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JPS6286546U - - Google Patents

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Publication number
JPS6286546U
JPS6286546U JP17965885U JP17965885U JPS6286546U JP S6286546 U JPS6286546 U JP S6286546U JP 17965885 U JP17965885 U JP 17965885U JP 17965885 U JP17965885 U JP 17965885U JP S6286546 U JPS6286546 U JP S6286546U
Authority
JP
Japan
Prior art keywords
sample
optical component
angle
rotating
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17965885U
Other languages
Japanese (ja)
Other versions
JPH0430576Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17965885U priority Critical patent/JPH0430576Y2/ja
Publication of JPS6286546U publication Critical patent/JPS6286546U/ja
Application granted granted Critical
Publication of JPH0430576Y2 publication Critical patent/JPH0430576Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１，２図は従来の入出射角可変式光学系を示
す図、第３図は本考案の基本構成を示す図、第４
図は本考案を具体的に実施した入出射角可変式光
学系を示す図である。 １，１２，１３……楕円鏡、２，１４，１５…
…回転鏡、１６〜２１……回転手段、Ｓ……サン
プル、Ｐ……プリズム、１１……試料室外壁。 Figures 1 and 2 are diagrams showing a conventional variable input/output angle optical system, Figure 3 is a diagram showing the basic configuration of the present invention, and Figure 4 is a diagram showing the basic configuration of the present invention.
The figure shows a variable input/output angle optical system that specifically implements the present invention. 1, 12, 13...Elliptical mirror, 2, 14, 15...
...Rotating mirror, 16-21... Rotating means, S... Sample, P... Prism, 11... Sample chamber outer wall.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 集光させた光をサンプル又は光学部品等に入出
射角を変化させながら測定を行なうための光学系
において、楕円鏡を固定して設け、該楕円鏡の一
方の焦点上に回転鏡を配置し、他方の焦点上にサ
ンプル又は光学部品当を配置し、上記回転鏡の回
転によつて入射光を楕円鏡面上で移動させ、サン
プル又は光学部品等に入る角度を変化せしめるこ
とを特徴とした入出射角可変式光学系。 In an optical system for performing measurements while changing the angle of incidence of condensed light on a sample or optical component, etc., an elliptical mirror is fixedly provided, and a rotating mirror is placed on one focal point of the elliptical mirror. , a sample or an optical component is placed on the other focal point, and the incident light is moved on the elliptical mirror surface by rotating the rotating mirror to change the angle at which the incident light enters the sample or the optical component. Variable output angle optical system.
JP17965885U 1985-11-21 1985-11-21 Expired JPH0430576Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17965885U JPH0430576Y2 (en) 1985-11-21 1985-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17965885U JPH0430576Y2 (en) 1985-11-21 1985-11-21

Publications (2)

Publication Number Publication Date
JPS6286546U true JPS6286546U (en) 1987-06-02
JPH0430576Y2 JPH0430576Y2 (en) 1992-07-23

Family

ID=31122907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17965885U Expired JPH0430576Y2 (en) 1985-11-21 1985-11-21

Country Status (1)

Country Link
JP (1) JPH0430576Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002174591A (en) * 2000-12-07 2002-06-21 Jasco Corp Total reflection measuring device
JP2015503750A (en) * 2011-12-31 2015-02-02 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッドＪ．Ａ．Ｗｏｏｌｌａｍ Ｃｏ．，Ｉｎｃ． Terahertz ellipsometer system and method of use thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48146U (en) * 1971-05-24 1973-01-05
JPS597922A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Light beam printer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48146U (en) * 1971-05-24 1973-01-05
JPS597922A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Light beam printer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002174591A (en) * 2000-12-07 2002-06-21 Jasco Corp Total reflection measuring device
JP2015503750A (en) * 2011-12-31 2015-02-02 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッドＪ．Ａ．Ｗｏｏｌｌａｍ Ｃｏ．，Ｉｎｃ． Terahertz ellipsometer system and method of use thereof

Also Published As

Publication number Publication date
JPH0430576Y2 (en) 1992-07-23

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