JP4059623B2 - Illumination device and uniform illumination device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an illumination optical apparatus, an illumination optical system, and a projection apparatus, an exposure apparatus, and a laser processing apparatus using these, and more specifically, a plurality of light emitting means using laser array light or the like as light sources. The present invention relates to an apparatus applicable to an optical system that uniformly illuminates an irradiated portion, and to a technique applicable to a projection apparatus (projector), a stepper (exposure apparatus), and the like.
[0002]
[Prior art]
The optical system for uniformly illuminating the irradiated portion of the irradiation target is not only suitable for, for example, a light and bulb type projection device using a liquid crystal display element, a stepper used for manufacturing a semiconductor, etc. There is a need for an optical system that can be applied to various uses and has a high accuracy, a compact and simple configuration. In addition, for example, in the above-described light valve type projection device, the illumination optical system is set so that the maximum incident angle with respect to the light valve is as small as possible (that is, incident as perpendicularly as possible to the surface of the light valve). It is hoped that
[0003]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described circumstances, and uses a light-emitting unit having a plurality of light sources that realizes a compact configuration. The light emitted from the plurality of light sources is uniformly and covered with respect to the irradiated surface. Illumination device for irradiating an irradiation surface with a minimum incident angle and using the same Uniform lighting device Is intended to provide.
[0004]
[Means for Solving the Problems]
According to the first aspect of the present invention, the light emitting means having a plurality of light emitting portions and the diffused light emitted from each of the light emitting portions are parallel light in at least the same direction on a plane orthogonal to the optical axis of the diffused light. And collimating means for condensing a plurality of light beams emitted from the collimating means in a predetermined condensing range. In the illumination device, the light emitting unit is configured such that the plurality of light emitting units are arranged in an array in one direction, and the collimating unit is configured by a cylindrical lens array, and each cylindrical lens configuring the cylindrical lens array The array pitch of the light emitting portions is provided to be equal to the array pitch of the light emitting portions, and the light emitted from the plurality of light emitting portions is made parallel to the divergent light component in the light source array direction by the cylindrical lens array. Characterized by being It is what.
[0006]
Claim 2 The invention of claim 1's In the present invention, the light emitting means includes a laser light emitting section that emits laser light.
[0009]
Claim 3 The invention of claim 1's In the present invention, at least two cylindrical lens arrays are provided.
[0010]
Claim 4 The invention of claim 1 In the invention, a lenticular lens is used as the collimating means, and the array pitch of each microlens constituting the lenticular lens is equal to the array pitch of the light emitting section.
[0011]
Claim 5 The invention of claim Four In the present invention, at least two or more of the lenticular lenses are provided.
[0012]
Claim 6 The invention of claim 1 to claim 1 5 Any one of the illumination device and intensity distribution uniformizing means for receiving illumination light emitted from the illumination device and uniformizing the light intensity distribution in a plane perpendicular to the optical axis of the received light. And the illumination target is illuminated by controlling the light emitted from the intensity distribution uniformizing means.
[0013]
Claim 7 The invention of claim 6 In the present invention, a kaleidoscope is used as the intensity distribution uniformizing means.
[0014]
Claim 8 The invention of claim 6 In the invention, a homogenizer is used as the intensity distribution uniformizing means.
[0015]
Claim 9 The invention of claim 6 In the invention, a fly-eye lens is used as the intensity distribution uniformizing means.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
First, an essential configuration of the present invention will be described below with reference to the drawings. The configuration of the embodiment will be specifically described later with reference to the drawings again. In the illumination device of the present invention, the light emitting means 11 having a plurality of light emitting portions 11a, 11b, and 11c and the diffused light emitted from each of the light emitting portions 11a, 11b, and 11c are orthogonal to the optical axis of the diffused light. Collimating means 12 for making parallel light in at least the same direction on the surface to be collimated, and condensing means 13 for condensing a plurality of light beams emitted from the collimating means 12 in a predetermined condensing range ((31, 32, 33), (41), (51)). Moreover, in said illuminating device, you may comprise the collimating means 12 by the lens 12a attached to each light emission part 11a of a light emission means, as shown in FIG. The light emitting means 11 can be constituted by laser light emitting portions 11a, 11b, and 11c that emit laser light.
[0028]
The light emitting means is configured such that a plurality of light emitting portions 11a, 11b, and 11c are arrayed in one direction, and the collimating means 12 matches the emitted light from the plurality of light emitting portions in the array arranging direction. It is comprised so that it may become parallel light about the direction to do. In addition, a cylindrical lens array is used as the collimating means 12, and the array pitch of each cylindrical lens part constituting the cylindrical lens array is equal to the array pitch of the light emitting part. Further, at least two cylindrical lens arrays may be provided.
[0029]
Further, a lenticular lens is used as the collimating means 11, and the array pitch of each microlens constituting the lenticular lens is made equal to the array pitch of the light emitting section. Further, at least two or more lenticular lenses may be provided.
[0030]
The uniform illumination device of the present invention receives the illumination device as described above and the illumination light emitted from the illumination device, and makes the light intensity distribution in a plane perpendicular to the optical axis of the received light uniform. It has intensity distribution uniformizing means 14 ((42, 43), (52, 53)), and illuminates the illumination target by controlling the light emitted from the intensity distribution uniformizing means 14.
[0031]
Example 1
FIGS. 1 and 2 are diagrams for explaining a first embodiment of the present invention. FIG. 1 shows a schematic top view configuration of an illumination optical system, and FIG. 2 shows a schematic side view configuration with an optical path. 1 and 2, 11 is a laser array, 12 is a cylindrical lens array, 13 is a condenser lens, 14 is a kaleidoscope, 15 is a relay lens, and 16 is an irradiated portion. In the laser array 11, the laser light emitting portions 11a, 11b, 11c... Are linearly arranged at an equal pitch. Each emitted light B1 from each laser light emitting part is emitted as diffused light. These emitted lights B1 are converted into parallel luminous fluxes in one direction by the cylindrical lens array 12. In the example of FIG. 1, the cylindrical lens array 12 emits an incident light beam as a light beam B2 that is collimated in a direction parallel to the paper surface. In this case, the parallel light beam B2 may not be strictly parallel. In the next condenser lens 13, it is sufficient that adjacent light beams do not intersect with each other with a large angle difference. That is, even if the emitted light beams B2 overlap to some extent, there is no problem if the angle difference is small.
[0032]
Then, by the condenser lens 13, the emitted light beam B <b> 3 is converged on the incident side end face 14 a of the kaleidoscope 14. The light beam traveling in the kaleidoscope 14 is multiple-reflected in the kaleidoscope 14, and the distribution of the in-plane intensity of the light beam is made uniform on the emission end face 14b. The light beam having the uniform intensity distribution is irradiated to the irradiated portion 16 by the relay lens 15.
[0033]
The cylindrical lens array 12 may be replaced with a so-called lenticular lens. The cylindrical lens array 12 is a lens array having an array pitch that is approximately the same as the array pitch of the laser array 11 and has only to have lens power with respect to the arrangement direction of the laser array. In the case of using a lenticular lens as well, the array pitch of the microlens is similarly set to be equal to the array pitch of the laser array 11 so as to operate similarly. When the cylindrical lens array 12 (or lenticular lens) is placed on the optical path immediately after the laser array 11, for example, the cylindrical lens array 11 is replaced with a linearly arranged lens array (having two-dimensional power). Compared with FIG. 1, the installation allowable range in the direction of the thickness of the paper becomes wider. That is, only fine adjustment in the vertical direction in FIG.
[0034]
The fact that the maximum incident angle to the irradiated portion 16 can be reduced by using the cylindrical lens array (or lenticular lens) 12 will be described using the result of ray tracing calculation. FIG. 3 is a diagram for explaining the effect of an illumination optical system using a lenticular lens. FIG. 3A shows a schematic configuration of the illumination optical system, and FIG. 3 is an enlarged view of a portion B in FIG. It is shown in (B).
[0035]
In the configuration shown in FIG. 3, a laser array including light sources 11a and 11c as shown in FIG. 1 is actually arranged. However, the entire laser array 11 is not shown in order to explain the characteristic optical path. ing. That is, the illustrated light source 11a is located at the end of the laser array, the light source 11n is located at the center of the laser array 11, and the other light sources constituting the laser array are not shown. A cylindrical lens array (or lenticular lens) 12 is disposed immediately after the laser light source 11a. 3B, reference numeral 12a denotes one lens portion (cylindrical lens) constituting the cylindrical lens array 12, which is arrayed in the y direction in the same manner as the light sources 11a to 11n.
[0036]
The light source array pitch of the laser array 11 and the array pitch of each lens of the cylindrical lens array 12 (or the microlens array pitch of the lenticular lens) are the same pitch, and in FIG. Only one microlens 12a constituting the lens) is shown. In the lenticular lens 12, light emitted from each laser array is collimated in a direction parallel to the paper surface. In this lenticular lens 12, the emitted light is not completely collimated due to the spherical aberration of the lens, but a sufficient effect can be obtained with a certain amount of parallel light flux. The collimated beam B2 passes through the cylindrical lenses 21, 22, and 23 and reaches the incident side end face 14a of the kaleidoscope 14. In this case, the maximum incident angle to the incident side end face 14a is 12 °.
[0037]
The cylindrical lens 21 serves to deflect the laser array light to the incident side end face 14 a of the kaleidoscope 14. The cylindrical lenses 22 and 23 serve to converge the divergent beam in the laser array thickness direction (paper thickness direction) on the incident side end face 14a.
[0038]
(Comparative example)
FIG. 4 is a diagram for explaining the operation of the optical system when the lenticular lens 12 is not provided in the configuration of FIG. FIG. 4 shows a light beam when the cylindrical lens array 12 immediately after the light source 11a located at the end of the laser array in the optical system of FIG. 3 is deleted. The divergent light B11 from the light source 11a passes through the cylindrical lenses 21, 22, and 23 and is incident on the incident side end surface 14a of the kaleidoscope 14 at a maximum incident angle of 16 °. The outgoing light from the outgoing side end face (not shown) of the kaleidoscope 14 is emitted at a maximum angle of 16 ° because the incident angle is maintained. Further, when FIG. 4 is compared with FIG. 3, the aperture of the kaleidoscope 14 can be reduced by using the cylindrical lens array 12. For a kaleidoscope with the same number of reflections, the smaller the aperture, the shorter the overall length. Therefore, the illumination optical system can be reduced by using a cylindrical lens array (or lenticular lens).
[0039]
(Example 2)
FIGS. 5 and 6 are diagrams for explaining a second embodiment of the present invention. FIG. 5 shows a schematic top view of the illumination optical system and FIG. 6 shows a schematic side view of the illumination optical system. The optical system includes a lens array 11, a cylindrical lens array 12, a kaleidoscope 14, a relay lens 15, and cylindrical lenses 31, 32, and 33, and 16 is an irradiated portion. As in the first embodiment, the cylindrical lens array 12 may be replaced with a lenticular lens. At this time, the array direction and array pitch of the microlenses of the lenticular lens are the same as the array configuration of the cylindrical lens, and both are configured to operate in the same manner. In the present embodiment, description will be given as an embodiment using the cylindrical lens array 12.
[0040]
The cylindrical lens array 12 has a cylindrical surface formed at a pitch approximately equal to the array pitch of the laser array 11 and has lens power in the array direction of the laser array 11 as shown in FIG. By the cylindrical lens array 12, each laser array light B1 radiated and emitted is converted into a parallel light beam only in the array direction. The parallel light beam B2 obtained in this case may not be strictly parallel. That is, it is sufficient that the incident light beams adjacent to each other in the next cylindrical lens 31 do not intersect with each other with a large angle difference, and even if they overlap to some extent, there is no problem if the angle difference is small.
[0041]
On the optical path between the cylindrical lens array 12 and the kaleidoscope 14, at least two cylindrical lenses are arranged. 5 and 6 show examples (cylindrical lenses 31, 32, and 33) in which three cylindrical lenses are configured. In this case, one cylindrical lens 32 having power in the array direction of the laser array 11 and two cylindrical lenses 31 and 33 having lens power in the direction orthogonal to the array direction of the laser array are arranged.
[0042]
The operation of these cylindrical lenses 31, 32, 33 will be described. First, as shown in FIG. 5, since the cylindrical lenses 31 and 33 can be regarded as the same as the parallel plate with respect to the light flux in the array direction of the laser array 11, the beam B2 converted into a parallel light flux only in the array direction passes through the cylindrical lens 31. The light is transmitted as it is and enters the cylindrical lens 32 as a light beam B21. The incident light beam B 21 is deflected by the cylindrical lens 32 (light beam B 22), passes through the cylindrical lens 33 (light beam B 23), and reaches the incident side end surface 14 a of the kaleidoscope 14.
[0043]
Next, as shown in FIG. 6, since the cylindrical lens array 12 can be regarded as a parallel plate for the beam in the direction orthogonal to the array direction in the laser array 11, the light beam B 1 emitted from each laser light emitting unit is converted into the cylindrical lens array 12. After being transmitted, the light diverges into a light beam B2, collimated by the cylindrical lens 31 (light beam B21), passes through the cylindrical lens 32 (light beam B22), and converges on the calidoscope 14 by the cylindrical lens 33 (light beam B23). ). The light beams B21 and B22 do not have to be parallel light beams in the vertical direction of FIG. 6 (that is, the direction orthogonal to the array direction of the laser array). Therefore, even if the cylindrical lenses 31 and 33 are replaced with one cylindrical lens and converged on the kaleidoscope with the one lens, the effect of the present invention is not affected.
[0044]
(Example 3)
FIGS. 7 and 8 are diagrams for explaining a third embodiment of the present invention. FIG. 7 shows a schematic top view of the illumination optical system and FIG. 8 shows a schematic side view of the illumination optical system. The optical system includes a laser array 11, a cylindrical lens array (or lenticular lens) 12, a cylindrical lens 41, homogenizers 42 and 43, and cylindrical lenses 44 and 45. FIG. 16 is a top view (FIG. 16 (A)) and a side view (FIG. 16 (B)) showing the configuration of the laser irradiation apparatus described in Japanese Patent Laid-Open No. 9-234579 using the above homogenizer. Is an apparatus that irradiates an irradiated portion with a linear laser beam as a linear beam with improved uniformity. In the present embodiment, the laser array light is uniformly illuminated on the rectangular irradiated portion by using the homogenizers 40a and 40b used in this optical system.
[0045]
Since the operation of the cylindrical lens array 12 (or a lenticular lens that can be replaced by this) is as described above, the description thereof is omitted. The cylindrical lens 41 converts the divergent beam component in the vertical direction of FIG. 8, that is, the direction orthogonal to the array direction of the laser array 11 into a parallel beam (light beam B31). The homogenizer 42 makes the light flux in the array direction of the laser array 11 uniform. The homogenizer 42 of the present embodiment has a five-divided configuration, but the light flux becomes uniform as the number of divisions increases. However, in FIG. 7, when the incident light to the lens arrays of the homogenizer 42 has the same intensity distribution, the effect of the homogenizer cannot be obtained. For example, such a phenomenon occurs when the array pitch between the lenticular lens 12 and the homogenizer 42 is an integer multiple. Light from the homogenizer 42 (light beams B32 and B33) is collected on the irradiated portion 16 by the cylindrical lens 44 (light beam B34).
[0046]
On the other hand, as shown in FIG. 8, the intensity distribution of the light beam is made uniform by the homogenizer 43 in the light beam orthogonal to the array direction of the laser array 11. That is, the diffused light component incident on the cylindrical lens 41 is converted into a parallel light beam (light beam B31), the light beam is divided by the homogenizer 43, and each of the divided light beams is condensed and focused to become further divergent light. (Flux B33) is superimposed on the irradiated portion 16 by the cylindrical lens 45 (Flux B34). The homogenizer 43 that controls the light flux in the direction orthogonal to the array direction of the laser array 11 has a higher uniformity effect as the number of divisions increases.
[0047]
By arranging a cylindrical lens array (lenticular lens) 12 immediately after the laser array 11, each array light in the array direction can be converted into a parallel light beam, and a homogenizer effect can be obtained. Further, since it is a cylindrical lens array (or lenticular lens), there is an advantage that installation accuracy is not required in the direction orthogonal to the eye direction of the laser array.
[0048]
Example 4
FIGS. 9 and 10 are views for explaining a fourth embodiment of the present invention. FIG. 9 shows a schematic top view of the illumination optical system, and FIG. 10 shows a schematic side view of the illumination optical system. The optical system includes a laser array 11, a cylindrical lens array (or lenticular lens) 12, a cylindrical lens 51, fly-eye lenses 52 and 53, and a condenser lens 54. In the illustrated embodiment, two fly-eye lenses 52 and 53 are used, but the second fly-eye lens 53 is not necessarily required and can be omitted. Further, the condenser lens 54 may be replaced with two cylindrical lenses that are orthogonal to each other in the lens power direction. In this embodiment as well, the cylindrical lens array can be replaced with a lenticular lens having the same function as in the above embodiments.
[0049]
First, the operation relating to the light component in the array direction will be described with reference to FIG. The cylindrical lens array 12 has an array pitch that is approximately the same as the array pitch of the laser array 11. The operation is as described above. The beam in the array direction of the laser array becomes a substantially parallel light beam B2 in the cylindrical lens array 12, passes through the cylindrical lens 51 (light beam B41), and the emitted light beam from each array light source is condensed by the first fly-eye lens 52. (Light flux B42). A second fly eye lens 53 is disposed at the focal position of the first fly eye lens 52. If the traveling direction of the light beam that has passed through the cylindrical lens array 12 in the plane of FIG. 9 is parallel to the axis of the first fly-eye lens 52, the second fly-eye lens 53 is not necessary. Further, the light beam B41 is generated by the first fly-eye when the light beam B1 emitted from the laser array 11 cannot be regarded as the light beam emitted from the point light source, the aberration of the cylindrical lens array 12, or the pitch deviation of the cylindrical lens 12 from the laser array 11. Slightly tilted with respect to the lens 52. In such a case, the second fly's eye lens 53 is required because the light rays collected from the lens portions constituting the first fly's eye lens 52 are not collected at one point. The emitted light beam from the second fly-eye lens 53 is superimposed on the irradiated portion 16 by the condenser lens 54 (light beam B43).
[0050]
Next, the effect | action regarding the light beam component of the orthogonal | vertical direction of the array direction of a laser array is demonstrated using FIG. The emitted light beam B1 from the laser array 11 passes through the cylindrical lens array 12 to become a light beam B2, and is converted into a parallel light beam B41 by the cylindrical lens 51. As described above, the second fly-eye lens 53 is disposed at the focal length position of the first fly-eye lens 52, and the emitted light beam (light beam B42) from each lens portion of the first fly-eye lens 52 is the second fly-eye lens. The light passes through each lens portion of the lens 53 and is superimposed on the irradiated portion 16 by the condenser lens 54 to make the illuminance uniform (light flux B43).
[0051]
When the thickness of the light emitting portion of the laser array 11 (thickness in the direction orthogonal to the array direction) is large, the light beam B41 is not necessarily parallel to the optical axis of the first fly-eye lens 52, and is condensed from each array. The rays that are made do not collect at one point. For this reason, the second fly-eye lens 53 is used. If the above-mentioned thickness of the light emitting part of the laser array can be considered to be sufficiently small, the emitted light beam (light beam B42) from each lens part of the first fly-eye lens 52 is condensed at almost one point, so that the second The fly eye lens 53 is not required. By using the cylindrical lens array 12, there is an advantage that installation tolerance of the laser array 11 in the thickness direction is widened.
[0052]
( Reference example )
FIG. Throw Shooting equipment reference FIG. 2 is a diagram illustrating a schematic configuration of an example together with an optical path, and the projection apparatus includes any one of the illumination optical systems from Example 1 to Example 4, a light valve, and a projection lens. The projection apparatus of the configuration example shown in FIG. 11 includes illumination optical systems 61r, 61g, 61b, a color synthesis element 62, a light valve 65, and a projection lens 64. In the configuration shown in FIG. 11, the optical system according to the third embodiment is used as the illumination optical systems 61r, 61g, and 61b. However, as described above, any one of the first to fourth embodiments is used as the illumination optical system. May be.
[0053]
As the color composition element 62, for example, a dichroic prism can be used. When the illumination optical systems 61r, 61g, and 61b are red, green, and blue laser array light sources in order, the color composition element (dichroic prism) 62 reflects red by the dichroic film 62r and blue by the dichroic film 62b. The dichroic films 62r and 62b are configured to transmit green. As the light valve 65, for example, a liquid crystal element can be used. In the configuration of FIG. 11, a field lens 63 is used immediately before the light valve. The light transmitted through the light valve 65 works to pass through the pupil of the projection lens 64.
[0054]
With the above configuration, since the maximum incident angle of the light that illuminates the light valve 65 is reduced as compared with the conventional case as described above, particularly in the case of a light valve whose contrast ratio changes depending on the incident angle, such as a liquid crystal element. The contrast ratio can be improved, and the color unevenness and the illuminance unevenness can be reduced.
[0055]
FIG. 11 shows a configuration example using a single plate light valve, but a configuration using a total of three light valves 65r, 65g, 65b corresponding to the illumination optical systems 61r, 61g, 61b as shown in FIG. May be. Field lenses 63r, 63g, and 63b are placed immediately before the light valves 65r, 65g, and 65b. 12 has a longer optical path length between the projection lens 64 and the light valves 65r, 65g, and 65b than the configuration of FIG. 11, the back focus length of the projection lens 64 is that of the projection lens 64 of FIG. Need to be longer than back focus. In the projection device of the three-plate light valve, the contrast ratio can be improved, and the color unevenness and the illuminance unevenness can be reduced as in the case of the single plate.
[0056]
FIG. , Dew Optical device Reference example It is a figure for demonstrating about 71 in the figure Is average One illumination device, 72 is a reticle, 73 is a projection lens, and 74 is a substrate stage. The exposure apparatus of the present invention illuminates the reticle 72 with the uniform illumination optical device 71 according to any one of claims 9 to 20, and the wafer on which the pattern of the reticle 72 is placed on the substrate stage 74 by the projection lens 73 It is to be exposed to.
[0057]
FIG. , Les -The processing machine Reference example In the figure, 75 is a lens, and 76 is a workpiece. The laser processing machine of the present invention , Average The illumination light from one illumination optical device is condensed on the workpiece 76 by the lens 75 and processed. The condensing spot shape on the workpiece 76 is the same as the aspect ratio of the irradiated portion of the illumination system 71. By concentrating, energy can be concentrated on a minute part of the workpiece, and surface processing and cutting can be performed. Further, when the lens 75 is replaced with a projection lens, or the arrangement in which the irradiated portion is the work 76 directly, uniform illumination can be performed over a wide range.
[0058]
【The invention's effect】
As is clear from the above description, according to the illumination device of the present invention, a compact optical system is realized by using a plurality of light sources, and the diffused light from the light sources is collimated and condensed to achieve illumination. It becomes possible to keep the maximum incident angle to the target portion small, whereby an optical system with good characteristics can be obtained even when applied to various uses.
[0059]
In addition, according to the uniform illumination device of the present invention, a simple and compact illumination device capable of uniform illumination can be obtained by providing the above illumination device and means for equalizing the light intensity distribution.
[Brief description of the drawings]
FIG. 1 is a diagram for explaining a first embodiment of the present invention, and is a diagram showing a schematic top surface configuration of an illumination optical system.
FIG. 2 is a diagram for explaining a first embodiment of the present invention and is a diagram showing a schematic side configuration of an illumination optical system.
FIG. 3 is a diagram for explaining the effect of an illumination optical system using a lenticular lens.
4 is a diagram for explaining the operation of the optical system when there is no lenticular lens in the configuration of FIG. 3;
FIG. 5 is a diagram for explaining a second embodiment of the present invention, and is a diagram showing a schematic top configuration of an illumination optical system.
FIG. 6 is a diagram for explaining a second embodiment of the present invention and is a diagram showing a schematic side configuration of an illumination optical system.
FIG. 7 is a diagram for explaining a third embodiment of the present invention, and is a diagram showing a schematic top surface configuration of an illumination optical system.
FIG. 8 is a diagram for explaining a third embodiment of the present invention, and is a diagram showing a schematic side configuration of an illumination optical system.
FIG. 9 is a diagram for explaining a fourth embodiment of the present invention and is a diagram showing a schematic top surface configuration of an illumination optical system.
FIG. 10 is a diagram for explaining a fourth embodiment of the present invention and is a diagram showing a schematic side configuration of an illumination optical system.
FIG. 11 Throw Shooting equipment reference It is a figure which shows schematic structure of an example with an optical path.
FIG. Another reference example of the projection device It is a figure which shows schematic structure with an optical path.
FIG. 13 is a diagram showing a configuration example of a light emitting unit and a collimating unit of the present invention.
FIG. 14 Exposure system reference It is a figure which shows an example.
FIG. 15 Les -The processing machine Reference example It is a figure for demonstrating.
FIG. 16 is a diagram showing a schematic configuration of another embodiment of the projection apparatus according to the present invention together with an optical path.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 ... Laser array, 12 ... Cylindrical lens array, 13 ... Condenser lens, 14 ... Callide scope, 15 ... Relay lens, 16 ... Irradiated part, 31, 32, 33, 41, 44, 45, 51 ... Cylindrical lens, 40a, 40b ... homogenizer, 42, 43 ... homogenizer, 52, 53 ... fly-eye lens, 54 ... condenser lens, 61r, 61g, 61b ... illumination optical system, 62 ... color synthesis element, 62r, 62b ... dichroic film, 63, 63r, 63g, 63b ... field lens, 64 ... projection lens, 65, 65r, 65g, 65b ... light valve, 71 ... uniform illumination device, 72 ... reticle, 73 ... projection lens, 74 ... substrate stage, 75 ... lens, 76 …work.

Claims (9)

A light-emitting unit having a plurality of light-emitting units, and a collimating unit that converts each of the diffused light emitted from each of the light-emitting units into parallel light in at least the same direction on a plane orthogonal to the optical axis of the diffused light And a light condensing device for condensing a plurality of light beams emitted from the collimating means in a predetermined condensing range , wherein the light emitting means is arranged so that the light emitting portions are arrayed in one direction. The collimating means is constituted by a cylindrical lens array, and the array pitch of each cylindrical lens part constituting the cylindrical lens array is provided equal to the array pitch of the light emitting part, and the cylindrical lens array The light emitted from the plurality of light emitting units is configured to collimate divergent light components in the light source array direction. Lighting device that. The illumination device according to claim 1 , wherein the light emitting unit includes a laser light emitting unit that emits laser light. The illumination device according to claim 1 , wherein at least two cylindrical lens arrays are provided. 2. The illumination device according to claim 1 , wherein a lenticular lens is used as the collimating means, and an array pitch of each microlens constituting the lenticular lens is equal to an array pitch of the light emitting unit. Lighting device. 5. The lighting device according to claim 4 , wherein at least two lenticular lenses are provided. The illumination device according to any one of claims 1 to 5 , and illumination light emitted from the illumination device, and uniformizing a light intensity distribution in a plane perpendicular to the optical axis of the received light And a uniform illumination device characterized in that the illumination target is illuminated by controlling light emitted from the uniform intensity distribution unit. 7. The uniform illumination device according to claim 6 , wherein a kaleidoscope is used as the intensity distribution uniformizing means. 7. The uniform illumination device according to claim 6 , wherein a homogenizer is used as the intensity distribution uniformizing means. The uniform illumination device according to claim 6 , wherein a fly-eye lens is used as the intensity distribution uniformizing unit.

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