JPH05150443A - Foreign matter inspecting device - Google Patents

Abstract

PURPOSE:To enable the inspection with high accuracy without receiving the influence of the stray light of a frame by efficiently setting an optimum inspection region according to the kinds of a pellicle film and pellicle frame. CONSTITUTION:The surface of a reticule 1 is scanned by inspecting light in a direction (x). The reticule 1 is simultaneously moved in a direction (y) by a transporting arm 5. The light from the reticule 1 at this time is received by plural photodetectors R, F and is photoelectrically converted. The photoelectric conversion signal is sent to signal processing sections 10a, 10b where the foreign matter inspection is executed in accordance with this signal. The reticule 1 is moved to the position where the stray light of the frame is received and thereafter the optical scanning is executed in the inspection region, by which the region meeting the optical characteristics of at least either of the pellicle film 3 and the frame 2 is set for each of the photodetectors in a decision section 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to at least a surface of a protective film (hereinafter referred to as a pellicle film) supported by a frame member and a photomask surface having a pellicle film, which is used, for example, in manufacturing a semiconductor element. The present invention relates to an apparatus suitable for foreign matter inspection.

[0002]

2. Description of the Related Art FIG. 7 is a perspective view schematically showing the structure of a conventional foreign matter inspection apparatus of this type. In the figure, the reticle 101 to be inspected is fixed on the transfer arm 105, and the pellicle frame 2 is placed on the pattern formation surface. A pellicle film 103 is stretched on the pellicle frame 102 so as to cover the pattern forming surface of the reticle. The inspection light emitted from the light source 107 obliquely enters the reticle 101 via a vibrating mirror 108 as a scanning unit. The inspection light scans the surface of the reticle 101 in a predetermined range in the x direction by the vibration of the mirror 108.

The inspection area of the reticle 101 is constant in the conventional inspection apparatus of this type, and in order to scan the entire area within the constant area, the reticle 101 is moved by the transfer arm 105 at the same time as scanning in the x direction. Is moved in the direction.
At this time, the scattered and diffracted light generated from the pattern forming surface of the reticle 101 is received by the light receiver 104 and photoelectrically converted, and the foreign matter is detected based on the output signal of the light receiver 104.

Next, the inspection area in the conventional foreign substance inspection apparatus will be described with reference to FIG. FIG. 8 shows an inspection start position 106 a on the reticle 101 to be inspected on which the pellicle film 103 is mounted by the pellicle frame 102 (the reticle 10 without the inspection light being blocked by the pellicle frame 102).
1), the reticle 101 is sequentially moved in the y direction by a transfer arm (not shown) to move the inspection position to the left side of the drawing (pellicle frame 10).
2 closer to the inner wall 102a on the left side), and the inspection position 106
It shows how b is inspected. In the figure, the inspection light (incident light) incident on the reticle 101 from a light source (not shown) is indicated by a solid line, and the inspection light (received light) traveling from the surface of the reticle 101 to the light receiver 104 is indicated by a dashed line. Further, the direction of the incident light at the inspection start position 106a is I ₁ , the inspection position 1
The direction of the incident light at 06b is indicated by I ₂ .

Here, when the incident angle α (the angle formed by the normal line of the reticle 101 and the incident light) and the light receiving angle β (the angle formed by the normal line of the reticle 101 and the received light) are increased, what kind of pellicle film 103 is generally used. However, the transmittance decreases while repeating rising and falling. When the transmittance of the pellicle film 103 at at least one of the incident angle α and the light receiving angle β is not 100%,
Incident light and received light are repeatedly reflected between the pellicle film 103 and the surface of the reticle 101.

The intersection 10 of the optical paths of these incident light and received light
Inner wall 102 of pellicle frame 102 on 9a and 109b
Considering the case where there is a, the inner wall 102a of the frame is indirectly illuminated by the incident light I ₂ and generates scattered light. Then, the scattered light from the inner wall 102a is
Since it exists on the optical path of the received light, it is received by the light receiver 104 as stray light (hereinafter referred to as frame stray light).

In the conventional foreign matter inspection apparatus, the incident angle α and the light receiving angle β are set to be small in order to reduce the frame stray light amount, and the stray light amount can be ignored in the inspection area A (FIG. 8) in almost any pellicle. It was configured to be less.

[0008]

However, with respect to the incident angle α, the light receiving angle β and the foreign matter inspection capability described above, the scattered light intensity from the foreign matter increases as the incident angle α and the light receiving angle β increase, and the foreign matter inspection is performed. Since the capability is improved, the inspection capability is sacrificed in the conventional foreign substance inspection apparatus. That is, in the conventional apparatus, when the pellicle film or the photomask with the pellicle film is to be inspected, the arrangement of the inspection light irradiating means and the light receiving means is significantly restricted, and the inspection accuracy is improved. I couldn't.

Further, in the prior art, since the inspection area is always constant, there is a problem that the area near the inner wall of the frame is not inspected even when a pellicle film or a pellicle frame which is relatively hard to generate scattered light is used. there were.

The present invention has been made in view of the above points, and when at least one of the surface of the pellicle film and the surface of the photomask on which the pellicle film is mounted is to be inspected, depending on the type of the pellicle film or the pellicle frame. It is an object of the present invention to provide an apparatus capable of independently and efficiently setting an optimum inspection region for each of a plurality of light receiving means, and performing highly accurate foreign matter inspection without being affected by frame stray light. ..

[0011]

In order to solve the above problems, in the present invention, a surface of a photomask having at least one of a protective film surface supported by a frame member and the protective film is used as a surface to be inspected, Irradiation means for irradiating the surface to be inspected with a light beam, a plurality of light receiving means for receiving and photoelectrically converting light from the surface to be inspected, and foreign matter on the surface to be inspected based on a detection signal of the light receiving means. In a foreign matter detection device having a detection means for detecting, in accordance with the optical properties of at least one of the frame member and the protective film, the inspection region on the surface to be inspected independently for each of the plurality of light receiving means, It is decided to provide an inspection area setting means that can be changed. As a specific configuration of the inspection area setting means in the present invention, an amount corresponding to the amount of scattered light from the frame member received by the light receiving means when the surface to be inspected is irradiated with the light beam is There is one that has a measuring unit that measures each of a plurality of light receiving units and sets the inspection region based on the measurement result of the measuring unit. Further, the inspection area setting means is provided with a storage means for storing the information measured by the measurement means for at least one type of the protective film and the frame member, and based on the information stored in the storage means. The inspection area may be set.

[0012]

The operation of the present invention will be described with reference to FIG. Figure 6
In (A), the pellicle film 3 is held by the pellicle frame 2 placed on the pattern formation surface of the reticle 1. The inspection light I illuminates the inspection point 6 on the reticle 1 from an oblique direction, is reflected by the surface of the reticle 1 and enters the light receiver 4. In the figure, the inspection light (incident light) incident on the reticle 1 from a light source (not shown) is shown by a solid line, and the inspection light (received light) traveling from the surface of the reticle 1 to the light receiver 4 is shown by a dashed line. Further, for the sake of simplicity, only the chief ray is shown for both the incident light and the received light.

Next, in order to move the inspection point on the reticle 1, when the reticle 1 is moved in the y direction in the figure, the inner wall 2a of the pellicle frame 2 relatively approaches the inspection point. This state is shown in FIG. 6 (B), and the inspection point moves to 6 '. In FIG. 6B, the inspection light I ′ is the pellicle film 3 and the reticle 1.
The inner wall 2a of the frame is repeatedly reflected multiple times on the surface.
Illuminate point i. Further, the point d on the inner wall is on the optical axis obtained by folding back a plurality of received optical axes at an angle γ formed by the light receiver 4 and the reticle. If there is a light emitting point on this optical axis, it is incident on the light receiver 4.

At this time, there are intersections A, B, C, and D of the optical path in which the incident light repeatedly reflects and travels a plurality of times, and the optical axis in which the received light optical axis is refracted a plurality of times. When the reticle 1 further moves in the y direction shown in the figure, the frame inner wall 2a passes through the respective intersection positions from the intersection D to the position of the intersection A sequentially. When the frame inner wall 2a is present at each of these intersections, the frame inner wall 2a is illuminated by the incident light and produces scattered light. The scattered light is on the optical axis obtained by bending the received optical axis back a plurality of times, and thus enters the light receiver 4.

Next, FIG. 6 (C) is a drawing corresponding to FIG. 6 (B) drawn in consideration of the solid angle of each light beam of the irradiation optical system and the light receiving optical system. In the figure, the optical paths of the outermost light rays are shown for each of the incident light and the received light, and a ', a', c ',
When the frame inner wall 2a is present in the region indicated by d), the inner wall 2a is illuminated with the inspection light, and the scattered light from the inner wall 2a enters the light receiver 4. .

The incident light quantity of the frame stray light at this time is 1. The rougher the surface of the inner wall 2a is The larger the reflectance at the incident angle of the pellicle film 3 (angle α in FIG. 8) is, 3. The larger the reflectance of the pellicle film 3 at the light receiving angle (angle β in FIG. 8), 4. The smaller the number of times the incident light is reflected, The smaller the number of times the received light is reflected, The smaller the angle between the optical axis of the light receiving system and the incident surface, the larger the angle.

Therefore, in FIG. 6B, the incident light quantity of the scattered light from the frame inner wall 2a becomes larger in the order of D → A,
The influence on the inspection operation becomes large. The present invention has been made paying attention to that the amount of scattered light from the inner wall of the frame depends on the above 1-3, that is, the state of at least one of the pellicle film and the pellicle frame. The inspection area, which is constant regardless of the optical characteristics of the pellicle film and the pellicle frame, is set to be changeable for each light receiving unit.

That is, in the present invention, for each type of pellicle film or pellicle frame, it is necessary to measure in advance how close the inspection point and the inner wall of the frame are to the stray light that will interfere with the inspection. Then, based on this information, an optimum inspection region (a region capable of covering a necessary inspection range as much as possible without being affected by frame stray light) is set according to the type of the pellicle film or the pellicle frame.

When the pellicle film or the pellicle frame is less likely to generate frame stray light, for example, the pellicle frame is subjected to a low reflection treatment (such as smoothing the inner wall,
This is a process of providing a diffused reflection preventing member, and is disclosed in Japanese Patent Application No. 3-
Details about No. 56935. ), Any inspection area that can cover the entire required inspection range is set.

When the pellicle film or the pellicle frame is likely to generate frame stray light (when the pellicle film has a low transmittance for the inspection light and the frame has a high reflectance), a certain light-receiving means can be inspected. However, since the foreign matter inspection apparatus of the present invention has a plurality of light receiving means and an inspection area is set for each light receiving means, the inspectable area of each light receiving means is set. The combination can always cover the required inspection range.

Considering that the scattering characteristics of the actual foreign matter are unknown, it is important to perform the foreign matter inspection by using a plurality of light receiving means which face the surface to be inspected from different directions. However, according to the present invention, An inspection area is set that can cover as much of the necessary inspection range as possible without being affected by frame stray light for each light receiving means, so that the overlapping portion of each inspection area can be maximized and the inspection accuracy can be improved. Is possible.

[0022]

Embodiments of the present invention will now be described with reference to the drawings. 1 is a perspective view showing the configuration of an optical system of a foreign matter inspection apparatus according to the first embodiment of the present invention, and FIG. 2 is a schematic configuration diagram of the entire foreign matter inspection apparatus according to the first embodiment. In the figure, a pellicle frame 2 is placed on a reticle 1 so as to surround a pattern formation region, and a pellicle film 3 is stretched on the pellicle frame 2.

Inspection light (incident light) I emitted from the light source 7
Is obliquely incident on the reticle 1 via a vibrating mirror 8 as a scanning means. This incident angle is preferably between 80 ° and 10 ° so that the inspection light I is not blocked by the pellicle frame 2. The inspection light I scans the reticle 1 within a predetermined range in the x direction by the vibrating mirror. On this occasion,
As for the frame inner wall in the y direction, the frame stray light does not usually cause a problem, so that the scanning range in the x direction is set in advance to a fixed range.

The reticle 1 with the pellicle film 3 is fixed on the transfer arm 5, and the transfer arm 5 is driven by the drive unit 1.
5 is configured to be movable in the y direction and rotatable in the xy plane. The movement amount of the transfer arm 5 is measured by a length measuring device such as a linear encoder, and is controlled to a predetermined value by the transfer control unit 14 based on a signal from the determination unit 13 described later.

By scanning in the x direction by the vibrating mirror and moving the transport arm 5 in the y direction, the entire surface of a preset inspection region (described later) is uniformly scanned by the inspection light. At this time, the light generated from the reticle 1 to be inspected is received by the photodetectors FL, FR and RR, RL, and photoelectrically converted there. In this embodiment, the light receivers RR and RL have an optical axis in a direction substantially parallel to the incident surface of the inspection light, and the inspection light I
Is arranged so as to face the reticle 1 from the incident direction, the light receivers FL and FR have an optical axis in a direction substantially perpendicular to the incident surface of the inspection light, and the reticle 1 from the scanning direction (x direction) by the inspection light I. It is arranged to face. Note that FIG.
R and F in the inside correspond to FL or FR, RR or RL in FIG. 1, respectively.

The photoelectric conversion signals from the photodetectors F and R are sent to the signal processing section 10a and the signal processing section 10b, respectively, and foreign matter is detected based on these signals. Signal processing for detecting a foreign matter is not particularly limited, but, for example, scattered and diffracted light from a pattern has relatively high directivity, and scattered and diffracted light from foreign matter is relatively omnidirectional. This can be utilized to discriminate the foreign matter from the regular pattern.

Further, in the case where the surface inspection through the pellicle film 3 is performed as in the present embodiment, in order to compensate for the decrease in the photoelectric conversion signal due to the interposition of the pellicle film 3, the transmittance of the pellicle film 3 is adjusted according to the transmittance. It is desirable to perform sensitivity correction of the light receivers F and R. In this embodiment, the signal processing units 10a and 10b can be controlled by an instruction from the pellicle transmittance measuring unit 12 and the sensitivity correcting unit 11 so that all the inspections can be performed automatically. The transmittance of the pellicle film 3 is preferably measured by irradiating the pellicle film 3 with light having the same wavelength as the inspection light I at an incident angle and a light receiving angle at the time of actual inspection.

Next, the structure and operation for setting the inspection area in this embodiment will be described. In the present embodiment, in order to always set the inspectable area with the same threshold value under the light receiving sensitivity condition equivalent to that in the actual foreign substance inspection, the light receiver R having the optical axis in the direction substantially parallel to the incident surface of the inspection light I is used. It is configured to measure the inspectable area of the light receiver R by using it. At this time, the light receiving sensitivity is corrected in accordance with the instructions from the above-mentioned transmittance measuring unit 12 and sensitivity correcting unit 11 for the loss amount corresponding to the transmittance of the pellicle film. Further, in this embodiment, the y-direction stroke of the transfer arm 5 is set to be sufficiently larger than that of the conventional apparatus. This is because it is necessary to bring the inspection point close to the frame when measuring the inspectable area or when performing the foreign substance inspection of the reticle using the frame subjected to the low reflection processing.

In measuring the inspectable area of the light receiver R, first, the drive unit 1 is moved to a measurement position where the scattered light from the pellicle frame 2 can be received within a desired inspection area.
5. The reticle 1 is moved by the transfer arm 5. Figure 2
Indicates this state. Next, the oscillating mirror 8 scans the reticle 1 with the incident light I in the x direction, and the reflected light from the reticle 1 scans the frame inner wall 2a. At this time, the scattered light from the inner wall 2 a of the frame is received by the light receiver R and photoelectrically converted, and the photoelectric conversion signal from the light receiver R is input to the determination unit 13 via the signal processing unit 10.

In this determination unit 13, a threshold value is set in advance for the amount of frame stray light (set in consideration of whether it will interfere with the actual foreign substance inspection).
It is determined whether the signal from the light receiver R exceeds this threshold value. When the value is equal to or less than the threshold value, the determination unit 13 sends a signal to the transfer operation control unit 14 to move the transfer arm 5 in the y direction by the drive unit 15 to bring the inspection point closer to the inner wall of the frame. Then, the determination unit 13 determines whether or not the frame stray light amount at that position exceeds a threshold value. By repeating the above operation, the position of the inspection point (the limit position in the y direction) when the frame stray light amount exceeds the threshold value is measured, and the inspectable area is determined by this.

Alternatively, the type of the frame 2 is determined by the signal from the light receiver R when the frame inner wall 2a is scanned by the reflected light from the reticle 1 at the measurement position (the state of FIG. 2) where the scattered light from the pellicle frame 2 can be received. Judge,
A suitable inspection area may be selected from among some preset inspection areas.

Further, when the frame stray light amount does not exceed the threshold value even when the inspection point is brought close to the frame inner wall 2a, that is, the frame 2 is appropriately subjected to the low reflection processing in the judging section 13 (or the pellicle film 3 is processed). When it is determined that the transmittance for the inspection light is almost 100%), an arbitrary inspection area is set within a range in which the inspection light I cannot fall on the frame 2.

Next, the foreign substance inspection operation will be described with reference to FIGS. 4 and 5. The line S _{1 in} FIG. 4 (corresponding to the line when the inspection start point 106a in FIG. 8 is viewed from the normal line direction of the reticle), that is, the incident light I is not blocked by the pellicle frame 2 and is on the surface to be inspected. The position at which the light begins to be incident is the inspection start position. The figure shows a state in which the incident beam is optically scanned in the x direction on the line S ₁ . The foreign substance inspection is started from this state, and the inspected reticle 1 is conveyed in the y direction in FIG. The amount of movement in the y direction is determined by the determination unit 1
3 is controlled by the drive operation control unit 14 based on the information about the inspectable area of the light receivers RL and RR, and the inspection area (F ₁ is controlled by the light receivers RL and RR and FR and FL).
+ R ₁ ) is checked. The inspection area F ₁ which cannot be inspected by the light receivers RR and RL is inspected by the light receivers FL and FR. When the inspection is performed in the state of FIG. 4 (when the direction mark M of the reticle 1 is located at the lower left), the inspection between the line S ₁ and the line E ₁ is performed, and the inspection area N
Has not been tested.

Next, in order to inspect the inspection region N, the reticle 1 is rotated 180 ° until the direction mark M of the reticle 1 is located at the upper right position as shown in FIG. 5, and the second inspection is performed. FIG. 5 is a diagram when the inspection of the inspection region N is started by changing the orientation of the reticle 1 of FIG. The figure shows a state in which the incident beam is optically scanned in the x direction on the line S ₁ . Since the area (F ₂ + R ₂ ) in FIG. 5 is within the inspectable area of the above-described photodetectors RL and RR, the photodetector RL,
Inspected by RR, FR, FL
The inspection area F ₂ is inspected by L and FR. As a result, the line S not inspected in the first inspection (FIG. 4)
The area N between ₁ and the line E ₂ will be inspected in the second inspection (FIG. 5). In the second inspection, the same as the first inspection, the incident light I is not blocked by the pellicle frame 2 and the inspection is started from the position S ₂ where the incident light I begins to be incident on the surface to be inspected. Area or line S
For the region between ₁ and the line S ₂ , the inspection results may be integrated.

As described above, the entire required inspection area is inspected by the four light receivers FL, FR and RR, RL, and the inspection result is displayed on the display unit 17. In the present embodiment, the inspection areas of the light receivers RL and RR are set so as to cover the most necessary inspection area within the range that is not affected by the frame stray light. Therefore, the light receivers RL and RR and the light receiver F are set.
The overlapping portion of the inspection areas of L and FR becomes the maximum, so that the foreign matter can be detected more reliably.

Next, FIG. 3 shows a second embodiment of the present invention, which is different from the first embodiment in the structure for determining the inspectable area. The other structure is similar to that of the first embodiment. That is, in the embodiment of FIG. 3, an input unit 16 including a keyboard, a bar code reader and the like is provided instead of the determination unit 13 of FIG. 2, and the types of the pellicle film 3 and the pellicle frame 2 are input from the outside. It can be configured.

In this embodiment, the inspectable area of each photodetector RL, RR, FL, FR is measured in advance for each type of pellicle film 3 and pellicle frame 2 mounted on the reticle 1 to be inspected (measurement). Is performed in the same manner as in the first embodiment), and the measurement results are the pellicle film 3 and the pellicle frame 2.
It is stored in the device for each product type. At the time of actual inspection, the optimum inspection area is determined for each light receiver by comparing the types of the pellicle film 3 and the pellicle frame 2 input to the input unit 16 with the previously stored data regarding the inspectable area. Is set to. The foreign substance inspection operation after setting the inspection region is the same as that of the first embodiment.

In this embodiment, in addition to the data regarding the inspectable area, the sensitivity correction values of the light receivers FL, FR, RL, and RR corresponding to the transmittance of the pellicle film 3 may be input from the outside.

In the above first and second embodiments, the example of inspecting the surface of the reticle on which the pellicle film is mounted has been described, but the foreign matter inspection apparatus of the present invention is also applied to the foreign matter inspection of the pellicle film itself. It goes without saying that you can do it.

The arrangement of the optical system, particularly the arrangement of the plurality of light receivers, is not limited to the above embodiment. In the above embodiment, the inspectable area is measured only for the light receivers RL and RR. However, depending on the arrangement of the light receivers, the inspectable area is measured for each light receiver and the inspection area is set. good.

[0041]

As described above, the foreign matter inspection apparatus of the present invention is provided with the means for setting the inspection area to be changeable in accordance with the optical properties of at least one of the pellicle film and the pellicle frame. For at least one of the film and the pellicle frame, it is possible to efficiently set the inspection area that can cover the most necessary inspection range without being affected by the frame stray light and perform the foreign matter inspection.

Further, since the foreign matter inspection apparatus of the present invention has a plurality of light receiving means and the inspection area is set for each light receiving means,
By combining a plurality of inspection areas, it is possible to always cover the necessary inspection range and maximize the overlapping portion of each inspection area. The inspection accuracy can be improved by increasing the overlapping portion of the inspection regions of the light receiving means arranged at different positions.

Further, according to the present invention, the arrangement of the irradiation means and the light receiving means for the inspection light is not significantly restricted,
The inspection light irradiating means and the light receiving means can be arranged in a preferable manner in order to improve the foreign matter detection ability, which is advantageous in realizing detection of fine foreign matter and inspection of fine patterns and foreign matter discrimination.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of an optical system of a foreign matter inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a configuration diagram showing an overall configuration of a foreign matter inspection device according to a first embodiment of the present invention.

FIG. 3 is a configuration diagram showing an overall configuration of a foreign matter inspection device according to a second embodiment of the present invention.

FIG. 4 is a conceptual diagram for explaining a foreign substance inspection operation in the embodiment of the present invention.

FIG. 5 is a conceptual diagram for explaining a foreign substance inspection operation in the embodiment of the present invention.

6 (A), (B) and (C) are conceptual diagrams for explaining the operation of the present invention.

FIG. 7 is a perspective view showing a configuration of a conventional foreign matter inspection device.

FIG. 8 is a conceptual diagram for explaining frame stray light in a conventional foreign matter inspection apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Reticle, 2 ... Pellicle frame, 2a ... Frame inner wall, 3 ... Pellicle film, FL, FR, RL, RR ... Photo receiver, 5 ... Conveying arm, 6, 6 '... Inspection point, 10a, 10
b ... signal processing unit, 11 ... sensitivity correction unit, 12 ... pellicle transmittance measuring unit, 13 ... determination unit, 14 ... transport operation control unit, 1
5 ... Drive unit, 16 ... Input unit, 17 ... Display unit.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H01L 21/66 J 8406-4M

Claims (4)

[Claims] 1. An irradiation means for irradiating a light beam onto the surface to be inspected, wherein at least one of the surface of the protective film supported by the frame member and the surface of the photomask provided with the protective film is used as the surface to be inspected. In a foreign matter detection device having a plurality of light receiving means for receiving light from an inspection surface and performing photoelectric conversion, and a detection means for detecting foreign matter on the surface to be inspected based on a detection signal of the light receiving means, the frame member and According to at least one of the optical properties of the protective film, the inspection area on the surface to be inspected is independently provided for each of the plurality of light receiving means, and the inspection area setting means is provided to be changeable. Foreign matter inspection device. 2. The inspection area setting means sets the plurality of light receiving means to an amount corresponding to the amount of scattered light from the frame member received by the light receiving means when the surface to be inspected is irradiated with the light beam. The foreign matter inspection apparatus according to claim 1, further comprising a measuring unit that measures each of the units, and sets the inspection region based on a measurement result of the measuring unit. 3. The inspection area setting means has a storage means for storing the information measured by the measuring means for each type of at least one of the protective film and the frame member, and the information stored in the storage means. The foreign matter inspection apparatus according to claim 1, wherein the inspection area is set based on the above. 4. The inspection area setting means sets the area so that the overlapping portion of the inspection areas set independently for each of the plurality of light receiving means is maximized. Foreign matter inspection device.