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JPH01101656A - Laminated integrated circuit - Google Patents

Laminated integrated circuit

Info

Publication number
JPH01101656A
JPH01101656A JP62258378A JP25837887A JPH01101656A JP H01101656 A JPH01101656 A JP H01101656A JP 62258378 A JP62258378 A JP 62258378A JP 25837887 A JP25837887 A JP 25837887A JP H01101656 A JPH01101656 A JP H01101656A
Authority
JP
Japan
Prior art keywords
capacitors
ceramic
substrate
laminated
capacitor network
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62258378A
Other languages
Japanese (ja)
Other versions
JP2627625B2 (en
Inventor
Minoru Takatani
稔 高谷
Nobunori Mochizuki
望月 宣典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP25837887A priority Critical patent/JP2627625B2/en
Publication of JPH01101656A publication Critical patent/JPH01101656A/en
Application granted granted Critical
Publication of JP2627625B2 publication Critical patent/JP2627625B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor

Landscapes

  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To reduce dimensions with a plurality of built-in capacitors and interconnections by integrally forming a multilayer interconnection ceramic substrate, in which a ceramic layer is interposed between internal conductors for interconnection, with a laminated capacitor network. CONSTITUTION:A laminated integrated circuits comprises ceramic green sheets 30A-30E and individual internal connectors 31A-31I to be printed onto the surfaces of the green sheets. In other words, a multilayer interconnection ceramic substrate is integrally formed with a laminated capacitor network where a plurality of capacitors are constructed with a ceramic layer interposed between the internal conductors 31A-31I for capacitors, with a ceramic layer interposed between the internal conductors 31A-31I for interconnection. According to the constitution, a multilayer interconnection substrate with a capacitor network base having a plurality of built-in capacitors and interconnections can be obtained, and such substrate contributes to reducing the outside dimensions while allowing to dispense with a capacitor mount.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、複数個のコンデンサ及び多層配線を内蔵した
積層集積回路に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a laminated integrated circuit incorporating a plurality of capacitors and multilayer wiring.

(従来の技術) 従来より多層配線セラミック基板は知られており、その
製法には、グリーンシート印刷法、グリーンシート積層
法及び厚膜法の3種類がある。
(Prior Art) Multilayer wiring ceramic substrates have been known for a long time, and there are three types of manufacturing methods: a green sheet printing method, a green sheet lamination method, and a thick film method.

グリーンシート印刷法は、セラミックグリーンシート(
未焼成のシート)にAg−Pd等の導体ペーストの印刷
とアルミナ等の誘電体ペーストの印刷を繰り返し、後に
焼成するものである。
The green sheet printing method is a ceramic green sheet (
Printing of a conductive paste such as Ag-Pd and dielectric paste such as alumina is repeated on an unfired sheet, and the sheet is then fired.

また、グリーンシート積層法は、グリーンシート印刷法
により作成した基板を重ね合わせて一体焼成するもので
ある。
Further, in the green sheet lamination method, substrates created by the green sheet printing method are stacked and integrally fired.

厚膜法は、焼成したセラミック基板上に導体ペーストと
誘電体ペーストとを交互に印刷、焼成する工程を繰り返
すものである。
The thick film method involves repeating the process of alternately printing conductor paste and dielectric paste on a fired ceramic substrate and firing them.

(発明が解決しようとする問題点) ところで、従未知ちれている多層配線セラミック基板は
、コンデンサを内蔵していないため、基板上にコンデン
サをマウントする必要があり、基板面積が増大してしま
う。また、実開昭59−44031号に開示されている
コンデンサネットワークは、多層配線部分が無い。しか
し、最近需要者側よりコンデンサネットワークに対して
も多層配線を付加することが要望されるようになってき
ている。
(Problem to be solved by the invention) By the way, the conventional multilayer wiring ceramic board does not have a built-in capacitor, so it is necessary to mount the capacitor on the board, which increases the board area. . Further, the capacitor network disclosed in Utility Model Application Publication No. 59-44031 does not have a multilayer wiring portion. However, recently, there has been a demand from consumers to add multilayer wiring to capacitor networks as well.

(問題点を解決するための手段) 本発明は、上記の点に鑑み、複数個のコンデンサ及び多
層配線を内蔵しており、需要者の種々の要望に対応可能
で外形寸法の小型化を図り得る積層集積回路提供しよう
とするものである。
(Means for Solving the Problems) In view of the above points, the present invention incorporates a plurality of capacitors and multilayer wiring, and is capable of responding to the various demands of consumers and achieving miniaturization of external dimensions. The aim is to provide a laminated integrated circuit that can be obtained.

本発明は、コンデンサ用西部導体間にセラミック層を介
在させて複数個のコンデンサを構成した積層コンデンサ
ネットワークに、配線用内部導体間にセラミック層を介
在させた多層配線セラミック基板を一体に形成したこと
により、上記従来の問題点を解消している。
The present invention includes a multilayer wiring ceramic substrate in which a ceramic layer is interposed between inner conductors for wiring and a multilayer wiring ceramic substrate in which a ceramic layer is interposed between inner conductors for wiring is integrally formed with a multilayer capacitor network in which a plurality of capacitors are constructed by interposing a ceramic layer between western conductors for capacitors. This solves the above conventional problems.

(作用) 本発明の82層集積回路においては、コンデンサネット
ワークと多層配線セラミック基板とが一体となっている
ため、従来の多層配線セラミック基板で必要とされたコ
ンデンサのマウントが不要となり、基板寸法の小型化が
可能である。また、単なるコンデンサネットワークとは
異なり、多層配線部分を有するため、需要者の種々の要
望に応えることができる利点がある。さらに、基板表面
に、印刷抵抗や半導体ペアチップ(外装容器を省略した
もの)をマウントして積層混成集積回路を構成すること
もできる。
(Function) In the 82-layer integrated circuit of the present invention, since the capacitor network and the multilayer wiring ceramic board are integrated, there is no need to mount the capacitor, which was required in the conventional multilayer wiring ceramic board, and the board size can be reduced. Miniaturization is possible. Furthermore, unlike a simple capacitor network, it has a multilayer wiring section, so it has the advantage of being able to meet the various demands of consumers. Furthermore, a laminated hybrid integrated circuit can be constructed by mounting a printed resistor or a pair of semiconductor chips (without an outer container) on the surface of the substrate.

(実施例) 以下、本発明に係る積層集積回路の実施例を図面に従っ
て説明する。
(Example) Hereinafter, an example of a laminated integrated circuit according to the present invention will be described with reference to the drawings.

第1図乃至第3図は本発明の第1実施例を示す。1 to 3 show a first embodiment of the present invention.

f:51図は積層工程を示すもので積層集積回路を構成
するためのセラミックグリーンシー)30A乃至30E
及びグリーンシート表面に印刷すべき谷内部導体31A
乃至311を示す。例えば、グリーンシート積層法によ
り製造するものとすれば、配線用内部導体31Aの導体
ペーストを印刷したグリーンシー)30Aと、配線用内
部導体31B。
Figure f: 51 shows the lamination process and shows ceramic green sheets (30A to 30E) for constructing a laminated integrated circuit.
and valley inner conductor 31A to be printed on the green sheet surface
to 311 are shown. For example, if they are manufactured by a green sheet lamination method, a green sheet 30A printed with a conductive paste for the internal wiring conductor 31A and an internal wiring conductor 31B.

31Cの導体ペーストを印刷したグリーンシート30B
と、コンデンサ用内部導体31 D、31 Eの導体ペ
ーストを印刷したグリーンシート30Cと、コンデンサ
用内部導体31F、31G、31H。
Green sheet 30B printed with 31C conductor paste
, a green sheet 30C printed with conductor paste for internal conductors 31D and 31E for capacitors, and internal conductors 31F, 31G, and 31H for capacitors.

311の導体ペーストを印刷したグリーンシート30D
とく但し印刷済みグリーンシー)30C,30Dは必要
な静電容量となるまで繰り返し積層される)、グリーン
シート?OEとを、重ね合わせて(ラミネートして)一
体焼成する。これにより、f53図のように配線用内部
導体31Aと31B。
Green sheet 30D printed with 311 conductor paste
However, printed green sheets) 30C and 30D are repeatedly stacked until the required capacitance is achieved), green sheets? OE and OE are superimposed (laminated) and fired together. As a result, the wiring internal conductors 31A and 31B are formed as shown in figure f53.

31C間に絶縁層としてのセラミック層が介在し、かつ
コンデンサ用内部導体31D、31Eと31F乃至31
1間に誘電体としてのセラミック層が介在したコンデン
サネットワークベース多層配線基板32が得られる。多
層基板32の側面部分には外部電極1乃至12がやは9
34体ペーストの印刷焼き付は等により所定間隔で設け
られる。
A ceramic layer as an insulating layer is interposed between the capacitor internal conductors 31D, 31E and 31F to 31C.
A capacitor network-based multilayer wiring board 32 is obtained in which a ceramic layer as a dielectric material is interposed between the layers. The external electrodes 1 to 12 are now 9 on the side surface of the multilayer substrate 32.
The printing of the 34-body paste is provided at predetermined intervals by et al.

第2図に多層基板32に形成された外部電極1乃至12
と内部のコンデンサ及び配線との接続関係を示す。また
、第3図は第2図のIII −iII断面図である。
External electrodes 1 to 12 formed on a multilayer substrate 32 in FIG.
The connection relationship between and internal capacitors and wiring is shown. Further, FIG. 3 is a sectional view taken along line III-iIII of FIG. 2.

この第1実施例によれば、複数個のコンデンサと多層配
線を内蔵したコンデンサネットワークベース多層配線基
板を得ることができ、コンデンサのマウントを不要とし
て外形寸法の小型化ができる。
According to the first embodiment, it is possible to obtain a capacitor network-based multilayer wiring board that incorporates a plurality of capacitors and multilayer wiring, and the external dimensions can be reduced by eliminating the need to mount the capacitors.

第4図及び第5図は本発明の第2実施例であり、fjS
4図で多層基板40に形成された外部電極1乃至24と
内部のコンデンサ、配線及び新たに付加する抵抗との接
続関係を示す。また、第5図は第4図のV−■断面図で
ある。この第2実施例は、第1実施例と同様にして得ら
れたコンデンサネットワークベース多層配線基板40の
一方の面に印刷抵抗41及び表面導体42を付加して積
層混成集積回路を構成したものである。この場合、印刷
抵抗41は抵抗ペーストの印刷焼き付け、表面導体42
は導体ペーストの印刷焼き付けで形成すればよい。なお
、31Jはコンデンサ用内部導体、31には配線用内部
導体である。
FIGS. 4 and 5 show a second embodiment of the present invention, in which fjS
FIG. 4 shows the connection relationships between the external electrodes 1 to 24 formed on the multilayer substrate 40, internal capacitors, wiring, and newly added resistors. Further, FIG. 5 is a sectional view taken along the line V--■ in FIG. 4. In this second embodiment, a printed resistor 41 and a surface conductor 42 are added to one side of a capacitor network-based multilayer wiring board 40 obtained in the same manner as in the first embodiment to construct a laminated hybrid integrated circuit. be. In this case, the printed resistor 41 is formed by printing and baking resistor paste, and the surface conductor 42
may be formed by printing and baking a conductive paste. Note that 31J is an internal conductor for a capacitor, and 31 is an internal conductor for wiring.

第6図及び第7図は本発明の第3実施例を示す。6 and 7 show a third embodiment of the invention.

この場合、コンデンサネットワークベース多層配線基板
40の一方の面に印刷抵抗41と表面導体42を設けた
第2実施例のm成に加えて、基板40の他方の面に半導
体ペアチップ50をマウントしかつ表面導体51を形成
し積層混成集積回路を構成している。なお、ペアチップ
50の保護の為に第7図のように樹脂やアルミナ等の保
護キャップ52を基板40上に装着してもよい。
In this case, in addition to the configuration of the second embodiment in which a printed resistor 41 and a surface conductor 42 are provided on one side of a capacitor network-based multilayer wiring board 40, a semiconductor pair chip 50 is mounted on the other side of the board 40. A surface conductor 51 is formed to constitute a laminated hybrid integrated circuit. Incidentally, in order to protect the paired chips 50, a protective cap 52 made of resin, alumina, etc. may be mounted on the substrate 40 as shown in FIG.

(発明の効果) 以上説明したように、本発明の積層集積回路によれば、
コンデンサ用内部導体間にセラミック層を介在させて複
数個のコン゛デンサを構成した積層コンデンサネットワ
ークに、配線用内部導体間にセラミック層を介在させた
多層配線セラミック基板を一体に形成したので、複数個
のコンデンサ及び多層配線を内蔵していて需要者の種々
の要望に対応可能であり、しかも外形寸法の小型化を図
り得る。
(Effects of the Invention) As explained above, according to the laminated integrated circuit of the present invention,
A multilayer wiring ceramic substrate with a ceramic layer interposed between wiring internal conductors is integrally formed with a multilayer capacitor network comprising a plurality of capacitors with ceramic layers interposed between capacitor internal conductors. It has built-in multiple capacitors and multilayer wiring, so it can meet the various demands of consumers, and it is also possible to reduce the external dimensions.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る積層集積回路の第1実施例を説明
する分解斜視図、第2図は第1実施例に1  おける外
部電極と基板内部の回路との接続関係を示す回路図、第
3図は第2図のlll−III断面図、第4図は本発明
の第2実施例における外部電極と基板内部の回路との接
続関係を示す回路図、第5図は第4図の■−■断面図、
@、6図は本発明の第3実施例を示す正断面図、第7図
は同斜視図である。 1乃至24・・・外部電極、30A乃至30E・・・グ
リーンシート、31A乃至311・・・内部導体、32
.40・・・多層基板、41・・・印刷抵抗、50・・
・半導体ペアチップ。 特許出厘人 ティーデイ−ケイ株式会社
FIG. 1 is an exploded perspective view illustrating a first embodiment of a laminated integrated circuit according to the present invention, and FIG. 2 is a circuit diagram showing the connection relationship between the external electrode and the circuit inside the substrate in the first embodiment. 3 is a sectional view taken along line III-III in FIG. 2, FIG. 4 is a circuit diagram showing the connection relationship between the external electrode and the circuit inside the substrate in the second embodiment of the present invention, and FIG. ■−■ Cross section,
Figure 6 is a front sectional view showing a third embodiment of the present invention, and Figure 7 is a perspective view thereof. 1 to 24... External electrode, 30A to 30E... Green sheet, 31A to 311... Internal conductor, 32
.. 40...Multilayer board, 41...Printed resistor, 50...
・Semiconductor pair chip. Patent agent TDC Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] (1) コンデンサ用内部導体間にセラミック層を介在
させて複数個のコンデンサを構成した積層コンデンサネ
ットワークに、配線用内部導体間にセラミック層を介在
させた多層配線セラミック基板を一体に形成したことを
特徴とする積層集積回路。
(1) A multilayer wiring ceramic substrate with a ceramic layer interposed between internal conductors for wiring is integrally formed with a multilayer capacitor network consisting of multiple capacitors with ceramic layers interposed between internal conductors for capacitors. Characteristics of stacked integrated circuits.
JP25837887A 1987-10-15 1987-10-15 Multilayer integrated circuit Expired - Lifetime JP2627625B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25837887A JP2627625B2 (en) 1987-10-15 1987-10-15 Multilayer integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25837887A JP2627625B2 (en) 1987-10-15 1987-10-15 Multilayer integrated circuit

Publications (2)

Publication Number Publication Date
JPH01101656A true JPH01101656A (en) 1989-04-19
JP2627625B2 JP2627625B2 (en) 1997-07-09

Family

ID=17319411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25837887A Expired - Lifetime JP2627625B2 (en) 1987-10-15 1987-10-15 Multilayer integrated circuit

Country Status (1)

Country Link
JP (1) JP2627625B2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759429U (en) * 1980-09-26 1982-04-08
JPS5944031U (en) * 1982-09-14 1984-03-23 ティーディーケイ株式会社 Multilayer capacitor network
JPS59111394A (en) * 1982-12-16 1984-06-27 松下電器産業株式会社 Condenser-contained ceramic multilayer board
JPS60244097A (en) * 1984-05-18 1985-12-03 ティーディーケイ株式会社 Hybrid electronic circuit
JPS6147691A (en) * 1984-08-15 1986-03-08 日本電気株式会社 Ceramic composite substrate
JPS6247119U (en) * 1985-09-10 1987-03-23

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759429U (en) * 1980-09-26 1982-04-08
JPS5944031U (en) * 1982-09-14 1984-03-23 ティーディーケイ株式会社 Multilayer capacitor network
JPS59111394A (en) * 1982-12-16 1984-06-27 松下電器産業株式会社 Condenser-contained ceramic multilayer board
JPS60244097A (en) * 1984-05-18 1985-12-03 ティーディーケイ株式会社 Hybrid electronic circuit
JPS6147691A (en) * 1984-08-15 1986-03-08 日本電気株式会社 Ceramic composite substrate
JPS6247119U (en) * 1985-09-10 1987-03-23

Also Published As

Publication number Publication date
JP2627625B2 (en) 1997-07-09

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