JPH0456763B2 - - Google Patents

Info

Publication number: JPH0456763B2
Authority: JP; Japan
Prior art keywords: getter; gas; nitrogen; nitrogen gas; layer
Prior art date: 1985-06-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP60140628A

Other languages

English (en)

Japanese (ja)

Other versions

JPS623006A (ja

Inventor

Kyoshi Nagai

Bofuiito Kuraudeio

Dooni Fuaburitsuio

Suuchii Maruko

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Taiyo Sanso Co Ltd

Original Assignee

Taiyo Sanso Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-06-28

Filing date

1985-06-28

Publication date

1992-09-09

1985-06-28 Application filed by Taiyo Sanso Co Ltd filed Critical Taiyo Sanso Co Ltd

1985-06-28 Priority to JP60140628A priority Critical patent/JPS623006A/ja

1986-06-23 Priority to CA000512229A priority patent/CA1300346C/en

1986-06-23 Priority to DE3621013A priority patent/DE3621013C2/de

1986-06-23 Priority to FR8609026A priority patent/FR2584062B1/fr

1986-06-26 Priority to KR1019860005146A priority patent/KR930006690B1/ko

1986-06-26 Priority to BE2/61004A priority patent/BE904998A/fr

1986-06-26 Priority to GB8615619A priority patent/GB2177080B/en

1986-06-27 Priority to SE8602870A priority patent/SE463149B/sv

1986-06-27 Priority to IT20963/86A priority patent/IT1204420B/it

1986-06-27 Priority to NL8601692A priority patent/NL192104C/nl

1987-01-09 Publication of JPS623006A publication Critical patent/JPS623006A/ja

1992-09-09 Publication of JPH0456763B2 publication Critical patent/JPH0456763B2/ja

Status Granted legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0494—Combined chemical and physical processing
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0483—Physical processing only by adsorption in solids in getters
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0003—Chemical processing
- C01B2210/0004—Chemical processing by oxidation
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
- C01B2210/0023—Physical processing by adsorption in solids in getters
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Analytical Chemistry (AREA)
Inorganic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
General Chemical & Material Sciences (AREA)
Separation Of Gases By Adsorption (AREA)
Gas Separation By Absorption (AREA)
Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Treating Waste Gases (AREA)

JP60140628A 1985-06-28 1985-06-28 窒素の超精製装置、並びに精製方法 Granted JPS623006A (ja)

Priority Applications (10)

Application Number	Priority Date	Filing Date	Title
JP60140628A JPS623006A (ja)	1985-06-28	1985-06-28	窒素の超精製装置、並びに精製方法
CA000512229A CA1300346C (en)	1985-06-28	1986-06-23	Superpurifier for nitrogen and process for purifying same
DE3621013A DE3621013C2 (de)	1985-06-28	1986-06-23	Reinigungsvorrichtung für Stickstoff und Verfahren zur Reinigung von Stickstoff
FR8609026A FR2584062B1 (fr)	1985-06-28	1986-06-23	Super purificateur pour l'azote et procede pour purifier ce gaz.
KR1019860005146A KR930006690B1 (ko)	1985-06-28	1986-06-26	질소 가스의 초정제 장치 및 정제방법
BE2/61004A BE904998A (fr)	1985-06-28	1986-06-26	Super purificateur pour l'azote et procede pour purifier ce gaz.
GB8615619A GB2177080B (en)	1985-06-28	1986-06-26	Superpurifier for nitrogen and process for purifying same
SE8602870A SE463149B (sv)	1985-06-28	1986-06-27	Superreningsanordning foer rening av kvaevgas samt saett att superrena kvaevgas
IT20963/86A IT1204420B (it)	1985-06-28	1986-06-27	Super-purificatore per azoto e relativo procedimento di purificazione
NL8601692A NL192104C (nl)	1985-06-28	1986-06-27	Inrichting en werkwijze voor het zuiveren van stikstof.

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP60140628A JPS623006A (ja)	1985-06-28	1985-06-28	窒素の超精製装置、並びに精製方法

Publications (2)

Publication Number	Publication Date
JPS623006A JPS623006A (ja)	1987-01-09
JPH0456763B2 true JPH0456763B2 (nl)	1992-09-09

Family

ID=15273115

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP60140628A Granted JPS623006A (ja)	1985-06-28	1985-06-28	窒素の超精製装置、並びに精製方法

Country Status (10)

Country	Link
JP (1)	JPS623006A (nl)
KR (1)	KR930006690B1 (nl)
BE (1)	BE904998A (nl)
CA (1)	CA1300346C (nl)
DE (1)	DE3621013C2 (nl)
FR (1)	FR2584062B1 (nl)
GB (1)	GB2177080B (nl)
IT (1)	IT1204420B (nl)
NL (1)	NL192104C (nl)
SE (1)	SE463149B (nl)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1227219B (it) *	1988-09-26	1991-03-27	Getters Spa	Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (nl) *	1988-10-21	1990-03-08	Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (fr) *	1989-02-07	1990-08-10	Air Liquide	Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature
DE3926015A1 (de) *	1989-08-05	1991-02-07	Messer Griesheim Gmbh	Verfahren zur feinreinigung von gasen
IT1237944B (it) *	1990-01-05	1993-06-19	Getters Spa	Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) *	1990-07-12	1994-11-17	Getters Spa	Processo per eliminare impurita' da un gas idruro
IT1244006B (it) *	1990-11-02	1994-06-28	Getters Spa	Procedimento di purificazione dell'ammoniaca.
IT1270875B (it) *	1993-04-29	1997-05-13	Getters Spa	Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) *	1992-04-02	1993-08-24	Saes Pure Gas, Inc.	Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en)	1993-04-29	2002-08-20	Saes Getter, S.P.A.	Hydrogen purification
JPH1157371A (ja) *	1997-08-11	1999-03-02	Taiyo Toyo Sanso Co Ltd	超清浄空気の製造方法
EP1028798B1 (en)	1997-10-15	2002-01-02	SAES PURE GAS, Inc.	Gas purification system with safety device and method for purifying gases
US6068685A (en) *	1997-10-15	2000-05-30	Saes Pure Gas, Inc.	Semiconductor manufacturing system with getter safety device
US6299670B1 (en) *	1999-06-10	2001-10-09	Saes Pure Gas, Inc.	Integrated heated getter purifier system
KR100356611B1 (ko) *	2000-08-10	2002-10-18	주식회사 아토	질소 정제 방법 및 정제 장치
ITMI20010930A1 (it)	2001-05-07	2002-11-07	Getters Spa	Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica
ITMI20011193A1 (it)	2001-06-06	2002-12-06	Getters Spa	Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4918255B2 (ja) *	2005-12-22	2012-04-18	ウチヤ・サーモスタット株式会社	窒素ガス発生装置
CN110759323A (zh) *	2018-07-27	2020-02-07	隆基绿能科技股份有限公司	一种气体纯化反应器及气体纯化方法
CN112978692B (zh) *	2021-03-04	2022-08-05	北京高麦克仪器科技有限公司	780氦气纯化器
JP7210803B1 (ja) *	2022-10-04	2023-01-23	レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード	ガス精製装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS55154546A (en) *	1979-04-06	1980-12-02	Getters Spa	Zrrfe alloy as low temperature hydrogen adsorbent
JPS6020323A (ja) *	1983-07-15	1985-02-01	Toshiba Corp	デイスク装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3535074A (en) *	1965-10-29	1970-10-20	Hitachi Ltd	Method and apparatus for purifying crude inert gases
BE792561A (en) *	1972-12-11	1973-03-30	Getters Spa	Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
DE3137569A1 (de) *	1981-09-22	1983-04-21	Leybold-Heraeus GmbH, 5000 Köln	Verfahren und vorrichtung zur herstellung von hochreinem stickstoff

1985
- 1985-06-28 JP JP60140628A patent/JPS623006A/ja active Granted
1986
- 1986-06-23 FR FR8609026A patent/FR2584062B1/fr not_active Expired - Lifetime
- 1986-06-23 DE DE3621013A patent/DE3621013C2/de not_active Expired - Lifetime
- 1986-06-23 CA CA000512229A patent/CA1300346C/en not_active Expired - Fee Related
- 1986-06-26 KR KR1019860005146A patent/KR930006690B1/ko not_active IP Right Cessation
- 1986-06-26 GB GB8615619A patent/GB2177080B/en not_active Expired
- 1986-06-26 BE BE2/61004A patent/BE904998A/fr not_active IP Right Cessation
- 1986-06-27 IT IT20963/86A patent/IT1204420B/it active
- 1986-06-27 NL NL8601692A patent/NL192104C/nl not_active IP Right Cessation
- 1986-06-27 SE SE8602870A patent/SE463149B/sv not_active IP Right Cessation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS55154546A (en) *	1979-04-06	1980-12-02	Getters Spa	Zrrfe alloy as low temperature hydrogen adsorbent
JPS6020323A (ja) *	1983-07-15	1985-02-01	Toshiba Corp	デイスク装置

Also Published As

Publication number	Publication date
DE3621013A1 (de)	1987-01-08
GB8615619D0 (en)	1986-07-30
SE8602870L (sv)	1986-12-29
FR2584062B1 (fr)	1990-12-21
FR2584062A1 (fr)	1987-01-02
NL192104B (nl)	1996-10-01
NL8601692A (nl)	1987-01-16
GB2177080A (en)	1987-01-14
SE8602870D0 (sv)	1986-06-27
IT8620963A0 (it)	1986-06-27
KR930006690B1 (ko)	1993-07-22
NL192104C (nl)	1997-02-04
BE904998A (fr)	1986-10-16
JPS623006A (ja)	1987-01-09
SE463149B (sv)	1990-10-15
KR870000237A (ko)	1987-02-17
DE3621013C2 (de)	1996-02-15
IT1204420B (it)	1989-03-01
GB2177080B (en)	1989-08-31
CA1300346C (en)	1992-05-12

Publication	Publication Date	Title
JPH0456763B2 (nl)	1992-09-09
JPH0456771B2 (nl)	1992-09-09
JPS5953201B2 (ja)	1984-12-24	水素ガスの精製方法
GB2188620A (en)	1987-10-07	One-step process for purifying an inert gas
US3361531A (en)	1968-01-02	Removal of oxygen from gas mixtures
JP2009517314A (ja)	2009-04-30	高比表面積を有する、ナノ多孔質カーバイド由来炭素の製造方法
JPH04308011A (ja)	1992-10-30	流動床を用いたタングステン粉末の製造方法
Li et al.	1998	Zeolite monoliths for air separation: Part 1: Manufacture and characterization
EP1894611B1 (en)	2017-05-03	Method for gas purification
JP2623487B2 (ja)	1997-06-25	窒素ガスの分離方法
JP2002060209A (ja)	2002-02-26	窒素精製方法及び精製装置
KR20210134910A (ko)	2021-11-11	가스 혼합물을 처리하기 위한 방법 및 장치
CN217909777U (zh)	2022-11-29	气体处理设备
JPH048362B2 (nl)	1992-02-14
JPS6159169B2 (nl)	1986-12-15
JP5189342B2 (ja)	2013-04-24	ガスの処理方法
JPS63305936A (ja)	1988-12-13	伝熱性の優れた吸着構造体
CN108778493A (zh)	2018-11-09	粒子处理装置以及催化剂担载体和/或纤维状碳纳米结构体的制造方法
JPH02293310A (ja)	1990-12-04	希ガスの高純度精製装置
JP2024536738A (ja)	2024-10-08	固相反応用の反応容器を備えた装置
SU967549A1 (ru)	1982-10-23	Способ получени углеродного адсорбента
JPS61232210A (ja)	1986-10-16	Ｃｏの分離方法
JPS60166206A (ja)	1985-08-29	高度に酸素を除去した窒素の製造方法及び装置
JP2008024566A (ja)	2008-02-07	水素製造方法及び水素製造装置
JPS6313924B2 (nl)	1988-03-28