[go: up one dir, main page]

JP6925770B2 - 膜形成装置及び膜形成方法 - Google Patents

膜形成装置及び膜形成方法 Download PDF

Info

Publication number
JP6925770B2
JP6925770B2 JP2019509612A JP2019509612A JP6925770B2 JP 6925770 B2 JP6925770 B2 JP 6925770B2 JP 2019509612 A JP2019509612 A JP 2019509612A JP 2019509612 A JP2019509612 A JP 2019509612A JP 6925770 B2 JP6925770 B2 JP 6925770B2
Authority
JP
Japan
Prior art keywords
substrate
inkjet head
ink
film forming
heating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019509612A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2018180803A1 (ja
Inventor
礒　圭二
圭二 礒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of JPWO2018180803A1 publication Critical patent/JPWO2018180803A1/ja
Application granted granted Critical
Publication of JP6925770B2 publication Critical patent/JP6925770B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2002/022—Control methods or devices for continuous ink jet

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Coating Apparatus (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Ink Jet (AREA)
JP2019509612A 2017-03-29 2018-03-20 膜形成装置及び膜形成方法 Active JP6925770B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017064872 2017-03-29
JP2017064872 2017-03-29
PCT/JP2018/011138 WO2018180803A1 (ja) 2017-03-29 2018-03-20 膜形成装置及び膜形成方法

Publications (2)

Publication Number Publication Date
JPWO2018180803A1 JPWO2018180803A1 (ja) 2020-02-06
JP6925770B2 true JP6925770B2 (ja) 2021-08-25

Family

ID=63675829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019509612A Active JP6925770B2 (ja) 2017-03-29 2018-03-20 膜形成装置及び膜形成方法

Country Status (5)

Country Link
JP (1) JP6925770B2 (zh)
KR (1) KR102433555B1 (zh)
CN (1) CN110446558B (zh)
TW (1) TWI724283B (zh)
WO (1) WO2018180803A1 (zh)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109083A (ja) * 1986-10-28 1988-05-13 Seiko Epson Corp インクジエツト記録方法
KR20040081771A (ko) * 2002-02-08 2004-09-22 거버 사이언티픽 프로덕츠, 인코포레이티드 표장 제조 방법 및 장치
CN1209488C (zh) * 2003-06-27 2005-07-06 西北工业大学 用于薄膜制备的加热控温装置及使用方法
JP2005033049A (ja) * 2003-07-08 2005-02-03 Nec Toppan Circuit Solutions Inc プリント配線板の配線パターン形成方法及びプリント配線板の製造方法
TW200624479A (en) * 2004-12-09 2006-07-16 Fraunhofer Ges Forschung Film forming material and preparation of surface relief and optically anisotropic structures by irradiating a film of the said material
JP2009520598A (ja) * 2005-12-22 2009-05-28 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 基板上に物質を位置付けるインクジェット装置、基板の上に物質を位置付ける方法、及び、インクジェット装置の使用
JP2008130764A (ja) * 2006-11-20 2008-06-05 Sharp Corp プリント配線板製造装置、プリント配線板、プリント配線板製造方法および電子機器
JP2008188983A (ja) 2006-12-25 2008-08-21 Seiko Epson Corp 紫外線照射装置および該紫外線照射装置を用いた記録装置、ならびに記録方法
KR101220628B1 (ko) * 2007-12-06 2013-01-21 도꾸리쯔교세이호진 상교기쥬쯔 소고겡뀨죠 패턴 묘화 방법 및 장치
WO2009139060A1 (ja) * 2008-05-15 2009-11-19 株式会社島津製作所 光マトリックスデバイスの製造方法および光マトリックスデバイスの製造装置
JP2010026507A (ja) * 2008-06-20 2010-02-04 Sharp Corp 局所加熱装置
JP5363257B2 (ja) * 2009-09-28 2013-12-11 富士フイルム株式会社 カラーフィルタ製造方法及びカラーフィルタ製造装置
JPWO2011155324A1 (ja) * 2010-06-08 2013-08-01 シャープ株式会社 インクジェット塗布装置
CN102646755A (zh) * 2012-04-23 2012-08-22 锦州新世纪石英（集团）有限公司 多晶硅薄膜电池片的生产工艺
CN102953033A (zh) * 2012-11-28 2013-03-06 中山市创科科研技术服务有限公司 一种激光蒸发镀膜装置
KR102294837B1 (ko) * 2013-08-16 2021-08-26 삼성전자주식회사 광학 부품을 제조하는 방법, 광학 부품, 및 그것을 포함하는 제품

Also Published As

Publication number Publication date
TWI724283B (zh) 2021-04-11
CN110446558A (zh) 2019-11-12
KR20190132986A (ko) 2019-11-29
TW201902583A (zh) 2019-01-16
CN110446558B (zh) 2021-11-09
JPWO2018180803A1 (ja) 2020-02-06
KR102433555B1 (ko) 2022-08-17
WO2018180803A1 (ja) 2018-10-04

Similar Documents

Publication Publication Date Title
EP3294528B1 (en) Additive manufacturing apparatus and method
JP6306907B2 (ja) 立体造形物の製造方法及び製造装置
US8353588B2 (en) Drawing device
KR20100080120A (ko) 인쇄회로 소결방법
CN100506539C (zh) 图案形成方法及液滴喷出装置
JP6925770B2 (ja) 膜形成装置及び膜形成方法
JP2010012391A (ja) 液体吐出装置及び液体パターンの形成方法
JP6926078B2 (ja) 回路形成方法、および回路形成装置
JP4297066B2 (ja) 液滴吐出装置及び液滴吐出ヘッド
JP5119167B2 (ja) 光硬化性インキを用いてインクジェット式に印刷する方法
JP2012139655A (ja) 印刷装置
JP2010201560A (ja) 球状構造体の製造方法及び装置
JP2009072729A (ja) 液滴吐出装置の液滴乾燥方法及び液滴吐出装置
KR102668012B1 (ko) 고해상도 솔더링
CN110406266B (zh) 喷墨打印装置和喷墨打印方法
JP2010204386A (ja) 球状構造体の製造方法及び装置
US8376542B2 (en) Pre-heating print media
WO2021141076A1 (ja) 液体吐出装置及び液体吐出方法
WO2019167156A1 (ja) 配線形成装置および配線形成方法
US11760018B2 (en) System and method for additive manufacture of three-dimensional (3D) printed objects with UV-curable material using a porous substrate
TW202202257A (zh) 錫膏之雷射列印
US20240190072A1 (en) Additive manufacture with line-shaped energy beam
CN1944050A (zh) 图案形成方法及液滴喷出装置
JP4400540B2 (ja) パターン形成方法及び液滴吐出装置
JP5790732B2 (ja) 液体吐出装置および描画方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200916

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210511

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210708

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210803

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210803

R150 Certificate of patent or registration of utility model

Ref document number: 6925770

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150