JP2013104703A - Method for evaluating straightness of non-contact type coordinate measuring machine, and straightness evaluation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a long time from being taken for evaluation work of the straightness of a non-contact type coordinate measuring machine.SOLUTION: A straightness evaluation method includes: a first step of measuring an evaluation standard 1 that comprises a rectangular-parallelepiped base material 11, and a plurality of spherical bodies 16, 17, 18 and 19 fixed at some intervals apart in the length direction of the base material 11, by a highly precise contact type coordinate measuring machine and obtaining a calibration value A of the straightness of the central positions of the spherical bodies 16, 17, 18 and 19 of the evaluation standard 1; a second step of measuring the evaluation standard 1 by a non-contact type coordinate measuring machine 2 to be evaluated and obtaining a measured value B of the straightness of the central positions of the spherical bodies 16, 17, 18, and 19 of the evaluation standard 1; and a third step of evaluating the straightness of the non-contact type coordinate measuring machine 2 from a correction value C obtained by subtracting the calibration value A from the measured value B.

Description

  The present invention belongs to a technical field related to straightness evaluation (accuracy inspection) of a non-contact coordinate measuring machine.

  Non-contact coordinate measuring machines are rapidly spreading because they have the advantage of being able to measure an object to be measured at a higher speed than contact coordinate measuring machines. For this reason, establishment of the method of evaluating the measurement accuracy of a non-contact coordinate measuring machine is calculated | required.

  Conventionally, the straightness, which is an important element of the measurement accuracy of non-contact coordinate measuring machines, can be obtained by measuring a straight-line ruler as a standard for evaluation and attaching a contact displacement meter such as an electric micrometer to the sensor head. Evaluation is performed from the measured values. This is because, when a straight ruler with a planar shape is used as an evaluation standard, if measurement is performed with a non-contact probe as it is, noise increases and high-precision measurement becomes impossible.

  Further, as a technique for evaluating the straightness of the contact coordinate measuring machine, for example, a technique described in Patent Document 1 is known.

  Patent Document 1 describes a technique in which a member composed of a rectangular parallelepiped base material and a plurality of spheres fixed in the length direction of the base material through a space is incorporated in an evaluation standard device.

  A member incorporated in the evaluation standard is called a ball bar in “JIS B7441” and is a standard for measuring dimensions.

Japanese Patent No. 3837503

  In the above-described straightness evaluation technology of the conventional non-contact coordinate measuring machine, since a contact displacement meter is attached to a non-contact probe and measured, the measurement surface of the evaluation standard device composed of a straight ruler is defined as one axial direction. There is a problem that it takes time for the evaluation work because the measurement must be performed twice by resetting it toward the axial direction perpendicular to this. In addition, since it is difficult to produce a long straight ruler, there is a problem that the straightness measurement range is limited.

  The present invention has been made in consideration of such problems, and it is a first problem to provide a straightness evaluation method for a non-contact coordinate measuring machine that does not take time for evaluation work. And a straightness evaluation method for a non-contact coordinate measuring machine and a straightness evaluation apparatus for the non-contact coordinate measuring machine used therefor. Is a second problem.

  In order to solve the first problem described above, the straightness evaluation method for a non-contact coordinate measuring machine according to the present invention employs the means described in claims 1 and 2 of the claims.

  That is, in claim 1, an evaluation standard device composed of a rectangular parallelepiped base material and a plurality of spheres fixed at intervals in the length direction of the base material is measured by a high precision contact coordinate measuring machine and evaluated. The first procedure for obtaining a calibration value for the straightness of the center position of the sphere of the standard for measurement, and the position of the center of the sphere of the evaluation standard by measuring the evaluation standard with the non-contact coordinate measuring machine to be evaluated A second procedure for obtaining a measurement value for the straightness of the first and a third procedure for evaluating the straightness of the non-contact coordinate measuring machine from a correction value obtained by subtracting the calibration value from the measurement value. .

  In this means, a ball bar is used as an evaluation standard, and a calibration value of the straightness of the center position of the sphere of the evaluation standard is obtained in advance, and for evaluation by measurement of a non-contact coordinate measuring machine to be evaluated. Evaluation is performed by subtracting the calibration value from the straightness measurement value at the center position of the sphere of the standard device to obtain a correction value.

  Further, according to claim 2, in the straightness evaluation method of the non-contact coordinate measuring machine according to claim 1, the straightness of the center position of the sphere of the standard device for evaluation is calculated by the least square method from the measurement distribution of the outer peripheral surface of the sphere. Approximate straight lines that pass near the centers of all the spheres are obtained from all the obtained center positions of the spheres by the method of least squares, and the direction of the approximate straight line is the X axis and the base sphere is attached perpendicular to the X axis. The coordinate system is set with the direction parallel to the reference plane as the Y-axis and the direction perpendicular to the Y-axis as the Z-axis, and extending from the center position of each sphere to an approximate straight line. It is represented by the length of a perpendicular line.

  In this means, a coordinate system is set with reference to an approximate straight line passing through the vicinity of the center of all the spheres for the position of the center of the sphere of the evaluation standard device, and a perpendicular line extending from the center position of each sphere to the approximate line is set. The straightness is expressed by the length.

  Furthermore, in order to solve the second problem described above, the straightness evaluation method for a non-contact coordinate measuring machine according to the present invention employs the means described in claims 3 and 4 of the claims.

  That is, according to claim 3, in the straightness evaluation method of the non-contact coordinate measuring machine according to claim 1 or 2, when the second procedure is executed, after the measurement value is obtained, the evaluation standard is slid before the slide. Position the last sphere after the slide at the position of the foremost sphere, obtain the measurement value again, and when performing the third procedure, set the correction value from the measurement value before and after the slide of the evaluation standard device The position of the foremost sphere before the slide and the position of the last sphere after the slide are connected by a two-point chain method.

  In this means, in addition to having the same effect as in the first or second aspect, the evaluation standard is slid and the correction values from the measured values before and after the slide are connected by the two-point chain method. Yes.

  According to a fourth aspect of the present invention, in the straightness evaluation method for the non-contact coordinate measuring machine according to the third aspect, the posture before and after the slide of the evaluation standard device of the second procedure is measured, and the two-point chain of the third procedure. When the measured values are joined by the method, correction is made so that the postures before and after the slide of the standard device for evaluation match.

  In this means, the correction values are corrected so that the postures before and after the slide of the standard device for evaluation match before connecting the correction values by the two-point chain method.

  Furthermore, in order to solve the second problem described above, the straightness evaluation apparatus for a non-contact coordinate measuring machine according to the present invention employs means described in claims 5 and 6 of the claims.

  That is, in claim 5, the straightness of the center position of the sphere is measured by a non-contact coordinate measuring machine comprising a rectangular parallelepiped base material and a plurality of spheres fixed at intervals in the length direction of the base material. Measure the attitude of the evaluation standard device from the evaluation standard device, the reflecting mirror attached to the base material of the evaluation standard device, and the reflected light of the light installed on the non-contact coordinate measuring machine And an autocollimator that performs the operation.

  In this means, when the third or fourth aspect is implemented, the apparatus is constituted by a reflecting mirror attached to the base material of the standard device for evaluation and a widely used autocollimator.

  Further, according to claim 6, in the straightness evaluation apparatus for the non-contact coordinate measuring machine according to claim 5, the relay is installed between the reflecting mirror and the autocollimator so that the optical path between the reflecting mirror and the autocollimator is V-shaped. It is characterized by having a mirror.

  In this means, the optical path between the reflecting mirror and the autocollimator is V-shaped by providing the relay mirror.

  A straightness evaluation method for a non-contact coordinate measuring machine according to the present invention is as follows. Claim 1 uses a ball bar as a standard for evaluation, and a calibration value for the straightness of the center position of the sphere of the standard for evaluation in advance. Since the calibration value is obtained by subtracting the calibration value from the straightness measurement value of the center position of the sphere of the evaluation standard device measured by the non-contact coordinate measuring machine to be evaluated, the calibration value is Although a preparatory work of obtaining is required, since it can be carried out by a normal measurement work of a non-contact coordinate measuring machine, there is an effect that the evaluation work does not take time.

  Further, as a second aspect of the present invention, a coordinate system based on an approximate straight line passing through the vicinity of the center of all the spheres is set as the position of the center of the sphere of the evaluation standard device, and extended from the center position of each sphere to the approximate straight line. Since the straightness is represented by the length of the vertical line, there is an effect that it is easy to create a program when the evaluation is computer processed.

  Further, the straightness evaluation method for a non-contact coordinate measuring machine according to the present invention provides the same operation as that of claim 1 or 2 as a third aspect, and slides the evaluation standard device before and after the slide. Since the correction values from the measured values are connected by the two-point chain method, the evaluation work does not take much time, and the straightness measurement range is not restricted and is a long range. There is an effect that the straightness of can be evaluated.

  Further, since the correction value is corrected so that the postures before and after the slide of the evaluation standard device are matched before connecting the correction values by the two-point chain method, before and after the slide of the evaluation standard device, This has the effect of eliminating the difference in posture from the correction value.

  Furthermore, the straightness evaluation apparatus for a non-contact coordinate measuring machine according to the present invention is widely used as a fifth aspect of the invention, in the implementation of the third or fourth aspect, with a reflecting mirror attached to a base material of an evaluation standard. Since the apparatus is configured by the autocollimator, there is an effect that the straightness evaluation method for a non-contact coordinate measuring machine according to claim 3 or 4 can be implemented with a simple apparatus configuration.

  In addition, since the optical path between the reflecting mirror and the autocollimator is V-shaped by providing the relay mirror, the non-contact coordinate measuring machine which is difficult to make the optical path I-shaped is provided. There is an effect that an autocollimator can be installed.

It is the schematic of the 1st example of the form for implementing the straightness evaluation method of the non-contact coordinate measuring machine which concerns on this invention. It is a side view of the non-contact coordinate measuring machine used for implementation of FIG. It is a flowchart of the procedure implemented in FIG. It is a graph which shows the evaluation by implementation of FIG. It is a graph which shows the evaluation by implementation of FIG. The perspective view of the form for implementing 2nd example of the form for implementing the straightness evaluation method of the non-contact coordinate measuring machine which concerns on this invention, and the straightness evaluation apparatus of the non-contact coordinate measuring machine which concerns on this invention (A) shows the state before the slide of the evaluation standard device, and (B) shows the state after the slide of the evaluation standard device. FIG. 7 is a block diagram of handling of calibration values, measured values, and correction values implemented in FIG. 6. It is a perspective view which shows the modification of the apparatus structure of FIG.

  EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing the straightness evaluation method and straightness evaluation apparatus of the non-contact coordinate measuring machine based on this invention is demonstrated based on drawing.

  FIGS. 1-5 shows the 1st example of the form for enforcing the straightness evaluation method of the non-contact coordinate measuring machine based on this invention.

  The first example solves the first problem and employs a ball bar as the standard device 1 for evaluation.

  The evaluation standard device 1 is composed of a precision-finished base material 11, legs 12, 13, 14, 15, and spheres 16, 17, 18, 19. The base material 11 is formed in a rectangular parallelepiped shape, and the legs 12, 13, 14, and 15 are fixed to the upper surface 11a serving as a reference surface. The legs 12, 13, 14, 15 are formed in a columnar shape, and four pieces are fixed in the length direction of the base material 1 through the same interval and aligned linearly. The spheres 16, 17, 18, and 19 are formed in a true sphere shape, and four are fixed to the upper ends of the legs 12, 13, 14, and 15, respectively.

  As a first procedure, the evaluation standard 1 is measured with a high-precision contact coordinate measuring machine, and the positions of the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 are measured. A calibration value A for straightness is obtained.

  In order to obtain the calibration value A, first, the upper surface 11a of the base material 11 of the evaluation standard device 1 serving as a reference surface is specified from measurement at a plurality of locations by a high-accuracy contact coordinate measuring machine. Subsequently, the centers 16a of the spheres 16, 17, 18, 19 are measured by the least square method from the measurement distribution of the outer peripheral surfaces of the spheres 16, 17, 18, 19 of the evaluation standard 1 measured with a high-precision contact coordinate measuring machine. The positions of 17a, 18a, 19a are obtained. Subsequently, all the spheres 16, 17, 18, and 19 are obtained by the least square method from the positions of the four centers 16a, 17a, 18a, and 19a of the obtained spheres 16, 17, 18, and 19 of the evaluation standard device 1. An approximate straight line L passing through the vicinity of the centers 16a, 17a, 18a, 19a is obtained. The direction of the approximate straight line L is the X axis, the direction perpendicular to the X axis and parallel to the upper surface 11a of the base material 11 of the evaluation standard device 1 is the Y axis, and is orthogonal to the X and Y axes. A coordinate system is set with the direction as the Z-axis. Further, the straightness calibration value A is represented by the length of the perpendicular extending from the position of the center 16a, 17a, 18a, 19a of each of the spheres 16, 17, 18, 19 of the evaluation standard 1 to the approximate straight line L. To do. In FIG. 1, the lengths of the perpendiculars from the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 are shown as a1, a2, a3, a4, respectively.

  As a second procedure, after obtaining the calibration value A, the evaluation standard 1 is measured by the non-contact coordinate measuring machine 2 to be evaluated, and the spheres 16, 17, 18, 19 of the evaluation standard 1 are measured. A measurement value B is obtained for the straightness of the positions of the centers 16a, 17a, 18a, 19a.

  As shown in FIG. 2, the non-contact coordinate measuring machine 2 is assumed to be configured such that the non-contact probe 22 is scanned and moved above the object to be measured which is configured in a three-axis gate shape and set on the measurement table 21. ing. The evaluation standard 1 is set on the measurement table 21 as an object to be measured.

  In order to obtain the measurement value B, the same process as that for obtaining the calibration value A is performed in the non-contact coordinate measuring machine 2 to be evaluated. In FIG. 1, the lengths of the perpendiculars from the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 are shown as b1, b2, b3, b4, respectively.

  As a third procedure, after obtaining the measurement value B, the correction value C is obtained by subtracting the calibration values A1, a2, a3, and a4 from b1, b2, b3, and b4 of the measurement value B.

  In FIG. 1, the lengths of the perpendicular lines from the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 are c1 (b1-a1) and c2 (b2-a2), respectively. , C3 (b3-a3), c4 (b4-a4).

  The non-contact coordinate measuring machine 2 is determined by the perpendicular lengths c1, c2, c3, c4 from the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 at the correction value C. Will be evaluated for straightness.

  The reliability of this evaluation is clarified by the graphs shown in FIGS.

  4 and 5, the vertical axis indicates straightness (mm) corresponding to c1, c2, c3, and c4, and the horizontal axis indicates the X-axis position (mm). C1, c2, c3, and c4 obtained in the first example of the embodiment for carrying out the straightness evaluation method of the non-contact coordinate measuring machine are indicated by solid lines. FIG. 4 shows the straightness of the X-axis in the Z-axis (vertical) direction. FIG. 5 shows the straightness of the X-axis in the Y-axis (plane) direction. In the graphs of FIGS. 4 and 5, the measurement values measured by attaching a contact-type displacement meter to the non-contact probe 22 of the non-contact coordinate measuring machine 2 are displayed in comparison with broken lines.

  As can be understood from the graphs of FIGS. 4 and 5, the correction value C (c 1, c 2, c 3, c 4) to be evaluated for straightness is applied to the non-contact probe 22 of the non-contact coordinate measuring machine 2 as a contact displacement. There is no difference of up to 0.001 mm with respect to the measured value measured with the meter attached. Therefore, it can be said that it can sufficiently cope with the straightness evaluation of the non-contact coordinate measuring machine 2.

  According to the first example, the straightness of the positions of the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 is previously corrected using the ball bar as the evaluation standard 1. A value A is obtained, and a straightness measurement value B of the positions of the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard device 1 by measurement of the non-contact coordinate measuring machine 2 to be evaluated. The correction value C is obtained by subtracting the calibration value A from the evaluation value. Therefore, although a preparatory work for obtaining the calibration value A is required, it is possible to carry out the normal measurement work of the non-contact coordinate measuring machine 2 that does not require re-setting of the evaluation standard device 1. The evaluation work will not take much time.

  Further, the positions of the centers 16a, 17a, 18a, 19a of the spheres 16, 17, 18, 19 of the evaluation standard 1 pass through the vicinity of the centers 16a, 17a, 18a, 19a of all the spheres 16, 17, 18, 19 The measurement is performed by setting a coordinate system based on the approximate straight line L to be measured, and the length of the perpendicular (a1, 1) extending from the position of the center 16a, 17a, 18a, 19a of each sphere 16, 17, 18, 19 to the approximate straight line. The straightness is represented by a2, a3, a4, b1, b2, b3, b4, c1, c2, c3, c4). Therefore, it is easy to create a program when the evaluation is computer processed.

  FIGS. 6-8 implement the 2nd example of the form for implementing the straightness evaluation method of the non-contact coordinate measuring machine which concerns on this invention, and the straightness evaluation apparatus of the non-contact coordinate measuring machine which concerns on this invention. The form for this is shown.

  The first example solves the second problem and uses the same evaluation standard device 1 as in the first example.

  In the form for carrying out the straightness evaluation apparatus for a non-contact coordinate measuring machine according to the present invention, the rail 4 set on the measurement table 21 of the non-contact coordinate measuring machine 2 with the evaluation standard 1 mounted on the slider 3. It is configured to be able to slide on.

  Further, the reflecting mirror 5 is attached to the side surface 11b of the base material 11 of the evaluation standard device 1, and the autocollimator 6 that measures the posture of the evaluation standard device 1 from the reflected light irradiated toward the reflecting mirror 5 is not used. It is installed on the measurement table 21 of the contact coordinate measuring machine 2 or the like.

  In the second example of the form for carrying out the straightness evaluation method of the non-contact coordinate measuring machine according to the present invention using the form for carrying out the straightness evaluating apparatus of the non-contact coordinate measuring machine according to the present invention, When the second procedure of the first example is executed, the evaluation standard 1 is slid after the measurement value B-1 (b1, b2, b3, b4) is first obtained, and the frontmost sphere 19 before the slide is moved. The last sphere 16 after the slide is positioned at the position, and the measured value B-2 (b5, b6, b7, b8) is obtained again.

  When the third procedure of the first example is executed, the correction values C-1 (c1) from the measurement values B-1 (b1, b2, b3, b4) and B-2 (b5, b6, b7, b8) are respectively obtained. , C2, c3, c4), C-2 (c5, c6, c7, c8), the posture of the evaluation standard device 1 before and after the slide (angle of the approximate straight line L) measured by the autocollimator 6 is obtained. The spheres 19, which are corrected so as to coincide with each other and the correction values C-1 (c1, c2, c3, c4) and C-2 (c5, c6, c7, c8) are overlapped before and after the slide of the evaluation standard device 1, The final correction value C-3 is obtained by connecting the 16 centers 19a and 16a by the two-point chain method.

  According to the second example of the embodiment for carrying out the straightness evaluation method of the non-contact coordinate measuring machine according to the present invention, the evaluation standard 1 is slid to measure the measured values B-1 (b1, b2, b1 and b2) before and after the slide. b3, b4), B-2 (b5, b6, b7, b8) correction values C-1 (c1, c2, c3, c4), C-2 (c5, c6, c7, c8) are linked in two points. Therefore, the straightness measurement range is not restricted and the straightness of the long range can be evaluated.

  Before the correction values C-1 (c1, c2, c3, c4) and C-2 (c5, c6, c7, c8) are joined by the two-point chain method, before and after the slide of the evaluation standard 1 Since the postures are corrected so as to coincide with each other, the difference between the postures before and after the slide of the evaluation standard device 1 is corrected by the correction values C-1 (c1, c2, c3, c4), C-2 (c5, c6). , C7, c8).

  In addition, in the 2nd example, the effect similar to a 1st example is show | played about another point.

  According to the form for implementing the straightness evaluation apparatus of the non-contact coordinate measuring machine which concerns on this invention, by the reflecting mirror 5 attached to the base material 11 of the standard device 1 for evaluation, and the widely used autocollimator 6 The device is configured. Therefore, the 2nd example of the form for implementing the straightness evaluation method of the non-contact coordinate measuring machine concerning the present invention with a simple device composition can be carried out.

  In FIG. 8, the relay mirror 7 is installed between the reflecting mirror 5 and the autocollimator 6 so that the optical path is V-shaped.

  According to the modification of the straightness evaluation apparatus for a non-contact coordinate measuring machine according to the present invention shown in FIG. 8, the autocollimator 6 is also installed for the non-contact coordinate measuring machine 2 in which it is difficult to make the optical path into an I-shape. It becomes possible to do.

  As described above, in addition to the illustrated examples, the number of spheres 16, 17, 18, and 19 of the evaluation standard device 1 can be two, three, or five or more.

  Further, regarding the setting of the evaluation standard device 1 on the measurement table 21 of the non-contact coordinate measuring machine 2, it is possible to set in any one direction or a plurality of directions of the X axis, the Y axis, and the Z axis. is there.

  For the evaluation standard device 1 for obtaining the numerical values shown in the graphs of FIGS. 4 and 5, the base material 11 is a square bar having a cross-sectional shape of 40 mm on one side and a low thermal expansion ceramic bar material having a length of 360 mm. 16, 17, 18, and 19 are sphere-treated steel balls for ball bearings (JIS 1501) with a diameter of 25.4 mm (JIS 1501) and TiN coating is used, and the distance between the centers 16 a, 17 a, 18 a, and 19 a is set to 100 mm. ing.

DESCRIPTION OF SYMBOLS 1 Standard device for evaluation 11 Base material 16, 17, 18, 19 Sphere 2 Non-contact coordinate measuring machine 5 Reflector 6 Auto collimator 7 Relay mirror A Calibration value B Measurement value C Correction value

Claims (6)

  The center of the sphere of the evaluation standard device is measured by measuring a standard device for evaluation consisting of a rectangular parallelepiped base material and a plurality of spheres fixed at intervals in the length direction of the base material with a high-precision contact coordinate measuring machine. A first procedure for obtaining a calibration value for the straightness of the position of the object, and a measured value for the straightness of the center position of the sphere of the evaluation standard by measuring the evaluation standard with the non-contact coordinate measuring machine to be evaluated And a third procedure for evaluating the straightness of the non-contact coordinate measuring machine from the correction value obtained by subtracting the calibration value from the measured value. Degree evaluation method.   The straightness evaluation method of the non-contact coordinate measuring machine according to claim 1, wherein the straightness of the center position of the sphere of the standard device for evaluation is determined by the least square method from the measurement distribution of the outer peripheral surface of the sphere. Approximate straight lines that pass near the center of all the spheres are obtained from all positions by the least square method, and the direction of the approximate straight line is the X axis, and the surface on which the base sphere is attached perpendicular to the X axis is used as the reference plane. In this case, the coordinate system is set with the direction parallel to the reference plane as the Y axis and the direction orthogonal to both the X axis and the Y axis as the Z axis, and depending on the length of the perpendicular extending from the center position of each sphere to the approximate line A straightness evaluation method for a non-contact coordinate measuring machine, characterized by:   3. The straightness evaluation method for a non-contact coordinate measuring machine according to claim 1 or 2, wherein when the second procedure is executed, after the measurement value is obtained, the evaluation standard is slid to the position of the foremost sphere before the slide. Position the last sphere after the slide and obtain the measurement value again. When executing the third procedure, the correction value from the measurement value before and after the slide of the standard for evaluation is set to the frontmost position before the slide. A straightness evaluation method for a non-contact coordinate measuring machine, wherein the position of the sphere and the position of the last sphere after the slide are connected by a two-point chain method.   4. The straightness evaluation method for a non-contact coordinate measuring machine according to claim 3, wherein the posture before and after the slide of the standard device for evaluation in the second procedure is measured, and the measured values are joined by the two-point chain method in the third procedure. In this case, a straightness evaluation method for a non-contact coordinate measuring machine, wherein correction is made so that the postures before and after the slide of the standard device for evaluation match.   A standard for evaluation consisting of a rectangular parallelepiped base material and a plurality of spheres fixed at intervals in the length direction of the base material, and measuring the straightness of the center position of the sphere with a non-contact coordinate measuring machine; A reflection mirror attached to the base material of the evaluation standard device and an autocollimator that is installed in a non-contact coordinate measuring machine and measures the posture of the evaluation standard device from the reflected light irradiated toward the reflection mirror A straightness evaluation apparatus for a non-contact coordinate measuring machine.   6. The straightness evaluation apparatus for a non-contact coordinate measuring machine according to claim 5, further comprising a relay mirror that is installed between the reflecting mirror and the autocollimator and makes the optical path between the reflecting mirror and the autocollimator V-shaped. Straightness evaluation device for non-contact coordinate measuring machine.

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