JP6937647B2 - 光学表示パネルの損傷検査方法 - Google Patents
光学表示パネルの損傷検査方法 Download PDFInfo
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- JP6937647B2 JP6937647B2 JP2017187930A JP2017187930A JP6937647B2 JP 6937647 B2 JP6937647 B2 JP 6937647B2 JP 2017187930 A JP2017187930 A JP 2017187930A JP 2017187930 A JP2017187930 A JP 2017187930A JP 6937647 B2 JP6937647 B2 JP 6937647B2
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- 238000007689 inspection Methods 0.000 title claims description 79
- 230000003287 optical effect Effects 0.000 title claims description 71
- 238000000034 method Methods 0.000 title claims description 43
- 238000005286 illumination Methods 0.000 claims description 20
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000012788 optical film Substances 0.000 description 17
- 238000012545 processing Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 238000007796 conventional method Methods 0.000 description 1
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- 230000001960 triggered effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017187930A JP6937647B2 (ja) | 2017-09-28 | 2017-09-28 | 光学表示パネルの損傷検査方法 |
KR1020197037780A KR102495565B1 (ko) | 2017-09-28 | 2018-02-07 | 광학 표시 패널의 손상 검사 방법 |
CN201880048168.6A CN110945347B (zh) | 2017-09-28 | 2018-02-07 | 光学显示面板的损伤检查方法 |
PCT/JP2018/004177 WO2019064622A1 (ja) | 2017-09-28 | 2018-02-07 | 光学表示パネルの損傷検査方法 |
TW107122468A TWI779055B (zh) | 2017-09-28 | 2018-06-29 | 光學顯示面板的損傷檢查方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017187930A JP6937647B2 (ja) | 2017-09-28 | 2017-09-28 | 光学表示パネルの損傷検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019060823A JP2019060823A (ja) | 2019-04-18 |
JP6937647B2 true JP6937647B2 (ja) | 2021-09-22 |
Family
ID=65903437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017187930A Active JP6937647B2 (ja) | 2017-09-28 | 2017-09-28 | 光学表示パネルの損傷検査方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6937647B2 (zh) |
KR (1) | KR102495565B1 (zh) |
CN (1) | CN110945347B (zh) |
TW (1) | TWI779055B (zh) |
WO (1) | WO2019064622A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7030914B1 (ja) * | 2020-08-27 | 2022-03-07 | 花王株式会社 | シート状部材の製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3025946B2 (ja) * | 1995-10-11 | 2000-03-27 | 茨城県 | 物体表面の粗さ測定方法及び装置 |
JPH11271035A (ja) * | 1998-03-24 | 1999-10-05 | Hitachi Metals Ltd | 欠陥検査装置及び欠陥検査方法 |
US6628381B1 (en) * | 2000-06-20 | 2003-09-30 | Applied Materials, Inc. | Optical inspection method and apparatus utilizing a collection angle design |
JP4703911B2 (ja) * | 2001-08-10 | 2011-06-15 | 日新製鋼株式会社 | 金属帯の孔状欠陥検査装置 |
JP2003247953A (ja) * | 2002-02-25 | 2003-09-05 | Seiko Epson Corp | 液晶パネル外観検査方法及び検査装置 |
WO2004079352A1 (ja) * | 2003-03-04 | 2004-09-16 | Mitsuboshi Diamond Industrial Co. Ltd. | 透明基板端面部の検査装置およびその検査方法 |
KR100418357B1 (ko) | 2003-03-31 | 2004-02-14 | (주)에이치아이티에스 | 엘시디(lcd) 패널의 측면검사장치 및 방법 |
WO2004088399A1 (en) * | 2003-03-31 | 2004-10-14 | Hits Co., Ltd. | Lcd cell edge inspection apparatus and method thereof |
JP4760029B2 (ja) * | 2005-01-31 | 2011-08-31 | アイシン精機株式会社 | 欠陥検査方法および欠陥検査装置 |
JP4626982B2 (ja) * | 2005-02-10 | 2011-02-09 | セントラル硝子株式会社 | ガラス板の端面の欠陥検出装置および検出方法 |
JP5015824B2 (ja) * | 2008-02-29 | 2012-08-29 | 日東電工株式会社 | 粘着フィルム位置検出器および粘着フィルム貼付装置 |
EP2515072A4 (en) * | 2009-12-17 | 2016-05-11 | Nippon Steel & Sumitomo Metal Corp | DEVICE AND METHOD FOR TESTING A TUBULAR PRODUCT |
JP5561178B2 (ja) * | 2010-04-09 | 2014-07-30 | 新日鐵住金株式会社 | 表面欠陥検査装置、表面欠陥検査方法及びプログラム |
JP2011257257A (ja) * | 2010-06-09 | 2011-12-22 | Panasonic Corp | 検査装置、検査方法およびこれらを用いた画像表示用パネルの製造方法 |
JP6329397B2 (ja) * | 2014-03-07 | 2018-05-23 | 株式会社ダイヘン | 画像検査装置及び画像検査方法 |
CN204215118U (zh) * | 2014-12-02 | 2015-03-18 | 北京兆维电子(集团)有限责任公司 | 液晶屏外观检测装置 |
JP6344290B2 (ja) * | 2015-04-01 | 2018-06-20 | 東芝三菱電機産業システム株式会社 | 平面形状測定装置 |
-
2017
- 2017-09-28 JP JP2017187930A patent/JP6937647B2/ja active Active
-
2018
- 2018-02-07 WO PCT/JP2018/004177 patent/WO2019064622A1/ja active Application Filing
- 2018-02-07 CN CN201880048168.6A patent/CN110945347B/zh active Active
- 2018-02-07 KR KR1020197037780A patent/KR102495565B1/ko active Active
- 2018-06-29 TW TW107122468A patent/TWI779055B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20200062081A (ko) | 2020-06-03 |
TW201915481A (zh) | 2019-04-16 |
CN110945347A (zh) | 2020-03-31 |
CN110945347B (zh) | 2024-01-12 |
WO2019064622A1 (ja) | 2019-04-04 |
KR102495565B1 (ko) | 2023-02-03 |
JP2019060823A (ja) | 2019-04-18 |
TWI779055B (zh) | 2022-10-01 |
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