JP4362296B2 - Work carry-in device and resin sealing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a work carry-in device and a resin seal device that hold a work necessary for resin sealing and carry it into a press section.
[0002]
[Prior art]
In the resin sealing device, a substrate (lead frame, resin substrate, film substrate, etc.) on which a semiconductor chip is mounted or a work of sealing resin (solid resin, granule resin, liquid resin, powder resin, etc.) is held by a loader. Then, the molded product is carried into the mold die and the molded product after resin sealing is taken out from the mold die by the unloader.
[0003]
An example of the resin sealing device proposed by the applicant of the present application is to connect the rail parts with a work supply unit, an additional rail unit equipped with a press unit, and a molded product storage unit in order to increase the functionality of the device. It is configured in a module type that can be freely separated. The loader and the unloader move while sharing the rail portion, and an additional rail unit can be added and used as necessary. For example, in order to release the heat generated in the semiconductor chip to the outside of the package part, a heat radiating plate (heat spreader) is carried into the cavity recess of the mold and resin-sealed together with the substrate. An extension rail unit provided with the heat radiating plate supply unit is added in the vicinity of the press unit, and a heat radiating plate is carried into the press unit separately from the work by a loader (see Patent Document 1).
[0004]
[Patent Document 1]
Japanese Patent Laid-Open No. 2001-300975 (FIG. 5)
[0005]
[Problems to be solved by the invention]
In general, when supplying special parts such as a heat spreader in a resin sealing device, it is necessary to add a dedicated supply unit, but the front side of the mold die loader and unloader moves forward and backward It is necessary to lay out to the side or rear side other than the above, which complicates the apparatus configuration such as changing the apparatus layout and installing a dedicated drive shaft.
[0006]
In addition, in the module-type resin sealing device shown in Patent Document 1, an additional rail unit can be added arbitrarily, so that the device layout can be changed relatively easily. Needs to access the mold separately, and the number of access to the mold increases as the number of parts carried in increases, and the cycle time required for one resin sealing is delayed. Also, even if the substrate is preheated and carried into the press section, there is a risk that the substrate will be cooled during loading, and since the loader holds the substrate and the sealing resin at the same time, the curing of the sealing resin proceeds by preheating. There was a fear. For this reason, the substrate needs to be pre-heated with a mold and then sealed with resin, which increases running costs and lowers work efficiency.
[0007]
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the prior art, easily cope with a change in the layout of the apparatus, shorten the access time to the press section and improve the work efficiency, and the work carry-in apparatus An object of the present invention is to provide a resin sealing device that can be easily modified and multi-functionalized by using the device and can improve productivity.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the present invention has the following configuration.
A workpiece loading device for loading the workpiece to the press section from the remains moving rail holding the workpiece in the workpiece holding portion, the cavity of the lower mold moves back and forth in the workpiece holder in the same direction to the loading device main body to the molding die A heat spreader conveyance unit that carries the heat spreader into the recess is integrally provided, and the heat spreader conveyance unit includes a stripper plate that can abut on a lower mold surface, an adsorption nozzle that adsorbs and holds the heat spreader, the adsorption nozzle, and the adsorption nozzle. A suspending portion for suspending and supporting a positioning pin for aligning the cavity recess, and a heat spreader is adsorbed to the adsorption nozzle, and the stripper plate is held at an upper position than the adsorbed heat spreader. Keep the heat spreader transport unit at the top By moving the loading device main body from the moving rail side to the press portion side, and moving the stripper plate toward the lower mold surface in a state where the suction nozzle is aligned with the cavity recess by the positioning pin. The heat spreader whose suction has been released is peeled off from the suction nozzle and supplied to the cavity recess, and then the work is carried in continuously from the work holding part moved to the lower mold .
In addition, a miss detection unit provided with a miss detection pin for detecting a carry-in mistake of the heat spreader is suspended and supported between the suction nozzles in the suspension unit, and the heat spreader is connected to the cavity recess of the lower mold. After the setting, the loading device main body moves a predetermined pitch in the loading direction, and a setting error is detected by a push-back operation when the error detection pin enters the cavity recess.
The resin sealing device is characterized in that the workpiece carried into the mold is clamped and resin-sealed by using the above-described workpiece carrying-in device.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In this embodiment, a loader as a work loading device that holds a work and carries it into a press part, and an unloader that takes out a molded product from the press part to a molded product take-out part are movable by using a moving rail part in common. FIG. 1 is an explanatory view showing a first embodiment of a loader, FIG. 2 is an explanatory view showing a second embodiment of the loader, and FIG. 3 is a third embodiment of the loader. FIG. 4 is an explanatory view showing a fourth embodiment of the loader, FIG. 5 is an explanatory view showing the fifth embodiment of the loader, and FIG. 6 is a plan view showing a layout configuration according to an example of the resin sealing device. It is.
[0010]
In FIG. 6, the schematic configuration of the resin sealing device will be described first. The resin sealing device includes an extension rail unit C that is separable between the workpiece supply unit A and the molded product storage unit B. Each of the workpiece supply unit A, the molded product storage unit B, and the extension rail unit C has a moving rail part and a pedestal part, and the pedestal part can be provided with various functional parts. In this embodiment, the extension rail unit C is provided with a press part and a heat spreader supply part so as to be detachable. Hereinafter, the configuration of each unit will be described.
[0011]
[Work supply unit A]
In FIG. 1, the workpiece supply unit 1 places a strip (a semiconductor chip mounted on a lead frame, a resin substrate, etc.) stored in a supply magazine 2 on a frame index 3, and then aligns the direction to a preheat rail 4. Sent out. In the preheat rail 4, the lead frame is preheated and delivered to the loader 7.
The resin tablet supply unit 5 loads the resin tablet aligned and fed from the linear feeder that sends out the resin tablet into the tablet holder 6 while temporarily storing it in the index table, and moves the tablet holder 6 to the supply position to load the resin tablet. Passed to 7.
[0012]
[Molded product storage unit B]
In FIG. 1, in the molded product take-out unit 9, the molded product taken out from any of the press units by the unloader 8 is delivered to the moving table 10 waiting in the downward direction. When the unloader 8 delivers the molded product to the moving table 10 waiting in the molded product taking-out unit 9, the unloader 8 shifts to an operation for taking out the next molded product. The moving table 10 places the molded product and conveys it to the delegation unit 11. The degate unit 11 presses and cools the molded product placed on the moving table 10 and cools it, and twists the strip to break the gate and separate unnecessary resin. Unnecessary resin is collected in a scrap box (not shown). The moving table 10 places only the molded product and conveys it to the molded product storage unit 12. In the molded product storage unit 12, the molded product transported to the movable table 10 is held at one end by the molded product pickup 13. And if the movement table 10 moves toward the molded product extraction part 9, it will rotate in the storage magazine 14 provided in the downward direction as needed, and it will accommodate in direction.
[0013]
[Expansion rail unit C]
The extension rail unit C is detachably provided between the workpiece supply unit A and the molded product storage unit B. The extension rail unit C is added between the workpiece supply unit A and the molded product storage unit B, and the supply side moving rail portion 15 and the storage side moving rail portion 16 are connected by the extension side moving rail portion 17. The loader 7 and the unloader 8 can share and move on the additional-side moving rail portion 17 (see FIG. 1).
[0014]
Functional units having various functions such as a press unit 19 and a heat spreader supply unit 20 can be mounted on the expansion side pedestal unit 18 of the expansion rail unit C.
The extension rail unit C is inserted between the work supply unit A and the molded product storage unit B so that the moving rail parts are continuous with each other, and then the extension rail unit C is added between the extension side base part 18 and the supply side base part 21. The side pedestal portion 18 and the storage side pedestal portion 22 and the extension side pedestal portion 21 are connected by bolting. Although it is possible to change the extension rail unit C to another extension rail unit C, it is possible to replace only the function unit in consideration of the size of various function units.
[0015]
Further, the molded product storage unit B and the extension rail unit C are provided with suction ducts 23 along the moving rail portions 16 and 17. The suction duct 23 is provided so as to be connectable from a duct connecting portion 24 that can be connected to the suction duct of the loader 7 or the unloader 8. When the loader 7 or the unloader 8 enters the press part 19, each suction duct is connected to the suction duct 23 via the duct connecting part 24 and collects dust to a dust collector (not shown).
[0016]
In this embodiment, the press portions 19 are arranged in parallel at three locations. Each press unit 19 includes a mold 25, a known mold opening / closing mechanism that opens the mold 25, and a known transfer mechanism that feeds a sealing resin while applying resin pressure to the cavity of the mold 25. Is equipped. Each press part 19 is provided in the expansion side pedestal part 18 and the storage side pedestal part 22, and a film unit is provided to stretch a release film that covers the mold surface of the mold 25 as necessary. Also good.
[0017]
The heat spreader supply unit 20 is provided between the workpiece supply unit A and the extension rail unit C on which the press unit 19 is mounted. The heat spreader supply unit 20 is provided in the expansion side pedestal unit 18. In the heat spreader supply unit 20, the heat spreader HS stacked and stored in the supply magazine 29 is taken out by the supply hand (pickup hand) 26 and transferred to the inspection unit 27 to inspect the direction and overlap of the heat spreader HS. Is called. Then, the heat spreader HS is transported to the delivery position by the moving table 28 and delivered to the loader 7.
[0018]
The loader 7 and unloader 8 are configured to move using a moving rail portion. That is, the loader 7 receives and holds the lead frame with the preheat rail 4, receives and holds the resin tablet from the tablet holder 6, and further receives the heat spreader HS from the heat spreader supply unit 20 and applies it to each press unit 19. It is designed to move forward and backward from the direction. Further, the molded product after the resin sealing is released from the mold die 25 and is carried out to the molded product take-out portion 9 by the unloader 8.
[0019]
[Loader configuration]
Here, the configuration of the loader 7 used as the work carry-in device will be described. FIG. 1 shows a first embodiment of the loader 7. The loader 7 is a mold access unit (function expansion unit) that can be accessed by moving back and forth to the mold 25 in the same direction as the work holding part 31 to the loading apparatus main body 32 provided with the work holding part 31 necessary for resin sealing. ) 33 is provided integrally with the work holding part 31. The work holding unit 31 can hold the substrate (in this embodiment, the lead frame L / F) W and the resin tablet T. The loader 7 is configured so that the carry-in device main body 32 moves forward and backward from the moving rail portion side to the press portion 19 side with the die access unit 33 at the head by rotating a pinion gear that meshes with a rack portion (not shown). . A cleaning unit 34 is provided as the mold access unit 33. The cleaning unit 34 cleans the mold surface (lower mold surface) prior to loading the workpiece. Note that the upper mold surface and / or the lower mold surface may be cleaned by providing a brush and a suction duct constituting the cleaning unit 34 on the upper side.
[0020]
The cleaning unit 34 includes a movable suction nozzle 35 that can move up and down and a cleaning brush 36 that brushes the mold surface. The movable suction nozzle 35 is connected to a movable suction duct 37 and is connected to a loader suction duct 38 provided in the longitudinal direction of the carry-in device main body 32 via a rubber packing 37a. The loader suction duct 38 is connected to a dust collector (not shown) at the duct connecting portion 24 described above. In place of the cleaning brush 36, the dust tape may be brought into contact with the mold surface while the adhesive tape is fed and wound between the rollers. When the cleaning brush 36 is disposed so as to enter the mold prior to the movable suction duct 37 in the carry-in direction, the cleaning brush 36 is more likely to suck dust that has been separated from the mold by the cleaning brush 36. Further, the cleaning brush 36, the movable suction duct 37, and the adhesive tape may be arranged in this order from the top with respect to the carry-in direction.
[0021]
FIG. 2 shows a second embodiment of the loader 7. The configuration of the work holding unit 31 is the same as that of the first embodiment, and the configuration of the mold access unit 33 will be mainly described. In this embodiment, a positioning sensor unit 39 is provided as the mold access unit 33. The positioning sensor unit 39 detects the distance and displacement from the workpiece (substrate W) set on the mold surface. The sensor head 41 that holds the sensor 40 is suspended and supported by being linked to the cylinder rod 43 of the vertical movement cylinder 42. As the sensor 40, a reflection type optical sensor or the like is used. The vertical movement cylinder 42 is attached to the sensor support plate 44. The sensor head 41 is connected to the lower end of a guide rod 45, and the upper end of the guide rod 45 is inserted through a guide bush 46 provided on the sensor support plate 44. When the vertical movement cylinder 42 is operated, the sensor head 41 is moved up and down with the guide rod 45 guided by the guide bush 46 so that the sensor position can be changed.
[0022]
After the substrate W held by the work holding unit 31 is carried into the mold 25, the sensor unit 39 enters the mold 25 when the loader 7 retreats from the mold 25 and the sensor 40 causes the substrate to move. W set mistakes, misalignments, etc. are detected. It should be noted that a mechanism for correcting the position may be provided when a setting error or positional deviation of the substrate W is detected.
[0023]
FIG. 3 shows a third embodiment of the loader 7. The configuration of the work holding unit 31 is the same as that of the first embodiment, and the configuration of the mold access unit 33 will be mainly described. In this embodiment, an imaging processing unit 47 is provided as the mold access unit 33. The image pickup processing unit 47 picks up the work (substrate W) set on the mold surface by the image pickup camera 48, and detects abnormalities such as a defect of the work, misalignment, bending of leads, wires and the like by image processing. The imaging camera 48 is provided with a ring illumination 49 and a lens 50 for irradiating the work with light. In addition, although it is not a workpiece | work abnormality, when the curvature of a board | substrate influences image processing, you may provide the holding | suppressing mechanism which presses down a board | substrate before imaging.
[0024]
FIG. 4 shows a fourth embodiment of the loader 7. The configuration of the work holding unit 31 is the same as that of the first embodiment, and the configuration of the mold access unit 33 will be mainly described. In this embodiment, a heat spreader transport unit 51 is provided as the mold access unit 33. The heat spreader transport unit 51 carries the heat spreader HS into the cavity recess of the mold 25. In the heat spreader transport unit 51, a stripper plate 52 that can come into contact with the lower mold surface and a miss detection unit 53 that detects a carry-in mistake of the heat spreader HS are suspended and supported by a suspension unit 54. The cylinder rod of the vertically moving cylinder 55 is connected to the hanging portion 54. A metal cylindrical suction nozzle 56 is suspended and supported by the hanging portion 54 as many times as necessary for one mold. An air suction path (not shown) communicating with each suction nozzle 56 is formed in the hanging portion 54.
[0025]
The stripper plate 52 is urged downward by a spring and is suspended and supported so as to be movable up and down, and is held at an upper position by a suspension cylinder 57. When the suspension cylinder 57 is operated, the stripper plate 52 moves to the tip side of the suction nozzle 56 by the elasticity of the spring. The stripper plate 52 is provided to forcibly peel off the heat spreader HS from each suction nozzle 56 when the heat spreader HS sucked by each suction nozzle 56 is released and set to the mold 25. It has been.
[0026]
The error detection unit 53 is provided between the suction nozzles 56. A movable block 58 is held on the stripper plate 52. On the movable block 58, a miss detection pin 59 is projected by being urged by a spring. The miss detection pin 59 protrudes from the stripper plate 52 to the lower mold side due to the weight of the movable block 58. On the upper end side of the movable block 58, a miss detection unit (contact sensor, mechanical switch, etc.) 60 for detecting the movement of the movable block 58 accompanying the push back of the miss detection pin 59 is provided. When the heat spreader HS sucked by the suction nozzle 56 is set in the cavity recess, the miss detection pin 59 is brought into contact with the lower mold surface and the movable block 58 is pushed back, so there is no inconvenience.
[0027]
A positioning pin 61 is suspended and supported by the hanging portion 54. By positioning the positioning pin 61 on the mold 25, the suction nozzle 56 is aligned with the cavity recess when the workpiece is loaded.
After the heat spreader HS held by the heat spreader transport unit 51 is set in the cavity recess of the mold 25, the setting error detection operation by the error detection unit 53 is performed. This detection operation is performed by moving the loader 7 so that the error detection pin 59 is directly above the cavity recess, thereby moving the hanging portion 54 in the longitudinal direction by a predetermined length (in FIG. 4, half the pitch between the cavity recesses). It has been moved. After the heat spreader HS is set in the mold 25, the work (substrate W and resin tablet T) held by the work holding unit 31 is carried in.
[0028]
FIG. 5 shows a fifth embodiment of the loader 7. The work holding unit 31 includes a substrate holding unit 62 that holds the substrate W and a preheating unit 63 that preheats the substrate W. The mold access unit 33 is provided with a resin holding portion 64 that holds a sealing resin (resin tablet T or the like). After the preheated substrate W held by the substrate holding part 62 is set in the mold 25, the loader 7 moves to load the resin tablet T from the resin holding part 64 into the mold and seal the resin. . In this way, by separating the substrate holding part 62 and the resin holding part 64, the preheating of the substrate W can be performed while being transported on the loader 7 side, so that the preheating time of the pressing part 19 can be shortened or omitted, so the cycle time is shortened. it can. Since the preheating time of the press part 19 can be shortened, the thermosetting resin is not cured and the flowability is not deteriorated.
[0029]
In FIG. 6, the loader 7 receives only the non-defective product from the heat spreader HS supplied from the heat spreader supply unit 20 provided in the extension rail unit C from the moving table 28 and holds the resin tablet T from the tablet holder 6. The lead frame L / F preheated from the preheat rail 4 is received and held. And it moves along a moving rail part, moves to the front position of the press part 19, and after setting the heat spreader HS to the mold 25, the resin tablet T and the lead frame L / F are set. After the loader 7 is retracted from the mold 25, the mold is clamped and sealed with resin. The molded product after resin sealing is released when the mold is opened, taken out by the unloader 8 to the molded product take-out section 9, and gate-breaked by the degate section 11, and only the molded product is sent to the molded product storage section 12. Stored.
[0030]
By using the above-described work transfer device (loader 7), a mold access unit that can access the carry-in apparatus main body 32 having the work holding part 31 necessary for resin sealing by moving forward and backward from the mold 25 in the same direction. Since 33 is provided integrally, the access time to the press unit 19 can be shortened and work efficiency can be improved by modifying the mold access unit 33 according to the increase or change of the workpiece.
Further, in the resin sealing device, by using the workpiece carry-in device, it is possible to easily change the layout of the device and to make modifications such as multi-functionality, and to shorten the cycle time and improve the productivity.
[0031]
The preferred embodiments of the present invention have been described above in various ways. However, the present invention is not limited to the above-described embodiments, and the work carry-in device is not limited to the module type resin sealing device, but is a single resin. It is possible to apply to a sealing device. In addition, the mold access unit 33 can be used not only for the heat spreader HS but also for other parts conveyance and function units.
Of course, the press part 19 may be stretched with a release film, and various modifications can be made without departing from the spirit of the law.
[0032]
【The invention's effect】
When using the workpiece loading device according to the present invention, the loading device main body provided with the workpiece holding unit necessary for resin sealing is integrally provided with an access unit that can be accessed by moving forward and backward from the same direction to the mold. In addition, by changing the access unit according to the increase or change of the workpiece, the access time to the press section can be shortened and the work efficiency can be improved.
Further, in the resin sealing device, by using the workpiece carry-in device, it is possible to easily change the layout of the device and to make modifications such as multi-functionality, and to shorten the cycle time and improve the productivity.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a first embodiment of a loader.
FIG. 2 is an explanatory view showing a second embodiment of the loader.
FIG. 3 is an explanatory view showing a third embodiment of the loader.
FIG. 4 is an explanatory view showing a fourth embodiment of the loader.
FIG. 5 is an explanatory view showing a fifth embodiment of the loader.
FIG. 6 is a plan view showing a layout configuration according to an example of a resin sealing device.
[Explanation of symbols]
A Workpiece supply unit B Molded product storage unit C Expansion rail unit HS Heat spreader 1 Work supply unit 2 Supply magazine 3 Frame index 4 Preheat rail 5 Resin tablet supply unit 6 Tablet holder 7 Loader 8 Unloader 9 Mold takeout unit 10 Moving table DESCRIPTION OF SYMBOLS 11 Digate part 12 Molded product storage part 13 Molded product pick-up 14 Storage magazine 15 Supply side movement rail part 16 Storage side movement rail part 17 Extension side movement rail part 18 Extension side base part 19 Press part 20 Heat spreader supply part 21 Supply side base Part 22 Storage side pedestal part 23 Suction duct 24 Duct connection part 25 Mold die 26 Supply hand 27 Inspection part 28 Moving table 29 Supply magazine 31 Work holding part 32 Loading device main body 33 Mold access unit 34 Cleaning Moving unit 35 Movable suction nozzle 36 Cleaning brush 37 Movable suction duct 38 Loader suction duct 39 Sensor unit 40 Sensor 41 Sensor head 42, 55 Vertical movement cylinder 43 Cylinder rod 44 Sensor support plate 45 Guide rod 46 Guide bush 47 Imaging processing unit 48 Imaging camera 49 Ring illumination 50 Lens 51 Heat spreader transport unit 52 Stripper plate 53 Miss detection part 54 Suspension part 56 Adsorption nozzle 57 Suspension cylinder 58 Movable block 59 Miss detection pin 60 Miss detection part 61 Positioning pin 62 Substrate holding part 63 Preheating part 64 Resin holder

Claims (3)

A workpiece loading device that loads a workpiece from the moving rail to the press portion while holding the workpiece in the workpiece holding portion,
The heat spreader transport unit for carrying a heat spreader in cavities of the lower mold loading apparatus to advance and retract the mold with the work holder in the same direction in the main body integrally comprises,
The heat spreader transport unit includes a stripper plate that can contact the lower mold surface, a suction nozzle that sucks and holds the heat spreader, and a suspension part that suspends and supports a positioning pin that aligns the suction nozzle and the cavity recess. The heat spreader is adsorbed by the adsorption nozzle and the stripper plate is held at the upper position with respect to the adsorbed heat spreader, with the heat spreader conveyance unit at the head, and The suction is released by moving the stripper plate toward the lower mold surface while moving the stripper plate toward the lower mold surface with the suction nozzle aligned with the cavity recess by the positioning pin. Remove the heat spreader from the suction nozzle Supplied to the cavities by peeling can then work loading device, characterized in that the loading of the workpiece is carried out continuously from the workpiece holding portion that has moved to the lower mold. An error detection unit having an error detection pin for detecting an error in loading of the heat spreader is suspended and supported between the suction nozzles in the suspension part, and the heat spreader is set in the cavity recess of the lower mold. 2. The workpiece according to claim 1, wherein a set error is detected by a push-back operation when the carry-in device main body moves by a predetermined pitch in the carry-in direction and the miss detection pin enters the cavity recess. Loading device. A resin sealing device characterized by clamping and resin-sealing a workpiece carried into a mold using the workpiece carrying-in device according to claim 1.

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