JPH01259265A - キャパシチブ加速度計およびその製造方法 - Google Patents
キャパシチブ加速度計およびその製造方法Info
- Publication number
- JPH01259265A JPH01259265A JP63283533A JP28353388A JPH01259265A JP H01259265 A JPH01259265 A JP H01259265A JP 63283533 A JP63283533 A JP 63283533A JP 28353388 A JP28353388 A JP 28353388A JP H01259265 A JPH01259265 A JP H01259265A
- Authority
- JP
- Japan
- Prior art keywords
- electrode structure
- accelerometer
- central
- electrode
- central electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000003990 capacitor Substances 0.000 abstract description 3
- 230000003534 oscillatory effect Effects 0.000 abstract 3
- 230000010355 oscillation Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000013016 damping Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 241001663154 Electron Species 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- AQCHWTWZEMGIFD-UHFFFAOYSA-N metolazone Chemical compound CC1NC2=CC(Cl)=C(S(N)(=O)=O)C=C2C(=O)N1C1=CC=CC=C1C AQCHWTWZEMGIFD-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI874942 | 1987-11-09 | ||
| FI874942A FI81915C (fi) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01259265A true JPH01259265A (ja) | 1989-10-16 |
Family
ID=8525381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63283533A Pending JPH01259265A (ja) | 1987-11-09 | 1988-11-09 | キャパシチブ加速度計およびその製造方法 |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPH01259265A (fi) |
| KR (1) | KR890008569A (fi) |
| CN (1) | CN1022136C (fi) |
| DE (1) | DE3837883A1 (fi) |
| ES (1) | ES2012420A6 (fi) |
| FI (1) | FI81915C (fi) |
| FR (1) | FR2622975B1 (fi) |
| GB (1) | GB2212274A (fi) |
| IT (1) | IT1224301B (fi) |
| SE (1) | SE468067B (fi) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02134570A (ja) * | 1988-11-15 | 1990-05-23 | Hitachi Ltd | 静電容量式加速度センサ及び半導体圧力センサ |
| US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
| JPH04116465A (ja) * | 1990-09-07 | 1992-04-16 | Hitachi Ltd | 半導体容量式加速度センサ及びその製造方法 |
| JPH06163935A (ja) * | 1992-11-17 | 1994-06-10 | Sumitomo Electric Ind Ltd | 半導体デバイス及びその製造方法 |
| US7360455B2 (en) | 1990-10-12 | 2008-04-22 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7533582B2 (en) | 1990-10-12 | 2009-05-19 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7578162B2 (en) | 1989-12-28 | 2009-08-25 | Kazuhiro Okada | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
| JPH03210478A (ja) * | 1990-01-12 | 1991-09-13 | Nissan Motor Co Ltd | 半導体加速度センサ |
| DE4000903C1 (fi) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
| DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
| FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
| DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| EP1243930A1 (de) | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| DE10117257A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| RU2207658C2 (ru) * | 2001-07-09 | 2003-06-27 | ФГУП "НИИ физических измерений" | Способ изготовления микромеханического инерциального чувствительного элемента емкостного типа |
| JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
| JP2009529697A (ja) | 2006-03-10 | 2009-08-20 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 微小機械回転速度センサ |
| EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
| DE112012005609T5 (de) * | 2012-04-30 | 2014-09-25 | Hewlett-Packard Development Company, L.P. | Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl |
| CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
| CN117368525A (zh) * | 2017-04-06 | 2024-01-09 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6227666A (ja) * | 1985-07-25 | 1987-02-05 | リットン システムズ インコ−ポレ−テッド | 加速度計 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
| JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
| US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
| DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
| DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/fi not_active IP Right Cessation
-
1988
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Ceased
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6227666A (ja) * | 1985-07-25 | 1987-02-05 | リットン システムズ インコ−ポレ−テッド | 加速度計 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
| JPH02134570A (ja) * | 1988-11-15 | 1990-05-23 | Hitachi Ltd | 静電容量式加速度センサ及び半導体圧力センサ |
| US7578162B2 (en) | 1989-12-28 | 2009-08-25 | Kazuhiro Okada | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus |
| JPH04116465A (ja) * | 1990-09-07 | 1992-04-16 | Hitachi Ltd | 半導体容量式加速度センサ及びその製造方法 |
| US7360455B2 (en) | 1990-10-12 | 2008-04-22 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7533582B2 (en) | 1990-10-12 | 2009-05-19 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| JPH06163935A (ja) * | 1992-11-17 | 1994-06-10 | Sumitomo Electric Ind Ltd | 半導体デバイス及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR890008569A (ko) | 1989-07-12 |
| DE3837883A1 (de) | 1989-05-18 |
| SE8804039D0 (sv) | 1988-11-08 |
| CN1033110A (zh) | 1989-05-24 |
| CN1022136C (zh) | 1993-09-15 |
| IT1224301B (it) | 1990-10-04 |
| GB2212274A (en) | 1989-07-19 |
| GB8826263D0 (en) | 1988-12-14 |
| FI81915C (fi) | 1990-12-10 |
| ES2012420A6 (es) | 1990-03-16 |
| SE468067B (sv) | 1992-10-26 |
| FR2622975A1 (fr) | 1989-05-12 |
| FI874942A0 (fi) | 1987-11-09 |
| IT8848532A0 (it) | 1988-11-08 |
| FI81915B (fi) | 1990-08-31 |
| FR2622975B1 (fr) | 1991-07-12 |
| FI874942L (fi) | 1989-05-10 |
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