, because the dimensions cannot be reduced due to the complexity, there is also the drawback that a large space must be taken up in the sample chamber in order to accommodate the entire optical system within the sample chamber.

Therefore, the purpose of the present invention is to overcome the drawbacks of the above-mentioned conventional methods, to be simple and compact, to operate reliably,
Moreover, it is an object of the present invention to provide an optical system with variable entrance and exit angles that enables gas purging and dehumidification in the sample chamber.

Means for Solving the Constituent Problems of the Invention In order to achieve the above object, the variable entrance/exit angle optical system of the present invention includes a fixed elliptical mirror and a rotating mirror on one focal point of the elliptical mirror. and placing a sample or an optical component on the other focal point, and by rotating the rotating mirror, the incident light is moved on the elliptical mirror surface to change the angle at which it enters the sample or the optical component. It is something to do.

Embodiment First, the basic configuration of the variable incidence/output angle optical system according to the present invention will be explained with reference to FIG.

In the figure, an elliptical mirror 1 is fixedly arranged and has two focal points F ₁ and F ₂ . One of the two focal points F ₂
A mirror 2 is disposed above the focal point so as to be rotatable about a vertical line passing through the focal point, and a sample or an optical component such as a prism, in the illustrated example, a sample S is placed above the other focal point _F1 .
is placed. The incident light I〓 is reflected by the rotating mirror 2,
It enters the sample S through the elliptical mirror 1.

When the rotating mirror 2 is rotated counterclockwise, the incident light moves along the elliptical surface of the elliptical mirror 1.
Due to the characteristics of an ellipse, the light reflected by an elliptical mirror is always at the focal point.
The light is focused on _F1 , that is, the sample S. Then, as the incident light moves along the elliptical surface, the angle of incidence on the sample S changes. That is, by simply rotating one rotary mirror 2, the angle of incidence can be arbitrarily varied. Note that if a scale is provided on the rotating portion of the mirror 2, the angle of incidence on the sample can be read.

Next, a concrete example of implementing the present invention will be described with reference to FIG.

In the figure, 10 is an optical base such as a spectrometer, 11 is an outer wall of a sample chamber, and the optical system of the present invention is placed in a space surrounded by this outer wall. That is, the first and second elliptical mirrors 12 and 13 are fixedly arranged facing each other, and the first and second mirrors 14 and 15 are arranged rotatably like the rotating mirror 2 described above. The first rotating mirror 14 is the first elliptical mirror 12
The second rotating mirror 15 is located on one focal point F ₁ of the second elliptical mirror 13 , while the second rotating mirror 15 is located on one focal point F ₂ ' of the second elliptical mirror 13 .

A prism P between a pair of facing elliptical mirrors 12 and 13
is arranged, and the entrance surface of the prism P is the first elliptical mirror 1.
The output surface of the prism P is located on the other focal point F ₁ ' of the second elliptical mirror ₁₃ , respectively. The first and second rotating mirrors 14 and 15 are the rotating table 1
6 and 17, and are rotated as desired by drive cams 20 and 21 via variable angle levers 18 and 19, respectively.

The incident light I〓 enters the entrance surface of the prism P through the first rotating mirror 14 and the first elliptical mirror 12, and the outgoing light I〓 passes from the exit surface of the prism P to the second elliptical mirror 13 and the second rotating mirror 15. It is then taken out. 1st and 2nd rotating mirror 1
By rotating rotating tables 16 and 17 in conjunction with each other, the angle of incidence on the prism P can be varied, and the emitted light can be extracted in a fixed direction.

Effects of the invention As described above, according to the present invention, the incident angle can be changed with a minimum amount of rotation, and a complicated lever mechanism is not required. A formula optical system is obtained.
Therefore, in addition to being able to be installed in a narrow sample chamber,
Since a long window is not required, gas sealing is easy, and gas purging and dehumidification inside the sample chamber can be performed more easily. Of course, assembly and adjustment become easier, and costs can be reduced.

[Brief explanation of the drawing]

Figures 1 and 2 are diagrams showing a conventional variable input/output angle optical system, Figure 3 is a diagram showing the basic configuration of the present invention, and Figure 4 is a diagram showing the basic configuration of the present invention.
The figure shows a variable input/output angle optical system that specifically implements the present invention. 1, 12, 13...Elliptical mirror, 2, 14, 15...
...Rotating mirror, 16-21... Rotating means, S... Sample, P... Prism, 11... Sample chamber outer wall.

Claims (1)

[Scope of utility model registration request] A rotating mirror is placed on one focal point of the elliptical mirror, a sample is placed on the other focal point, and the incident light is moved on the elliptical mirror surface by the rotation of the rotating mirror, and the incident light enters the sample at a fixed position. An incident light variable optical measuring device characterized by changing the angle of the incident light.