JP3957364B2 - Photopolymerizable composition - Google Patents
Photopolymerizable composition Download PDFInfo
- Publication number
- JP3957364B2 JP3957364B2 JP19281097A JP19281097A JP3957364B2 JP 3957364 B2 JP3957364 B2 JP 3957364B2 JP 19281097 A JP19281097 A JP 19281097A JP 19281097 A JP19281097 A JP 19281097A JP 3957364 B2 JP3957364 B2 JP 3957364B2
- Authority
- JP
- Japan
- Prior art keywords
- photopolymerizable
- weight
- film
- photopolymerizable composition
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000203 mixture Substances 0.000 title claims description 31
- 239000000178 monomer Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 17
- 239000002253 acid Substances 0.000 claims description 13
- 229920000642 polymer Polymers 0.000 claims description 13
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 9
- 239000003999 initiator Substances 0.000 claims description 9
- 239000011230 binding agent Substances 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 5
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 125000005442 diisocyanate group Chemical group 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 41
- -1 2-ethylhexyl Chemical group 0.000 description 22
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 18
- 239000007864 aqueous solution Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 238000011161 development Methods 0.000 description 12
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 10
- 229920005684 linear copolymer Polymers 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000000975 dye Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- 239000011241 protective layer Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 238000004040 coloring Methods 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- 239000000539 dimer Substances 0.000 description 4
- ORBFAMHUKZLWSD-UHFFFAOYSA-N ethyl 2-(dimethylamino)benzoate Chemical compound CCOC(=O)C1=CC=CC=C1N(C)C ORBFAMHUKZLWSD-UHFFFAOYSA-N 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 229920001451 polypropylene glycol Polymers 0.000 description 4
- 229910000029 sodium carbonate Inorganic materials 0.000 description 4
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229920001897 terpolymer Polymers 0.000 description 3
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- LYCNQAIOLGIAFA-UHFFFAOYSA-N 4-[bis[4-(dimethylamino)-2-methylphenyl]methyl]-n,n,3-trimethylaniline Chemical compound CC1=CC(N(C)C)=CC=C1C(C=1C(=CC(=CC=1)N(C)C)C)C1=CC=C(N(C)C)C=C1C LYCNQAIOLGIAFA-UHFFFAOYSA-N 0.000 description 2
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 2
- MJVAVZPDRWSRRC-UHFFFAOYSA-N Menadione Chemical compound C1=CC=C2C(=O)C(C)=CC(=O)C2=C1 MJVAVZPDRWSRRC-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Chemical compound CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229940107698 malachite green Drugs 0.000 description 2
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000003918 potentiometric titration Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 238000010526 radical polymerization reaction Methods 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 150000003918 triazines Chemical class 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- QUDQABVGMBRGEA-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octaethylanthracene-9,10-dione Chemical compound CCC1=C(CC)C(CC)=C2C(=O)C3=C(CC)C(CC)=C(CC)C(CC)=C3C(=O)C2=C1CC QUDQABVGMBRGEA-UHFFFAOYSA-N 0.000 description 1
- SDTXSEXYPROZSZ-UHFFFAOYSA-N 1,2-dibromo-2-methylpropane Chemical compound CC(C)(Br)CBr SDTXSEXYPROZSZ-UHFFFAOYSA-N 0.000 description 1
- PAAZPARNPHGIKF-UHFFFAOYSA-N 1,2-dibromoethane Chemical compound BrCCBr PAAZPARNPHGIKF-UHFFFAOYSA-N 0.000 description 1
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- YXZFFTJAHVMMLF-UHFFFAOYSA-N 1-bromo-3-methylbutane Chemical compound CC(C)CCBr YXZFFTJAHVMMLF-UHFFFAOYSA-N 0.000 description 1
- YZWKKMVJZFACSU-UHFFFAOYSA-N 1-bromopentane Chemical compound CCCCCBr YZWKKMVJZFACSU-UHFFFAOYSA-N 0.000 description 1
- YNSNJGRCQCDRDM-UHFFFAOYSA-N 1-chlorothioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl YNSNJGRCQCDRDM-UHFFFAOYSA-N 0.000 description 1
- DKTOWFDVEJQWPF-UHFFFAOYSA-N 1-ethylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2CC DKTOWFDVEJQWPF-UHFFFAOYSA-N 0.000 description 1
- FEWDXGMBVQULLN-UHFFFAOYSA-N 1-hydroxy-2-phenyl-1,5,6,7-tetrahydro-4H-benzimidazol-4-one Chemical compound ON1C=2CCCC(=O)C=2N=C1C1=CC=CC=C1 FEWDXGMBVQULLN-UHFFFAOYSA-N 0.000 description 1
- BTUGGGLMQBJCBN-UHFFFAOYSA-N 1-iodo-2-methylpropane Chemical compound CC(C)CI BTUGGGLMQBJCBN-UHFFFAOYSA-N 0.000 description 1
- BLXSFCHWMBESKV-UHFFFAOYSA-N 1-iodopentane Chemical compound CCCCCI BLXSFCHWMBESKV-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 1
- KGRVJHAUYBGFFP-UHFFFAOYSA-N 2,2'-Methylenebis(4-methyl-6-tert-butylphenol) Chemical compound CC(C)(C)C1=CC(C)=CC(CC=2C(=C(C=C(C)C=2)C(C)(C)C)O)=C1O KGRVJHAUYBGFFP-UHFFFAOYSA-N 0.000 description 1
- UPQQXPKAYZYUKO-UHFFFAOYSA-N 2,2,2-trichloroacetamide Chemical compound OC(=N)C(Cl)(Cl)Cl UPQQXPKAYZYUKO-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- KIJPZYXCIHZVGP-UHFFFAOYSA-N 2,3-dimethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(C)=C2 KIJPZYXCIHZVGP-UHFFFAOYSA-N 0.000 description 1
- LZWVPGJPVCYAOC-UHFFFAOYSA-N 2,3-diphenylanthracene-9,10-dione Chemical compound C=1C=CC=CC=1C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 LZWVPGJPVCYAOC-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 1
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- YQZHOBBQNFBTJE-UHFFFAOYSA-N 2-chloro-3-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(Cl)=C2 YQZHOBBQNFBTJE-UHFFFAOYSA-N 0.000 description 1
- FPKCTSIVDAWGFA-UHFFFAOYSA-N 2-chloroanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3C(=O)C2=C1 FPKCTSIVDAWGFA-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- NTZCFGZBDDCNHI-UHFFFAOYSA-N 2-phenylanthracene-9,10-dione Chemical compound C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 NTZCFGZBDDCNHI-UHFFFAOYSA-N 0.000 description 1
- GPNYZBKIGXGYNU-UHFFFAOYSA-N 2-tert-butyl-6-[(3-tert-butyl-5-ethyl-2-hydroxyphenyl)methyl]-4-ethylphenol Chemical compound CC(C)(C)C1=CC(CC)=CC(CC=2C(=C(C=C(CC)C=2)C(C)(C)C)O)=C1O GPNYZBKIGXGYNU-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical compound CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- KLSLBUSXWBJMEC-UHFFFAOYSA-N 4-Propylphenol Chemical compound CCCC1=CC=C(O)C=C1 KLSLBUSXWBJMEC-UHFFFAOYSA-N 0.000 description 1
- AXDJCCTWPBKUKL-UHFFFAOYSA-N 4-[(4-aminophenyl)-(4-imino-3-methylcyclohexa-2,5-dien-1-ylidene)methyl]aniline;hydron;chloride Chemical compound Cl.C1=CC(=N)C(C)=CC1=C(C=1C=CC(N)=CC=1)C1=CC=C(N)C=C1 AXDJCCTWPBKUKL-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- YVGGHNCTFXOJCH-UHFFFAOYSA-N DDT Chemical compound C1=CC(Cl)=CC=C1C(C(Cl)(Cl)Cl)C1=CC=C(Cl)C=C1 YVGGHNCTFXOJCH-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical group COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- WZKXBGJNNCGHIC-UHFFFAOYSA-N Leucomalachite green Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=CC=C1 WZKXBGJNNCGHIC-UHFFFAOYSA-N 0.000 description 1
- UBUCNCOMADRQHX-UHFFFAOYSA-N N-Nitrosodiphenylamine Chemical compound C=1C=CC=CC=1N(N=O)C1=CC=CC=C1 UBUCNCOMADRQHX-UHFFFAOYSA-N 0.000 description 1
- YNPNZTXNASCQKK-UHFFFAOYSA-N Phenanthrene Natural products C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- PQYJRMFWJJONBO-UHFFFAOYSA-N Tris(2,3-dibromopropyl) phosphate Chemical compound BrCC(Br)COP(=O)(OCC(Br)CBr)OCC(Br)CBr PQYJRMFWJJONBO-UHFFFAOYSA-N 0.000 description 1
- UUQJMSSFMULZHR-UHFFFAOYSA-N [4,5,5,6,6-pentaethoxy-4-[2-[1,5,5,6,6-pentaethoxy-4-(2-methylprop-2-enoyloxy)cyclohex-2-en-1-yl]propan-2-yl]cyclohex-2-en-1-yl] 2-methylprop-2-enoate Chemical compound C(C(=C)C)(=O)OC1C(C(C(C=C1)(C(C)(C)C1(C(C(C(C=C1)OC(C(=C)C)=O)(OCC)OCC)(OCC)OCC)OCC)OCC)(OCC)OCC)(OCC)OCC UUQJMSSFMULZHR-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001251 acridines Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- KSCQDDRPFHTIRL-UHFFFAOYSA-N auramine O Chemical compound [H+].[Cl-].C1=CC(N(C)C)=CC=C1C(=N)C1=CC=C(N(C)C)C=C1 KSCQDDRPFHTIRL-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- LHMRXAIRPKSGDE-UHFFFAOYSA-N benzo[a]anthracene-7,12-dione Chemical compound C1=CC2=CC=CC=C2C2=C1C(=O)C1=CC=CC=C1C2=O LHMRXAIRPKSGDE-UHFFFAOYSA-N 0.000 description 1
- FAJDWNKDRFAWLS-UHFFFAOYSA-N benzyl-[9-(diethylamino)benzo[a]phenoxazin-5-ylidene]azanium;chloride Chemical compound [Cl-].O1C2=CC(N(CC)CC)=CC=C2N=C(C2=CC=CC=C22)C1=CC2=[NH+]CC1=CC=CC=C1 FAJDWNKDRFAWLS-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- NNBFNNNWANBMTI-UHFFFAOYSA-M brilliant green Chemical compound OS([O-])(=O)=O.C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 NNBFNNNWANBMTI-UHFFFAOYSA-M 0.000 description 1
- OQROAIRCEOBYJA-UHFFFAOYSA-N bromodiphenylmethane Chemical compound C=1C=CC=CC=1C(Br)C1=CC=CC=C1 OQROAIRCEOBYJA-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 235000010354 butylated hydroxytoluene Nutrition 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical group 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- PMMYEEVYMWASQN-IMJSIDKUSA-N cis-4-Hydroxy-L-proline Chemical compound O[C@@H]1CN[C@H](C(O)=O)C1 PMMYEEVYMWASQN-IMJSIDKUSA-N 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- QKSIFUGZHOUETI-UHFFFAOYSA-N copper;azane Chemical compound N.N.N.N.[Cu+2] QKSIFUGZHOUETI-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- FJBFPHVGVWTDIP-UHFFFAOYSA-N dibromomethane Chemical compound BrCBr FJBFPHVGVWTDIP-UHFFFAOYSA-N 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 125000003754 ethoxycarbonyl group Chemical group C(=O)(OCC)* 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 235000012701 green S Nutrition 0.000 description 1
- 239000004120 green S Substances 0.000 description 1
- WDPIZEKLJKBSOZ-UHFFFAOYSA-M green s Chemical compound [Na+].C1=CC(N(C)C)=CC=C1C(C=1C2=CC=C(C=C2C=C(C=1O)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](C)C)C=C1 WDPIZEKLJKBSOZ-UHFFFAOYSA-M 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- VHHHONWQHHHLTI-UHFFFAOYSA-N hexachloroethane Chemical compound ClC(Cl)(Cl)C(Cl)(Cl)Cl VHHHONWQHHHLTI-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- DWCZIOOZPIDHAB-UHFFFAOYSA-L methyl green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)[N+](C)(C)C)=C1C=CC(=[N+](C)C)C=C1 DWCZIOOZPIDHAB-UHFFFAOYSA-L 0.000 description 1
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
- 229940012189 methyl orange Drugs 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 150000003021 phthalic acid derivatives Chemical class 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- CZMAXQOXGAWNDO-UHFFFAOYSA-N propane-1,1,2-triol Chemical compound CC(O)C(O)O CZMAXQOXGAWNDO-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- JEVGKYBUANQAKG-UHFFFAOYSA-N victoria blue R Chemical compound [Cl-].C12=CC=CC=C2C(=[NH+]CC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JEVGKYBUANQAKG-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Polymerisation Methods In General (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は光重合性組成物および光重合性積層体に関し、更に詳しくは印刷回路板作成に適したアルカリ現像可能な光重合性組成物および光重合性積層体に関する。
【0002】
【従来の技術】
従来、印刷回路作成用のレジストとして支持層と光重合性層からなる、いわゆるドライフィルムレジスト(以下DFRと略称)が用いられている。DFRは、一般に支持フィルム上に光重合性組成物を積層し、多くの場合、さらに該組成物上に保護用のフィルムを積層することにより調製される。ここで用いられる光重合性層としては、現像液として弱アルカリ水溶液を使用するアルカリ現像型が一般的である。
【0003】
DFRを用いてプリント回路板を作成するには、まず保護フィルムを剥離した後、ラミネーター等を用い銅張積層板等の永久回路作成用基板上にDFRを積層し、配線パターンマスクフィルム等を通し露光を行う。次に、必要に応じて支持フィルムを剥離し、現像液により未露光部分の光重合性組成物を溶解、もしくは分散除去し、基板上に硬化レジスト画像を形成させる。その後、形成されたレジスト画像をマスクとして基板の金属表面をエッチング、またはめっきによる処理を行い、次いでレジスト画像を現像液よりも強いアルカリ水溶液を用いて剥離して、プリント配線板等を形成する。特に最近は、工程の簡便さから貫通孔(スルーホール)を硬化膜で覆い、その後エッチングするいわゆるテンティング法が多用されている。ここで用いられるエッチング液としては、塩化第二銅、塩化第二鉄、銅アンモニア錯体溶液などが用いられる。
【0004】
しかしながら、従来のDFRは三層構造のロール状態で保存されるため、保存時に端面から光重合層がはみだす、いわゆるエッジフューズという現象が起こることがあり、取り扱い上好ましくない状況になることがある。また、従来のDFRにおける未露光部の光重合性層が硬いと、それを基板上にラミネートした時に密着性が悪く、凹凸の有る基板表面においては、光重合層が凹凸を埋めることができず空間を生じることがある。このような空間が生じた場合、エッチング液が基板に浸透するため、断線、欠け等の不良が生じる。
【0005】
【発明が解決しようとする課題】
上述したようなエッジフューズを改良するためには、光重合性層における結合剤の配合割合を相対的に増加させれば良いが、そうすると光重合性層の基板への追従性が低下し、硬化膜の柔軟性が低下する。一方、光重合性層の基板への追従性を良くするには、光重合性層における結合剤の配合割合を相対的に減少させれば良いが、そうするとエッジフューズの悪化、剥離時間が増加するという問題点が生じる。従ってこれら特性を同時に満足する光重合性組成物が提供されることが望まれていた。
【0006】
【課題を解決するための手段】
本発明者らは、上記の課題を解決すべく鋭意検討を重ねた結果、下記(a)の線状重合体を含有する光重合性組成物をDFRとして用いた場合に、硬化レジストの柔軟性が良好となり、エッジフューズ性と光重合性層の基板への追従性が良好、常温での保存が6ヶ月以上可能になる等の特性が得られることを見いだし、本発明を完成するに至った。
【0007】
すなわち、本発明は、
1.(a)カルボキシル基含有量が酸当量で100〜600であり、かつ、重量平均分子量が15万〜30万であり、単量体成分としてアクリル酸ブチルを含有する線状重合体A、及びカルボキシル基含有量が酸当量で100〜600であり、かつ、重量平均分子量が1万〜3万の線状重合体Bが混合されてなり、Bに対するAの重量比率が90/10〜50/50であるバインダー用樹脂、20〜90重量%、(b)光重合可能な不飽和化合物、5〜60重量%、(c)光重合開始剤、0.01〜30重量%を含有することを特徴とする光重合性組成物。
【0008】
2.線状重合体Bは、単量体成分としてスチレンを含有することを特徴とする上記1.記載の光重合性組成物。
3.光重合可能な不飽和化合物(b)が下記式(I)または(II)で示される化合物であることを特徴とする上記1.又は2.記載の光重合性組成物。
【0009】
【化3】
(ここでR 1 は炭素数4〜12のジイソシアナート残基、R 2 、R 3 は水素またはメチル基、n 1 、n 2 は1〜15の整数を表す。)
【0010】
【化4】
(ここでn3、n 4 、n 5 は3〜20の整数、R 4 、R 5 は水素またはメチル基を表す)
【0011】
4.支持体上に上記1.〜3.の何れか一項に記載の光重合性組成物からなる層を設けた光重合性樹脂積層体。
【0012】
以下、本発明を詳細に説明する。
【0013】
本発明に用いるバインダー用樹脂(a)を構成する線状重合体Aに含まれるカルボキシル基の量は酸当量で100〜600である必要があり、好ましくは、300〜400が好ましい。線状共重合体A中のカルボキシル基は、DFRにアルカリ水溶液に対する現像性や剥離性を与えるために必要である。酸当量が100未満では、塗工溶媒または他の組成物、例えばモノマーとの相溶性が低下し、600を超えると現像性や剥離性が低下する。
【0014】
ここで酸当量とはその中に1当量のカルボキシル基を有するポリマーの重量を言う。なお、酸当量の測定は電位差滴定法により行われる。また分子量はゲルパーミエーションクロマトグラフィー(GPC)により重量平均分子量(ポリスチレン換算)として求められる。また、線状重合体Aの分子量は15〜30万である必要があり、より好ましくは18〜25万である。線状重合体Aの分子量が30万を超えると現像性が低下し、15万未満では光重合性層の基板への追従性が悪化する。
【0015】
本発明に用いられる線状共重合体Aは、下記の2種類の単量体の中より各々一種またはそれ以上の単量体を共重合させることにより得られる。第一の単量体は、分子中に重合性不飽和基を一個有するカルボン酸または酸無水物である。そのような単量体としては、例えば、(メタ)アクリル酸、フマル酸、ケイ皮酸、クロトン酸、イタコン酸、マレイン酸無水物、マレイン酸半エステル等が挙げられる。第二の単量体は、非酸性で、分子中に重合性不飽和基を一個有し、光重合性層の現像性、エッチング及びめっき工程での耐性、硬化膜の可とう性等の種々の特性を保持するように選ばれる。このような単量体としては、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、2ーエチルヘキシル(メタ)アクリレート等のアルキル(メタ)アクリレート類が挙げられる。また、フェニル基を有するビニル化合物(例えばスチレン)も第二の単量体として用いることができる。
【0016】
本発明で用いる線状共重合体Aは単独で用いても追従性、密着性は良好であるが、線状共重合体Bと併用することにより、より迅速な現像処理が可能となる。また、併用する場合のA/B(重量比)は90/10〜50/50である。併用する場合の線状重合体Bの重量比率が10%以下では現像時間短縮の効果は低下し、50%以上ではエッジフューズ性が悪化する。
【0017】
本発明に用いる線状共重合体Bに含まれるカルボキシル基の量は酸当量で100〜600である必要があり、200〜400が好ましい。線状共重合体B中のカルボキシル基はDFRにアルカリ水溶液に対する現像性や剥離性を与えるために必要である。酸当量が100未満では、塗工溶媒または他の組成物、例えばモノマーとの相溶性が低下し、600を超えると現像性や剥離性が低下する。
【0018】
ここで酸当量とはその中に1当量のカルボキシル基を有するポリマーの重量を言う。なお、酸当量の測定は電位差滴定法により行われる。また分子量はゲルパーミエーションクロマトグラフィー(GPC)により重量平均分子量(ポリスチレン換算)として求められる。また、線状共重合体Bの分子量は1万〜3万である必要がある。線状共重合体Bの分子量が3万を超えると現像性が低下し、1万未満ではエッジフューズ性が著しく悪化する。
【0019】
線状共重合体Bは線状共重合体Aの場合と同様に、前記の2種類の単量体から選ばれた単量体を共重合することにより得られる。本発明の光重合性組成物に含有されるバインダー用樹脂(a)の量は20〜90重量%の範囲であり、好ましくは30〜70重量%である。バインダー用樹脂(a)の量が20重量%未満または90重量%を超えると、露光によって形成される硬化画像がレジストとしての特性(例えば、テンティング、エッチング、各種めっき工程において十分な耐性)を十分に有しない。
【0020】
本発明の光重合性組成物を構成する光重合可能な不飽和化合物(b)としては、少なく
とも二つの末端エチレン基を持つ光重合性不飽和化合物が用いられることが好ましい(以下、光重合性不飽和化合物をモノマーともいう)。この例としては、1、6ーヘキサンジオールジ(メタ)アクリレート、1、4ーシクロヘキサンジオールジ(メタ)アクリレート、またポリプロピレングリコールジ(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、ポリオキシエチレンポリオキシプロピレングリコールジ(メタ)アクリレート等のポリオキシアルキレングリコールジ(メタ)アクリレート、2ージ(pーヒドロキシフェニル)プロパンジ(メタ)アクリレート、グリセロールトリ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ポリオキシプロピルトリメチロールプロパントリ(メタ)アクリレート、ポリオキシエチルトリメチロールプロパントリアクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、トリメチロールプロパントリグリシジルエーテルトリ(メタ)アクリレート、ビスフェノールAジグリシジルエーテルジ(メタ)アクリレート、2、2ービス(4ーメタクリロキシペンタエトキシフェニル)プロパン、及びウレタン基を含有する多官能(メタ)アクリレート等が挙げられる。好ましい例としては、前記の一般式(I)または(II)で表されるものが挙げられる。これらは単独で用いてもよいし、その他の多官能、または単官能モノマーと併用しても良い。また、一般式(I)と(II)のモノマーを併用する系が望ましく、これらのモノマーを使用する事により、追従性が良好で柔軟、かつ強靱なテンティング膜が得られる。
【0021】
一般式(I)で表される化合物としては、例えばヘキサメチレンジイソシアネート、トリレンジイソシアネートまたは、2、2、4、ートリメチルヘキサメチレンジイソシアネート等のジイソシアネート化合物と、一分子中にヒドロキシル基と(メタ)アクリル基を有する化合物(例えば、2ーヒドロキシプロピルアクリレート、オリゴプロピレングリコールモノメタクリレート等)とのウレタン化合物等がある。これらは公知の方法により合成できる。
【0022】
一般式(II)で表される化合物において、n3、n4、n5が3よりも小さいと当該化合物の沸点が低下して、レジストの臭気が強くなり、使用が著しく困難になる。また、n3、n4、n5が20を越えると単位重量あたりの光活性部位の濃度が低くなるため、実用的感度が得られない。一般式(II)で表される化合物は、プロピレンオキサイドとエチレンオキサイドを反応させ、得られた生成物を適当な酸触媒の存在下でアクリル酸またはメタクリル酸によりエステル化する方法により合成することができる。
【0023】
これらのモノマーは、一種類で用いてもよいし、二種類以上を併用してもよい。モノマーの使用量は5〜60重量%の範囲から選ばれ、5重量%未満では、感度、膜強度の点で充分ではなく、60重量%を越えるとDFRに用いた場合に保存時の光重合性層のはみ出しが著しくなるため好ましくない。本発明の光重合性組成物に用いることのできる光重合開始剤(c)としては、各種の活性光線、例えば紫外線などにより活性化され重合を開始する公知の開始剤が挙げられる。
【0024】
このような光重合開始剤としては、例えば、2ーエチルアントラキノン、オクタエチルアントラキノン、1、2ーベンズアントラキノン、2、3ーベンズアントラキノン、2ーフェニルアントラキノン、2、3ージフェニルアントラキノン、1ークロロアントラキノン、2ークロロアントラキノン、2ーメチルアントラキノン、1、4ーナフトキノン、9、10ーフェナントラキノン、2ーメチル1、4ーナフトキノン、2、3ージメチルアントラキノン、3ークロロー2ーメチルアントラキノンなどのキノン類、ベンゾフェノン、ミヒラーズケトン[4、4’ービス(ジメチルアミノ)ベンゾフェノン]、4、4’ービス(ジエチルアミノ)ベンゾフェノンなどの芳香族ケトン類、ベンゾイン、ベンゾインエチルエーテル、ベンゾインフェニルエーテル、メチルベンゾイン、エチルベンゾインなどのベンゾインエーテル類、ベンジルジメチルケタール、ベンジルジエチルケタール、2ー(οークロロフェニル)ー4、5ージフェニルイミダゾリル二量体等のビイミダゾール化合物、チオキサントン類とアルキルアミノ安息香酸の組み合わせ、例えばエチルチオキサントンとジメチルアミノ安息香酸エチル、2ークロルチオキサントンとジメチルアミノ安息香酸エチル、イソプロピルチオキサントンとジメチルアミノ安息香酸エチルとの組み合わせ、また、2ー(οークロロフェニル)ー4、5ージフェニルイミダゾリル二量体とミヒラーズケトンとの組み合わせ、9ーフェニルアクリジン等のアクリジン類、1ーフェニルー1、2ープロパンジオンー2ーοーベンゾイルオキシム、1ーフェニルー1、2ープロパンジオンー2ー(οーエトキシカルボニル)オキシム等のオキシムエステル類等がある。これらの開始剤の好ましい例としては、ジエチルチオキサントン、クロルチオキサントン等のチオキサントン類、ジメチルアミノ安息香酸エチル等のジアルキルアミノ安息香酸エステル類、ベンゾフェノン、4、4’ービス(ジメチルアミノ)ベンゾフェノン、4、4’ービス(ジエチルアミノ)ベンゾフェノン、2ー(οークロロフェニル)ー4、5ージフェニルイミダゾリル二量体、及びこれらの組み合わせを挙げることができる。
【0025】
本発明の光重合性組成物に含有される光重合開始剤(c)の量は、0.01重量〜30重量%であり、好ましくは、0.05重量〜10重量%である。光重合開始剤の量が30重量%を超えると光重合性組成物の活性吸収率が高くなり、光重合性樹脂積層体として用いた場合、光重合性層の底の部分の重合による硬化が不十分になる。また、光重合開始剤の量が0.01重量%未満では十分な感度がでなくなる。
【0026】
本発明の光重合性組成物の熱安定性、保存安定性を向上させるために、光重合性組成物にラジカル重合禁止剤を含有させることは好ましいことである。このようなラジカル重合禁止剤としては、例えば、p−メトキシフェノール、ハイドロキノン、ピロガロール、ナフチルアミン、tertーブチルカテコール、塩化第一銅、2、6ージ−tertーブチルーpークレゾール、2、2’ーメチレンビス(4ーエチルー6ーtertーブチルフェノール)、2、2’ーメチレンビス(4ーメチルー6ーtertーブチルフェノール)、ニトロソフェニルヒドロキシアミンアルミニウム塩、ジフェニルニトロソアミン等が挙げられる。
【0027】
本発明の光重合性組成物は、染料、顔料等の着色物質を含有させることもできる。このような着色物質としては、例えば、フクシン、フタロシアニングリーン、オーラミン塩基、カルコキシドグリーンS,パラマジエンタ、クリスタルバイオレット、メチルオレンジ、ナイルブルー2B、ビクトリアブルー、マラカイトグリーン、ベイシックブルー20、ダイヤモンドグリーン等が挙げられる。
【0028】
また光照射により発色する発色系染料を本発明の光重合性組成物に含有させることもできる。発色系染料としては、ロイコ染料またはフルオラン染料と、ハロゲン化合物の組み合わせが挙げられる。ロイコ染料としては、例えば、トリス(4ージメチルアミノー2ーメチルフェニル)メタン[ロイコクリスタルバイオレット]、トリス(4ージメチルアミノー2ーメチルフェニル)メタン[ロイコマラカイトグリーン]等が挙げられる。一方ハロゲン化合物としては臭化アミル、臭化イソアミル、臭化イソブチレン、臭化エチレン、臭化ジフェニルメチル、臭化ベンザル、臭化メチレン、トリブロモメチルフェニルスルフォン、4臭化炭素、トリス(2、3ージブロモプロピル)ホスフェート、トリクロロアセトアミド、ヨウ化アミル、ヨウ化イソブチル、1、1、1ートリクロロー2、2ービス(p−クロロフェニル)エタン、ヘキサクロロエタン、トリアジン化合物等が挙げられる。トリアジン化合物としては、2、4、6ートリス(トリクロロメチル)ーs−トリアジン、2ー(4ーメトキシフェニル)ー4、6ービス(トリクロロメチル)ーs−トリアジンが挙げられる。
【0029】
また、このような発色系染料の中でもトリブロモメチルフェニルスルフォンとロイコ染料との組み合わせや、トリアジン化合物とロイコ染料との組み合わせが有用である。さらに、本発明の光重合性樹脂組成物に熱発色防止剤として、グリシジルエーテル化合物を少量添加しても良い。このような化合物の具体例としては、ポリプロピレングリコールジグリシジルエーテル、グリセリンジグリシジルエーテル、水添ビスフェノールAジグリシジルエーテル、ビスフェノールAーPO2モル付加ジグリシジルエーテル等が挙げられる。
【0030】
また、本発明の光重合性組成物に必要に応じて可塑剤等の添加剤を含有させることもできる。そのような添加剤としては、例えば、ジエチルフタレート等のフタル酸エステル類が挙げられる。本発明の光重合性樹脂積層体を作成する場合には、上記光重合性組成物を含有した光重合性層に、該光重合性層を支持する支持層を積層する。支持層の材料としては、活性光を透過する透明なものが望ましい。活性光を透過する支持層の材料としては、例えば、ポリエチレンテレフタレートフィルム、ポリビニルアルコールフィルム、ポリ塩化ビニルフィルム、塩化ビニル共重合体フィルム、ポリ塩化ビニリデンフィルム、塩化ビニリデン共重合体フィルム、ポリメタクリル酸メチル共重合体フィルム、ポリスチレンフィルム、ポリアクリロニトリルフィルム、スチレン共重合体フィルム、ポリアミドフィルム、セルロース誘導体フィルム、等が挙げられる。これらのフィルムが必要に応じ延伸されたものも使用可能である。画像形成性、経済性の面でフィルムの厚みは薄い方が有利であるが、強度を維持する必要から、フィルムの厚みは10〜30μmのものが一般的である。
【0031】
支持層とは反対側の光重合性層の表面に、必要に応じて保護層を積層する。支持層よりも保護層の方が光重合性層との密着力が十分小さいことがこの保護層としての重要な特性であり、これにより、保護層が容易に剥離できる。このような保護層としては、例えば、ポリエチレンフィルム、ポリプロピレンフィルム等が挙げられる。
【0032】
光重合性層の厚みは用途において異なるが、印刷回路板作製用には5〜100μm、好ましくは、5〜90μmであり、光重合性層が薄いほど解像力は向上する。また、光重合性層が厚いほど膜強度が向上する。この光重合性樹脂積層体を用いた印刷回路板の作成工程は公知の技術により行われるが、以下にその工程を簡単に述べる。
【0033】
保護層がある場合は、まず保護層を剥離した後、光重合性層を印刷回路板用基板の金属表面に加熱圧着し積層する。この時の加熱温度は一般的に40〜160℃である。次に、必要ならば支持層を剥離しマスクフィルムを通して活性光により画像露光する。次に、光重合性層上に支持フィルムがある場合には必要に応じてこれを除き、続いてアルカリ水溶液を用いて光重合性層の未露光部を現像除去する。アルカリ水溶液としては、炭酸ナトリウム、炭酸カリウム、水酸化ナトリウム、水酸化カリウム等の水溶液を用いる。これらのアルカリ水溶液は光重合性層の特性に合わせて選択されるが、一般的に0.5〜3%の炭酸ナトリウム水溶液が用いられる。次に、現像により露出した金属面に既知のエッチング法、またはめっき法のいずれかの方法を用いて金属の画像パターンを形成する。その後、一般的に、現像で用いたアルカリ水溶液よりも更に強いアルカリ性の水溶液により硬化レジスト画像を剥離する。剥離用のアルカリ水溶液についても特に制限はないが、1%〜5%の水酸化ナトリウム、水酸化カリウムの水溶液が一般的に用いられる。また、現像液や剥離液に少量の水溶性有機溶媒を加えることも可能である。
【0034】
【発明の実施の形態】
【0035】
【実施例】
(実施例1〜6、比較例1〜3)
表1に示された組成(実施例1〜6、比較例1〜3の欄)の化合物を均一に溶解した。次に、この混合溶液を厚さ20μmのポリエチレンテレフタレートフィルムにバーコーターを用いて均一に塗布し、95℃の乾燥機中で4分間乾燥した。この時の光重合性層の厚さは40μmであった。光重合性層のポリエチレンテレフタレートフィルムを積層していない表面上に23μmのポリエチレンフィルムを張り合わせ積層フィルムを得た。一方、35μm圧延銅箔を積層した銅張積層板表面を湿式バフロール研磨(スリーエム社製、商品名スコッチブライト#600、2連)し、この積層フィルムのポリエチレンフィルムを剥しながら光重合性層をホットロールラミネーターにより105℃でラミネートした。
【0036】
得られた積層体にマスクフィルムを通して、超高圧水銀ランプ(オーク製作所HMW−201KB)により60mJ/cm2で光重合性層を露光した。続いてこの積層体からポリエチレンテレフタレート支持フィルムを剥離した後、30℃の1%炭酸ナトリウム水溶液を約60秒間スプレーし、未露光部分を溶解除去したところ良好な硬化画像を得た。
【0037】
また、本発明の光重合性組成物を用いた積層体について以下の評価を行った。
(1)エッジフューズ試験23℃、50%でロール状で保管し端面からの光重合層のしみ有無により以下のランク付けにより評価した。
○;6ヶ月以上端面からのしみ出し無しで保存可能。
【0038】
△;1ヶ月以上6ヶ月未満端面からのしみ出し無しで保存可能。
×;1ヶ月未満端面からのしみ出し無しで保存可能。
(2)最小現像時間の測定35μm圧延銅箔を積層した銅張り積層板にDFRのポリエチレンフィルムを剥がしながら光重合性層をホットロールラミネーターにより、105℃でラミネートした。続いて、この積層体のポリエチレンテレフタレート支持フィルムを剥離した後、30℃の1%炭酸ナトリウム水溶液をスプレーし、未露光の光重合性層が溶解する最小現像時間を測定し、その時間を最小現像時間とした。実際の現像はこの最小現像時間の1.5倍の時間で行った。
(3)追従性評価試験35μm圧延銅箔を積層した銅張り積層板に、あらかじめ市販のDFRを使って、ラミネートー露光ー現像ーエッチングーレジスト剥離を行い、ライン幅が100μmの線状の溝を作った。溝の深さは約10μmであった。
【0039】
こうして作製した溝付き基板を用い、上記と同様の方法で上記積層体をラミネートした。この積層体にマスクフィルムを通して、基板の溝に垂直になるようなラインパターン(ライン幅;125μm)を使用して、露光、現像により画像パターンを得た。さらに、50℃の塩化第二銅溶液を70秒間スプレーし、レジストの無い部分の銅をエッチングした。最後に50℃の3%水酸化ナトリウム水溶液を約80秒間スプレーして硬化レジストを剥離した。こうして作られた銅ライン上で、あらかじめ溝のあった部分が断線していない箇所を数え、その数をxとした。反対にエッチングされて断線している箇所を数え、その数をyとし、次の計算式により断線率(%)を計算し、以下の方法によりランク付けした。
【0040】
断線率(%)=100y/(x+y)
○;断線率が30%未満
△;断線率が30%以上50%未満
×;断線率が50%以上<記号説明>
P−1:メタクリル酸メチル70重量%、メタクリル酸23重量%、アクリル酸ブチル7重量%の三元共重合体のメチルエチルケトン溶液(固形分濃度32%、重量平均分子量8.5万)
P−2:メタクリル酸メチル70重量%、メタクリル酸23重量%、アクリル酸ブチル7重量%の三元共重合体のメチルエチルケトン溶液(固形分濃度24%、重量平均分子量20万)
P−3:スチレン55重量%、アクリル酸35重量%、α−メチルスチレン10重量%の三元共重合体(重量平均分子量1.5万)
M−1:トリメチロールプロパントリアクリレート
M−2:ヘキサメチレンジイソシアネートとオリゴプロピレングリコールモノメタクリレート(日本油脂(株)製ブレンマーPP1000)との反応物
M−3:平均8モルのプロピレンオキサイドを付加したポリプロピレングリコールにエチレンオキサイドをさらに両端にそれぞれ平均3モル付加したグリコールのジメタクリレート
M−4:平均10モルのプロピレンオキサイドを付加したポリプロピレングリコールにエチレンオキサイドをさらに両端にそれぞれ平均4モル付加したグリコールのジメタクリレート
M−5:テトラエチレングリコールジメタクリレート
M−6:テトラエチレングリコールジアクリレート
A−1:ベンゾフェノン
A−2:4、4’ービス(ジメチルアミノ)ベンゾフェノン
A−3:2ー(οークロロフェニル)ー4、5ージフェニルイミダゾリル二量体
B−1:マラカイトグリーン
B−2:ロイコクリスタルバイオレット
B−3:トリブロモメチルフェニルスルフォン
【0041】
【表1】
【0042】
【発明の効果】
本発明の光重合性樹脂組成物を用いたDFRは、特に保存時のエッジフューズ性が小さく、基板へのラミネート時における追従性が良好で、アルカリ現像型回路板作製用DFRとして有用である。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a photopolymerizable composition and a photopolymerizable laminate, and more particularly to an alkali-developable photopolymerizable composition and a photopolymerizable laminate suitable for printed circuit board production.
[0002]
[Prior art]
Conventionally, a so-called dry film resist (hereinafter abbreviated as DFR) composed of a support layer and a photopolymerizable layer has been used as a resist for forming a printed circuit. The DFR is generally prepared by laminating a photopolymerizable composition on a support film, and in many cases, further laminating a protective film on the composition. As the photopolymerizable layer used here, an alkali development type using a weak alkaline aqueous solution as a developer is common.
[0003]
To create a printed circuit board using DFR, first peel off the protective film, then use a laminator or the like to laminate DFR on a permanent circuit creation board such as a copper-clad laminate, and pass through a wiring pattern mask film or the like. Perform exposure. Next, if necessary, the support film is peeled off, and the photopolymerizable composition in the unexposed part is dissolved or dispersed and removed with a developer to form a cured resist image on the substrate. Thereafter, the metal surface of the substrate is etched or plated using the formed resist image as a mask, and then the resist image is peeled off using an alkaline aqueous solution stronger than the developer to form a printed wiring board or the like. Particularly recently, a so-called tenting method in which a through-hole (through-hole) is covered with a cured film and then etched is often used because of the simplicity of the process. As the etching solution used here, cupric chloride, ferric chloride, a copper ammonia complex solution, or the like is used.
[0004]
However, since a conventional DFR is stored in a three-layer roll state, a so-called edge fuse phenomenon may occur in which the photopolymerization layer protrudes from the end face during storage, which may be undesirable in handling. Moreover, if the photopolymerizable layer in the unexposed area in the conventional DFR is hard, the adhesion is poor when it is laminated on the substrate, and the photopolymerizable layer cannot fill the unevenness on the substrate surface with the unevenness. May create space. When such a space is generated, the etching solution penetrates into the substrate, so that defects such as disconnection and chipping occur.
[0005]
[Problems to be solved by the invention]
In order to improve the edge fuse as described above, it is only necessary to relatively increase the blending ratio of the binder in the photopolymerizable layer, but the followability of the photopolymerizable layer to the substrate is reduced, and curing is performed. The flexibility of the membrane is reduced. On the other hand, in order to improve the followability of the photopolymerizable layer to the substrate, the blending ratio of the binder in the photopolymerizable layer may be relatively decreased. However, this deteriorates the edge fuse and increases the peeling time. The problem arises. Accordingly, it has been desired to provide a photopolymerizable composition that simultaneously satisfies these characteristics.
[0006]
[Means for Solving the Problems]
As a result of intensive studies to solve the above problems, the present inventors have found that the flexibility of the cured resist is obtained when the photopolymerizable composition containing the linear polymer (a) below is used as the DFR. It has been found that characteristics such as good edge fuse property and followability to the substrate of the photopolymerizable layer and that storage at room temperature is possible for 6 months or more are obtained, and the present invention has been completed. .
[0007]
That is, the present invention
1. (A) A linear polymer A having a carboxyl group content of 100 to 600 in terms of acid equivalent, a weight average molecular weight of 150,000 to 300,000 and containing butyl acrylate as a monomer component, and carboxyl A linear polymer B having a group content of 100 to 600 in terms of acid equivalent and a weight average molecular weight of 10,000 to 30,000 is mixed, and the weight ratio of A to B is 90/10 to 50/50. A binder resin, 20 to 90% by weight, (b) a photopolymerizable unsaturated compound, 5 to 60% by weight, (c) a photopolymerization initiator, and 0.01 to 30% by weight. A photopolymerizable composition.
[0008]
2. The linear polymer B contains styrene as a monomer component, as described in 1 above. The photopolymerizable composition as described.
3. 1. The photopolymerizable unsaturated compound (b) is a compound represented by the following formula (I) or (II): Or 2. The photopolymerizable composition as described.
[0009]
[Chemical Formula 3]
(Where R 1 Is a diisocyanate residue having 4 to 12 carbon atoms, R 2 , R Three Is hydrogen or methyl group, n 1 , N 2 Represents an integer of 1 to 15. )
[0010]
[Formula 4]
(Where n3, n Four , N Five Is an integer from 3 to 20, R Four , R Five Represents hydrogen or a methyl group)
[0011]
4). 1. On the support. ~ 3. The photopolymerizable resin laminated body which provided the layer which consists of a photopolymerizable composition as described in any one of these.
[0012]
Hereinafter, the present invention will be described in detail.
[0013]
The amount of the carboxyl group contained in the linear polymer A constituting the binder resin (a) used in the present invention needs to be 100 to 600 in terms of acid equivalent, and preferably 300 to 400. The carboxyl group in the linear copolymer A is necessary to give the DFR developability and releasability to an alkaline aqueous solution. When the acid equivalent is less than 100, the compatibility with a coating solvent or other composition such as a monomer is lowered, and when it exceeds 600, developability and peelability are lowered.
[0014]
Here, the acid equivalent means the weight of the polymer having 1 equivalent of a carboxyl group therein. The acid equivalent is measured by potentiometric titration. Moreover, molecular weight is calculated | required as a weight average molecular weight (polystyrene conversion) by gel permeation chromatography (GPC). Moreover, the molecular weight of the linear polymer A needs to be 150,000 to 300,000, more preferably 180 to 250,000. When the molecular weight of the linear polymer A exceeds 300,000, the developability decreases, and when it is less than 150,000, the followability of the photopolymerizable layer to the substrate deteriorates.
[0015]
The linear copolymer A used in the present invention can be obtained by copolymerizing one or more monomers from the following two types of monomers. The first monomer is a carboxylic acid or acid anhydride having one polymerizable unsaturated group in the molecule. Examples of such a monomer include (meth) acrylic acid, fumaric acid, cinnamic acid, crotonic acid, itaconic acid, maleic anhydride, maleic acid half ester, and the like. The second monomer is non-acidic, has one polymerizable unsaturated group in the molecule, has various properties such as developability of the photopolymerizable layer, resistance to etching and plating, and flexibility of the cured film. Chosen to retain the characteristics of Examples of such monomers include alkyl (meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, and 2-ethylhexyl (meth) acrylate. A vinyl compound having a phenyl group (for example, styrene) can also be used as the second monomer.
[0016]
The linear copolymer A used in the present invention has good followability and adhesion even when used alone, but when used in combination with the linear copolymer B, a more rapid development process becomes possible. Moreover, A / B (weight ratio) in the case of using together is 90 / 10-50 / 50. When the weight ratio of the linear polymer B when used in combination is 10% or less, the effect of shortening the development time is lowered, and when it is 50% or more, the edge fuse property is deteriorated.
[0017]
The amount of the carboxyl group contained in the linear copolymer B used in the present invention needs to be 100 to 600 in terms of acid equivalent, and preferably 200 to 400. The carboxyl group in the linear copolymer B is necessary to give the DFR developability and releasability to an alkaline aqueous solution. When the acid equivalent is less than 100, the compatibility with a coating solvent or other composition such as a monomer is lowered, and when it exceeds 600, developability and peelability are lowered.
[0018]
Here, the acid equivalent means the weight of the polymer having 1 equivalent of a carboxyl group therein. The acid equivalent is measured by potentiometric titration. Moreover, molecular weight is calculated | required as a weight average molecular weight (polystyrene conversion) by gel permeation chromatography (GPC). Moreover, the molecular weight of the linear copolymer B needs to be 10,000-30,000. When the molecular weight of the linear copolymer B exceeds 30,000, the developability is deteriorated, and when it is less than 10,000, the edge fuse property is remarkably deteriorated.
[0019]
As in the case of the linear copolymer A, the linear copolymer B is obtained by copolymerizing a monomer selected from the two types of monomers. The amount of the binder resin (a) contained in the photopolymerizable composition of the present invention is in the range of 20 to 90% by weight, preferably 30 to 70% by weight. When the amount of the binder resin (a) is less than 20% by weight or more than 90% by weight, the cured image formed by exposure has characteristics as a resist (for example, sufficient resistance in tenting, etching, and various plating processes). Not enough.
[0020]
As the photopolymerizable unsaturated compound (b) constituting the photopolymerizable composition of the present invention, there are few
It is preferable to use a photopolymerizable unsaturated compound having two terminal ethylene groups (hereinafter, the photopolymerizable unsaturated compound is also referred to as a monomer). Examples of this include 1,6-hexanediol di (meth) acrylate, 1,4-cyclohexanediol di (meth) acrylate, polypropylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, polyoxyethylene poly Polyoxyalkylene glycol di (meth) acrylate such as oxypropylene glycol di (meth) acrylate, 2-di (p-hydroxyphenyl) propane di (meth) acrylate, glycerol tri (meth) acrylate, trimethylolpropane tri (meth) acrylate , Polyoxypropyltrimethylolpropane tri (meth) acrylate, polyoxyethyltrimethylolpropane triacrylate, dipentaerythritol penta (meth) acrylate, Limethylolpropane triglycidyl ether tri (meth) acrylate, bisphenol A diglycidyl ether di (meth) acrylate, 2,2-bis (4-methacryloxypentaethoxyphenyl) propane, and polyfunctional (meth) acrylate containing urethane group Etc. Preferable examples include those represented by the above general formula (I) or (II). These may be used alone or in combination with other polyfunctional or monofunctional monomers. Further, a system in which the monomers of the general formulas (I) and (II) are used in combination is desirable. By using these monomers, a tenting film having good followability, flexibility, and toughness can be obtained.
[0021]
Examples of the compound represented by the general formula (I) include a diisocyanate compound such as hexamethylene diisocyanate, tolylene diisocyanate or 2,2,4, -trimethylhexamethylene diisocyanate, a hydroxyl group in one molecule, and (meth) Examples include urethane compounds with compounds having an acrylic group (for example, 2-hydroxypropyl acrylate, oligopropylene glycol monomethacrylate, etc.). These can be synthesized by known methods.
[0022]
In the compound represented by the general formula (II), if n3, n4, and n5 are smaller than 3, the boiling point of the compound is lowered, the odor of the resist is increased, and the use becomes extremely difficult. On the other hand, when n3, n4, and n5 exceed 20, the concentration of the photoactive site per unit weight becomes low, so that practical sensitivity cannot be obtained. The compound represented by the general formula (II) can be synthesized by a method in which propylene oxide and ethylene oxide are reacted and the obtained product is esterified with acrylic acid or methacrylic acid in the presence of an appropriate acid catalyst. it can.
[0023]
These monomers may be used alone or in combination of two or more. The amount of the monomer used is selected from the range of 5 to 60% by weight, and if it is less than 5% by weight, the sensitivity and the film strength are not sufficient, and if it exceeds 60% by weight, photopolymerization during storage when used for DFR. This is not preferable because the protrusion of the conductive layer becomes remarkable. Examples of the photopolymerization initiator (c) that can be used in the photopolymerizable composition of the present invention include known initiators that are activated by various actinic rays such as ultraviolet rays to start polymerization.
[0024]
Examples of such a photopolymerization initiator include 2-ethylanthraquinone, octaethylanthraquinone, 1,2-benzanthraquinone, 2,3-benzanthraquinone, 2-phenylanthraquinone, 2,3-diphenylanthraquinone, and 1-chloro. Quinones such as anthraquinone, 2-chloroanthraquinone, 2-methylanthraquinone, 1,4-naphthoquinone, 9,10-phenanthraquinone, 2-methyl-1,4-naphthoquinone, 2,3-dimethylanthraquinone, 3-chloro-2-methylanthraquinone , Benzophenone, Michler's ketone [4,4'-bis (dimethylamino) benzophenone], aromatic ketones such as 4,4'-bis (diethylamino) benzophenone, benzoin, benzoin ethyl ether, benzoin phen Benzoin ethers such as ether, methyl benzoin, ethyl benzoin, benzyldimethyl ketal, benzyl diethyl ketal, biimidazole compounds such as 2- (ο-chlorophenyl) -4,5-diphenylimidazolyl dimer, thioxanthones and alkylaminobenzoates Combinations of acids, such as ethylthioxanthone and ethyl dimethylaminobenzoate, 2-chlorothioxanthone and ethyl dimethylaminobenzoate, isopropylthioxanthone and ethyl dimethylaminobenzoate, and 2- (ο-chlorophenyl) -4,5 -A combination of diphenylimidazolyl dimer and Michler's ketone, acridines such as 9-phenylacridine, 1-phenyl-1,2-propanedione-2-ο-benzoyloxime, -Phenyl-there etc. 1,2-propane dione-2 over (o over ethoxycarbonyl) oxime esters such as oxime. Preferable examples of these initiators include thioxanthones such as diethylthioxanthone and chlorothioxanthone, dialkylaminobenzoates such as ethyl dimethylaminobenzoate, benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4, 4 Examples include '-bis (diethylamino) benzophenone, 2- (ο-chlorophenyl) -4,5-diphenylimidazolyl dimer, and combinations thereof.
[0025]
The amount of the photopolymerization initiator (c) contained in the photopolymerizable composition of the present invention is 0.01 to 30% by weight, preferably 0.05 to 10% by weight. When the amount of the photopolymerization initiator exceeds 30% by weight, the active absorptivity of the photopolymerizable composition is increased, and when used as a photopolymerizable resin laminate, curing due to polymerization of the bottom portion of the photopolymerizable layer is caused. It becomes insufficient. Further, when the amount of the photopolymerization initiator is less than 0.01% by weight, sufficient sensitivity is not obtained.
[0026]
In order to improve the thermal stability and storage stability of the photopolymerizable composition of the present invention, it is preferable that the photopolymerizable composition contains a radical polymerization inhibitor. Examples of such radical polymerization inhibitors include p-methoxyphenol, hydroquinone, pyrogallol, naphthylamine, tert-butylcatechol, cuprous chloride, 2,6-di-tert-butyl-p-cresol, 2,2′-methylenebis ( 4-ethyl-6-tert-butylphenol), 2,2′-methylenebis (4-methyl-6-tert-butylphenol), nitrosophenylhydroxyamine aluminum salt, diphenylnitrosamine and the like.
[0027]
The photopolymerizable composition of the present invention can also contain coloring substances such as dyes and pigments. Examples of such coloring substances include fuchsin, phthalocyanine green, auramin base, chalcoxide green S, paramadienta, crystal violet, methyl orange, nile blue 2B, Victoria blue, malachite green, basic blue 20, diamond green and the like. It is done.
[0028]
In addition, a color-forming dye that develops color when irradiated with light can be contained in the photopolymerizable composition of the present invention. Examples of the coloring dye include a combination of a leuco dye or a fluorane dye and a halogen compound. Examples of the leuco dye include tris (4-dimethylamino-2-methylphenyl) methane [leuco crystal violet], tris (4-dimethylamino-2-methylphenyl) methane [leucomalachite green], and the like. On the other hand, halogen compounds such as amyl bromide, isoamyl bromide, isobutylene bromide, ethylene bromide, diphenylmethyl bromide, benzal bromide, methylene bromide, tribromomethylphenyl sulfone, carbon tetrabromide, tris (2, 3 -Dibromopropyl) phosphate, trichloroacetamide, amyl iodide, isobutyl iodide, 1,1,1-trichloro-2,2-bis (p-chlorophenyl) ethane, hexachloroethane, triazine compounds and the like. Examples of the triazine compound include 2,4,6-tris (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine.
[0029]
Among such coloring dyes, combinations of tribromomethylphenylsulfone and leuco dyes, and combinations of triazine compounds and leuco dyes are useful. Further, a small amount of a glycidyl ether compound may be added to the photopolymerizable resin composition of the present invention as a thermochromic inhibitor. Specific examples of such a compound include polypropylene glycol diglycidyl ether, glycerin diglycidyl ether, hydrogenated bisphenol A diglycidyl ether, bisphenol A-PO2 molar addition diglycidyl ether, and the like.
[0030]
Moreover, additives, such as a plasticizer, can also be contained in the photopolymerizable composition of this invention as needed. Examples of such additives include phthalic acid esters such as diethyl phthalate. When producing the photopolymerizable resin laminate of the present invention, a support layer that supports the photopolymerizable layer is laminated on the photopolymerizable layer containing the photopolymerizable composition. The material for the support layer is preferably a transparent material that transmits active light. Examples of the material for the support layer that transmits active light include polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, and polymethyl methacrylate. Examples thereof include a copolymer film, a polystyrene film, a polyacrylonitrile film, a styrene copolymer film, a polyamide film, and a cellulose derivative film. Those obtained by stretching these films as necessary can also be used. Although it is advantageous that the thickness of the film is thin in terms of image formability and economy, the thickness of the film is generally 10 to 30 μm because it is necessary to maintain the strength.
[0031]
If necessary, a protective layer is laminated on the surface of the photopolymerizable layer opposite to the support layer. An important characteristic of the protective layer is that the protective layer has a sufficiently lower adhesion to the photopolymerizable layer than the support layer, whereby the protective layer can be easily peeled off. Examples of such a protective layer include a polyethylene film and a polypropylene film.
[0032]
Although the thickness of the photopolymerizable layer varies depending on the application, it is 5 to 100 μm, preferably 5 to 90 μm for producing a printed circuit board. The thinner the photopolymerizable layer, the better the resolution. Also, the thicker the photopolymerizable layer, the better the film strength. A process for producing a printed circuit board using the photopolymerizable resin laminate is performed by a known technique. The process will be briefly described below.
[0033]
When there is a protective layer, the protective layer is first peeled off, and then the photopolymerizable layer is heat-pressed and laminated on the metal surface of the printed circuit board substrate. The heating temperature at this time is generally 40 to 160 ° C. Next, if necessary, the support layer is peeled off and image exposure is performed with active light through a mask film. Next, when there is a support film on the photopolymerizable layer, it is removed as necessary, and then an unexposed portion of the photopolymerizable layer is developed and removed using an alkaline aqueous solution. As the alkaline aqueous solution, an aqueous solution of sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide or the like is used. These alkaline aqueous solutions are selected in accordance with the characteristics of the photopolymerizable layer, but generally 0.5 to 3% sodium carbonate aqueous solution is used. Next, a metal image pattern is formed on the metal surface exposed by development using either a known etching method or a plating method. Thereafter, the cured resist image is generally peeled off with an alkaline aqueous solution stronger than the alkaline aqueous solution used in the development. Although there is no restriction | limiting in particular also about the aqueous alkali solution for peeling, The aqueous solution of 1-5% sodium hydroxide and potassium hydroxide is generally used. It is also possible to add a small amount of a water-soluble organic solvent to the developer or stripping solution.
[0034]
DETAILED DESCRIPTION OF THE INVENTION
[0035]
【Example】
(Examples 1-6, Comparative Examples 1-3)
Composition shown in Table 1 (Example 1)-6, Comparative Examples 1-3The compound in the column) was uniformly dissolved. Next, this mixed solution was uniformly applied to a polyethylene terephthalate film having a thickness of 20 μm using a bar coater, and dried in a dryer at 95 ° C. for 4 minutes. At this time, the thickness of the photopolymerizable layer was 40 μm. A 23 μm polyethylene film was laminated on the surface of the photopolymerizable layer on which the polyethylene terephthalate film was not laminated to obtain a laminated film. On the other hand, the surface of the copper clad laminate on which 35 μm rolled copper foil was laminated was wet-baked foulol (product name: Scotch Bright # 600, 2 series, manufactured by 3M), and the photopolymerizable layer was heated while peeling the polyethylene film of this laminated film. Lamination was performed at 105 ° C. using a roll laminator.
[0036]
A mask film is passed through the obtained laminate, and 60 mJ / cm by an ultra-high pressure mercury lamp (Oak Seisakusho HMW-201KB).2The photopolymerizable layer was exposed. Subsequently, the polyethylene terephthalate support film was peeled from this laminate, and then a 1% sodium carbonate aqueous solution at 30 ° C. was sprayed for about 60 seconds to dissolve and remove the unexposed portion, whereby a good cured image was obtained.
[0037]
Moreover, the following evaluation was performed about the laminated body using the photopolymerizable composition of this invention.
(1) Edge fuse test It was stored in roll form at 23 ° C. and 50%, and evaluated according to the following ranking according to the presence or absence of a stain of the photopolymerization layer from the end face.
○: Can be stored for 6 months or more without oozing from the end face.
[0038]
Δ: Can be stored without oozing from the end face for 1 month or more and less than 6 months.
×: Can be stored for less than 1 month without exuding from the end face.
(2) Measurement of minimum development time The photopolymerizable layer was laminated at 105 ° C. with a hot roll laminator while peeling a DFR polyethylene film on a copper-clad laminate laminated with 35 μm rolled copper foil. Subsequently, after peeling the polyethylene terephthalate support film of this laminate, spraying a 1% sodium carbonate aqueous solution at 30 ° C., measuring the minimum development time during which the unexposed photopolymerizable layer dissolves, and measuring the minimum development time It was time. Actual development was performed in 1.5 times the minimum development time.
(3) Follow-up evaluation test 35 μm Rolled copper foil is laminated to a copper-clad laminate using a commercially available DFR in advance, laminating exposure-developing-etching-resist peeling, and forming a linear groove with a line width of 100 μm. Had made. The depth of the groove was about 10 μm.
[0039]
Using the thus-grooved substrate, the laminate was laminated by the same method as described above. An image pattern was obtained by exposure and development using a line pattern (line width; 125 μm) perpendicular to the groove of the substrate through a mask film through this laminate. Further, a cupric chloride solution at 50 ° C. was sprayed for 70 seconds to etch the copper in the portion having no resist. Finally, a 3% aqueous sodium hydroxide solution at 50 ° C. was sprayed for about 80 seconds to remove the cured resist. On the copper line made in this way, the number of portions where the grooved portion was not disconnected in advance was counted, and the number was defined as x. On the other hand, the number of locations that were etched and disconnected was counted, the number was set to y, the disconnection rate (%) was calculated by the following calculation formula, and ranking was performed by the following method.
[0040]
Disconnection rate (%) = 100y / (x + y)
○: Disconnection rate is less than 30%
Δ: Disconnection rate is 30% or more and less than 50%
×: Disconnection rate is 50% or more <Explanation of symbols>
P-1: Methyl ethyl ketone solution of a terpolymer of 70% by weight of methyl methacrylate, 23% by weight of methacrylic acid and 7% by weight of butyl acrylate (solid content concentration 32%, weight average molecular weight 85,000)
P-2: Methyl ethyl ketone solution of terpolymer of 70% by weight of methyl methacrylate, 23% by weight of methacrylic acid and 7% by weight of butyl acrylate (solid content concentration 24%, weight average molecular weight 200,000)
P-3: terpolymer (styrene weight 55% by weight, acrylic acid 35% by weight, α-methylstyrene 10% by weight (weight average molecular weight 15,000))
M-1: trimethylolpropane triacrylate
M-2: Reaction product of hexamethylene diisocyanate and oligopropylene glycol monomethacrylate (Blenmer PP1000 manufactured by NOF Corporation)
M-3: Glycol dimethacrylate in which ethylene oxide is added to both ends at an average of 3 moles on polypropylene glycol with an average of 8 moles of propylene oxide added
M-4: glycol dimethacrylate in which ethylene oxide is further added to both ends at an average of 4 moles on polypropylene glycol to which an average of 10 moles of propylene oxide is added.
M-5: Tetraethylene glycol dimethacrylate
M-6: Tetraethylene glycol diacrylate
A-1: Benzophenone
A-2: 4,4'-bis (dimethylamino) benzophenone
A-3: 2- (ο-chlorophenyl) -4,5-diphenylimidazolyl dimer
B-1: Malachite Green
B-2: Leuco Crystal Violet
B-3: Tribromomethylphenylsulfone
[0041]
[Table 1]
[0042]
【The invention's effect】
The DFR using the photopolymerizable resin composition of the present invention is particularly useful as a DFR for preparing an alkali development type circuit board because it has a small edge fuse property during storage and good followability during lamination to a substrate.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19281097A JP3957364B2 (en) | 1997-02-06 | 1997-07-17 | Photopolymerizable composition |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2404797 | 1997-02-06 | ||
JP9-24047 | 1997-02-06 | ||
JP19281097A JP3957364B2 (en) | 1997-02-06 | 1997-07-17 | Photopolymerizable composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10282656A JPH10282656A (en) | 1998-10-23 |
JP3957364B2 true JP3957364B2 (en) | 2007-08-15 |
Family
ID=26361525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19281097A Expired - Fee Related JP3957364B2 (en) | 1997-02-06 | 1997-07-17 | Photopolymerizable composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3957364B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3916605B2 (en) * | 2001-11-12 | 2007-05-16 | 旭化成エレクトロニクス株式会社 | Photosensitive resin composition and use thereof |
JP4526318B2 (en) * | 2004-07-29 | 2010-08-18 | 旭化成イーマテリアルズ株式会社 | Photosensitive resin composition |
TW200919085A (en) * | 2007-09-18 | 2009-05-01 | Asahi Kasei Emd Corp | Photosensitive resin composition and laminate thereof |
-
1997
- 1997-07-17 JP JP19281097A patent/JP3957364B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH10282656A (en) | 1998-10-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3549015B2 (en) | Photopolymerizable composition | |
JP3508819B2 (en) | Photopolymerizable composition | |
JP2001201851A (en) | Photopolymerizable resin composition | |
JP4395384B2 (en) | Photosensitive resin composition and laminate | |
JP2009128419A (en) | Photosensitive resin composition and laminate | |
JP3267703B2 (en) | New photopolymerizable resin laminate | |
JP3957513B2 (en) | Photopolymerizable resin composition | |
JP3957364B2 (en) | Photopolymerizable composition | |
JP4259855B2 (en) | Photosensitive resin composition | |
JP4716347B2 (en) | Dry film resist | |
JP3640869B2 (en) | Photopolymerizable composition | |
JP2004212805A (en) | Photopolymerizable resin composition | |
JP2002053621A (en) | Photopolymerizable resin composition and laminate | |
JP3458000B2 (en) | Photopolymerizable resin composition | |
JP3824508B2 (en) | Dry film resist and manufacturing method thereof | |
JP3638772B2 (en) | Photopolymerizable composition | |
JP4033571B2 (en) | Novel photopolymerizable composition | |
JP3252081B2 (en) | Photopolymerizable composition | |
JP4197445B2 (en) | Photosensitive resin composition and laminate | |
JP2982398B2 (en) | New photosensitive resin composition | |
JP3957502B2 (en) | Photosensitive resin composition | |
JPH02161442A (en) | Photopolymerizable composition | |
JP4326059B2 (en) | Photopolymerizable composition | |
JP3945864B2 (en) | New photosensitive resin laminate | |
JP3529237B2 (en) | Photopolymerizable resin composition |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040714 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040714 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070130 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070327 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20070327 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070508 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070508 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100518 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100518 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100518 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110518 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110518 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120518 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120518 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130518 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130518 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140518 Year of fee payment: 7 |
|
LAPS | Cancellation because of no payment of annual fees |