JP7431032B2 - 電磁誘導式エンコーダ - Google Patents
電磁誘導式エンコーダ Download PDFInfo
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- JP7431032B2 JP7431032B2 JP2019231719A JP2019231719A JP7431032B2 JP 7431032 B2 JP7431032 B2 JP 7431032B2 JP 2019231719 A JP2019231719 A JP 2019231719A JP 2019231719 A JP2019231719 A JP 2019231719A JP 7431032 B2 JP7431032 B2 JP 7431032B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2073—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to two or more coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
- G01D5/206—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element constituting a short-circuiting element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2497—Absolute encoders
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- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
図1(a)は、検出ヘッドとスケールとの間の電磁結合を利用した電磁誘導式エンコーダ100の構成を例示する図である。電磁誘導式エンコーダ100は、測定軸方向に相対移動する検出ヘッド10とスケール20とを有する。検出ヘッド10およびスケール20は、それぞれ略平板形状を有し、所定の隙間を介して対向配置されている。また、電磁誘導式エンコーダ100は、送信信号生成部30、変位量測定部40などを備えている。図1(a)において、X軸は、検出ヘッド10の変位方向(測定軸)を表している。なお、スケール20が構成する平面において、X軸と直交する方向をY軸とする。
図5の例では、トラック数を2としたが、それに限られない。トラック数は3以上であってもよい。図7(a)~図7(c)は、3トラックに適用される受信コイル12の詳細を例示する図である。本変形例においては、第1コイル12aおよび第2コイル12bは、それぞれ、第1トラックTr_A、第2トラックTr_Bおよび第3トラックTr_Cについて共通に備わっている。送信コイル11も、第1トラックTr_A~第3トラックTr_Cのそれぞれについて備わっている。
図8(a)は、第2実施形態に係る送信コイル11aを例示する図である。送信コイル11aは、X軸方向に長さ方向を有する矩形コイルがY軸方向に2つ並び、各矩形コイルでの電流の向きが逆向きになるように配線されたツイスト構造を有している。すなわち、送信コイル11aは、2段のコイルを有している。
11 送信コイル
12 受信コイル
12a 第1コイル
12b 第2コイル
20 スケール
21 結合導体
21a 周期的要素
22 接続部
30 送信信号生成部
40 変位量測定部
100 電磁誘導式エンコーダ
Claims (4)
- 対向配置され、測定軸方向に相対移動する検出ヘッドおよびスケールを備え、
前記検出ヘッドは、第1トラックおよび第2トラックのそれぞれについて、磁束を発生する送信コイルを備え、
前記スケールは、前記第1トラックおよび前記第2トラックのそれぞれについて、前記測定軸方向に周期的に配置されかつ導体からなる複数の周期的要素を備え、
前記検出ヘッドは、前記第1トラックおよび前記第2トラックにわたって連続して配線され、前記第1トラックおよび前記第2トラックについて前記複数の周期的要素が発生する磁束と電磁結合して当該磁束の位相を検出する受信コイルを備え、
前記第1トラックおよび前記第2トラックのそれぞれについて、前記複数の周期的要素は、導体によって接続され、
前記第1トラックおよび前記第2トラックのそれぞれについて、前記送信コイルは、前記複数の周期的要素のそれぞれに対して、互いに逆向きの2以上の渦電流を発生させるように配線されていることを特徴とする電磁誘導式エンコーダ。 - 前記第1トラックおよび前記第2トラックの前記送信コイルに送信信号を送信する送信信号生成部と、
前記受信コイルからの信号に応じて前記検出ヘッドと前記スケールとの間の相対変位量を測定する変位量測定部と、を備え、
前記送信信号生成部は、前記第1トラックの前記送信コイルに前記送信信号を送信する場合には前記第2トラックの前記送信コイルには前記送信信号を送信せず、前記第2トラックの前記送信コイルに前記送信信号を送信する場合には前記第1トラックの前記送信コイルには前記送信信号を送信しないことを特徴とする請求項1に記載の電磁誘導式エンコーダ。 - 前記第1トラックと前記第2トラックとで、前記複数の周期的要素が前記測定軸方向に沿って配置されている周期が異なるか、前記測定軸方向に沿って配置されている位置が異なることを特徴とする請求項1または2に記載の電磁誘導式エンコーダ。
- 前記受信コイルは、前記2以上の渦電流をそれぞれ検出する2以上のコイルを備えることを特徴とする請求項1から3のいずれか一項に記載の電磁誘導式エンコーダ。
Priority Applications (4)
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JP2019231719A JP7431032B2 (ja) | 2019-12-23 | 2019-12-23 | 電磁誘導式エンコーダ |
DE102020007111.2A DE102020007111A1 (de) | 2019-12-23 | 2020-11-20 | Encoder vom elektromagnetischen induktionstyp und verfahren zur verwendung desselben |
US17/101,270 US11422010B2 (en) | 2019-12-23 | 2020-11-23 | Electromagnetic induction type encoder and using method of the same |
CN202011523982.4A CN113091778B (zh) | 2019-12-23 | 2020-12-22 | 电磁感应型编码器及其使用方法 |
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JP2019231719A JP7431032B2 (ja) | 2019-12-23 | 2019-12-23 | 電磁誘導式エンコーダ |
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JP7431032B2 true JP7431032B2 (ja) | 2024-02-14 |
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JP (1) | JP7431032B2 (ja) |
CN (1) | CN113091778B (ja) |
DE (1) | DE102020007111A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003121206A (ja) | 2001-10-12 | 2003-04-23 | Mitsutoyo Corp | 磁気式エンコーダ |
JP2009186200A (ja) | 2008-02-04 | 2009-08-20 | Mitsutoyo Corp | 電磁誘導式エンコーダ |
JP2014137362A (ja) | 2013-01-18 | 2014-07-28 | Mitsutoyo Corp | 誘導検出型ロータリエンコーダ |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US5886519A (en) * | 1997-01-29 | 1999-03-23 | Mitutoyo Corporation | Multi-scale induced current absolute position transducer |
US6329813B1 (en) | 1998-12-17 | 2001-12-11 | Mitutoyo Corporation | Reduced offset high accuracy induced current absolute position transducer |
US6271661B2 (en) * | 1999-03-16 | 2001-08-07 | Mitutoyo Corporation | Absolute position transducer having a non-binary code-track-type scale |
US6297750B1 (en) * | 1999-09-16 | 2001-10-02 | Dynamics Research Corporation | Linear position detecting system |
US6636035B2 (en) * | 2000-03-13 | 2003-10-21 | Mitutoyo Corporation | Position measuring device and error detecting method for the same, and electromagnetic induction position detecting device |
AT509101B1 (de) * | 2009-11-18 | 2011-10-15 | Victor Vasiloiu | Induktive messeinrichtung für längen- und winkelerfassung |
JP5809479B2 (ja) * | 2011-08-03 | 2015-11-11 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
JP5948620B2 (ja) * | 2011-09-16 | 2016-07-06 | 株式会社ミツトヨ | 誘導検出型ロータリエンコーダ |
JP6277047B2 (ja) * | 2014-04-09 | 2018-02-07 | 株式会社ミツトヨ | 誘導検出型ロータリエンコーダ |
DE102014221967A1 (de) * | 2014-10-28 | 2016-04-28 | Horst Siedle Gmbh & Co. Kg | Positionsgeber, Positionsmesseinrichtung und Betriebsverfahren hierfür |
DE102015224589A1 (de) * | 2015-12-08 | 2017-06-08 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
JP6970640B2 (ja) * | 2018-04-13 | 2021-11-24 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
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- 2019-12-23 JP JP2019231719A patent/JP7431032B2/ja active Active
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- 2020-11-20 DE DE102020007111.2A patent/DE102020007111A1/de active Pending
- 2020-11-23 US US17/101,270 patent/US11422010B2/en active Active
- 2020-12-22 CN CN202011523982.4A patent/CN113091778B/zh active Active
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JP2003121206A (ja) | 2001-10-12 | 2003-04-23 | Mitsutoyo Corp | 磁気式エンコーダ |
JP2009186200A (ja) | 2008-02-04 | 2009-08-20 | Mitsutoyo Corp | 電磁誘導式エンコーダ |
JP2014137362A (ja) | 2013-01-18 | 2014-07-28 | Mitsutoyo Corp | 誘導検出型ロータリエンコーダ |
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JP2021099274A (ja) | 2021-07-01 |
US11422010B2 (en) | 2022-08-23 |
CN113091778A (zh) | 2021-07-09 |
US20210190544A1 (en) | 2021-06-24 |
DE102020007111A1 (de) | 2021-06-24 |
CN113091778B (zh) | 2023-09-22 |
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