JPH0471707B2 - - Google Patents
Info
- Publication number
- JPH0471707B2 JPH0471707B2 JP59142152A JP14215284A JPH0471707B2 JP H0471707 B2 JPH0471707 B2 JP H0471707B2 JP 59142152 A JP59142152 A JP 59142152A JP 14215284 A JP14215284 A JP 14215284A JP H0471707 B2 JPH0471707 B2 JP H0471707B2
- Authority
- JP
- Japan
- Prior art keywords
- polyimide film
- metal foil
- polyimide
- etching
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001721 polyimide Polymers 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 238000005530 etching Methods 0.000 claims description 28
- 239000011888 foil Substances 0.000 claims description 26
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 229920006259 thermoplastic polyimide Polymers 0.000 claims description 17
- 239000012790 adhesive layer Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 239000004642 Polyimide Substances 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 239000011889 copper foil Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000004080 punching Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【発明の詳細な説明】
(発明の分野)
本発明は、金属箔・ポリイミドフイルム積層板
からなる印刷配線板およびその製造方法に関し、
詳しくはポリイミドフイルムと金属箔を接着する
接着剤として特定の熱可塑性ポリイミドを用いた
製造容易で高精度な印刷配線板、および孔開け加
工等の形状加工を容易かつ高精度にした印刷配線
板の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a printed wiring board made of a metal foil/polyimide film laminate and a method for manufacturing the same.
For details, we will introduce easy-to-manufacture, high-precision printed wiring boards that use a specific thermoplastic polyimide as an adhesive for bonding polyimide film and metal foil, and printed wiring boards that are easy to manufacture and highly accurate in shape processing, such as hole punching. Regarding the manufacturing method.
(発明の背景)
従来、金属箔・ポリイミドフイルム積層板の製
造にあたつて、金属箔とポリイミドフイルムを接
着するには接着剤としてエポキシ樹脂、熱硬化性
ポリイミド樹脂、アクリル樹脂等の熱硬化性樹脂
が使用されている。これらの樹脂は、ベースフイ
ルムであるポリイミドフイルムのエツチング液に
対しほとんど侵されないため、積層板に孔等の貫
通部分が必要な場合にはドリル、打抜きプレス等
の機械的手段を用いる必要がある。(Background of the Invention) Conventionally, in manufacturing metal foil/polyimide film laminates, thermosetting adhesives such as epoxy resin, thermosetting polyimide resin, and acrylic resin have been used to bond metal foil and polyimide film together. resin is used. These resins are hardly affected by the etching solution for the polyimide film that is the base film, so if a hole or other penetrating portion is required in the laminate, it is necessary to use mechanical means such as a drill or punching press.
しかし、ドリルによる孔開けは加工精度が悪
く、バリやスミヤの発生があり、使用可能なドリ
ルの寸法により孔の最小径が限定されるという欠
点がある。打抜きプレスでは加工精度が悪いため
微細で複雑な加工が困難であり、また製作費用が
高い金型を使用しなければならない。さらに、こ
れらの方法では金属箔裏面の樹脂等を除去して新
たな導通部分として用いることは困難である。 However, drilling holes with a drill has disadvantages in that processing accuracy is poor, burrs and smear occur, and the minimum diameter of the hole is limited by the dimensions of the drill that can be used. Punching presses have poor processing accuracy, making it difficult to perform fine and complicated processing, and require the use of molds that are expensive to manufacture. Furthermore, with these methods, it is difficult to remove the resin etc. on the back side of the metal foil and use it as a new conductive part.
(発明の目的)
本発明は、上述の従来技術の欠点を解決すべく
なされたもので、孔開け加工等の形状加工が容易
で、かつ加工精度が高い印刷配線板およびその製
造方法を提供することを目的とする。(Object of the Invention) The present invention has been made to solve the above-mentioned drawbacks of the prior art, and provides a printed wiring board that is easy to perform shape processing such as hole punching and has high processing accuracy, and a method for manufacturing the same. The purpose is to
本発明者らは、上記目的を達成するために鋭意
検討した結果、ポリイミドフイルムと金属箔を接
着する接着剤としてベースポリイミドフイルム用
エツチング液でエツチング可能なものを用いるこ
とにより上述の問題点が解決できることを見出し
本発明に到達した。 As a result of extensive studies to achieve the above object, the inventors of the present invention solved the above problems by using an adhesive that can be etched with an etching solution for base polyimide films as an adhesive for bonding polyimide film and metal foil. We have discovered what can be done and arrived at the present invention.
(発明の構成)
すなわち、本発明は、ポリイミドフイルムの片
面もしくは両面に、下記化学式
で示される熱可塑性ポリイミドの接着剤層を介し
て導体回路が形成され、かつ露出した熱可塑性ポ
リイミド接着剤層およびその下層にあるポリイミ
ドフイルムの少なくとも一部がエツチングされて
いることを特徴とする印刷配線板である。(Structure of the Invention) That is, the present invention provides the following chemical formula on one or both sides of a polyimide film. A printing characterized in that a conductor circuit is formed through a thermoplastic polyimide adhesive layer represented by the above, and at least a portion of the exposed thermoplastic polyimide adhesive layer and the underlying polyimide film are etched. It is a wiring board.
また、本発明は、下記化学式
で示される熱可塑性ポリイミドを接着剤としてポ
リイミドフイルムの片面もしくは両面に金属箔を
接着し金属箔・ポリイミドフイルム積層板を製造
する工程と、該金属箔をエツチング操作すること
により導体回路を形成する工程と、該金属箔のエ
ツチング操作により露出した熱可塑性ポリイミド
接着剤層およびその下層にあるポリイミドフイル
ムをエツチング操作により形状加工する工程から
なることを特徴とする印刷配線板の製造方法であ
る。 Furthermore, the present invention also provides the following chemical formula A process of manufacturing a metal foil/polyimide film laminate by bonding metal foil to one or both sides of a polyimide film using thermoplastic polyimide as an adhesive, and a process of forming a conductor circuit by etching the metal foil. This method of manufacturing a printed wiring board is characterized by comprising the steps of: and shaping the thermoplastic polyimide adhesive layer exposed by etching the metal foil and the polyimide film thereunder by etching.
以下、本発明の印刷配線板の製造方法について
述べる。 The method for manufacturing a printed wiring board of the present invention will be described below.
まず、本発明においては、特定の熱可塑性ポリ
イミドを接着剤としてポリイミドフイルムの片面
もしくは両面に金属箔を接着して金属・ポリイミ
ド積層板を製造する。例えば、金属箔とポリイミ
ドフイルムの一方または両方に熱可塑性ポリイミ
ドワニスを塗布し、加熱して熱可塑性ポリイミド
層を形成させた後、ホツトプレスにより積層板を
製造するか、あるいは金属箔とポリイミドフイル
ムの間に熱可塑性ポリイミドフイラムを挾みホツ
トプレスにより金属箔・ポリイミドフイルム積層
板を製造する。 First, in the present invention, a metal/polyimide laminate is manufactured by bonding metal foil to one or both sides of a polyimide film using a specific thermoplastic polyimide as an adhesive. For example, a thermoplastic polyimide varnish is applied to one or both of the metal foil and polyimide film, heated to form a thermoplastic polyimide layer, and then a laminate is manufactured by hot pressing, or a laminate is produced between the metal foil and the polyimide film. A thermoplastic polyimide film is sandwiched between the two and hot pressed to produce a metal foil/polyimide film laminate.
本発明において接着剤として用いる特定の熱可
塑性ポリイミドは上述のように下記の化学式を有
する。 The specific thermoplastic polyimide used as the adhesive in the present invention has the following chemical formula as described above.
このような熱可塑性ポリイミドは通常のポリイ
ミド用エツチング液でエツチング可能なため、後
の工程で接着剤層とポリイミドフイルムのエツチ
ング操作を同時に行なうことができる。 Since such thermoplastic polyimide can be etched with a common polyimide etching solution, the adhesive layer and the polyimide film can be etched simultaneously in a later step.
次に、金属箔に通常の配線板作成と同様にフオ
トリソグラフイを用いたエツチング操作によつて
導体回路を形成する。 Next, a conductor circuit is formed on the metal foil by etching using photolithography in the same manner as in the production of a normal wiring board.
さらに、前記の金属箔エツチング操作によつて
露出した接着剤層およびその下層にあるポリイミ
ドフイルムをベースポリイミドフイルム用エツチ
ング液にてエツチング除去してスルーホール加工
等の形状加工を行なう。 Further, the adhesive layer exposed by the metal foil etching operation and the underlying polyimide film are removed by etching with an etching solution for base polyimide film to perform shape processing such as through-hole processing.
なお、露出した接着剤層およびその下層にある
ポリイミドフイルムの所望部分のみをエツチング
する場合は、金属箔エツチング後さらにフオトレ
ジスト等によりマスクした後にエツチングすれば
よい。 If only the exposed adhesive layer and the desired portion of the underlying polyimide film are to be etched, etching may be performed after etching the metal foil and then masking with a photoresist or the like.
本発明において形状加工の際には、勿論ドリ
ル、打抜きプレス等の機械的方法を併用すること
もできる。 In the present invention, mechanical methods such as a drill and a punching press can of course be used in conjunction with the shape processing.
以上の如く本発明においては、金属箔の裏側も
容易に金属面を露出させることができ、新しく露
出した金属面は新たな導通部分として利用でき
る。 As described above, in the present invention, the metal surface can be easily exposed on the back side of the metal foil, and the newly exposed metal surface can be used as a new conductive part.
以下、実施例に基づき詳細に説明する。 Hereinafter, a detailed explanation will be given based on examples.
実施例 1
第1図は、本発明に係る両面スルーホール印刷
配線板の製造方法を説明する図である。この両面
スルーホール印刷配線板は以下のようにして製造
される。Example 1 FIG. 1 is a diagram illustrating a method for manufacturing a double-sided through-hole printed wiring board according to the present invention. This double-sided through-hole printed wiring board is manufactured as follows.
銅箔1とベースポリイミドフイルム3の一方ま
たは両方の片面に熱可塑性ポリイミドワニスを塗
布する。オーブン中100℃で30分間加熱し溶剤を
除去した後、徐々に200℃まで昇温し30分間加熱
してイミド化を完了させる。新しく形成されたポ
リイミド接着剤層2が内側になるように銅箔1を
ベースポリイミドフイルムの両面に積層し、ホツ
トプレスにより300℃まで加熱して銅箔1とベー
スポリイミドフイルム3を接着し第1図aに示す
ような銅箔・ポリイミドフイルム積層板を製造す
る。 Thermoplastic polyimide varnish is applied to one or both sides of the copper foil 1 and the base polyimide film 3. After heating at 100°C in an oven for 30 minutes to remove the solvent, the temperature is gradually raised to 200°C and heated for 30 minutes to complete imidization. Copper foil 1 is laminated on both sides of the base polyimide film so that the newly formed polyimide adhesive layer 2 is on the inside, and the copper foil 1 and base polyimide film 3 are bonded together by heating to 300°C using a hot press. A copper foil/polyimide film laminate as shown in a is manufactured.
得られた積層板の両面にフオトレジストを塗布
し、フオトマスクを用いて露光する。銅を溶解す
る部分のレジストを除き、エツチング操作により
銅を除去する。続いてフオトレジストを剥離剤で
取り除き、第1図bに示すような積層板を製造す
る。 Photoresist is applied to both sides of the obtained laminate and exposed using a photomask. The resist in the area where the copper is to be dissolved is removed, and the copper is removed by an etching operation. Subsequently, the photoresist is removed with a stripping agent to produce a laminate as shown in FIG. 1b.
銅エツチング操作により露出したポリイミド接
着剤層2およびその下層にあるベースポリイミド
フイルム3をベースポリイミドエツチング液によ
りエツチング除去することにより、第1図cに示
すように積層板中に貫通したスルーホールAが形
成される。この後通常のスルーホールメツキ工程
により両面スルーホール印刷配線板を完成する。 By etching and removing the polyimide adhesive layer 2 exposed by the copper etching operation and the underlying base polyimide film 3 using a base polyimide etching solution, a through hole A penetrating the laminate is formed as shown in FIG. 1c. It is formed. Thereafter, a double-sided through-hole printed wiring board is completed by a normal through-hole plating process.
実施例 2
第2図は、本発明に係る印刷配線板であつて、
ベースポリイミドフイルムの両面に設けられた金
属箔層の裏面を露出させた印刷配線板の製造方法
を説明する図である。この印刷配線板は以下のよ
うにして製造される。Example 2 FIG. 2 shows a printed wiring board according to the present invention,
It is a figure explaining the manufacturing method of the printed wiring board which exposed the back surface of the metal foil layer provided on both surfaces of the base polyimide film. This printed wiring board is manufactured as follows.
実施例1と同様にして第1図aの銅箔・ポリイ
ミドフイルム積層板を製造する。得られた積層板
の両面にフオトレジストを塗布し、露光によりそ
れぞれ異なるパターンを焼付ける。銅を溶解する
部分のレジストを除いた後、エツチングにより銅
を除去しフオトレジストを剥離する。 The copper foil/polyimide film laminate shown in FIG. 1a is manufactured in the same manner as in Example 1. Photoresist is applied to both sides of the resulting laminate, and different patterns are printed on each side by exposure. After removing the resist in the area where the copper is to be dissolved, the copper is removed by etching and the photoresist is peeled off.
銅エツチング操作により露出したポリイミド接
着剤層2およびその下層にあるベースポリイミド
フイルム3をベースポリイミドエツチング液によ
りエツチング除去する。このようにして第2図b
に示すような片面もしくは両面の銅箔の裏面が露
出した印刷配線板を完成する。 The polyimide adhesive layer 2 exposed by the copper etching operation and the underlying base polyimide film 3 are removed by etching with a base polyimide etching solution. In this way, Figure 2b
Complete a printed wiring board with the back side of the copper foil exposed on one or both sides as shown in .
なお、ここで、露出したポリイミド接着剤層2
およびベースポリイミドフイルム3の所望部分の
みをエツチングする場合は、除去不所望部分をフ
オトレジスト等によりマスクした後エツチングす
ればよい。 Note that here, the exposed polyimide adhesive layer 2
When only desired portions of the base polyimide film 3 are to be etched, etching may be carried out after masking the portions that are not desired to be removed with photoresist or the like.
(本発明の効果)
以上の如く本発明によれば、以下のような効果
を奏する。(Effects of the present invention) As described above, according to the present invention, the following effects are achieved.
フオトリソグラフイを利用するため開口する
孔の最小径はフオトリソグラフイにより形成可
能な径が最小径となり、微細加工および高精度
の加工が可能となる。ゆえにバリ、スミヤ等の
発生が見られない。 Since photolithography is used, the minimum diameter of the hole to be opened is the minimum diameter that can be formed by photolithography, making micro-machining and high-precision machining possible. Therefore, no occurrence of burrs, smear, etc. is observed.
フオトマスクを用いるため、加工形状が自由
に設計でき、また次工程のパターン用のフオト
マスクとの整合性が良い。 Since a photomask is used, the processed shape can be freely designed, and it has good compatibility with the photomask for the pattern in the next process.
従来法では金属箔と樹脂間の接着層の除去が
困難であつたが、本発明によれば金属箔の裏側
の金属面も自由に露出させることができ、導通
部として利用できる。 In the conventional method, it was difficult to remove the adhesive layer between the metal foil and the resin, but according to the present invention, the metal surface on the back side of the metal foil can also be freely exposed and can be used as a conductive part.
従つて、本発明の印刷配線板の製造方法は、フ
レキシブル配線板やリードフレームの製造、両面
配線板のスルーホール加工、多層板の孔開け加工
等印刷配線板の種々の形状加工等に好適に用いら
れる。 Therefore, the printed wiring board manufacturing method of the present invention is suitable for manufacturing flexible wiring boards and lead frames, through-hole processing of double-sided wiring boards, hole punching of multilayer boards, and various other shapes of printed wiring boards. used.
第1図は本発明の一実施例に係る両面印刷配線
板の断面図で、同図aは両面積層板の断面図を、
同図bは銅エツチング後を、同図cはポリイミド
エツチング後を示す図、および、第2図は本発明
の他の一実施例に係る両面印刷配線板の断面図
で、同図aは銅エツチング後を、同図bはポリイ
ミドエツチング後を示す図である。
1…金属箔、2…熱可塑性ポリイミド接着剤
層、3…ベースポリイミドフイルム、A…スルー
ホール貫通部、B…新しく露出した銅面。
FIG. 1 is a sectional view of a double-sided printed wiring board according to an embodiment of the present invention, and FIG.
Figure b shows the state after copper etching, figure c shows the state after polyimide etching, and figure 2 is a cross-sectional view of a double-sided printed wiring board according to another embodiment of the present invention, and figure a shows the state after copper etching. Figure b shows the state after polyimide etching. 1...Metal foil, 2...Thermoplastic polyimide adhesive layer, 3...Base polyimide film, A...Through hole penetration part, B...Newly exposed copper surface.
Claims (1)
下記化学式 で示される熱可塑性ポリイミドの接着剤層を介し
て導体回路が形成され、かつ露出した熱可塑性ポ
リイミド接着剤層およびその下層にあるポリイミ
ドフイルムの少なくとも一部がエツチングされて
いることを特徴とする印刷配線板。 2 下記化学式 で示される熱可塑性ポリイミドを接着剤としてポ
リイミドフイルムの片面もしくは両面に金属箔を
接着し金属箔・ポリイミドフイルム積層板を製造
する工程と、該金属箔をエツチング操作すること
により導体回路を形成する工程と、該金属箔のエ
ツチング操作により露出した熱可塑性ポリイミド
接着剤層およびその下層にあるポリイミドフイル
ムをエツチング操作により形状を加工する工程か
らなることを特徴とする印刷配線板の製造方法。[Claims] 1. On one or both sides of the polyimide film,
Chemical formula below A printing characterized in that a conductor circuit is formed through a thermoplastic polyimide adhesive layer represented by the above, and at least a portion of the exposed thermoplastic polyimide adhesive layer and the underlying polyimide film are etched. wiring board. 2 The following chemical formula A process of manufacturing a metal foil/polyimide film laminate by bonding metal foil to one or both sides of a polyimide film using thermoplastic polyimide as an adhesive, and a process of forming a conductor circuit by etching the metal foil. A method for manufacturing a printed wiring board, comprising the steps of: - processing the shape of the thermoplastic polyimide adhesive layer exposed by etching the metal foil and the polyimide film thereunder by etching.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14215284A JPS6122937A (en) | 1984-07-11 | 1984-07-11 | Printed wiring board and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14215284A JPS6122937A (en) | 1984-07-11 | 1984-07-11 | Printed wiring board and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6122937A JPS6122937A (en) | 1986-01-31 |
JPH0471707B2 true JPH0471707B2 (en) | 1992-11-16 |
Family
ID=15308567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14215284A Granted JPS6122937A (en) | 1984-07-11 | 1984-07-11 | Printed wiring board and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6122937A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0686534B2 (en) * | 1985-10-31 | 1994-11-02 | 三井東圧化学株式会社 | Flexible printed circuit board manufacturing method |
JPH07119087B2 (en) * | 1987-09-30 | 1995-12-20 | 日立化成工業株式会社 | Manufacturing method of flexible double-sided metal-clad laminate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518426A (en) * | 1978-07-27 | 1980-02-08 | Asahi Chem Ind Co Ltd | Heat-resistant flexible electronic parts |
-
1984
- 1984-07-11 JP JP14215284A patent/JPS6122937A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518426A (en) * | 1978-07-27 | 1980-02-08 | Asahi Chem Ind Co Ltd | Heat-resistant flexible electronic parts |
Also Published As
Publication number | Publication date |
---|---|
JPS6122937A (en) | 1986-01-31 |
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