JPH0460698B2 - - Google Patents

Description

Detailed Description of the Invention [Industrial Application Field] The present invention particularly relates to a monomolecular cumulative film that can perform cumulative operations while optically measuring the properties of a monomolecular film spread on a liquid surface. The present invention relates to a forming apparatus, and more specifically, to a monomolecular cumulative film forming apparatus equipped with a measuring device for light absorption characteristics, which is the basis for various characteristic analyzes of monomolecular films.

[Prior Art] Conventionally, as a device for measuring the light absorption characteristics of a certain sample, there is a device that determines the light absorption characteristics from transmittance or reflectance. However, when a sample is irradiated with light, there is scattered light in addition to transmitted light and reflected light, and in order to achieve even higher accuracy, it is important to directly measure the absorption component of light in evaluating light absorption characteristics. .

A device that directly measures the absorption component of light is a measurement device that utilizes the fact that when irradiated with light intermittently, the light energy absorbed by the sample is intermittently converted into heat through a non-radiative relaxation process. Photoacoustic Spectroscopy (PAS)
and photothermal radiation spectrometer
Radiometry: PTR).

PAS devices can be divided into microphone type and piezoelectric element type depending on the type of detector, but with the microphone type it is necessary to place the sample in a sealed sample chamber, and with the piezoelectric element type, the placement of the detector and sample becomes a problem. It is also unsuitable for measuring monolayers spread on the liquid surface. In addition, the PTR device
Since it uses an infrared detector, it has the disadvantage of being susceptible to atmospheric changes such as water vapor.

On the other hand, a photothermal deflection spectrometer (photothermal deflection spectrometer) is a device that directly measures the absorption component of light.
There is a device called Deflection Spectroscopy (PDS). This PDS device utilizes the fact that heat generated by the sample's absorption of light creates a temperature distribution within and near the sample, which changes the refractive index, thereby deflecting the light incident there. That is, the measurement site of the sample is irradiated with excitation light that generates a temperature distribution due to heat generation when the light is absorbed and changes the refractive index, and a probe light that measures the amount of deflection caused by the excitation light. The light absorption characteristics of the sample are measured from the wavelength and the amount of deflection of the probe light. This device allows the sample and detection system to be set independently, making it suitable for on-site measurement and remote measurement. It is similar to

There are two types of PDS devices, transverse type and collinear type, depending on the arrangement of excitation light and probe light. It measures the amount of deflection of the probe light, and a position sensitive detector (PSD) is often used as the detector.

FIG. 10a shows an example of a vertical type, in which excitation light 11 emitted from an excitation light source 10 is turned into intermittent light by a chopper 12, focused by a lens 34, and irradiated onto a sample 4'. The probe light 6 emitted from the probe light source 5 is
The excitation light 11 passes through the area of the sample 4' irradiated by the lens 35 and the optical path adjuster 17 such as a mirror, reaches the detector 7, and the amount of deflection is measured as shown by the dotted line. Ru. FIG. 10b shows an example of the horizontal type, which is the same as the vertical type except that the probe light 5 is irradiated parallel to the surface of the sample 4'.

Theoretical handling in this PDS device is to solve the heat conduction equation within the sample, and the amount of deflection measured as the deflection angle φ is determined by the excitation light intensity, temperature coefficient of refractive index (∂n/∂T), probe It is proportional to the temperature gradient (∂T/∂x) in the area through which the light passes. The term proportional to the light absorption coefficient of the sample is (∂T/
included in ∂x). Furthermore, (∂n/∂T) can take either a positive or negative value depending on the sample, which indicates that the deflection angle can also be both positive and negative.

However, if this PDS device is applied as it is to the measurement of a monomolecular film spread on a liquid surface, the following problems will occur because the monomolecular film that is the sample is extremely thin.

In the case of a monomolecular film spread on the liquid surface, the passage area of the irradiated excitation light is short, so the excitation light is affected by the external environment before reaching the liquid surface, such as dust in the air and fluctuations. Cheap. Further, the influence of unnecessary reflected light and transmitted light after the excitation light reaches the monomolecular film also causes a decrease in the S/N ratio, making it difficult to perform measurements with good accuracy and sensitivity. In particular, in systems that use a special gas in the gas phase on the liquid surface and utilize interaction with a monomolecular film on the liquid surface, it is necessary to make the gas region through which the excitation light passes as short as possible. is difficult.

On the other hand, in the monomolecular film accumulation method (hereinafter referred to as the LB method; see Maruzen, New Experimental Chemistry Course, Vol. 18, pp. 498-507), which is called the Langmiur-Blodget method after the inventor, a monomolecular film is formed on the liquid surface. The characteristics of the monomolecular film on the liquid surface are important because it is transferred onto the surface of a substrate and layered one by one to form an ultra-thin film. It is natural that the structure and molecular orientation of the cumulative film transferred onto the substrate by the LB method is based on the state of the developed monolayer on the liquid surface, but is it true that the structure and molecular orientation of the film are transferred onto the substrate as is? There is a problem with that.

Conventionally, in a monomolecular cumulative film forming apparatus for carrying out the LB method, the surface pressure of the monomolecular film increases as the film formation frame is moved to reduce the development area of the monomolecular film and increase the areal density. A surface pressure measuring device is provided to measure the surface pressure, and whether or not the measured value is within a predetermined range is used to determine whether the state is suitable for transfer to a substrate. That is,
The amount of movement of the film forming frame is controlled based on the measured value of the surface pressure measuring device so that the monomolecular film maintains a constant surface pressure selected within a range suitable for transfer to the substrate. Furthermore, as the monomolecular film is transferred to the substrate, the areal density of the monomolecular film on the liquid surface decreases,
Since the surface pressure will also decrease, the above control is
This process is carried out continuously from the formation of a monomolecular film on the liquid surface until the completion of the transfer operation to the substrate, and is one of the important controls in obtaining a monomolecular cumulative film.

The above-mentioned surface pressure measuring instruments include those that apply a method that indirectly determines the surface tension from the difference in surface tension between the liquid surface that is not covered with a monomolecular film and the liquid surface that is covered with a monomolecular film, and There are methods that directly measure the two-dimensional pressure applied to a floating film forming frame that separates the liquid surface that is not covered by a monomolecular film from the liquid surface that is covered by a monomolecular film, and each method has its own characteristics. Further, in addition to the surface pressure, the occupied area per molecule of the monomolecular film and the amount of change thereof are also usually measured. The occupied area and the amount of change thereof are determined from the left and right movement of the film forming frame.

However, the surface pressure of the monomolecular film in a state suitable for transfer to the above substrate cannot be determined without conducting various experiments, and it is not possible to determine the state of the monomolecular film on the liquid surface based on the surface pressure. The problem is that it is too accurate and lacks accuracy. Furthermore, in general, the surface pressure of a monomolecular film suitable for transfer is 15 to 30 dyn/cm. Outside this range, the arrangement and orientation of molecules may be disturbed and the film may easily peel off. However, in special cases, for example, depending on the chemical structure of the membrane constituents, temperature conditions, etc., a suitable surface pressure value may fall outside the above range, so the above range is only a rough guide.

[Problems to be Solved by the Invention] The present invention is directed to making it possible to accurately and sensitively measure the light absorption characteristics of a monomolecular film spread on a liquid surface, which is extremely thin and in a unique environment. The problem to be solved is to be able to perform accumulation operations while directly analyzing the characteristics of a monomolecular film on the liquid surface.

[Means for Solving the Problems] The means taken to solve the above problems in the present invention is that the measurement site of the monomolecular film spread on the liquid surface is completely transferred from below the liquid surface to the measurement site on the liquid surface. an excitation light source that emits excitation light that is irradiated at an incident angle that is reflected;
A chopper that makes excitation light into intermittent light before it reaches the measurement site, a probe light source that emits a probe light that passes through the measurement site or the vicinity thereof, and a detection that detects the amount of deflection of the probe light that passes through the measurement site or the vicinity thereof. The object of the present invention is to provide a monomolecular cumulative film forming apparatus equipped with a light absorption characteristic measuring device having a device.

[Function] When the excitation light is absorbed by the monomolecular film, the refractive index of the measurement site and its vicinity changes between when the excitation light is irradiated and when it is not irradiated, so this can be detected as the amount of deflection of the probe light. The light absorption characteristics can be measured by This principle itself is the same as that of conventional PDS devices.

By the way, in the present invention, the sample is a monomolecular film spread on the liquid surface, and the excitation light is irradiated from the liquid side so that it is totally reflected on the liquid surface on which the monomolecular film is spread. be. Since the excitation light passes through the liquid and is irradiated onto the monomolecular film, it is not affected by dust or fluctuations in the air, unlike when it is irradiated through the air. The excitation light irradiated to the monomolecular film is totally reflected by the liquid surface, and the transmitted light that passes into the gas phase on the liquid surface is very small, on the order of the wavelength as an evanescent wave at the time of total reflection. There is no need to worry about transmitted light affecting the measured values. Furthermore, since the excitation light is regularly reflected on the liquid surface, there is no adverse effect caused by irregularly reflected light. In this way, the light absorption characteristics of the monomolecular film developed on the liquid surface are measured, and based on this, the characteristics of the monomolecular film are analyzed to determine whether it is in a state suitable for transfer to a substrate. If it is determined whether or not, accurate determination is possible.

[Example] In FIG. 1, 1 is a liquid tank containing liquid 2,
A monomolecular film 4 is spread on the liquid surface 3.
In the drawing, the monomolecular film 4 is schematically shown.

A probe light source 5 is provided on the side of the liquid tank 1. The probe light source 5 emits probe light 6 directly below the liquid surface 3 in a direction parallel to the liquid surface 3. Further, a detector 7 for detecting the position of the probe light 6 sent is provided at a position facing the probe light source 5 with the liquid tank 1 in between.
The signal from this detector 7 is sent to a lock-in amplifier 9 via a driver 8.

An excitation light source 10 is provided slightly below the probe light source 5. The excitation light source 10 irradiates excitation light 11 from the liquid 2 side toward the measurement site of the monomolecular film 4 at an angle at which it is totally reflected by the liquid surface 3 on which the monomolecular film 4 is spread. A chopper 12 is provided along the optical path of the excitation light 11 for irradiating the excitation light 11 as intermittent light. Further, an absorber 13 for absorbing the excitation light 11 is provided at a position where the excitation light 11 emitted from the excitation light source 10 and totally reflected by the liquid surface 3 exits the liquid tank 1 .

The chopper 12 is connected to a lock-in amplifier 9, and the pump light 1 sent from the chopper 12
The signal from the detector 7 can be synchronously detected by using the signal indicating the disconnection state of the detector 7 as a reference signal. The probe light source 5, excitation light source 10, chopper 12, and lock-in amplifier 9 are each connected to a measurement controller 14. The measurement controller 14 controls the optical path and wavelength of the probe light 6 and the excitation light 11 as well as the intermittent interval of the excitation light 11 by the chopper 12, and also controls the light absorption characteristics of the monomolecular film 4 using the signal from the lock-in amplifier 9. is calculated.

Note that the liquid tank 1 does not need to be entirely transparent as long as a transparent window is provided at least in the portion that becomes the optical path of the probe light 6 and the excitation light 11. In addition, if the liquid 2 has a small absorption of the excitation light 11, even if it has a slight direct effect on the probe light 6, it will not have much of an adverse effect on the measurement.
Preferably, it is transparent.

First, excitation light 11 emitted from the excitation light source 10
is modulated into intermittent light by the chopper 12, and irradiates the measurement site of the monomolecular film 4 spread on the liquid surface 3 of the liquid tank 1 from below the liquid surface 3. At this time, the excitation light 11 is incident such that the incident angle is larger than the critical angle of the liquid 2, is totally reflected at the liquid surface 3, and is totally reflected in the liquid 2.
It passes through the inside and exits the liquid tank 1. Only a very small amount of light, on the order of a wavelength, seeps into the gas phase above the liquid surface 3 as an evanescent wave during total reflection. The excitation light 11 emitted from the liquid tank 1 is transmitted to the absorber 1
3, and unnecessary light is cut out. In the area above the measurement site where the intermittent excitation light 11 is totally reflected, the monomolecular film 4 on the liquid surface 3 absorbs the light and intermittently generates heat due to a non-radiative radiation process, which causes refraction in the vicinity. Rate changes will occur intermittently.

On the other hand, since the probe light 6 emitted from the probe light source 5 passes directly below the liquid surface 3 in parallel to the liquid surface 3,
The excitation light 11 passes through the vicinity of the measurement site where the refractive index changes intermittently due to the irradiation of the excitation light 11. When the probe light 6 emitted from the probe light source 5 passes through a region where the refractive index changes intermittently, the optical path is deflected as shown by the dotted line according to the changed refractive index distribution.

The detector 7 continuously receives the probe light 6 and sends the receiving position of the probe light 6 to the lock-in amplifier 9 via the driver 8. Lock-in amplifier 9
receives the signal from the chopper 12 at the same time it receives the signal from the detector 7, and by synchronizing both signals, the light reception position signal of the probe light 6 when the excitation light 11 is irradiated and the light reception position signal of the excitation light 6 11 and the light reception position signal of the probe light 6 during non-irradiation are separated with a good S/N ratio and sent to the measurement controller 14. Based on this sent signal, the measurement controller 14 determines the amount of deflection of the probe light 6 for the wavelength of the excitation light 11 at that time, and calculates the optical absorption characteristics of the monomolecular film 4 based on this. Further, by performing similar measurements while sequentially changing the wavelength of the excitation light 11, the spectral absorption characteristics of the monomolecular film 4 can be obtained.

In this measurement, the measurement part is the measurement controller 1
4 can be freely selected by adjusting the optical path of the excitation light 11, and accuracy can also be ensured by adjusting the optical path of the probe light 6 with the measurement controller 14 according to the position of the liquid level 3. It is also possible to automatically make all necessary adjustments to the probe light source 5, excitation light source 10, and chopper 12 by the measurement controller 14, thereby simplifying the operation.

The light energy absorbed by the monomolecular film 4 is determined from the light intensity distribution of the excitation light 11 at the measurement site, the characteristics of the refractive index change due to heat of the liquid 2, the incident beam position of the probe light 6, and the amount of deflection at that time. Therefore, by monitoring the irradiation energy of the excitation light 11 onto the monomolecular film 4 with a photo sensor or the like, the absolute light absorption characteristics of the monomolecular film 4 can be obtained from both. Then, by changing the wavelength of the excitation light 11, absolute spectral absorption characteristics can be obtained. Also,
Relative spectral absorption characteristics can be obtained by simply determining the relative intensity of the excitation light 11 at each wavelength in advance and determining the amount of deflection of the probe light 6 corresponding to the wavelength. The relative value and absolute value of the light absorption characteristic may be appropriately selected depending on the purpose of measurement.

Monomolecular film 4 was measured using the light absorption property measuring device as described above.
By measuring the light absorption characteristics of the monomolecular film 4 and analyzing other characteristics based on this, the state of the monomolecular film 4 can be accurately grasped. Then, by carrying out the cumulative operation of the monomolecular film 4 while performing this analysis, a monomolecular cumulative film can be formed with high accuracy. The accumulation operation of the monomolecular film 4 and the equipment surrounding the liquid tank 1 for carrying out the accumulation operation are the same as those of the conventional ones, as will be described later. Further, the characteristic analysis and cumulative operation of the monomolecular film 4 can be automatically performed by the measurement controller 14.

As shown in FIG. 2, the probe light 6 may be totally reflected together with the excitation light 11 at the measurement site of the excitation light 11. This has the advantage that it can pass through a portion of the liquid 2 that causes a large change in refractive index, allowing highly sensitive measurement.

As shown in FIG. 3, the probe light 6 can also be passed through a gas phase near the liquid surface 3 and placed under the influence of a change in the refractive index of the gas phase. In this way, since the probe light 6 and the excitation light 11 do not intersect at all, the influence of the excitation light 11 intersecting the probe light 6 can be eliminated.

As shown in FIG. 4, a part of the liquid surface 3 where the monomolecular film 4 is spread is partitioned off by a partition frame 15 to form a liquid surface 3' without the monomolecular film 4, and this liquid surface 3' can also be measured as a reference liquid level. That is, the probe light 6 emitted from the probe light source 5 and the excitation light 11 emitted from the excitation light source 10 and passed through the chopper 12 are split by an optical path splitting means 16 such as a beam splitter or a half mirror, and then separated by a mirror or the like. The liquid levels 3 and 3' are adjusted using the optical path adjusting means 17.
Probe light 6 and excitation light 11 are simultaneously sent to. Then, the amount of deflection of the probe light 6 corresponding to the liquid levels 3, 3' is detected by each detector 7, and measurement is performed based on the difference between the two. In this way, the difference due to the presence or absence of the monomolecular film 4 can be measured, and other influences can be canceled out, making it possible to perform highly accurate measurements.

Furthermore, as shown in FIG. 5, the excitation light 11 can be reflected multiple times. The excitation light 11 emitted from the excitation light source 10 is turned into intermittent light by the chopper 12, is totally reflected at the liquid surface 3, is further reflected by the mirror surface 18 disposed below the liquid surface 3, and irradiates the liquid surface 3 again. do. If the mirror surface 18 is set parallel to the liquid surface 3, reflection will be repeated in the region where the mirror surface 18 exists, and the monomolecular film 4 on the liquid surface 3 will be irradiated at multiple locations, expanding the region where the refractive index distribution occurs. . If the probe light 6 from the probe light source 5 is passed therethrough, the area where the probe light 6 is deflected increases, so that a large deflection angle can be obtained. If the position shift of the probe light 6 due to this deflection is detected by the detector 7, highly sensitive detection can be performed. Letting the incident angle θ, the distance d between the mirror surface 18 and the liquid surface 3, and the reflection area be l, the number of times N of excitation light irradiation has the following relationship. That is, N=l/
The relationship (2dtanθ) holds true, for example, l=30mm,
If d=0.5 mm and θ=60°, N≒18, and the sensitivity can be increased approximately 18 times.

Furthermore, as shown in FIG.
can also be passed through a medium 19 with a large refractive index change, such as a lithium niobate crystal, a titanium oxide crystal, a silicon dioxide crystal, glass, or plastic, provided near the liquid surface 3. That is, heat generated by light absorption by the monomolecular film 4 on the liquid surface 3 is applied to a medium 19 with a large change in thermal refractive index, which is arranged near the monomolecular film 4 and parallel to the liquid surface 3, to change the refractive index. converting it into a change, passing the probe light 6 through the medium 19,
It is possible to increase the amount of deflection of the probe light 6 and achieve highly sensitive detection.

In the present invention, the equipment surrounding one liquid tank for accumulating the monomolecular film 4 is the same as the conventional one, and the accumulation operation procedure is also almost the same as the conventional one, which will be explained with reference to FIGS. 7 and 8. .

As shown in the figure, an inner frame 21 made of, for example, polypropylene is hung horizontally inside a shallow and wide rectangular liquid tank 1 containing a liquid 2, and partitions water surfaces 3 and 3'. . As the liquid 2, pure water is usually used. Inside the inner frame 21, a film forming frame 22 made of, for example, polypropylene is floated. The film forming frame 22 is a rectangular parallelepiped whose width is slightly shorter than the inner width of the inner frame 21, and is capable of two-dimensional piston movement in the left-right direction in the figure. A weight 23 for pulling the film forming frame 22 to the right in the figure is tied to the film forming frame 22 via a pulley 24 . In addition, a magnet 25 fixed on the film forming frame 22
and a pair of magnets 26 which are movable from side to side in the figure above the film forming frame 22 and which repel each other when approaching the magnet 25, thereby causing the film forming frame 22 to move from side to side in the figure. It is possible to move as well as stop. Such a weight 23 and a set of magnets 25, 2
Instead of 6, there is also a system in which the film forming frame 22 is directly moved using a rotary motor or a pulley.

Suction nozzles 28 connected to a suction pump (not shown) via suction pipes 27 are arranged on both sides of the inner frame 21 . This suction nozzle 28 is used to prevent impurities from being mixed into the monomolecular film 4 or the obtained monomolecular cumulative film.
This is used to quickly remove the monomolecular film 4 from the previous process that is no longer needed on the liquid surface 3, 3'. Note that 20 is a board that is attached to a board holder 29 and is vertically moved up and down.

First, the film forming frame 22 is moved and the liquid levels 3, 3'
The monomolecular film 4, etc., which are no longer needed on the top, are swept up and sucked out from the suction nozzle 28, thereby purifying the liquid surfaces 3, 3'. The film forming frame 22 is moved to the left end of the liquid surface 3, 3' cleaned in this way, and ^the
A few drops of a solution of a membrane constituent material dissolved in a volatile solvent such as benzene or chloroform at a concentration of mol/l are dropped onto the liquid surface 3 using a dropper or the like. This solution is liquid level 3
When it spreads upward and the solvent evaporates, a monomolecular film 4 is left on the liquid surface 3.

The monomolecular film 4 exhibits two-dimensional behavior on the liquid surface 3. When the areal density of molecules is low, it is called a gas film of a secondary gas, and a two-dimensional ideal gas equation of state is established between the occupied area per molecule and the surface pressure.

Next, from this gas film state, the film forming frame 22 is gradually moved to the right to gradually reduce the area of the liquid surface 3 where the monomolecular film 4 is developed and increase the areal density, thereby increasing the intermolecular interaction. becomes stronger, and changes from a liquid film of a two-dimensional liquid to a solid film of a two-dimensional solid. When it comes to this solid film, the molecules are arranged and oriented in a neat manner.
It has a high degree of order and uniform ultra-thin film properties.
At this time, the monomolecular film 4, which has become a solid film, can be attached to the surface of the substrate 20 and transferred. Further, by stacking and transferring the monomolecular film 4 to the same substrate 20 multiple times, a monomolecular cumulative film can be obtained. Incidentally, as the substrate 20, for example, glass, synthetic resin, ceramic, metal, etc. are used.

There are roughly two types of methods for transferring the monomolecular film 4 from above the liquid level 3 to the surface of the substrate 20. One is the vertical dipping method and the other is the horizontal deposition method. The vertical immersion method refers to the monomolecular film 4 on the liquid level 3 being maintained in a constant state suitable for accumulation operation while the substrate 20 is moved up and down in the direction across the film, that is, in the vertical direction. This is a method of transferring. The horizontal adhesion method is a method in which the substrate 20 is held horizontally, brought as close as possible to the liquid surface 3 from above, and slightly tilted to touch the monomolecular film 4 from one end for adhesion. In the present invention, the monomolecular film 4 is deposited on the liquid surface 3 so that the monomolecular film 4 is in a state suitable for transfer to the substrate 20 based on the measured values of the above-mentioned light absorption characteristic measuring device. The movement of the film forming frame 22 is controlled from formation to completion of the transfer operation. Further, the light absorption characteristic measuring device according to the present invention may be provided in place of a conventional surface pressure measuring device, or may be used in combination with a surface pressure measuring device.

Next, another embodiment of the present invention will be described with reference to FIG.

A support column 30 is installed on one side of the liquid tank 1 containing the liquid 2.
A substrate holder 29 holding the substrate 20 is attached thereto, so that the substrate 20 can be vertically moved up and down toward the liquid level 3. A lifting device 31 is provided at the bottom of the liquid tank 1, and a measuring unit 32 is installed on top of the lifting device 31.

The measurement unit 32 has a generally hollow donut shape, and its inner bottom side is a mirror surface 18, and the measurement unit 32 is arranged so that the mirror surface 18 is located directly below and parallel to the liquid level 3. The position is adjusted by a lifting device 31. This measurement unit 32 includes a probe light source 5, a detector 7, a probe light source 5,
The probe light 6 emitted from the liquid surface 3 and the mirror surface 18
an optical path adjusting means 17 that guides the optical path to the detector 7 through the
a to 17c, an excitation light source 10, a chopper 12 that uses the excitation light 11 emitted from the excitation light source as intermittent light;
Optical path adjustment means 17d and 17e are provided to reflect the absorber 13 and the excitation light 11 multiple times between the liquid surface 3 and the mirror surface 18 and guide it to the absorber 13. Also,
The lower portions of both inner side surfaces of the measurement unit 32 are window portions 33 through which the probe light 6 and the excitation light 10 pass, while the inside of the measurement unit 32 is partitioned off from the liquid 2. In addition, 22 is a monomolecular film 4 which is a monomolecular film.
This is a film forming frame for adjusting the surface pressure of the film.

As explained in FIG. 5, according to the above embodiment, the light absorption characteristics of the monomolecular film 4 can be measured with high sensitivity. In particular, according to this embodiment, since the light absorption characteristic measuring device is integrated into a unit, the influence of the outside world on the measuring system can be reduced, and direct removal into the liquid tank 1 is also easy.

[Effects of the Invention] According to the present invention, the light absorption characteristics of a monomolecular film developed on the liquid surface can be directly detected on the spot, and various characteristics of the monomolecular film that is being formed can be easily analyzed. Therefore, a monomolecular film can be accumulated under optimal conditions, and the obtained monomolecular cumulative film can be made with higher precision.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing one embodiment of the present invention, and FIG.
6 to 6 are explanatory diagrams of other embodiments of the probe light and excitation light optical paths, respectively. Figure 9 is an explanatory diagram of the embodiment of the present invention, the first
0A and 0B are explanatory diagrams of the prior art. 1...liquid tank, 2...liquid, 3,3'...liquid level,
4... Monomolecular film, 5... Probe light source, 6... Probe light, 7... Detector, 8... Driver, 9
... Lock-in amplifier, 10 ... Excitation light source, 11
... Excitation light, 12 ... Chopper, 13 ... Absorber, 14 ... Measurement controller, 15 ... Partition frame, 16
... Optical path dividing means, 17, 17a to 17e ... Optical path adjusting means, 18 ... Mirror surface, 19 ... Medium, 20
... Substrate, 21 ... Inner frame, 22 ... Film forming frame, 23
... plumbum, 24 ... pulley, 25 ... magnet, 26 ...
... pair magnet, 27 ... absorption pipe, 28 ... suction nozzle, 29 ... substrate holder, 30 ... support column, 3
1... Lifting device, 32... Measurement unit, 33...
...window section.

Claims (1)

[Claims] 1. An excitation light source that emits excitation light that is irradiated from below the liquid surface to the measurement site of the monomolecular film spread on the liquid surface at an incident angle that is totally reflected by the liquid surface, and a A light absorption characteristic measurement comprising a chopper that emits intermittent light, a probe light source that emits a probe light that passes through the measurement site or the vicinity thereof, and a detector that detects the amount of deflection of the probe light that passes through the measurement site or the vicinity thereof. A monomolecular cumulative film forming device comprising: