JPH01227037A - Vessel for leak tester - Google Patents
Vessel for leak testerInfo
- Publication number
- JPH01227037A JPH01227037A JP5258388A JP5258388A JPH01227037A JP H01227037 A JPH01227037 A JP H01227037A JP 5258388 A JP5258388 A JP 5258388A JP 5258388 A JP5258388 A JP 5258388A JP H01227037 A JPH01227037 A JP H01227037A
- Authority
- JP
- Japan
- Prior art keywords
- container
- vessel
- test object
- substance
- trace gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 claims description 56
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 239000000126 substance Substances 0.000 abstract 6
- 238000007689 inspection Methods 0.000 abstract 2
- 238000001514 detection method Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 230000002000 scavenging effect Effects 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、トレースガスが供給される被試験物を真空
排気された密閉容器内に置き、前記被試験物より容器内
に漏れるトレースガスをセンサによって検出する漏れ試
験機に係り、特にその容器の改良に関するものである。[Detailed Description of the Invention] [Industrial Application Field] This invention places a test object to which trace gas is supplied in an evacuated sealed container, and removes the trace gas leaking from the test object into the container. The present invention relates to a leak tester that detects a leak using a sensor, and particularly relates to improvements to its container.
従来から、圧力容器等の気密性を検査するために用いら
れているこの種の漏れ試験機としては種々知られており
、その−例として特開昭49−4586号公報、特開昭
60−178332号公報等がある。これらは、容器と
この容器内に配量された被試験物との各内部を真空排気
して、前記被試験物の内部または外部に供給したトレー
スガスが、該被試験物を介してその外部または内部に漏
れるのをリークデテクタで検出するようにしたものであ
る。Various types of leak testing machines have been known that have been used to test the airtightness of pressure vessels and the like, examples of which include JP-A-49-4586 and JP-A-60. There are publications such as No. 178332. These systems evacuate the inside of a container and a test object placed in the container, and the trace gas supplied to the inside or outside of the test object passes through the test object to the outside of the test object. Alternatively, a leak detector is used to detect internal leakage.
第3図はこのような漏れ試験機の従来例を示すもので、
1は被試験物2を収納する密閉型の容器で、この容器1
は粗引ポンプ3によって真空排気され、また、掃気時に
は空気源4よシ清浄な空気が清浄器5を介して供給され
前記ポンプ3によって排気されるように構成されている
。前記容器1内に収納される被試験物2はスタンドオフ
6によって保持されることにより、容器内面との間に空
間7を形成しており、トレースガス供給源8よシヘリウ
ム等のトレースガスGがボートシール9を通って供給さ
れる。この状態において被試験物2かもトレースガスG
が容器1内に漏れていた場合、その漏れガスは検出用ポ
ンプ10によりトレースガスセンサ11に導かれて検出
され、漏れ量が検出器12によって記録もしくは表示さ
れる。Figure 3 shows a conventional example of such a leak testing machine.
Reference numeral 1 denotes a sealed container that stores the test object 2;
is evacuated by a roughing pump 3, and during scavenging, clean air is supplied from an air source 4 via a cleaner 5 and is evacuated by the pump 3. The test object 2 housed in the container 1 is held by standoffs 6, thereby forming a space 7 between it and the inner surface of the container. It is fed through the boat seal 9. In this state, the test object 2 may contain trace gas G.
If gas is leaking into the container 1, the leaked gas is guided by the detection pump 10 to the trace gas sensor 11 and detected, and the amount of leakage is recorded or displayed by the detector 12.
なお、13〜18は接続管、19A〜19Fは切換弁、
20はダクト、21はサージタンク、22はボートシー
ルである。In addition, 13 to 18 are connection pipes, 19A to 19F are switching valves,
20 is a duct, 21 is a surge tank, and 22 is a boat seal.
漏れの検出に際しては、先ず被試験物2を容器内に収納
して該容器1を密閉すると共にボートシール9.22の
内端を前記被試験物2にそれぞれ接続する。次に、粗引
ポンプ3によって容器1を排気し所定圧になるまで排気
すると、該ポンプ3を停止する一方、トレースガス供給
源8よブトレースガスGを被試験物2に供給し、容器1
を検出用ポンプ10によって真空引きする。この状態で
被試験物2より漏れるトレースガスGは上述した通り、
接続管14を経てトレースガスセンサ11に導かれ、こ
こで検出される。When detecting a leak, first, the test object 2 is placed in a container, the container 1 is sealed, and the inner ends of the boat seals 9 and 22 are connected to the test object 2, respectively. Next, when the container 1 is evacuated to a predetermined pressure by the roughing pump 3, the pump 3 is stopped, and the trace gas G is supplied to the test object 2 from the trace gas supply source 8, and the container 1 is evacuated to a predetermined pressure.
is evacuated by the detection pump 10. As mentioned above, the trace gas G leaking from the test object 2 in this state is
The gas is guided to the trace gas sensor 11 via the connecting pipe 14 and detected there.
ところで、従来の容器1は剛体で製作され、その容積が
一定とされる。また、容器1は被試験物2に合わせて製
作されるため、被試験物2が変ると、その大きさに合っ
た容器を使用する必要がある。その場合、大小いずれの
被試験物2に対しても便用し得るよう容器1を大きく形
成して容器の共通化を計ることは可能であるが、そうす
ると被試験物2の大きさにより、検出時間および検出感
度が変化し、小さい被試験物の場合検出時間が長く、検
出感度が低下するという問題があった。By the way, the conventional container 1 is made of a rigid body and has a constant volume. Further, since the container 1 is manufactured according to the test object 2, when the test object 2 changes, it is necessary to use a container that matches the size of the test object 2. In that case, it is possible to make the container 1 larger so that it can be conveniently used for both large and small test objects 2, and to standardize the container, but in this case, the detection There is a problem in that the time and detection sensitivity change, and in the case of small test objects, the detection time is long and the detection sensitivity is reduced.
すなわち、被試験物2が小さく、該被試験物2と容器1
との間に形成される空間Tが大きいときは、被試験物2
から容器1内に漏れたトレースガスGの分子が広範囲に
拡散するため、ガス濃度が低下し、センサ11の感度が
下ると共に漏れガスがセンサー11に到達するまでの時
間が長くなるからである。That is, the test object 2 is small and the test object 2 and the container 1 are small.
When the space T formed between the test object 2 and
This is because the molecules of the trace gas G leaked into the container 1 are diffused over a wide range, resulting in a decrease in gas concentration, lowering the sensitivity of the sensor 11, and prolonging the time it takes for the leaked gas to reach the sensor 11.
したがって、この発明は上述したような問題点を解決し
、簡単な構成で、被試験物の大きさに関係なく容器と被
試験物との間の空間を略一定の体積とすることができ、
検査時間および検出感度を略一定に維持し得るようKし
た漏れ試験機用容器を提供することを目的とするもので
ある。Therefore, the present invention solves the above-mentioned problems, and with a simple configuration, the space between the container and the test object can be made to have a substantially constant volume regardless of the size of the test object.
It is an object of the present invention to provide a container for a leakage tester that can maintain test time and detection sensitivity substantially constant.
この発明は上記目的を達成するために、密閉排気された
容器内に被試験物を収納し、この被試験物にトレースガ
スを供給し、該被試験物よυ容器内に漏れたトレースガ
スをセンサによって検出するようにした漏れ試験機にお
いて、前記容器を可撓性材料によって形成し、その内面
に真空排気時に被試験物外表面と接触し該外表面との間
に一定の空間を形成するスタンドオフを一体に設けたも
のである。In order to achieve the above object, the present invention stores a test object in a sealed and evacuated container, supplies trace gas to the test object, and removes the trace gas leaking from the test object into the υ container. In a leakage tester configured to detect leakage using a sensor, the container is formed of a flexible material, and the inner surface of the container contacts the outer surface of the test object during evacuation to form a certain space between the container and the outer surface. It is equipped with an integrated standoff.
この発明において容器は可撓性を有するため真空排気に
よって収縮し、スタンドオフが被試験物の外表面に密接
する。したがって、容器と被試験物との間に形成される
空間の体積は被試験物の大きさに拘わらす略一定となる
。In this invention, since the container is flexible, it contracts by evacuation, and the standoffs come into close contact with the outer surface of the test object. Therefore, the volume of the space formed between the container and the test object is approximately constant regardless of the size of the test object.
以下、この発明を図面に示す実施例に基づいて詳細に説
明する。Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
第1図はこの発明に係る漏れ試験機用容器の一実施例を
示す真空排気前の断面図、第2図は同容器の真空排気後
の断面図である。なお、図中第3図と同一構成部品、部
分に対しては同一符号を以て示し、その説明を省略する
。これらの図において、被試験物2を収納する容器30
はゴム等の可撓性材料によって一端が開放する袋状に形
成され、その開口端30mが外ケース31の開口部32
の内側周縁部に接合固定されている。前記外ケース31
は剛体で、外部と連通する連通孔33を有し、前記開口
部32に蓋体34がOIJング35を介して嵌合される
ことにより、前記容器30が機密に密閉される。前記蓋
体34の内側面には前記容器30内に収納される被試験
物2が配設され、また該蓋体34には接続管13 、.
15が接続されると共にボートシール9.22が貫通さ
れている。そして、容器30の内面には真空排気時に被
試験物2の外表面に接触するスタンドオフ6が一体に突
設されている。FIG. 1 is a cross-sectional view of an embodiment of a container for a leak tester according to the present invention before evacuation, and FIG. 2 is a cross-sectional view of the same container after evacuation. Components and portions in the figure that are the same as those in FIG. 3 are designated by the same reference numerals, and their explanations will be omitted. In these figures, a container 30 containing the test object 2 is shown.
is formed of a flexible material such as rubber into a bag shape with one end open, and the open end 30m is connected to the opening 32 of the outer case 31.
It is bonded and fixed to the inner periphery of the The outer case 31
is a rigid body and has a communication hole 33 that communicates with the outside, and when a lid 34 is fitted into the opening 32 via an OIJ ring 35, the container 30 is hermetically sealed. The test object 2 to be housed in the container 30 is disposed on the inner surface of the lid 34, and the connecting tubes 13, .
15 is connected and the boat seal 9.22 is pierced. A standoff 6 that comes into contact with the outer surface of the test object 2 during evacuation is integrally provided on the inner surface of the container 30 in a protruding manner.
なお、その他の構成は第3図と同様である。Note that the other configurations are the same as in FIG. 3.
このような構成からなる漏れ試験機用容器30において
、被試験物2を蓋体34の内側面にセットして容器30
内に押入し、前記蓋体34を外ケース31の開口部32
に嵌合し、容器30を密閉する。との時、容器30と被
試験物2との間には第1図に示すように大きな空間7が
形成されている。この状態において、被試験物2K)レ
ースガスGを供給すると同時に前記容器30を真空排気
すると、圧力低下に伴い容器30が第2図に示すように
収縮してスタンドオフ6が被試験物2の外表面に密接す
る。すなわち、容器30は可変容積型の容器を構成する
もので、したがって、被試験物2の大きさが変っても、
それに応じた大きさの容器に交換する必要がなく、また
この状態での容器30と被試験物2との間の空間T′は
著しく減少してその体積が被試験物2の大きさに拘わら
す略一定となるため、小さま被試験物2の場合でも、前
記空間7′に漏れるトレースガスGのガス濃度が下がら
ず、センサの感度を略一定に維持し、またセンサにトレ
ースガスGが到達する時間も長くならず、略一定にする
ことができるものである。In the leak tester container 30 having such a configuration, the test object 2 is set on the inner surface of the lid 34 and the container 30 is opened.
the lid 34 into the opening 32 of the outer case 31.
and seals the container 30. At this time, a large space 7 is formed between the container 30 and the test object 2, as shown in FIG. In this state, when the test object 2K) race gas G is supplied and the container 30 is evacuated at the same time, the container 30 contracts as shown in FIG. In close contact with the outer surface. In other words, the container 30 constitutes a variable volume container, so even if the size of the test object 2 changes,
There is no need to replace the container with a correspondingly sized container, and the space T' between the container 30 and the test object 2 in this state is significantly reduced and its volume remains unchanged regardless of the size of the test object 2. Therefore, even in the case of the small test object 2, the gas concentration of the trace gas G leaking into the space 7' does not decrease, and the sensitivity of the sensor is maintained approximately constant. The time it takes to reach the target does not take long and can be kept approximately constant.
なお、容器30のスタンドオフ6の断面形状は矩形に限
らず種々の形状に変更することができ、またその先端面
に、耐摩耗性材料からなるチップ38を設けておくと、
スタンドオフ6、換MftLば容器30の耐久性を向上
させることができる。Note that the cross-sectional shape of the standoff 6 of the container 30 is not limited to a rectangular shape, but can be changed to various shapes, and if a tip 38 made of a wear-resistant material is provided on the tip surface,
If the standoff 6 and MftL are replaced, the durability of the container 30 can be improved.
以上説明したようにこの発明に係る漏れ試験機用容器は
、可撓性材料によって形成されその内面にスタンドオフ
を一体に形成したもので、容器内部に被試験物を収納し
て密閉し、該容器を真空排気によって収縮させ、前記ス
タンドオフを被試験物外表面に接触させるように構成し
たので、被試験物の大小に拘わらず容器と被試験物との
間の空間体積を略一定にすることができ、したがって特
に小さな被試験物の漏れ検出時においても検出感度が良
好で短時間に検出することができ、その上容積可変型で
あるため容器変換の必要もないため、試験機の取扱いが
簡単かつ容易で、−m迅速な検出を可能にする。As explained above, the container for a leak tester according to the present invention is made of a flexible material and has standoffs integrally formed on its inner surface, and the test object is stored and sealed inside the container. Since the container is deflated by vacuum evacuation and the standoff is brought into contact with the outer surface of the test object, the space volume between the container and the test object is kept approximately constant regardless of the size of the test object. Therefore, even when detecting leaks from small test objects, detection sensitivity is good and detection can be made in a short time.Furthermore, since the volume is variable, there is no need to change the container, so handling of the test machine is easy. is simple and easy and allows rapid detection.
第1図はこの発明に係る漏れ試験機用容器の一実施例を
示す排気前の断面図、
第2図は同容器の排気後の断面図、
第3図は漏れ試験機の従来例を示す構成図である。
1・・・・容器、2・・・・被試験物、3・・・・粗引
ポンプ、4・・・・空気源、6・−・番スタンドオフ、
11・・・・トレースガスセンサ、
30・・・・容器、31・・・・外ケース、34・・・
・蓋体、
38・・−・耐摩耗性材料からなるチップ、G争・舎・
トレースガス。
特許出願人 ヤ マ ハ 株式会社Fig. 1 is a cross-sectional view of an embodiment of the container for a leak tester according to the present invention before evacuation, Fig. 2 is a cross-sectional view of the same container after evacuation, and Fig. 3 is a conventional example of a leak tester. FIG. 1... Container, 2... Test object, 3... Roughing pump, 4... Air source, 6... No. standoff, 11... Trace gas sensor, 30 ... Container, 31 ... Outer case, 34 ...
・Lid body, 38... Chip made of wear-resistant material, G-shape・
trace gas. Patent applicant Yamaha Co., Ltd.
Claims (1)
物にトレースガスを供給し、該被試験物より前記容器内
に洩れたトレースガスをセンサによつて検出するように
した漏れ試験機において、前記容器は可撓性材料によつ
て形成されることにより可変容積型とされ、内面には真
空排気時に被試験物外表面と接触し該外表面との間に一
定の空間を形成するスタンドオフが一体に設けられてい
ることを特徴とする漏れ試験機用容器。A leak test in which a test object is housed in a sealed and evacuated container, a trace gas is supplied to the test object, and a sensor detects the trace gas leaking from the test object into the container. In this machine, the container is made of a flexible material to have a variable volume, and the inner surface is in contact with the outer surface of the test object during evacuation to form a certain space between the container and the outer surface. A container for a leakage tester, characterized in that it is integrally provided with a standoff.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5258388A JPH01227037A (en) | 1988-03-08 | 1988-03-08 | Vessel for leak tester |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5258388A JPH01227037A (en) | 1988-03-08 | 1988-03-08 | Vessel for leak tester |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01227037A true JPH01227037A (en) | 1989-09-11 |
Family
ID=12918818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5258388A Pending JPH01227037A (en) | 1988-03-08 | 1988-03-08 | Vessel for leak tester |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01227037A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04131745U (en) * | 1991-05-27 | 1992-12-04 | 株式会社島津製作所 | leak test equipment |
JPH1019718A (en) * | 1996-07-04 | 1998-01-23 | Ulvac Japan Ltd | Vacuum container for testing leakage |
JPH10185752A (en) * | 1996-12-26 | 1998-07-14 | Teijin Seiki Co Ltd | Method and apparatus for inspecting leakage of sealed body |
JP2001264209A (en) * | 2000-03-21 | 2001-09-26 | Yamaha Corp | Leakage testing method and device using sealed structure, and sealed structure of leakage testing device |
JP2004077263A (en) * | 2002-08-16 | 2004-03-11 | Ulvac Japan Ltd | Leak test method of testpiece generating deformation in shape with change in pressure |
US6742384B2 (en) * | 2002-07-02 | 2004-06-01 | Carrier Corporation | Trace gas management system for leak detection operations |
JP2006007157A (en) * | 2004-06-29 | 2006-01-12 | Japan Organo Co Ltd | Reaction device and reaction method |
JP2013134098A (en) * | 2011-12-26 | 2013-07-08 | Fukuda:Kk | Leak test chamber and leak test device |
JP2017044542A (en) * | 2015-08-25 | 2017-03-02 | 株式会社大塚製薬工場 | Quantitative method for gaseous leakage, and flexible bag |
JP2018501475A (en) * | 2014-12-03 | 2018-01-18 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | Airtightness test using carrier gas in foil chamber |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60227144A (en) * | 1984-02-08 | 1985-11-12 | プロダクト サプライヤ−ズ エ−ジ− | Method and device for inspecting leakage |
JPS62112027A (en) * | 1985-11-11 | 1987-05-23 | Shinkosumosu Denki Kk | Detecting method for leak in container |
-
1988
- 1988-03-08 JP JP5258388A patent/JPH01227037A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60227144A (en) * | 1984-02-08 | 1985-11-12 | プロダクト サプライヤ−ズ エ−ジ− | Method and device for inspecting leakage |
JPS62112027A (en) * | 1985-11-11 | 1987-05-23 | Shinkosumosu Denki Kk | Detecting method for leak in container |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04131745U (en) * | 1991-05-27 | 1992-12-04 | 株式会社島津製作所 | leak test equipment |
JPH1019718A (en) * | 1996-07-04 | 1998-01-23 | Ulvac Japan Ltd | Vacuum container for testing leakage |
JPH10185752A (en) * | 1996-12-26 | 1998-07-14 | Teijin Seiki Co Ltd | Method and apparatus for inspecting leakage of sealed body |
JP2001264209A (en) * | 2000-03-21 | 2001-09-26 | Yamaha Corp | Leakage testing method and device using sealed structure, and sealed structure of leakage testing device |
US6742384B2 (en) * | 2002-07-02 | 2004-06-01 | Carrier Corporation | Trace gas management system for leak detection operations |
JP2004077263A (en) * | 2002-08-16 | 2004-03-11 | Ulvac Japan Ltd | Leak test method of testpiece generating deformation in shape with change in pressure |
JP2006007157A (en) * | 2004-06-29 | 2006-01-12 | Japan Organo Co Ltd | Reaction device and reaction method |
JP2013134098A (en) * | 2011-12-26 | 2013-07-08 | Fukuda:Kk | Leak test chamber and leak test device |
JP2018501475A (en) * | 2014-12-03 | 2018-01-18 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | Airtightness test using carrier gas in foil chamber |
JP2017044542A (en) * | 2015-08-25 | 2017-03-02 | 株式会社大塚製薬工場 | Quantitative method for gaseous leakage, and flexible bag |
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