JP5837360B2 - Long gauge for 3D measuring machine verification - Google Patents

Description

  The present invention relates to a three-dimensional measuring machine verification gauge used for accuracy inspection of a three-dimensional measuring machine and calibration of measurement errors.

  Conventionally, for measuring the dimensions of mechanical parts such as automobile engines and transmission cases, a probe (measuring element) that can be moved in a three-dimensional direction with respect to an object to be measured set on a measurement table (bed). A three-dimensional measuring machine in which the tip is brought into contact and the coordinates of the contact point are measured is widely used.

  In order to maintain the measurement accuracy, such a three-dimensional measuring machine is periodically inspected for accuracy and calibrated for measurement errors using a reference gauge that has been finished with high accuracy.

  As a verification gauge for a three-dimensional measuring machine that has been conventionally proposed, for example, there is a ball step gauge as described in Patent Document 1. This is a structure in which a plurality of holes are provided along the axis of a long gauge frame body, and a ball contacting the probe of the coordinate measuring machine is press-fitted into each hole and fixed. The accuracy of the three-dimensional measuring machine is evaluated by comparing the data such as the distance between different balls measured by the above with the reference value of the ball step gauge.

JP 2001-4358 A

  In the verification gauge (ball step gauge) disclosed in Patent Document 1, a plurality of holes are provided in the longitudinal direction of a long section H-shaped gauge frame, and a ball is fixed to each hole. In addition, there is a structure in which four grooves for allowing the probe to enter are formed around the ball, and the shape and structure are complicated, and there is a problem that many processes are required for manufacturing. .

  In addition, in order to measure the coordinate value of the ball surface, it is necessary to insert the probe into the groove formed around the ball of the gauge frame body. There was a problem that it was limited to only four places in the groove.

  Further, in a three-dimensional measuring machine having a structure in which the probe tip can be brought into contact with the surface to be measured from different directions, there is a possibility that a difference occurs between measured coordinate values depending on the direction of the probe tip. When evaluating the measurement accuracy, it is necessary to verify the measurement error due to the orientation of the probe.

  However, the verification gauge disclosed in Patent Document 1 has a structure on the premise that the probe is brought into contact with the surface to be measured from above in a vertical posture. ° It was unsuitable when trying to verify the measurement error due to the orientation of the probe by contacting the surface to be measured from different directions.

  Therefore, the present invention solves the problems in the conventional three-dimensional measuring machine verification gauge as described above, can be easily manufactured with a simple structure, and verifies the measurement error depending on the orientation of the probe tip. Another object of the present invention is to provide a highly accurate three-dimensional measuring machine verification long gauge that can be used for the above-mentioned.

  The long gauge for verification of a three-dimensional measuring machine of the present invention provided for the above purpose has a reference hole serving as a reference measuring surface with which a probe of the three-dimensional measuring machine comes into contact, extending between the upper surface and the lower surface in the longitudinal direction. A long gauge body having a rectangular cross section made of a material having a small coefficient of thermal expansion and excellent dimensional stability, and a lower surface of the gauge body and one side surface perpendicular thereto. A plurality of projecting support legs, the support legs projecting in an arrangement that is the apex of a flat isosceles triangle at the position in the vicinity of the longitudinal ends of each of the lower surface and one side surface and the center position. These support legs are characterized in that the gauge main body is selectively supported at three points on the lower surface or one side surface toward the measurement table surface of the three-dimensional measuring machine.

  In the 3D measuring machine verification long gauge, the protruding length is set slightly shorter than the supporting leg on the lower surface of the gauge body and one side surface perpendicular thereto, and the measuring table surface of the 3D measuring machine. It is desirable to provide an auxiliary leg that contacts the measurement table surface and prevents the gauge body from overturning when one of the support legs that support the gauge body floats.

In addition, the long gauge for verification of the three-dimensional measuring machine of the present invention has a plurality of reference sleeve holding holes penetrating between the upper surface and the lower surface along the longitudinal direction, has a small thermal expansion coefficient and excellent dimensional stability. A long gauge body having a rectangular cross section made of a material, and a reference hole serving as a reference measurement surface which is fitted in each reference sleeve holding hole of the gauge body and a probe of the three-dimensional measuring machine contacts the center. A plurality of reference sleeves formed in a hollow cylindrical shape that penetrates in the axial direction, and three supports that protrude from the lower surface of the gauge body and support the gauge body on the measurement table surface of the three-dimensional measuring machine at three points Each of the three support legs is fitted and held in a hole or a U-shaped groove formed in a mounting portion of a gauge holding jig placed on the measurement table of the three-dimensional measuring machine. The cylindrical part and these support legs Threaded portion for screwing a fixing nut fastened to the mounting portion is characterized by being provided.

  Further, in the long gauge for verification of the three-dimensional measuring machine according to the present invention, the reference sphere receiving recesses are respectively formed on the upper surfaces in the vicinity of both ends of the gauge body in the longitudinal direction, and It is also desirable that a reference sphere serving as a reference measurement surface with which the probe abuts is disposed.

  According to the long gauge for verification of a three-dimensional measuring machine according to the first aspect of the invention, the structure is simple, can be manufactured with high accuracy and easily, and according to the orientation of the probe of the three-dimensional measuring machine. The orientation of the reference hole can be selected and used in the vertical and horizontal directions.

  In particular, in a state in which the direction of the reference hole is in the horizontal direction, the tip of the probe can be horizontally penetrated from both sides of the reference hole, and therefore, in a three-dimensional measuring machine equipped with a probe head that can hold the probe in a horizontal posture Can also be used to verify measurement errors caused by the orientation of the probe tip.

  In addition, by providing the support legs, it is possible to support three points on the measurement table of the three-dimensional measuring machine without rattling, and to secure a gap where a hand can enter between the gauge body and the measurement table surface. Even when the weight of the gauge body is large, it can be easily set on the measurement table of the three-dimensional measuring machine.

  According to the long gauge for verification of a three-dimensional measuring machine according to the invention described in claim 2, since the auxiliary leg is provided on one side surface and the lower surface of the gauge body, when setting to the measurement table, etc. When an external force acts on the gauge main body and one of the support legs supporting the gauge main body floats from the measurement table surface, the auxiliary leg can contact the upper surface of the measurement table to support the gauge main body and prevent a fall.

  According to the long gauge for verification of a three-dimensional measuring machine according to the invention described in claim 3, the structure is simple, highly accurate and easy to manufacture, similar to that described in claim 1. Since a gap is provided between the lower surface of the gauge body and the measurement table surface, it can be easily set on the measurement table of the three-dimensional measuring machine even when the gauge body is heavy.

  The three-dimensional measurement according to claim 1, wherein a reference hole serving as a reference measurement surface with which a probe of the three-dimensional measuring machine abuts is formed in a reference sleeve which is a component independent of the gauge body. Manufacture is easier and accuracy can be improved than the long gauge for machine verification.

  Furthermore, each support leg has a cylindrical portion fitted in and held in a hole or a U-shaped groove formed in a mounting portion of a gauge holding jig placed on the measurement table of the three-dimensional measuring machine, and these supports. Since there is a threaded part for screwing a fixing nut to fasten and fix the leg to the mounting part, a long gauge is attached to the cage holding jig and measured with a high degree of freedom, such as in a vertical, horizontal, or inclined position. Can be set on the table.

  In particular, when the gauge body is set with the gauge holding jig so that the reference hole is oriented sideways, the gauge body is oriented horizontally as in the long gauge for verification of a three-dimensional measuring machine according to claim 1. Since the tip of the probe can enter the inside from both sides of the reference hole, it is also used for verification of measurement errors caused by the orientation of the probe tip in a coordinate measuring machine equipped with a probe head that can hold the probe in a horizontal position. can do.

  Further, according to the long gauge for verification of a three-dimensional measuring machine according to the invention described in claim 4, in addition to the effects of the invention described in claims 1 to 3, the one long gauge is further added. Since two different reference measurement surfaces, a reference hole and a reference sphere, are provided, accuracy evaluation using the reference hole and accuracy evaluation using the reference sphere can be selected when evaluating the accuracy of the three-dimensional measuring machine.

  In addition, since the reference sphere is placed in the reference sphere receiving recess, when handling a long gauge, the risk of inadvertently hitting a nearby reference object with a highly accurate reference sphere is reduced. can do.

It is a perspective view which shows the state which set the long gauge for 3D measuring machine verification in the 1st Embodiment of this invention on the measurement table of a 3D measuring machine. It is a top view which shows 1st Embodiment of the long gauge for three-dimensional measuring machine verification of this invention. It is a side view which shows 1st Embodiment of the long gauge for three-dimensional measuring machine verification of this invention. It is a bottom view which shows 1st Embodiment of the long gauge for three-dimensional measuring machine verification of this invention. It is the figure seen from the left end surface side of FIG. 3 which shows 1st Embodiment of the long gauge for verification of the three-dimensional measuring machine of this invention. It is a cross-sectional view which shows the state which set the long gauge for verification of the three-dimensional measuring machine of this invention on the measurement table of the three-dimensional measuring machine in the horizontal orientation. It is a fragmentary perspective view of a probe head. It is a top view which shows 2nd Embodiment of the long gauge for three-dimensional measuring machine verification of this invention. It is a side view which shows 2nd Embodiment of the long gauge for three-dimensional measuring machine verification of this invention. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. It is a perspective view of a gauge holding jig. It is a perspective view of the gauge holding jig which attached the long gauge for the three-dimensional measuring machine verification of this invention. It is a fragmentary sectional view which shows the attachment structure to the gauge holding jig of the long gauge for 3D measuring machine verification of this invention. It is a perspective view of the cage holding jig which attached the long gauge for verification of the three-dimensional measuring machine of the present invention in the horizontal posture.

Hereinafter, an embodiment of a long gauge for verification of a three-dimensional measuring machine (hereinafter referred to as a long gauge) of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a state in which a long gauge is set on a measurement table of a three-dimensional measuring machine in the first embodiment of the present invention. As shown in FIG. A three-dimensional measuring machine 2 in which accuracy inspection is performed by the gauge 1 has a measurement table 3 on which an object to be measured is placed.

  On both sides of the measurement table 3, gate-shaped movable frames 4 are supported so as to be slidable in the horizontal X direction. The movable frame 4 supports a head portion 5 so as to be slidable in a horizontal Y direction orthogonal to the X direction, and the head portion 5 further includes a lifting cylinder 6 in the Z direction, that is, in the vertical direction. It is slidably supported.

  Further, a probe 7 is attached to a probe head 6A provided at the lower end of the elevating cylinder 6, and when the dimensions of the finished surface of a work such as an engine block are measured by the three-dimensional measuring machine 2, Then, a work (not shown) is placed on the measurement table 3 and the movable movable frame 4, the head unit 5, and the elevating cylinder 6 are moved in the X, Y, and Z directions, respectively, and the tip of the probe 7 is placed on the work table. The coordinate position of the surface to be measured is measured by touching the surface to be measured.

  On the other hand, when performing accuracy inspection of the three-dimensional measuring machine 2 or calibration of measurement errors, the long gauge 1 of the present invention is placed on the measurement table 2 instead of the workpiece as shown in FIG. Thus, the coordinate positions of a plurality of measurement points on the long gauge are measured.

  2 is a plan view of the long gauge 1, FIG. 3 is a side view thereof, FIG. 4 is a bottom view thereof, and FIG. 5 is a view seen from the left end face side of FIG. As shown, the long gauge 1 has an elongated gauge body 1A having a rectangular cross section.

  In the present embodiment, the gauge body 1A is formed of a super invar having a small thermal expansion coefficient, and has a plurality of reference holes 1B penetrating from the upper surface to the lower surface. The material of the gauge body 1A is not limited to this, and other materials having a small coefficient of thermal expansion and excellent dimensional stability, for example, invar (invariant steel), quartz, glass, or the like may be used.

  These reference holes 1B are all arranged at the same interval L along the longitudinal direction of the gauge body 1A, and the inner peripheral surfaces of these reference holes 1B are finished with high accuracy, and the probe of the three-dimensional measuring machine 2 is used. 7 is a reference measurement surface with which the tip comes into contact.

  In the long gauge 1 of the present embodiment, the gauge body 1A has a length of 1030 mm, a width of 50 mm, and a height of 40 mm, and the reference hole 1B has an inner diameter of 25 mm and an interval L of 100 mm. is there.

  Further, a support leg 1a and an auxiliary leg 1b for stably setting the long gauge 1 on the measurement table 3 of the three-dimensional measuring machine 2 are provided on one side surface and the lower surface of the gauge body 1A, respectively. Has been.

  That is, as shown in FIG. 3, on one side surface perpendicular to the lower surface of the gauge body 1A, the supporting leg 1a is disposed on the lower side and the auxiliary leg 1b on the upper side, respectively, near the both ends in the longitudinal direction. Further, a support leg 1a is disposed on the upper side of the longitudinal center position.

  Further, as shown in FIG. 4, support legs 1 a and auxiliary legs 1 b are respectively arranged on the same side on the lower surface of the gauge body 1 </ b> A on the left and right sides in the vicinity of both ends in the longitudinal direction. On the left and right sides in the width direction of the center position, support legs 1a and auxiliary legs 1b, respectively, are arranged with their left and right reversed from those near both ends.

  These support legs 1a provided on one side surface and the lower surface of the gauge body 1A allow the gauge body 1 to be placed on the measurement table 3 when the long gauge 1 is used with the reference hole 1B oriented vertically or horizontally. Three points are stably supported at two positions near both ends in the longitudinal direction and one at the center position.

  In addition, since the support leg 1a can secure a clearance between the gauge body 1A and the upper surface of the measurement table 3 of the coordinate measuring machine 2, the measurement table 3 can be used even when the weight of the long gauge 1 is large. Easy to set up.

FIG. 5 shows a state in which the long gauge 1 is supported on the measurement table 3 by the support leg 1a on the lower surface of the gauge body 1A with the reference hole 1B directed in the vertical direction. The auxiliary legs 1b are set to be slightly shorter than the support legs 1a, and usually their lower ends are slightly separated from the upper surface of the measurement table 3.
In the figure, the difference in length between the support leg 1a and the auxiliary leg 1b is exaggerated, and the difference between the two is actually set to about several tens of μm.

  Since the auxiliary leg 1b is supported on the measurement table 3 by three vertices of a flat isosceles triangle formed by the three support legs 1a, the auxiliary leg 1b is easy to fall down. When setting, etc., when some external force acts on the gauge body 1A and one of the support legs 1a supporting the gauge body floats from the upper surface of the measurement table 3 of the three-dimensional measuring machine 2, the gauge contacts the upper surface. It is provided for the purpose of preventing the main body 1A from falling.

  The accuracy of the three-dimensional measuring machine 2 is evaluated by setting the long gauge 1 on the measurement table 3 as shown in FIG. 1, for example, and bringing the tip of the probe 7 into contact with several points on the upper surface of the gauge body 1A. By setting the upper surface as one reference coordinate surface from the coordinate values of several points, the probe 7 is inserted into each reference hole 1B by a predetermined depth from this surface and brought into contact with a plurality of positions on the inner surface. The coordinate position of the center of each reference hole 1B is obtained, and the distance between the centers of these reference holes 1B is compared with the reference value of the long gauge 1 measured in advance with high accuracy.

  FIG. 6 is a cross-sectional view showing a state in which the long gauge 1 is set on the measurement table 3 so that the reference hole 1B faces sideways (that is, the central axis of the reference hole 1B faces the horizontal direction). In this case, the long gauge 1 is supported on the measurement table 3 by three support legs 1a provided on one side surface of the gauge body 1A. In this case, the lower end of the auxiliary leg 1b is usually slightly separated from the upper surface of the measurement table 3.

  As shown in the figure, when the accuracy inspection of the three-dimensional measuring machine 2 is performed by setting the long gauge 1 on the measurement table 3 with the reference hole 1B facing sideways, the tip of the probe 7 is shown in FIG. As shown by the solid line in FIG. 7, it is rotated 90 ° upward as shown by the solid line in FIG. 7 to change the direction so that it can enter the reference hole 1B from the horizontal direction, and the reference hole 1B is opened. The center position of the reference hole 1B at a position where the tip of the probe 7 enters a predetermined distance from here into the reference hole 1B on the basis of one surface of the gauge body 1A (for example, the upper surface lying down as shown in FIG. 6). Measure the coordinates.

  In this case, with the long gauge 1 placed at the same position on the measurement table 3, the direction of the tip of the probe 7 held by the probe head 6A is reversed by 180 °, and the other surface of the gauge body 1A ( In this case, the front end of the probe 7 is inserted into the reference hole 1B from the side of the lower surface (lower side) to the same position as before, and the center position of the reference hole 1B is measured in the same manner. By comparing the values, the measurement error caused by the difference in the direction of the tip of the probe 7 can also be verified.

  The probe head 6A having the structure shown in FIG. 7 has a structure in which the orientation of the probe 7 can be rotated by 180 ° in the vertical plane, but the probe has a structure in which the orientation of the probe can be changed by 180 ° in the horizontal plane. Even in a three-dimensional measuring machine having a probe head for fixing and holding a pair of probes whose tips are opposite to each other in a horizontal plane, a measurement error caused by a difference in the orientation of the probe tip due to the long gauge 1 It is possible to perform the verification in the same manner.

  Next, FIG. 8 is a plan view showing a second embodiment of the long gauge of the present invention, FIG. 9 is a side view thereof, and FIG. 10 is a cross-sectional view taken along line AA of FIG. The long gauge 11 shown in the figure includes an elongated gauge body 11A having a rectangular cross section similar to the long gauge 1 described above.

  In this embodiment, ten reference sleeve holding holes 11B (see FIG. 10) penetrating from the upper surface to the lower surface are arranged at equal intervals along the longitudinal direction of the gauge body 11A, and these reference sleeve holding holes are arranged. A reference sleeve 12 is fitted to 11B.

  Each reference sleeve 12 is formed in a hollow cylindrical shape in which a reference hole 12A passes through the center in the axial direction and a flange 12B is formed at one end, and the reference hole 12A is the above-described three-dimensional measurement. This is a reference measurement surface with which the probe 7 of the machine 2 abuts.

Further, these reference sleeves 12 are fitted into the gauge body 11A and fixed with an adhesive in a state where the lower surface of the flange 12B is positioned in contact with the upper edge of each reference sleeve holding hole 11B of the gauge body 11A. Has been.
In addition, since the hardness and abrasion resistance are requested | required as a raw material of the reference | standard sleeve 12, carbon tool steel (SK material) is used here.

  Further, as shown in FIG. 8, in this embodiment, concave portions 11C having a substantially square shape in plan view are formed in the vicinity of both ends in the longitudinal direction of the upper surface of the gauge body 11A, and the concave portions 11C are formed at the centers of the concave portions 11C. A reference sphere K serving as a reference measurement surface with which the probe 7 abuts is disposed together with the reference hole 12A of each reference sleeve 12 described above.

  As shown in FIG. 10, the reference sphere K is fixed to a spherical concave seating portion 11D, which is formed at the center of the bottom surface of the recess 11C and conforms to the radius of curvature of the reference sphere K, with an adhesive. Yes.

  In the present embodiment, a 3/4 inch diameter zirconia sphere is used as the reference sphere K, and the upper end level is set to be about 1 mm lower than the upper surface level of the gauge body 11A.

  Further, in the long gauge 11 of the present embodiment, a plurality of lightening recesses G are provided on the upper surface side and the lower surface side of the gauge body 11A in order to reduce weight and save material. Note that the gauge body 11A is made of invar.

  As shown in FIG. 8, the gauge body 11A has three screw holes 11E penetrating between the upper surface and the lower surface. One of these screw holes 11E is provided at the center in the width direction near one end in the longitudinal direction of the gauge body 11A.

  The remaining two are provided near the other end of the gauge main body 11A and symmetrically away from the center in the width direction on both sides. These screw holes 11E are for screwing and fixing three support legs 13 protruding from the lower surface of the gauge body 11A as shown in FIG.

  FIG. 11 is a view showing a BB cross section of FIG. 8, and as shown in FIG. 11, the first screw portion 13A of the support leg 13 is screwed into the screw hole 11E. A first cylindrical portion 13B having a smooth surface is formed below the first screw portion 13A.

  A second cylindrical portion 13C having a larger diameter is provided below the first cylindrical portion 13B, and a tapered guide portion 13D is provided further below the second cylindrical portion 13C. Accordingly, a second screw portion 13E having a lower end made of a part of a spherical surface is formed.

  A pair of spherical washers 14A and 14B are incorporated between the lower surface of the gauge body 11A and the upper end surface of the second cylindrical portion 13C, and one spherical washer 14A is the other spherical washer. The opposing surface to 14B is constituted by a part of a concave spherical surface, and the opposing surface of the other spherical washer 14B is constituted by a part of a convex spherical surface adapted to the concave spherical surface.

These spherical washers 14A and 14B are formed on the lower surface of the gauge body 11A and the upper surface of the second cylindrical part 13C when the first screw part 13A is screwed into the screw hole 11E and the support leg 13 is fastened and fixed to the gauge body 11A. Abnormality in parallelism due to a manufacturing error between the end face and the end face is absorbed to prevent distortion in the gauge body 11A.
Although not shown, the attachment structure of the support legs 13 to the two screw holes 11E formed near the other end of the gauge body 11A is the same as that shown in FIG.

  The long gauge 11 configured as described above is supported on the measurement table 3 by the three support legs 13 in the same manner as the long gauge 1 shown in FIG. It can be used for accuracy inspection of the three-dimensional measuring machine 2 with the posture directed in the vertical direction.

  At this time, as described above, the lower ends of the support legs 13 (the lower ends of the second screw portions 13E) are part of a spherical surface, so that the three points on the upper surface of the measurement table 3 are in a point contact state. Since it abuts, the long gauge 11 is stably supported on the measurement table 3.

  Further, in the long gauge 11 of the present embodiment, similarly to the long gauge 1 in the above-described embodiment, the support legs 13 are provided, so that the measurement of the gauge main body 11A and the three-dimensional measuring machine 2 is performed. Since a clearance can be secured between the table 3 and the upper surface of the table 3, setting on the measurement table 3 can be easily performed.

  Further, in the long gauge 11 of the present embodiment, the entire outer surface of the gauge main body 11A is coated for rust prevention, and as shown in FIG. 8, the total distributedly arranged on the upper surface of the gauge main body 11A. The coating film is removed only at 10 circular measurement points a.

  When performing accuracy inspection of the three-dimensional measuring machine 2, after setting the long gauge 11 on the measurement table 3, the probe 7 is brought into contact with these measurement points a to measure the position of the upper surface of the gauge body 11A. Then, one of the reference coordinate planes is determined, and the contact position of the probe tip 7 with the inner peripheral surface of the reference hole 11 in the axial direction of the reference hole 11B is determined from the reference coordinate plane.

  Further, in the long gauge 11 of the present embodiment, the measurement can be performed by applying the tip of the probe 7 of the three-dimensional measuring machine 2 to the inner peripheral surface of each reference hole 11B, and on the surfaces of the two reference spheres K. Measurement can be performed by applying the tip of the probe, and either the inner peripheral surface of the reference hole 11B or the surface of the reference sphere K can be selected as the reference measurement surface.

  Further, in the long gauge 11 of the present embodiment, the three support legs 13 are attached to the gauge holding jig 8 as shown in FIG. 12, and the gauge body 11A is inclined, and the reference hole 12A is set in the horizontal posture. 1 can be set on the measurement table 3 of the coordinate measuring machine 2 shown in FIG.

  The gauge holding jig 8 shown in FIG. 12 has three columnar support legs 8A supported on the measurement table 3, and one of these support legs 8A is the first support body 8B. It is fixed to the lower surface.

  The other two are fixed in the vicinity of the left and right ends of the lower surface of the frame-shaped second support 8C, and the center of the lower surface of these support legs 8A is based on the second support 8C side. It is arranged at each vertex of the isosceles triangle.

  One end of each of the pair of connecting rods 8D and 8E is fixed to each lower surface of the first support 8B and the second support 8C with bolts. The other ends of the connecting rods 8D and the other ends of the connecting rods 8E are respectively fixed by bolts in the vicinity of the short sides of the rectangular connecting plate 8F.

  The upper end of the second support 8C is higher than the upper end of the first support 8B. Between these upper ends, the vicinity of both ends of the gauge support bar 8G is fixed by bolts, and the gauge is held. In order to increase the rigidity of the jig 8, a connecting bar 8H for connecting the first support 8B and the second support 8C is attached to the lower side of the gauge support bar 8G by a bolt in parallel with the jig support bar 8G. .

  On one side surface of the gauge support bar 8G, a slit 8I having a T-shaped cross section is formed along the longitudinal direction. The first lug 8J and the second lug 8K for slidably engaging with the slit 8I for attaching the support leg 13 of the long gauge 11 described above are slidably engaged.

  These lugs 8J and 8K are fastened to a nut (not shown) incorporated in the slit 8I by tightening a bolt that is hidden and cannot be seen in FIG. 12, according to the mounting position of the support leg 13 of the long gauge 11. The gauge support bar 8G can be fixed at an arbitrary position.

  The lugs 8J and 8K are each composed of two mounting pieces 8Ja, 8Jb, 8Ka and 8Kb which are substantially L-shaped and orthogonal to each other. Two mounting holes h for fitting the second cylindrical portion 13C of the support leg 13 shown in FIG. 11 are formed, and the mounting pieces 8Ka and 8Kb of the second lug 8K are respectively provided on the first lug 8J side. The same mounting hole h is formed one by one.

  In the present embodiment, the gauge holding jig 8 is made of an aluminum material in order to reduce the weight of most components except for fastening parts such as bolts, and to facilitate transportation and storage. In addition, it can be disassembled finely by removing the bolts fixing the parts.

   As shown in FIG. 13, when attaching the long gauge 11 to the gauge holding jig 8 described above with the upper surface of the gauge body 11A facing upward, the first attachment of the first lug 8J shown in FIG. The center position of each of the two attachment holes h formed in the piece 8Ja and the one attachment hole h formed in the first attachment piece 8Ka of the second lug 8K is the lower surface of the gauge body 11A of the long gauge 11 The mounting positions of the first lugs 8J and the second lugs 8K are adjusted and fixed to the gauge support bar 8G so as to be aligned with the center positions of the three support legs 13 protruding from the base.

  At this time, one of the first lug 8J and the second lug 8K is fixed to the gauge support bar 8G first, and the protruding end of each support leg 13 is inserted into the opposing mounting hole h to support it. Guided by the guide portion 13D of the leg 13, the second cylindrical portion 13C of the corresponding support leg 13 is fitted into each mounting hole h.

In this state, either the first lug 8J or the second lug 8K is also fixed to the gauge support bar 8G. Next, as shown in FIG. 14, spherical washers 15A and 15B similar to the spherical washers 14A and 14B described above are fixed to the second screw part 13E that protrudes downward through the attachment hole h of the first attachment piece 8Ka. By attaching the nut 16 and tightening the fixing nut 16, the long gauge 11 can be fixed to the gauge holding jig 8.
In addition, although description is abbreviate | omitted here, the attachment structure of the support leg 13 with respect to the 1st lug 8J is also the same as the attachment structure of the support leg 13 with respect to the 2nd lug 8K shown in FIG.

  As described above, the long gauge 11 is tilted with respect to the measurement table 3 of the three-dimensional measuring machine 2 using the cage holding jig 8 to set the accuracy of the three-dimensional measuring machine 3 in the height direction. Can also be performed simultaneously with the horizontal direction.

  In addition, although the gauge holding jig 8 used in the present embodiment is configured to be disassembled into a plurality of parts for easy transportation and storage, in order to simplify the structure and increase the rigidity, The main components may be manufactured integrally. Further, the gauge support bar 8G of the gauge holding jig 8 can be designed at various inclination angles according to the contents of the accuracy inspection of the three-dimensional measuring machine 2.

  The gauge holding jig 8 has an inclination angle with respect to the measurement table 3 in the diagonal direction with the longest measurement range of the three-dimensional measuring machine 2 shown in FIG. Is attached to the gauge holding jig 8 with the maximum measurement length close to the diagonal length, and set on the measurement table 3 in the diagonal direction, The accuracy of the accuracy inspection of the three-dimensional measuring machine 2 and the calibration of the measurement error can be maximized.

  Next, FIG. 15 is a perspective view showing a state in which the long gauge 11 is fixed to the gauge holding jig 8 in a horizontal posture. In this case, the detailed illustration is omitted, but the above-described figure. The two attachment holes h formed in the second attachment piece 8Jb of the first lug 8J and the one attachment hole h formed in the second attachment piece 8Kb of the second lug 8K shown in FIG. 11 are inserted, and spherical washers 15A and 15B and a fixing nut 16 are respectively inserted into the second threaded portions 13E protruding to the back side of the second mounting pieces 8Jb and 8Kb. It is mounted and fixed by tightening the fixing nut 16.

  As shown in FIG. 15, the long gauge 11 is fixed to the gauge holding jig 8 in a horizontal posture and set on the measurement table 3 of the three-dimensional measuring machine 2 so that the axial direction of the reference hole 12A is oriented in the horizontal direction. Similarly to the long gauge 1 of the above-described embodiment, the probe 7 is horizontally oriented and inserted from both sides of the reference hole 12A to measure the center position of the reference hole 12A. It is possible to verify measurement errors caused by differences in probe orientation.

  The first lug 8J and the second lug 8K are opened in the same direction in the longitudinal direction of the gauge support bar 8G in place of the mounting hole h into which the second cylindrical portion 13C of the support leg 13 is fitted. A U-shaped groove having a width in which the portion 13C can be fitted may be formed.

  In this case, the spherical washers 15A and 15B and the fixing nut 16 are loosely attached to the respective support legs 13 in advance, and the second cylindrical portion 13C of each support leg 13 corresponds to the corresponding U from the longitudinal direction of the gauge support bar 8G. After being slid into the letter-shaped groove, the fixing nut 16 can be fastened and fixed, and the assembling work can be simplified.

  The long gauge for verification of a three-dimensional measuring machine according to the present invention is used when performing accuracy inspection of a three-dimensional measuring machine that measures the coordinate position of a measurement point by bringing a probe into contact with a surface to be measured of a workpiece, or calibration of a measurement error. It can be widely used as a verification gauge.

DESCRIPTION OF SYMBOLS 1 3D measuring machine verification long gauge 1A Gauge body 1B Reference hole 1a Support leg 1b Auxiliary leg 2 3D measuring machine 3 Measurement table 4 Movable frame 5 Head part 6 Lifting cylinder 6A Probe head 7 Probe 8 Gauge holding jig 8A Support leg 8B 1st support 8C 2nd support 8D, 8E Connecting rod 8F Connecting plate 8G Gauge support bar 8H Connecting bar 8I Slit 8J 1st lug 8K 2nd lug 8Ja, 8Ka 1st mounting piece 8Jb, 8Kb 2nd mounting Piece h Mounting hole 11 Long gauge for 3D measuring machine verification 11A Gauge body 11B Reference hole 11C Concave 11D Seating part 11E Screw hole G Thinning concave part K Reference ball 12 Reference sleeve 12A Reference hole 12B Gutter 13 Support leg 13A 1st Threaded portion 13B First cylindrical portion 13C Second cylindrical portion 13D Guide portion 13E Second threaded portion 1 A, 14B spherical washers 15A, 15B spherical washer 16 fixing nut

Claims (4)

From a material having a small coefficient of thermal expansion and excellent dimensional stability, a plurality of reference holes serving as reference measurement surfaces with which the probe of the coordinate measuring machine abuts are arranged along the longitudinal direction between the upper surface and the lower surface. A long gauge body with a rectangular cross section,
A lower surface of the gauge body and a plurality of support legs respectively protruding from one side surface perpendicular to the gauge body;
The support legs protrude from the lower surface and one side surface in the vicinity of both longitudinal ends and the center position in an arrangement that is the apex of a flat isosceles triangle,
For these three-dimensional measuring machine verification, the gauge main body is selectively supported by the support legs at three points toward the measurement table surface of the three-dimensional measuring machine. Long gauge.   When the projection length is set slightly shorter than the support leg on the bottom surface of the gauge body and one side surface perpendicular to the gauge body, and one of the support legs supporting the gauge body floats from the measurement table surface of the 3D measuring machine The long gauge for verification of a three-dimensional measuring machine according to claim 1, further comprising an auxiliary leg that comes into contact with the measurement table surface and prevents the gauge body from overturning. A plurality of reference sleeve holding holes penetrating between the upper surface and the lower surface are arranged along the longitudinal direction, a long gauge body having a rectangular cross section made of a material having a small coefficient of thermal expansion and excellent dimensional stability,
A plurality of reference holes that are fitted in the reference sleeve holding holes of the gauge body and that serve as a reference measurement surface with which the probe of the three-dimensional measuring machine abuts are formed in a hollow cylindrical shape that penetrates the central portion in the axial direction. A reference sleeve ;
Provided with three support legs protruding from the lower surface of the gauge body and supporting the gauge body on the measurement table surface of the coordinate measuring machine at three points;
In each of the three support legs, a cylindrical portion that is fitted and held in a hole or a U-shaped groove formed in a mounting portion of a gauge holding jig placed on a measurement table of a three-dimensional measuring machine, and these A long gauge for verification of a three-dimensional measuring machine, wherein a screw part for screwing a fixing nut for fastening and fixing the support leg to the mounting part is provided.   Reference sphere receiving recesses are respectively formed on the upper surfaces in the vicinity of both ends in the longitudinal direction of the gauge body, and reference spheres serving as reference measuring surfaces with which the probes of the three-dimensional measuring machine abut are arranged in the respective reference sphere receiving recesses. The long gauge for verification of a three-dimensional measuring machine according to any one of claims 1 to 3.

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