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CN111707186B - Calibration test piece of direct-irradiation point laser three-coordinate measuring device - Google Patents

Calibration test piece of direct-irradiation point laser three-coordinate measuring device Download PDF

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Publication number
CN111707186B
CN111707186B CN201910205595.7A CN201910205595A CN111707186B CN 111707186 B CN111707186 B CN 111707186B CN 201910205595 A CN201910205595 A CN 201910205595A CN 111707186 B CN111707186 B CN 111707186B
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coordinate system
calibration
test piece
direct
positioning
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CN111707186A (en
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陈珂
王宇
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Sichuan University
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Sichuan University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a calibration test piece of a direct-injection point laser three-coordinate measuring device, which consists of seven functional shaft sections on the same shaft: the device comprises two round table mounting positioning shaft sections, two cylindrical checking shaft sections, two eccentric cylindrical checking shaft sections and a measuring coordinate system calibration shaft section; the round platform mounting and positioning shaft section mainly comprises a standard ball taper hole seat and a mounting and positioning conical surface; the measuring coordinate system calibration shaft section comprises an alignment plane, a vertical step surface, a horizontal step surface and a cross-shaped groove. In the calibration process of the direct-injection point laser three-coordinate measuring device, the calibration test piece can effectively inhibit the influence of depth of field and inclination angle errors on calibration precision in laser triangulation, and detect pitching and deflection errors of the laser sensor; the standard ball taper hole seat of the round platform mounting positioning shaft section can be used for placing a standard ball and is used for calibrating a calibration piece by a contact type three-coordinate measuring machine; the cylindrical check shaft section and the eccentric cylindrical check shaft section can be used for detecting and judging the calibration effectiveness of a coordinate system.

Description

Calibration test piece of direct-irradiation point laser three-coordinate measuring device
Technical Field
The invention relates to a calibration test piece of a non-contact detection device, in particular to a calibration test piece of a direct-injection point laser three-coordinate measurement device
Background
Before the three-coordinate measuring device detects the part for the first time, the three-coordinate measuring device needs to be calibrated, and the calibration accuracy of the measurement coordinate system of the detecting device directly influences the accuracy of the detection measurement value of the part. In the traditional contact type three-coordinate measurement, the standard sphere is adopted for calibration, and in the direct type point laser three-coordinate measurement, compared with a measurement coordinate system calibration mode adopting the standard sphere, the influence of a depth-of-view error and an inclination angle error on calibration precision in laser triangulation optical measurement can be effectively restrained by adopting the calibration test piece.
Although the patent CN201820375099 can calibrate the measurement coordinate system, the calibration part adopts a cylindrical surface for radial positioning, the mounting fit clearance can influence the coincidence degree of the axis of the calibration part and the axis of the turntable, and extra system errors can be introduced in the measurement process; the laser position and orientation measuring device has no step surface characteristics, and can not test and verify the correctness of the position and orientation of the direct-injection point laser, so that the uncertainty of a measured value can be caused; the installation and positioning mode is only suitable for the form of cylindrical holes on the turntable, and cannot be suitable for the tip positioning mode of common rotating shafts; it does not have symmetrically distributed calibration feature domains and cannot accommodate interference conditions that may exist in the measurement device.
Disclosure of Invention
The invention provides a calibration test piece of a direct-injection point laser three-coordinate measuring device.
The two round platform installation positioning shaft sections are respectively positioned at two end parts of the calibration piece and are symmetrical relative to the plane of the test piece XOY coordinate system, and the round platform installation positioning shaft section I comprises a standard spherical taper hole seat I (101) and a positioning conical surface I (102); the round table mounting positioning shaft section II comprises a standard ball taper hole seat II (201) and a positioning taper surface II (202), wherein the standard ball taper hole seat I (101) and the standard ball taper hole seat II (201) are conical counter bores and are used for placing and positioning a standard ball and positioning a center, and the axes of the standard ball taper hole seat I and the standard ball taper hole seat II are coincident with a Z axis of a calibration test piece coordinate system; the positioning conical surface I (102) and the positioning conical surface II (202) are radial and axial positioning installation surfaces when the calibration test piece is subjected to coordinate system calibration in the detection device, the axes of the positioning conical surface I (102) and the positioning conical surface II (202) are coincident with the Z axis of the calibration test piece coordinate system, and the distance between the plane of the large end of the positioning conical surface I (102) and the large end of the positioning conical surface II (202) and the XOY reference surface of the test piece coordinate system is a known fixed value.
The two eccentric cylinder verification shaft sections are respectively positioned at the outer ends of the two cylinder verification shaft sections and are symmetrical relative to the plane of the test piece XOY coordinate system, and the two eccentric cylinder verification shaft sections are respectively composed of an eccentric cylindrical surface I (103) and an eccentric cylindrical surface II (203) and serve as detection verification feature surfaces or measurement verification feature surfaces for coordinate system calibration.
The two cylindrical calibration shaft sections are respectively positioned at the outer ends of the coordinate system calibration shaft sections, are symmetrical relative to the plane of the test piece XOY coordinate system, and are respectively composed of a cylindrical surface I (104) and a cylindrical surface II (204) and serve as detection and verification characteristic surfaces of coordinate system calibration.
The coordinate system calibration shaft section consists of transverse step surfaces (105), (106), (107), vertical step surfaces (205), (206), (207), a cross groove (108) and an alignment plane (208); the transverse step surfaces (105, 106, 107) are perpendicular to the alignment plane (208) and are parallel to a Z axis of a test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the transverse step surface (105) and the alignment plane (208) are equal and known, the relative distances between the transverse step surfaces (105, 106, 107) are known, and in the process of detecting the transverse step surfaces (105, 106, 107) by the direct-injection type point laser, if the direct-injection type point laser has a pitching angle, the reading difference of the direct-injection type point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the pitching angle of the measuring head is reflected; the vertical step surfaces (205), (206), (207) are perpendicular to the alignment plane (208) and are parallel to the Z axis of the test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the vertical step surface (205) and the alignment plane (208) are equal and known, the relative distances between the vertical step surfaces (205), (206), (207) are known, and in the process of detecting the vertical step surfaces (205), (206), (207) by the direct-injection point laser, if the direct-injection point laser has a deflection angle, the reading difference of the direct-injection point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the deflection angle of the measuring head is reflected, and a reference is provided for the posture adjustment of the measuring head; the cross-shaped groove (108) is positioned opposite to the alignment plane (208), the cross section of the cross-shaped groove (108) is rectangular, the cross-shaped groove (108) is symmetrical relative to the test piece coordinate system XOZ plane, the horizontal groove of the cross-shaped groove (108) is mutually perpendicular to the vertical groove, the symmetrical plane of the horizontal groove of the cross-shaped groove (108) coincides with the test piece coordinate system XOY plane, the vertical groove of the cross-shaped groove (108) and the right angle edge of the horizontal groove respectively form calibration characteristics of the Y-axis and Z-axis linear zero position of the measuring device coordinate system, and in the direct-injection point laser detection process, the right angle edge causes direct-injection point laser measurement value mutation so as to reflect the position of direct-injection point laser in the measuring device coordinate system; the alignment plane (208) is an X-axis linear zero calibration characteristic plane of the measuring device and assists in alignment of the calibration piece.
The notch width of the cross-shaped groove (108) is larger than the maximum light spot size in the effective range of the direct-injection point laser.
The origin of the test piece coordinate system is positioned at the intersection point of the horizontal symmetry planes of the axes of the cylindrical surface I (104), the cylindrical surface II (204) and the cross-shaped groove (108).
The beneficial effects of the invention are as follows: the standard sphere is replaced by the cross groove (108) and the alignment plane (208) for calibration, so that the influence of the depth of view error and the inclination angle error on the calibration precision in the laser triangulation optical measurement can be effectively inhibited, and the right-angle edge abrupt change characteristic formed by the cross groove (108) is also beneficial to the calibration precision; the standard ball taper hole seat I (101) and the standard ball taper hole seat II (201) on the round platform installation positioning shaft section can be used for calibrating the precision of a calibration piece by a three-coordinate measuring machine and can also be used for clamping a double center; radial and axial positioning is carried out by adopting a positioning conical surface I (102) and a positioning conical surface II (202), so that the coincidence ratio of the axis of the calibration piece and the axis of the turntable can be ensured, and the system error is reduced; the transverse step surfaces (105), (106), (107) and the vertical step surfaces (205), (206), (207) can detect the pose of the laser measuring head and assist in adjusting the pose; the symmetrical calibration characteristic structure is adopted, so that the interference condition existing in the measuring device can be adapted.
Drawings
Fig. 1 is an isometric view i of a calibration test piece of a direct-injection point laser three-coordinate measuring device, and fig. 2 is an isometric view ii of a calibration test piece of a direct-injection point laser three-coordinate measuring device.
The graphic symbols are: 101-standard ball taper hole seat I, 102-positioning conical surface I, 103-eccentric cylindrical surface I, 104-cylindrical surface I, 201-standard ball taper hole seat II, 202-positioning conical surface II, 203-eccentric cylindrical surface II, 204-cylindrical surface II, 105, 106, 107-transverse stepped surface, 205, 206, 207-vertical stepped surface, 108-alignment plane and 208-cross groove.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the attached drawings;
A calibration test piece of a laser delta optical inspection device, comprising: the two round platforms are provided with positioning shaft sections, two cylindrical checking shaft sections, two eccentric cylindrical checking shaft sections and a coordinate system calibration shaft section.
The two round platform installation positioning shaft sections are respectively positioned at two end parts of the calibration piece and are symmetrical relative to the plane of the test piece XOY coordinate system, and the round platform installation positioning shaft section I comprises a standard spherical taper hole seat I (101) and a positioning conical surface I (102); the round platform installation positioning shaft section II comprises a standard ball taper hole seat II (201) and a positioning conical surface II (202), the standard ball taper hole seat I (101) and the standard ball taper hole seat II (201) are conical counter bores and are used for placing and positioning of a standard ball and positioning of a center, and the axis of the standard ball taper hole seat I and the standard ball taper hole seat II is coincident with the Z axis of a calibration test piece coordinate system; the positioning conical surface I (102) and the positioning conical surface II (202) are radial and axial positioning installation surfaces when the calibration test piece is subjected to coordinate system calibration in the detection device, the axes of the positioning conical surface I (102) and the positioning conical surface II (202) are coincident with the Z axis of the calibration test piece coordinate system, and the distance between the plane of the large end of the positioning conical surface I (102) and the large end of the positioning conical surface II (202) and the XOY reference surface of the test piece coordinate system is a known fixed value.
The two eccentric cylinder verification shaft sections are respectively positioned at the outer ends of the two cylinder verification shaft sections and are symmetrical relative to the plane of the test piece XOY coordinate system, and the two eccentric cylinder verification shaft sections are respectively composed of an eccentric cylindrical surface I (103) and an eccentric cylindrical surface II (203) and serve as detection verification feature surfaces or measurement verification feature surfaces for coordinate system calibration.
The two cylindrical calibration shaft sections are respectively positioned at the outer ends of the coordinate system calibration shaft sections, are symmetrical relative to the plane of the test piece XOY coordinate system, and are respectively composed of a cylindrical surface I (104) and a cylindrical surface II (204) and serve as detection and verification characteristic surfaces of coordinate system calibration.
The coordinate system calibration shaft section consists of transverse step surfaces (105), (106), (107), vertical step surfaces (205), (206), (207), a cross groove (108) and an alignment plane (208); the transverse step surfaces (105, 106, 107) are perpendicular to the alignment plane (208) and are parallel to a Z axis of a test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the transverse step surface (105) and the alignment plane (208) are equal and known, the relative distances between the transverse step surfaces (105, 106, 107) are known, and in the process of detecting the transverse step surfaces (105, 106, 107) by the direct-injection type point laser, if the direct-injection type point laser has a pitching angle, the reading difference of the direct-injection type point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the pitching angle of the measuring head is reflected; the vertical step surfaces (205), (206), (207) are perpendicular to the alignment plane (208) and are parallel to the Z axis of the test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the vertical step surface (205) and the alignment plane (208) are equal and known, the relative distances between the vertical step surfaces (205), (206), (207) are known, and in the process of detecting the vertical step surfaces (205), (206), (207) by the direct-injection point laser, if the direct-injection point laser has a deflection angle, the reading difference of the direct-injection point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the deflection angle of the measuring head is reflected, and a reference is provided for the posture adjustment of the measuring head; the cross-shaped groove (108) is positioned opposite to the alignment plane (208), the cross section of the cross-shaped groove (108) is rectangular, the cross-shaped groove (108) is symmetrical relative to the test piece coordinate system XOZ plane, the horizontal groove of the cross-shaped groove (108) is mutually perpendicular to the vertical groove, the symmetrical plane of the horizontal groove of the cross-shaped groove (108) coincides with the test piece coordinate system XOY plane, the vertical groove of the cross-shaped groove (108) and the right angle edge of the horizontal groove respectively form calibration characteristics of the Y-axis and Z-axis linear zero position of the measuring device coordinate system, and in the direct-injection point laser detection process, the right angle edge causes direct-injection point laser measurement value mutation so as to reflect the position of direct-injection point laser in the measuring device coordinate system; the alignment plane (208) is an X-axis linear zero calibration characteristic plane of the measuring device and assists in alignment of the calibration piece.
The notch width of the cross-shaped groove (108) is larger than the maximum light spot size in the effective range of the direct-injection point laser.
The origin of the test piece coordinate system is positioned at the intersection point of the horizontal symmetry planes of the axes of the cylindrical surface I (104), the cylindrical surface II (204) and the cross-shaped groove (108).
The foregoing is only a preferred embodiment of the present invention. All equivalent changes and modifications made in accordance with the scope of the present invention shall fall within the scope of the present invention.

Claims (1)

1. The utility model provides a direct irradiation type point laser three-coordinate measuring device's calibration test piece which characterized in that, it includes: the two round platforms are provided with positioning shaft sections, two eccentric cylinder checking shaft sections, two cylinder checking shaft sections and a coordinate system calibration shaft section;
The two round platform installation positioning shaft sections are respectively positioned at two end parts of the calibration piece and are symmetrical relative to the plane of the test piece XOY coordinate system, and the round platform installation positioning shaft section I comprises a standard spherical taper hole seat I (101) and a positioning conical surface I (102); the round platform mounting and positioning shaft section II comprises a standard ball taper hole seat II (201) and a positioning taper surface II (202), wherein the standard ball taper hole seat I (101) and the standard ball taper hole seat II (201) are conical counter bores and are used for placing and positioning a standard ball and positioning a center, and the axes of the standard ball taper hole seat I and the standard ball taper hole seat II are coincident with a Z axis of a calibration test piece coordinate system; the positioning conical surface I (102) and the positioning conical surface II (202) are radial and axial positioning installation surfaces when the calibration test piece is subjected to coordinate system calibration in the detection device, the axes of the positioning conical surface I (102) and the positioning conical surface II (202) are coincident with the Z axis of the calibration test piece coordinate system, and the distances between the plane of the large ends of the positioning conical surface I (102) and the positioning conical surface II (202) and the XOY reference plane of the test piece coordinate system are known fixed values;
The two eccentric cylindrical calibration shaft sections are respectively positioned at the outer ends of the two cylindrical calibration shaft sections, are symmetrical relative to the plane of the test piece XOY coordinate system, and are respectively composed of an eccentric cylindrical surface I (103) and an eccentric cylindrical surface II (203) and serve as a detection verification characteristic surface or a measurement verification characteristic surface for coordinate system calibration;
The two cylindrical calibration shaft sections are respectively positioned at the outer ends of the coordinate system calibration shaft sections, are symmetrical relative to the plane of the test piece XOY coordinate system, and are respectively composed of a cylindrical surface I (104) and a cylindrical surface II (204) and serve as detection and verification characteristic surfaces of coordinate system calibration;
The coordinate system calibration shaft section consists of transverse step surfaces (105), (106), (107), vertical step surfaces (205), (206), (207), a cross groove (108) and an alignment plane (208); the transverse step surfaces (105, 106, 107) are perpendicular to the alignment plane (208) and are parallel to a Z axis of a test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the transverse step surface (105) and the alignment plane (208) are equal and known, the relative distances between the transverse step surfaces (105, 106, 107) are known, and in the process of detecting the transverse step surfaces (105, 106, 107) by the direct-injection type point laser, if the direct-injection type point laser has a pitching angle, the reading difference of the direct-injection type point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the pitching angle of the measuring head is reflected; the vertical step surfaces (205), (206), (207) are perpendicular to the alignment plane (208) and are parallel to the Z axis of the test piece coordinate system, the distances from the Z axis of the test piece coordinate system to the vertical step surface (205) and the alignment plane (208) are equal and known, the relative distances between the vertical step surfaces (205), (206), (207) are known, and in the process of detecting the vertical step surfaces (205), (206), (207) by the direct-injection point laser, if the direct-injection point laser has a deflection angle, the reading difference of the direct-injection point laser on the three step surfaces is unequal to the known design value between the three step surfaces, so that the deflection angle of the measuring head is reflected, and a reference is provided for the posture adjustment of the measuring head; the cross-shaped groove (108) is positioned opposite to the alignment plane (208), the cross section of the cross-shaped groove (108) is rectangular, the cross-shaped groove (108) is symmetrical relative to the test piece coordinate system XOZ plane, the horizontal groove of the cross-shaped groove (108) is mutually perpendicular to the vertical groove, the symmetrical plane of the horizontal groove of the cross-shaped groove (108) coincides with the test piece coordinate system XOY plane, the vertical groove of the cross-shaped groove (108) and the right angle edge of the horizontal groove respectively form calibration characteristics of the Y-axis and Z-axis linear zero position of the measuring device coordinate system, and in the direct-injection point laser detection process, the right angle edge causes direct-injection point laser measurement value mutation so as to reflect the position of direct-injection point laser in the measuring device coordinate system; the alignment plane (208) is an X-axis linear zero calibration characteristic plane of the measuring device and is used for assisting alignment of the calibration piece;
the width of the notch of the cross-shaped groove (108) is larger than the maximum light spot size in the effective range of the direct-injection point laser; the origin of the test piece coordinate system is positioned at the intersection point of the horizontal symmetry planes of the axes of the cylindrical surface I (104), the cylindrical surface II (204) and the cross-shaped groove (108).
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CN114383595B (en) * 2022-01-10 2023-11-17 浙江大学 Optical displacement measuring head space posture self-calibration method and device
CN115307572B (en) * 2022-06-27 2023-07-21 北京工业大学 A fixed-width planar line laser sensor pose calibration device and calibration method
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CN115307570B (en) * 2022-06-27 2023-07-21 北京工业大学 U-groove planar line laser sensor pose calibration piece and calibration method
CN116222385B (en) * 2023-05-08 2023-07-14 东莞市兆丰精密仪器有限公司 Laser center position calibration method and measurement system

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