JP5224838B2 - 電磁誘導式エンコーダ - Google Patents
電磁誘導式エンコーダ Download PDFInfo
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- JP5224838B2 JP5224838B2 JP2008023507A JP2008023507A JP5224838B2 JP 5224838 B2 JP5224838 B2 JP 5224838B2 JP 2008023507 A JP2008023507 A JP 2008023507A JP 2008023507 A JP2008023507 A JP 2008023507A JP 5224838 B2 JP5224838 B2 JP 5224838B2
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- 230000005674 electromagnetic induction Effects 0.000 title claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 25
- 238000005259 measurement Methods 0.000 claims description 9
- 230000004907 flux Effects 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2073—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to two or more coils
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
12…グリッド
14A、14B…スケールコイル
20A、20B…受信コイル
24A、24B…送信コイル
28…送信制御部
Claims (2)
- 測定方向に沿ってスケール上に多数配列されたスケールコイルと、
前記スケールに対して測定方向に相対移動自在にグリッド上に配設された送信コイル及び受信コイルとを備え、
送信コイルを励磁した時に、スケールコイルを経由して受信コイルで検出される磁束の変化から、スケールとグリッドの相対移動量を検出する電磁誘導式エンコーダにおいて、
前記送信コイル、受信コイルとスケールコイルが、スケールの中心に対して対称に複数セット配置されており、
スケール中心に関して対称な位置にあるスケールコイルの一方は、他方のスケールコイルに対し、スケールピッチの1/2位相がずれた関係になっており、
前記送信コイルに同じ方向の電流を流すようにされ、
スケール中心に関して対称な位置にある2つの受信コイルの出力の差を取るように受信コイル同士が接続されていることを特徴とする電磁誘導式エンコーダ。 - 測定方向に沿ってスケール上に多数配列されたスケールコイルと、
前記スケールに対して測定方向に相対移動自在にグリッド上に配設された送信コイル及び受信コイルとを備え、
送信コイルを励磁した時に、スケールコイルを経由して受信コイルで検出される磁束の変化から、スケールとグリッドの相対移動量を検出する電磁誘導式エンコーダにおいて、
前記送信コイル、受信コイルとスケールコイルが、スケールの中心に対して対称に複数セット配置されており、
スケール中心に関して対称な位置にあるスケールコイルの一方は、他方のスケールコイルに対し、スケールピッチの1/2位相がずれた関係になっており、
前記送信コイルに異なる方向の電流を流すようにされ、
スケール中心に関して対称な位置にある2つの受信コイルの出力の和を取るように受信コイル同士が接続されていることを特徴とする電磁誘導式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008023507A JP5224838B2 (ja) | 2008-02-04 | 2008-02-04 | 電磁誘導式エンコーダ |
US12/320,695 US7906958B2 (en) | 2008-02-04 | 2009-02-02 | Electromagnetic induction type encoder |
EP09151984.3A EP2085751B1 (en) | 2008-02-04 | 2009-02-03 | Electromagnetic Induction Type Encoder |
CN2009100099872A CN101504293B (zh) | 2008-02-04 | 2009-02-04 | 电磁感应式编码器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008023507A JP5224838B2 (ja) | 2008-02-04 | 2008-02-04 | 電磁誘導式エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009186200A JP2009186200A (ja) | 2009-08-20 |
JP5224838B2 true JP5224838B2 (ja) | 2013-07-03 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2008023507A Active JP5224838B2 (ja) | 2008-02-04 | 2008-02-04 | 電磁誘導式エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7906958B2 (ja) |
EP (1) | EP2085751B1 (ja) |
JP (1) | JP5224838B2 (ja) |
CN (1) | CN101504293B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7342078B2 (ja) | 2020-09-14 | 2023-09-11 | 楊怡欣 | 液肥、湿度、温度、空気の制御による栽培システム |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5885382B2 (ja) * | 2010-04-19 | 2016-03-15 | 株式会社ミツトヨ | 電磁誘導式直線型エンコーダ |
JP5798397B2 (ja) | 2011-07-22 | 2015-10-21 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
JP5809479B2 (ja) | 2011-08-03 | 2015-11-11 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
JP5948620B2 (ja) * | 2011-09-16 | 2016-07-06 | 株式会社ミツトヨ | 誘導検出型ロータリエンコーダ |
US9163926B2 (en) * | 2012-01-25 | 2015-10-20 | Mitutoyo Corporation | Inductive detection type rotary encoder |
KR101491507B1 (ko) | 2014-01-20 | 2015-02-09 | 한국오므론전장 주식회사 | 자계 유도 보상 패턴이 구비되는 유도형 위치 센서 |
JP6021136B1 (ja) * | 2016-02-03 | 2016-11-09 | 三菱重工工作機械株式会社 | 電磁誘導式位置検出器 |
JP6234497B2 (ja) | 2016-03-15 | 2017-11-22 | Thk株式会社 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
US9778072B1 (en) * | 2016-03-15 | 2017-10-03 | Mitutoyo Corporation | Absolute electromagnetic position encoder |
US9835473B2 (en) | 2016-03-15 | 2017-12-05 | Mitutoyo Corporation | Absolute electromagnetic position encoder |
US10775199B2 (en) | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
US10612943B2 (en) * | 2016-08-24 | 2020-04-07 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
CN108571985A (zh) * | 2017-03-07 | 2018-09-25 | 赛卓电子科技(上海)有限公司 | 电磁感应式旋转编码器 |
JP7118627B2 (ja) * | 2017-12-01 | 2022-08-16 | 株式会社ミツトヨ | 電磁誘導式位置検出装置 |
JP7154990B2 (ja) * | 2017-12-21 | 2022-10-18 | 株式会社ミツトヨ | 電磁誘導式エンコーダの巻線及びスケール構成 |
JP2019113542A (ja) | 2017-12-21 | 2019-07-11 | 株式会社ミツトヨ | 電磁誘導式エンコーダの巻線及びスケール構成 |
US10591316B2 (en) | 2018-03-30 | 2020-03-17 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US10551217B2 (en) | 2018-06-29 | 2020-02-04 | Mitutoyo Corporation | Receiver line spacing in inductive position encoder |
CN110487162B (zh) * | 2019-09-29 | 2020-09-08 | 桂林广陆数字测控有限公司 | 混合定位电磁感应式位移传感器 |
JP7431032B2 (ja) | 2019-12-23 | 2024-02-14 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
DE102021106510A1 (de) | 2020-03-23 | 2021-09-23 | Mitutoyo Corporation | Sender- und empfängerkonfiguration für induktionspositionsgeber |
US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
US12072212B2 (en) | 2022-08-31 | 2024-08-27 | Mitutoyo Corporation | Inductive position encoder utilizing transmissive configuration |
US12072213B2 (en) | 2022-08-31 | 2024-08-27 | Mitutoyo Corporation | Inductive position encoder utilizing slanted scale pattern |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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DE58901369D1 (de) | 1988-03-28 | 1992-06-17 | Weidmueller C A Gmbh Co | Induktive sensoranordnung und messanordnung zur ermittlung der relativlage einer sensoranordnung. |
AU679378B2 (en) * | 1994-05-14 | 1997-06-26 | Synaptics (Uk) Limited | Position encoder |
US6005387A (en) * | 1997-04-16 | 1999-12-21 | Mitutoyo Corporation | Reduced offset high accuracy induced current position transducer |
JP2001201363A (ja) * | 2000-01-19 | 2001-07-27 | Omron Corp | 変位センサ |
JP3504904B2 (ja) * | 2000-03-13 | 2004-03-08 | 株式会社ミツトヨ | 誘導型トランスデューサ及び電子ノギス |
JP3842099B2 (ja) | 2001-10-12 | 2006-11-08 | 株式会社ミツトヨ | 磁気式エンコーダ |
JP2005291929A (ja) * | 2004-03-31 | 2005-10-20 | Mitsutoyo Corp | 電磁誘導式エンコーダ |
JP4615955B2 (ja) * | 2004-10-12 | 2011-01-19 | 株式会社ミツトヨ | 誘導型変位検出装置 |
-
2008
- 2008-02-04 JP JP2008023507A patent/JP5224838B2/ja active Active
-
2009
- 2009-02-02 US US12/320,695 patent/US7906958B2/en active Active
- 2009-02-03 EP EP09151984.3A patent/EP2085751B1/en active Active
- 2009-02-04 CN CN2009100099872A patent/CN101504293B/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7342078B2 (ja) | 2020-09-14 | 2023-09-11 | 楊怡欣 | 液肥、湿度、温度、空気の制御による栽培システム |
Also Published As
Publication number | Publication date |
---|---|
EP2085751B1 (en) | 2015-09-16 |
CN101504293B (zh) | 2012-06-06 |
CN101504293A (zh) | 2009-08-12 |
JP2009186200A (ja) | 2009-08-20 |
US20090195241A1 (en) | 2009-08-06 |
US7906958B2 (en) | 2011-03-15 |
EP2085751A1 (en) | 2009-08-05 |
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