JPH0459041A - Ultraviolet ray treating device - Google Patents

Abstract

PURPOSE:To hold ozone at a high concn. and to enhance treating efficiency by providing a device for cooling an UV lamp and changing the output of the lamp based on whether the material to be treated is present or not. CONSTITUTION:The electrode of a lamp 1 in the UV ray treating device is covered by a metallic block 4, brought into contact with a water-cooled board 5 and cooled. A water cooling pipeline 6 is provided on the wall surface of an irradiation chamber, the board 5 and a hose 7 are connected in series, water is passed through the members to cool the wall surface of the irradiation chamber, and the atmospheric gas in the chamber is kept at low temp. The output of the lamp 1 is reduced to less than half of its rated output when a material to be irradiated is on standby. Ozone is held at a high concn. in this way, and treating efficiency is enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultraviolet treatment device 4 for treating solid surfaces such as glass, metal, plastic, etc. with ultraviolet rays and ozone generated by the ultraviolet rays.

1. Techniques and issues at the end of the 1st century In recent years, light cleaning has been developed to separate and remove organic contaminants using ultraviolet lamps, and UV light has been applied to glass and resin-filled TM to modify their surfaces. Wetness/V during coach ink
l. Techniques that improve the adhesion of vapor-deposited films have been put into practical use. Since this surface treatment using ultraviolet rays has a high cleaning effect, it is expected to be effectively used in the field of manufacturing I' conductors and liquid crystal display devices.

The lamps used for these purposes emit ultraviolet rays with a wavelength of 185 nm and 24 nm,
This 185 nm ultraviolet light converts atmospheric oxygen into ozone, producing a large amount of ozone. The ultraviolet rays and ozone of 185 former n and 254 former η were irradiated with 14 (f1 in Table 1r11) and did not bring about the effect of light cleaning or surface modification.

That is, the ultraviolet rays of 185 nm cut the chemical bonds in the glue, and the ultraviolet rays of 254 nm act on ozone, creating oxygen atoms that make it viscous, and cutting it! It is said that it reacts chemically with the IT organic matter, converts into a scum-like substance, and forms a new 1" layer.

Table tr11 treatment using ultraviolet rays is ultraviolet 1j4 (Q
・Use ozone generated by 1. Moreover, the higher the ozone concentration, the higher the treatment efficiency (in the direction of Jfj).

In general, ozone (10) is generated by oxidizing oxygen by the action of 185 nm ultraviolet rays, and is decomposed into (1), (1), and (1) and returns to (ζ) oxygen. Therefore, (11) (11) Concentration depends on three things:

In other words, ■The stronger the UV output from the lamp, ■1
The higher the degree of oxygen in the surrounding air scum, 7 tablespoons in the 7 in the firing chamber, the higher the
■The lower the temperature in the atmosphere, the higher the ozone concentration.

The output of ultraviolet light becomes stronger as the power of the low-pressure mercury lamp increases, but if the power is simply increased, the lamp itself generates more heat (and this causes the mercury vapor pressure to increase, causing the low-pressure water to cease to exist as a lamp. 185, 25 II II
It becomes difficult for In to emit ultraviolet rays.

Therefore, the inventor attempted to realize a low-pressure mercury lamp with increased power by bringing a part of the lamp into contact with a water-cooled boat and cooling the lamp with water. In other words, unless you indicate the power per lamp arc length, a normal air-cooled low J1 mercury lamp is 0.5
~'1'/' C11 or later 1': or its 4-1
1 to 10) A high-output, low-volume dilution lamp of 2W/cmLJ has been realized.

However, when these lamps are placed inside the dosing room,
Z.

However, if the lamp power is high, the temperature of the atmosphere inside the irradiation chamber will increase by 1% of the ozone]? 4. There was a problem that the L lyozone concentration became low.

Means for Solving the Problems The present invention provides lamp power per lamp tube length of 2W/C1.
In an ultraviolet treatment equipment in which ultraviolet lamps of 1 liter or more are installed facing each other on both sides of the object to be treated, there is a water cooling board for cooling the electrode part of the lamp and a water cooling board for cooling the When the irradiated object is placed between the lamps, the ultraviolet lamp outputs at its rated output.
JiIJ is characterized by lighting at a lamp output of about half or less of the rated output when not in use.

Action! [(Install water-cooling pipes at appropriate intervals on the wall 1'11 in the firing chamber) to communicate with the water-cooling boat for lamp cooling, and cool the lamp and wall surface by passing water through.
The temperature of the scum can be brought to a low value by cooling it with the atmospheric scum (5 ports; ♀ mountain 1, 1, 1, touching the water cooling piping). In addition, when the lamp is on standby when no one is exposed to light, the lamp output can be cut to less than half of the rated power, thereby reducing heating of waste from the lamp. It is possible to suppress the increase in ozone abundance caused by mold growth and thermal decomposition of ozone.

Example Hereinafter, the present invention will be explained using preferred embodiments.

1 is a schematic diagram of the surface treatment 111 apparatus δ according to the present invention. 61 contains 185 n nl and 2541
1111 is mainly radiated synthetic iF made in England σ) Low pressure water/
Two itJ lamps 1 are arranged. Me1. I can't support it when I look at it, so I irradiate it with 11!1 and 2 according to the H rule.

The lamp 1 is cooled by covering the electrode portion with a metal blanket 4 and bringing it into contact with a water-cooled nozzle board 5 in order to increase the jll power. As a result, the lamp arc length is 1 m, the lamp 7j:
JJ, 100W high 11": :h (Mr. Moon - Wednesday'J
1 (Lamp asked j-1.

1 [(i) Water cooling piping 6 is installed in contact with the wall of the firing chamber.
] is connected to the water-cooled board 5 and the boss 7 in the i+'i row, and the water is passed through this to the irradiation chamber wall i'fii.
1: to be able to keep the indoor atmospheric gas temperature as low as H1.

The rated output of the lamp 1 is 400 W when the object 2 to be treated is inserted, but the output can be cut to 200 W, which is about half of the rated output, when the lamp 1 is not inserted.

This causes the lamps facing each other to heat up and reach high temperatures, shortening the life of the lamps! As soon as JJ stops, it depends on the cycle conditions during irradiation and waiting,
This also has the effect of reducing the amount of heated air in the irradiation chamber, thereby preventing ozone decomposition due to heating and preventing the ozone concentration from decreasing.

In addition, the ozone force in the device or exhaust]]8 to exhaust tough l
~ 9, and a safety base l through an exhaust system consisting of an ozone scum decomposition filter 0 and an air blower 11;
j,: J, is emitted at an ozone concentration of l'.

The second one shows the change in the ozone concentration in the firing chamber after the 11th lamp lights up and the 11th lamp lights up in the device.

1l17) in the figure) The curve A Li 1;(-Nagagu); In this case, the ozone humidity changes to the maximum value several minutes after the lighting is turned on.At t, when the temperature inside the reflection chamber is stable and the temperature in the reflection chamber is high, it is half of the maximum f11'■
J, go down and make a low 1.

force, curves 1-3 are according to the present invention],! Water cooling the single wall ITr1! Higashiyosho Tanuki II, 7 ptH1 minute, Ministry 1 hours 4
The lamp output shows changes in the ozone concentration of the tlJ tree and Enokotoki under the minute cycle condition. In this case, after the ozone depth reached its maximum value, the rate of decrease was small and a high ozone concentration was maintained.

Effects of the Invention (1) As explained above, the ultraviolet treatment device of the present invention has the effect of being able to maintain ozone generated by a mercury lamp at a high temperature and increasing the treatment efficiency. .

a U, :! J-side node J11. Explanation No. 1 is a sectional view of an ultraviolet-treated device according to an embodiment of the present invention.

DESCRIPTION OF SYMBOLS 1...Lamp, 2...Workpiece 5...Water cooling board, 6...Water cooling piping FIG. 2 is a diagram showing changes in the degree of ozone depth within the irradiation chamber.

A...When using the conventional device Y3...When using the device according to the present invention: 6'
’＞Fixed copy

Claims (1)

[Scope of Claims] An ultraviolet treatment device in which ultraviolet lamps with a lamp power of 2 W/cm or more per lamp tube length are installed facing each other on both sides of an object to be treated, which includes a water cooling board for cooling the electrode portion of the lamp and irradiation. It is equipped with water cooling piping to cool the room wall surface, and the ultraviolet lamp has rated output when the object to be irradiated is placed between the lamps, and approximately half or less of the rated output when not inserted. An ultraviolet treatment device characterized by lighting with lamp output.