JP4904052B2 - 磁気方位検出装置 - Google Patents
磁気方位検出装置 Download PDFInfo
- Publication number
- JP4904052B2 JP4904052B2 JP2005375422A JP2005375422A JP4904052B2 JP 4904052 B2 JP4904052 B2 JP 4904052B2 JP 2005375422 A JP2005375422 A JP 2005375422A JP 2005375422 A JP2005375422 A JP 2005375422A JP 4904052 B2 JP4904052 B2 JP 4904052B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- axis
- magnetic sensor
- group
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 29
- 238000007789 sealing Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 9
- 230000005389 magnetism Effects 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920006351 engineering plastic Polymers 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
- G01C17/02—Magnetic compasses
- G01C17/28—Electromagnetic compasses
- G01C17/30—Earth-inductor compasses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electromagnetism (AREA)
- Geology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Description
2 回路基板
3 磁気センサ
3x X軸用磁気センサ
3y Y軸用磁気センサ
3z Z軸用磁気センサ
4 制御用半導体装置
5 封止部材
6、6x、6y、6z 端子形成面
25 マーク
Claims (5)
- 回路基板の一面に、3つの磁気センサおよびこれらの磁気センサの制御を行う制御用半導体装置が直接取り付けられて実装されているとともに、前記各磁気センサおよび前記制御用半導体装置が封止部材により封止されて一体化されており、さらに、前記各磁気センサは、磁気センサの端子形成面が前記回路基板の一面に対して水平に配置されているグループと、磁気センサの端子形成面が前記回路基板の一面に対して垂直に配置されているグループとの2つのグループに区分されていることを特徴とする磁気方位検出装置。
- 前記各グループが離隔配置されていることを特徴とする請求項1に記載の磁気方位検出装置。
- 前記グループ毎に磁気センサが近接配置されていることを特徴とする請求項1または請求項2に記載の磁気方位検出装置。
- 前記封止部材の表面に、前記各磁気センサのうちの少なくとも1つの配設位置の情報を外部から認識することのできるマークが設けられていることを特徴とする請求項1ないし請求項3のいずれか1項に記載の磁気方位検出装置。
- 前記各磁気センサが、X軸方向の地磁気を検出するためのX軸用磁気センサ、Y軸方向の地磁気を検出するためのY軸用磁気センサ、および、Z軸方向の地磁気を検出するためのZ軸用磁気センサであり、前記X軸用およびY軸用磁気センサにより1つのグループが形成され、前記Z軸用磁気センサにより他の1つのグループが形成されていることを特徴とする請求項1ないし請求項4のいずれか1項に記載の磁気方位検出装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005375422A JP4904052B2 (ja) | 2005-12-27 | 2005-12-27 | 磁気方位検出装置 |
PCT/JP2006/325841 WO2007074801A1 (ja) | 2005-12-27 | 2006-12-26 | 磁気方位検出装置 |
KR1020087018420A KR100996692B1 (ko) | 2005-12-27 | 2006-12-26 | 자기방위 검출장치 |
EP06843225A EP1967862B1 (en) | 2005-12-27 | 2006-12-26 | Magnetic azimuth detector |
US12/138,713 US7559148B2 (en) | 2005-12-27 | 2008-06-13 | Magnetic azimuth detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005375422A JP4904052B2 (ja) | 2005-12-27 | 2005-12-27 | 磁気方位検出装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007178203A JP2007178203A (ja) | 2007-07-12 |
JP2007178203A5 JP2007178203A5 (ja) | 2007-11-08 |
JP4904052B2 true JP4904052B2 (ja) | 2012-03-28 |
Family
ID=38218021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005375422A Active JP4904052B2 (ja) | 2005-12-27 | 2005-12-27 | 磁気方位検出装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7559148B2 (ja) |
EP (1) | EP1967862B1 (ja) |
JP (1) | JP4904052B2 (ja) |
KR (1) | KR100996692B1 (ja) |
WO (1) | WO2007074801A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009034983A1 (ja) * | 2007-09-10 | 2009-03-19 | Alps Electric Co., Ltd. | 磁気センサモジュール |
US20090072823A1 (en) * | 2007-09-17 | 2009-03-19 | Honeywell International Inc. | 3d integrated compass package |
KR100930960B1 (ko) | 2007-11-08 | 2009-12-10 | 주식회사 아모센스 | 자기센서 패키지와 그의 제조방법 및 센서 모듈 |
JP5154275B2 (ja) * | 2008-03-24 | 2013-02-27 | アルプス電気株式会社 | 磁気センサパッケージ |
JP4725600B2 (ja) * | 2008-06-10 | 2011-07-13 | 愛知製鋼株式会社 | マグネトインピーダンスセンサ素子 |
CN201708396U (zh) * | 2009-11-20 | 2011-01-12 | 富士康(昆山)电脑接插件有限公司 | 模组元件 |
US8316552B1 (en) * | 2011-05-05 | 2012-11-27 | Honeywell International Inc. | Systems and methods for three-axis sensor chip packages |
US8459112B2 (en) | 2011-06-09 | 2013-06-11 | Honeywell International Inc. | Systems and methods for three dimensional sensors |
CN102849674B (zh) * | 2011-11-02 | 2015-04-29 | 杭州士兰集成电路有限公司 | 一种垂直传感器的封装方法 |
JP6373642B2 (ja) * | 2013-08-05 | 2018-08-15 | ローム株式会社 | 半導体装置 |
JP6571411B2 (ja) * | 2014-07-04 | 2019-09-04 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
WO2016056179A1 (ja) * | 2014-10-09 | 2016-04-14 | パナソニックIpマネジメント株式会社 | 磁気センサ |
DE102014016565B3 (de) | 2014-11-11 | 2015-11-12 | Micronas Gmbh | Schaltkreisgehäuse |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0518750A (ja) * | 1991-07-09 | 1993-01-26 | Takao Yamaguchi | 全範囲傾斜方位測定装置 |
JP3872262B2 (ja) * | 2000-01-25 | 2007-01-24 | セイコーインスツル株式会社 | 電子方位計及び電子方位計付電子時計 |
US6543146B2 (en) * | 2000-12-06 | 2003-04-08 | Honeywell International, Inc. | Electronic compass and compensation of large magnetic errors for operation over all orientations |
JP4006674B2 (ja) * | 2001-05-22 | 2007-11-14 | 日立金属株式会社 | 方位計 |
JP2003197848A (ja) * | 2001-12-28 | 2003-07-11 | Toshiba Corp | 半導体パッケージ及びパッケージ実装体 |
JP4214853B2 (ja) | 2002-07-29 | 2009-01-28 | ヤマハ株式会社 | 磁気センサ |
JP2004191065A (ja) * | 2002-12-06 | 2004-07-08 | Asahi Kasei Electronics Co Ltd | 磁気センサおよびその製造方法 |
JP4644126B2 (ja) * | 2003-07-03 | 2011-03-02 | 旭化成エレクトロニクス株式会社 | 方位角計測装置及び方位角計測方法 |
KR100743384B1 (ko) * | 2003-07-18 | 2007-07-30 | 아이치 세이코우 가부시키가이샤 | 3차원 자기 방위센서 및 마그네토-임피던스 센서 소자 |
JP2005114489A (ja) * | 2003-10-06 | 2005-04-28 | Citizen Electronics Co Ltd | 磁気方位検出装置 |
US7095226B2 (en) | 2003-12-04 | 2006-08-22 | Honeywell International, Inc. | Vertical die chip-on-board |
US7271586B2 (en) * | 2003-12-04 | 2007-09-18 | Honeywell International Inc. | Single package design for 3-axis magnetic sensor |
JP4293922B2 (ja) * | 2004-02-17 | 2009-07-08 | シチズン電子株式会社 | 磁気方位検出装置 |
JP4333425B2 (ja) * | 2004-03-17 | 2009-09-16 | 株式会社デンソー | センサ装置及びその製造方法 |
EP1605232A3 (en) * | 2004-06-11 | 2010-12-29 | Yamaha Corporation | Method and apparatus for measuring magnetic offset of geomagnetic sensor and portable electronic apparatus |
JP4252555B2 (ja) * | 2005-04-25 | 2009-04-08 | アルプス電気株式会社 | 傾斜センサおよびこれを用いた方位計測装置 |
JP4915996B2 (ja) * | 2006-10-06 | 2012-04-11 | 株式会社リコー | センサ・モジュール、補正方法、プログラム及び記録媒体 |
-
2005
- 2005-12-27 JP JP2005375422A patent/JP4904052B2/ja active Active
-
2006
- 2006-12-26 WO PCT/JP2006/325841 patent/WO2007074801A1/ja active Application Filing
- 2006-12-26 EP EP06843225A patent/EP1967862B1/en active Active
- 2006-12-26 KR KR1020087018420A patent/KR100996692B1/ko active Active
-
2008
- 2008-06-13 US US12/138,713 patent/US7559148B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20080080411A (ko) | 2008-09-03 |
WO2007074801A1 (ja) | 2007-07-05 |
EP1967862A1 (en) | 2008-09-10 |
KR100996692B1 (ko) | 2010-11-25 |
JP2007178203A (ja) | 2007-07-12 |
EP1967862B1 (en) | 2011-10-12 |
US20080276474A1 (en) | 2008-11-13 |
EP1967862A4 (en) | 2010-10-20 |
US7559148B2 (en) | 2009-07-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100996692B1 (ko) | 자기방위 검출장치 | |
JP5977780B2 (ja) | 垂直ダイ・チップオンボード | |
KR100779352B1 (ko) | 각속도 센서 | |
JP4495240B2 (ja) | 検出装置および検出装置の製造方法 | |
JP2006308543A (ja) | 角速度センサ | |
US20130249542A1 (en) | Foldable substrate | |
US7829982B2 (en) | Lead frame, sensor including lead frame and method of forming sensor including lead frame | |
US20150355220A1 (en) | Inertial sensor module having hermetic seal formed of metal and multi-axis sensor employing the same | |
JP2004125778A (ja) | 磁気センサおよび磁気センサユニット | |
KR100832185B1 (ko) | 압전 장치 및 전자기기 | |
JP2006229121A (ja) | 圧電デバイス及び圧電装置並びに電子機器 | |
JP2010243196A (ja) | ジャイロセンサー | |
JP4804764B2 (ja) | 磁界を3次元で検出する小型磁気センサー素子 | |
KR101090990B1 (ko) | 지자기 센서 및 그의 제조방법 | |
JP4548401B2 (ja) | 磁気センサ | |
KR101023082B1 (ko) | 플럭스게이트 소자를 갖는 전자 나침반 및 이를 제조하는 방법 | |
KR100801276B1 (ko) | 하이브리드형 지자기 센서 및 그 제조방법 | |
US20160054352A1 (en) | Multi-axis sensor and method for manufacturing the same | |
JP2007147649A (ja) | 磁気センサおよび磁気センサユニット | |
JP2007113919A (ja) | 3軸半導体センサ | |
KR20070030226A (ko) | 물리량 센서 및 이것에 사용하는 리드 프레임 | |
KR20110012178A (ko) | 플립 본딩 방식으로 실장된 플럭스게이트 소자를 갖는 전자 나침반 패키지 및 이의 제조 방법 | |
KR20100117195A (ko) | 플럭스게이트 소자를 갖는 전자 나침반 패키지 및 이를 제조하는 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070926 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110125 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111220 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120106 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4904052 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150113 Year of fee payment: 3 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |