JP3267703B2 - New photopolymerizable resin laminate - Google Patents
New photopolymerizable resin laminateInfo
- Publication number
- JP3267703B2 JP3267703B2 JP31048492A JP31048492A JP3267703B2 JP 3267703 B2 JP3267703 B2 JP 3267703B2 JP 31048492 A JP31048492 A JP 31048492A JP 31048492 A JP31048492 A JP 31048492A JP 3267703 B2 JP3267703 B2 JP 3267703B2
- Authority
- JP
- Japan
- Prior art keywords
- photopolymerizable
- weight
- layer
- film
- aqueous solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920005989 resin Polymers 0.000 title claims description 14
- 239000011347 resin Substances 0.000 title claims description 14
- 238000007747 plating Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 20
- 239000000178 monomer Substances 0.000 claims description 20
- 239000007864 aqueous solution Substances 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 10
- 239000000243 solution Substances 0.000 claims description 10
- 239000003999 initiator Substances 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 8
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 5
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 47
- 239000010408 film Substances 0.000 description 36
- -1 p-hydroxyphenyl Chemical group 0.000 description 26
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- 239000000975 dye Substances 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000000539 dimer Substances 0.000 description 5
- 238000010030 laminating Methods 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- MJVAVZPDRWSRRC-UHFFFAOYSA-N Menadione Chemical compound C1=CC=C2C(=O)C(C)=CC(=O)C2=C1 MJVAVZPDRWSRRC-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 3
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- ORBFAMHUKZLWSD-UHFFFAOYSA-N ethyl 2-(dimethylamino)benzoate Chemical compound CCOC(=O)C1=CC=CC=C1N(C)C ORBFAMHUKZLWSD-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- LYCNQAIOLGIAFA-UHFFFAOYSA-N 4-[bis[4-(dimethylamino)-2-methylphenyl]methyl]-n,n,3-trimethylaniline Chemical compound CC1=CC(N(C)C)=CC=C1C(C=1C(=CC(=CC=1)N(C)C)C)C1=CC=C(N(C)C)C=C1C LYCNQAIOLGIAFA-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- UUQJMSSFMULZHR-UHFFFAOYSA-N [4,5,5,6,6-pentaethoxy-4-[2-[1,5,5,6,6-pentaethoxy-4-(2-methylprop-2-enoyloxy)cyclohex-2-en-1-yl]propan-2-yl]cyclohex-2-en-1-yl] 2-methylprop-2-enoate Chemical compound C(C(=C)C)(=O)OC1C(C(C(C=C1)(C(C)(C)C1(C(C(C(C=C1)OC(C(=C)C)=O)(OCC)OCC)(OCC)OCC)OCC)OCC)(OCC)OCC)(OCC)OCC UUQJMSSFMULZHR-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical group 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 229940107698 malachite green Drugs 0.000 description 2
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- LKWIHEWORSWTJM-UHFFFAOYSA-N (4,5,5,6,6-pentaethoxy-4-propylcyclohex-2-en-1-yl) 2-methylprop-2-enoate Chemical compound C(C(=C)C)(=O)OC1C(C(C(C=C1)(OCC)CCC)(OCC)OCC)(OCC)OCC LKWIHEWORSWTJM-UHFFFAOYSA-N 0.000 description 1
- PLFFHJWXOGYWPR-HEDMGYOXSA-N (4r)-4-[(3r,3as,5ar,5br,7as,11as,11br,13ar,13bs)-5a,5b,8,8,11a,13b-hexamethyl-1,2,3,3a,4,5,6,7,7a,9,10,11,11b,12,13,13a-hexadecahydrocyclopenta[a]chrysen-3-yl]pentan-1-ol Chemical class C([C@]1(C)[C@H]2CC[C@H]34)CCC(C)(C)[C@@H]1CC[C@@]2(C)[C@]4(C)CC[C@@H]1[C@]3(C)CC[C@@H]1[C@@H](CCCO)C PLFFHJWXOGYWPR-HEDMGYOXSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- QUDQABVGMBRGEA-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octaethylanthracene-9,10-dione Chemical compound CCC1=C(CC)C(CC)=C2C(=O)C3=C(CC)C(CC)=C(CC)C(CC)=C3C(=O)C2=C1CC QUDQABVGMBRGEA-UHFFFAOYSA-N 0.000 description 1
- SDTXSEXYPROZSZ-UHFFFAOYSA-N 1,2-dibromo-2-methylpropane Chemical compound CC(C)(Br)CBr SDTXSEXYPROZSZ-UHFFFAOYSA-N 0.000 description 1
- PAAZPARNPHGIKF-UHFFFAOYSA-N 1,2-dibromoethane Chemical compound BrCCBr PAAZPARNPHGIKF-UHFFFAOYSA-N 0.000 description 1
- ATOUXIOKEJWULN-UHFFFAOYSA-N 1,6-diisocyanato-2,2,4-trimethylhexane Chemical compound O=C=NCCC(C)CC(C)(C)CN=C=O ATOUXIOKEJWULN-UHFFFAOYSA-N 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- YXZFFTJAHVMMLF-UHFFFAOYSA-N 1-bromo-3-methylbutane Chemical compound CC(C)CCBr YXZFFTJAHVMMLF-UHFFFAOYSA-N 0.000 description 1
- YZWKKMVJZFACSU-UHFFFAOYSA-N 1-bromopentane Chemical compound CCCCCBr YZWKKMVJZFACSU-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- DKTOWFDVEJQWPF-UHFFFAOYSA-N 1-ethylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2CC DKTOWFDVEJQWPF-UHFFFAOYSA-N 0.000 description 1
- FEWDXGMBVQULLN-UHFFFAOYSA-N 1-hydroxy-2-phenyl-1,5,6,7-tetrahydro-4H-benzimidazol-4-one Chemical compound ON1C=2CCCC(=O)C=2N=C1C1=CC=CC=C1 FEWDXGMBVQULLN-UHFFFAOYSA-N 0.000 description 1
- BTUGGGLMQBJCBN-UHFFFAOYSA-N 1-iodo-2-methylpropane Chemical compound CC(C)CI BTUGGGLMQBJCBN-UHFFFAOYSA-N 0.000 description 1
- BLXSFCHWMBESKV-UHFFFAOYSA-N 1-iodopentane Chemical compound CCCCCI BLXSFCHWMBESKV-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 1
- KGRVJHAUYBGFFP-UHFFFAOYSA-N 2,2'-Methylenebis(4-methyl-6-tert-butylphenol) Chemical compound CC(C)(C)C1=CC(C)=CC(CC=2C(=C(C=C(C)C=2)C(C)(C)C)O)=C1O KGRVJHAUYBGFFP-UHFFFAOYSA-N 0.000 description 1
- UPQQXPKAYZYUKO-UHFFFAOYSA-N 2,2,2-trichloroacetamide Chemical compound OC(=N)C(Cl)(Cl)Cl UPQQXPKAYZYUKO-UHFFFAOYSA-N 0.000 description 1
- KIJPZYXCIHZVGP-UHFFFAOYSA-N 2,3-dimethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(C)=C2 KIJPZYXCIHZVGP-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- OVOUKWFJRHALDD-UHFFFAOYSA-N 2-[2-(2-acetyloxyethoxy)ethoxy]ethyl acetate Chemical class CC(=O)OCCOCCOCCOC(C)=O OVOUKWFJRHALDD-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- YQZHOBBQNFBTJE-UHFFFAOYSA-N 2-chloro-3-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(Cl)=C2 YQZHOBBQNFBTJE-UHFFFAOYSA-N 0.000 description 1
- FPKCTSIVDAWGFA-UHFFFAOYSA-N 2-chloroanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3C(=O)C2=C1 FPKCTSIVDAWGFA-UHFFFAOYSA-N 0.000 description 1
- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- NTZCFGZBDDCNHI-UHFFFAOYSA-N 2-phenylanthracene-9,10-dione Chemical compound C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 NTZCFGZBDDCNHI-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- AXDJCCTWPBKUKL-UHFFFAOYSA-N 4-[(4-aminophenyl)-(4-imino-3-methylcyclohexa-2,5-dien-1-ylidene)methyl]aniline;hydron;chloride Chemical compound Cl.C1=CC(=N)C(C)=CC1=C(C=1C=CC(N)=CC=1)C1=CC=C(N)C=C1 AXDJCCTWPBKUKL-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- JUQPZRLQQYSMEQ-UHFFFAOYSA-N CI Basic red 9 Chemical compound [Cl-].C1=CC(N)=CC=C1C(C=1C=CC(N)=CC=1)=C1C=CC(=[NH2+])C=C1 JUQPZRLQQYSMEQ-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- YVGGHNCTFXOJCH-UHFFFAOYSA-N DDT Chemical compound C1=CC(Cl)=CC=C1C(C(Cl)(Cl)Cl)C1=CC=C(Cl)C=C1 YVGGHNCTFXOJCH-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- WZKXBGJNNCGHIC-UHFFFAOYSA-N Leucomalachite green Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=CC=C1 WZKXBGJNNCGHIC-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- UBUCNCOMADRQHX-UHFFFAOYSA-N N-Nitrosodiphenylamine Chemical compound C=1C=CC=CC=1N(N=O)C1=CC=CC=C1 UBUCNCOMADRQHX-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- PQYJRMFWJJONBO-UHFFFAOYSA-N Tris(2,3-dibromopropyl) phosphate Chemical compound BrCC(Br)COP(=O)(OCC(Br)CBr)OCC(Br)CBr PQYJRMFWJJONBO-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000001251 acridines Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- JPIYZTWMUGTEHX-UHFFFAOYSA-N auramine O free base Chemical compound C1=CC(N(C)C)=CC=C1C(=N)C1=CC=C(N(C)C)C=C1 JPIYZTWMUGTEHX-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- LHMRXAIRPKSGDE-UHFFFAOYSA-N benzo[a]anthracene-7,12-dione Chemical compound C1=CC2=CC=CC=C2C2=C1C(=O)C1=CC=CC=C1C2=O LHMRXAIRPKSGDE-UHFFFAOYSA-N 0.000 description 1
- FAJDWNKDRFAWLS-UHFFFAOYSA-N benzyl-[9-(diethylamino)benzo[a]phenoxazin-5-ylidene]azanium;chloride Chemical compound [Cl-].O1C2=CC(N(CC)CC)=CC=C2N=C(C2=CC=CC=C22)C1=CC2=[NH+]CC1=CC=CC=C1 FAJDWNKDRFAWLS-UHFFFAOYSA-N 0.000 description 1
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 1
- FQUNFJULCYSSOP-UHFFFAOYSA-N bisoctrizole Chemical compound N1=C2C=CC=CC2=NN1C1=CC(C(C)(C)CC(C)(C)C)=CC(CC=2C(=C(C=C(C=2)C(C)(C)CC(C)(C)C)N2N=C3C=CC=CC3=N2)O)=C1O FQUNFJULCYSSOP-UHFFFAOYSA-N 0.000 description 1
- NNBFNNNWANBMTI-UHFFFAOYSA-M brilliant green Chemical compound OS([O-])(=O)=O.C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 NNBFNNNWANBMTI-UHFFFAOYSA-M 0.000 description 1
- OQROAIRCEOBYJA-UHFFFAOYSA-N bromodiphenylmethane Chemical compound C=1C=CC=CC=1C(Br)C1=CC=CC=C1 OQROAIRCEOBYJA-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- PMMYEEVYMWASQN-IMJSIDKUSA-N cis-4-Hydroxy-L-proline Chemical compound O[C@@H]1CN[C@H](C(O)=O)C1 PMMYEEVYMWASQN-IMJSIDKUSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- FJBFPHVGVWTDIP-UHFFFAOYSA-N dibromomethane Chemical compound BrCBr FJBFPHVGVWTDIP-UHFFFAOYSA-N 0.000 description 1
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- FWQHNLCNFPYBCA-UHFFFAOYSA-N fluoran Chemical compound C12=CC=CC=C2OC2=CC=CC=C2C11OC(=O)C2=CC=CC=C21 FWQHNLCNFPYBCA-UHFFFAOYSA-N 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 235000012701 green S Nutrition 0.000 description 1
- 239000004120 green S Substances 0.000 description 1
- WDPIZEKLJKBSOZ-UHFFFAOYSA-M green s Chemical compound [Na+].C1=CC(N(C)C)=CC=C1C(C=1C2=CC=C(C=C2C=C(C=1O)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](C)C)C=C1 WDPIZEKLJKBSOZ-UHFFFAOYSA-M 0.000 description 1
- VHHHONWQHHHLTI-UHFFFAOYSA-N hexachloroethane Chemical compound ClC(Cl)(Cl)C(Cl)(Cl)Cl VHHHONWQHHHLTI-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- DWCZIOOZPIDHAB-UHFFFAOYSA-L methyl green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)[N+](C)(C)C)=C1C=CC(=[N+](C)C)C=C1 DWCZIOOZPIDHAB-UHFFFAOYSA-L 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
- 229940012189 methyl orange Drugs 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- SYSQUGFVNFXIIT-UHFFFAOYSA-N n-[4-(1,3-benzoxazol-2-yl)phenyl]-4-nitrobenzenesulfonamide Chemical class C1=CC([N+](=O)[O-])=CC=C1S(=O)(=O)NC1=CC=C(C=2OC3=CC=CC=C3N=2)C=C1 SYSQUGFVNFXIIT-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000003918 potentiometric titration Methods 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- LMYRWZFENFIFIT-UHFFFAOYSA-N toluene-4-sulfonamide Chemical compound CC1=CC=C(S(N)(=O)=O)C=C1 LMYRWZFENFIFIT-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 239000003021 water soluble solvent Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、プリント配線板作成に
適したアルカリ現像可能な光重合性樹脂積層体に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alkali-developable photopolymerizable resin laminate suitable for producing a printed wiring board.
【0002】[0002]
【従来の技術】従来、プリント配線板作成用のレジスト
として支持層と光重合性層より成るいわゆるドライフィ
ルムフォトレジスト(以下DFRと略称)が用いられて
いる。DFRは、一般に支持層上に光重合性組成物から
成る光重合性層を積層し、多くの場合、さらに該組成物
上に保護用のフィルムを積層することにより調製され
る。2. Description of the Related Art Conventionally, a so-called dry film photoresist (hereinafter abbreviated as DFR) comprising a support layer and a photopolymerizable layer has been used as a resist for producing a printed wiring board. DFR is generally prepared by laminating a photopolymerizable layer composed of a photopolymerizable composition on a support layer, and often further laminating a protective film on the composition.
【0003】DFRを用いてプリント配線板を作成する
には、まず保護フィルムを剥離した後、銅張り積層板等
の永久回路作成用基板上にラミネーター等を用いてDF
Rを積層する。次に必要により支持層を剥離し、配線パ
ターンマスクフィルム等を通し露光を行う。露光後に支
持層がある場合は必要に応じて支持層を剥離し、現像液
により未露光部分の光重合性層を溶解、もしくは分散除
去し、基板上に硬化レジスト画像を形成する。光重合性
層としては、現像液として弱アルカリ水溶液を用いるア
ルカリ現像型と、有機溶剤を用いる溶剤現像型が知られ
ているが、近年環境問題ないし費用の点からアルカリ現
像型の需要が伸びている。In order to prepare a printed wiring board using a DFR, a protective film is first peeled off, and then a DF is formed on a substrate for forming a permanent circuit such as a copper-clad laminate using a laminator or the like.
R is laminated. Next, if necessary, the support layer is peeled off, and exposure is performed through a wiring pattern mask film or the like. If there is a support layer after exposure, the support layer is peeled off as necessary, and the unpolymerized layer of the photopolymerizable layer is dissolved or dispersed and removed with a developer to form a cured resist image on the substrate. As the photopolymerizable layer, an alkali developing type using a weakly alkaline aqueous solution as a developing solution and a solvent developing type using an organic solvent are known. In recent years, however, demand for the alkali developing type has increased due to environmental problems or costs. I have.
【0004】現像後回路を形成させるプロセスは両型と
も同一であり、大きく二つの方法に分かれる。第一の方
法は、硬化レジストによって覆われていない銅面をエッ
チング除去した後、さらにレジストを除去するものであ
り、第二の方法は、同上の銅面に銅及び半田等のめっき
処理を行った後、レジストの除去、さらに現れた銅面を
エッチングするものである。The process of forming a circuit after development is the same for both types, and is roughly divided into two methods. The first method is to remove the resist after etching and removing the copper surface not covered by the cured resist, and the second method is to perform a plating process of copper and solder on the copper surface. After that, the resist is removed, and the exposed copper surface is etched.
【0005】また、DFRを用いて作製されるプリント
配線板の中で、スルーホールの内周面に付設した導電性
回路形成物質層、例えば銅薄膜層によって永久回路作成
用基板の一方の面と他方の面とを電気的に接続した形式
のものがある。この種の印刷回路基板の製造方法として
は、銅スルーホール法と半田スルーホール法が一般的で
あって、銅スルーホールの中ではテンティング法が広く
採用されるようになってきている。[0005] In a printed wiring board manufactured using DFR, a conductive circuit forming material layer, for example, a copper thin film layer, provided on the inner peripheral surface of a through hole, is used to form one side of a permanent circuit forming substrate. There is a type in which the other surface is electrically connected. As a method of manufacturing this type of printed circuit board, a copper through-hole method and a solder through-hole method are generally used, and a tenting method has been widely used in the copper through-hole method.
【0006】半田スルーホール法はスルーホール内周面
の導電性回路構成物質、例えば銅薄膜層を保護する耐エ
ッチング金属、例えば半田めっきで被覆し、次いで基板
表面の不要箇所をエッチングするものである。上述の方
法における銅めっきや半田めっき等の各種めっき工程に
おいて、レジストと基材との間の密着性が十分でないと
レジストの下部と基板との間にめっき液が入り込んでめ
っきが形成される、いわゆるめっきもぐりが発生する。
めっきがもぐると、回路間の短絡や回路のがたつきの原
因となる。したがって耐めっき性の優れたDFRが必要
である。In the solder through hole method, the inner peripheral surface of the through hole is coated with a conductive circuit constituent material, for example, an etching resistant metal for protecting a copper thin film layer, for example, solder plating, and then unnecessary portions on the substrate surface are etched. . In various plating steps such as copper plating and solder plating in the above-described method, if the adhesion between the resist and the base material is insufficient, a plating solution enters between the lower part of the resist and the substrate to form plating, A so-called plating hole occurs.
If the plating gets loose, it causes a short circuit between the circuits and rattling of the circuits. Therefore, a DFR having excellent plating resistance is required.
【0007】一方、硬化後のレジストは現像、めっき、
エッチング等における搬送時にリングロールに触れた
り、めっき治具に取り付ける場合に装置等に触れること
があり、またフレキシブル基板の場合には、作業中に折
り曲げたり、湾曲したりすることがあり、硬化レジスト
が硬くて脆いと欠けたり割れたりして重大な支障を及ぼ
すことになる。また、生産性の点から迅速に現像、剥離
が可能なDFRが必要とされている。On the other hand, the cured resist is developed, plated,
It may come into contact with the ring roll during transportation during etching, etc., or may touch the equipment when attaching to a plating jig.In the case of a flexible substrate, it may bend or bend during operation, If it is hard and brittle, it will chip or crack, causing serious problems. Further, from the viewpoint of productivity, there is a need for a DFR that can be rapidly developed and peeled.
【0008】現在広く用いられているDFRの光重合性
層は、(1)少なくとも一個のエッチング性基を有し、
光重合開始剤によって重合体を形成できる不飽和化合
物、(2)熱可塑性有機重合体結合剤、(3)光重合開
始剤、および、(4)その他の添加剤から成っている
(特公昭50−9177号公報、特公昭57−2169
7号公報)。The photopolymerizable layer of DFR widely used at present has (1) at least one etching group,
(2) a thermoplastic organic polymer binder, (3) a photopolymerization initiator, and (4) other additives. No. 9177, Japanese Patent Publication No. 57-2169
No. 7).
【0009】上記不飽和化合物としては、脂肪族系多価
アルコールのアクリル酸及びメタクリル酸エステルが最
も一般的で、トリメチロールプロパントリアクリレー
ト、ペンタエリスリトールトリアクリレート、ポリエチ
レングリコールジアクリレート等の少なくとも二個の不
飽和基を持つものが知られている。しかし、前記の少な
くとも二個の不飽和基を持つモノマーを用いた場合、硬
化レジストの柔軟性が充分ではなく、また、剥離が遅く
生産性が悪いという問題がある。また、硬化レジストの
柔軟化や剥離性改良のためには、一個の不飽和基を持つ
モノマーと併用することが効果のあることが知られてい
るが(例えば特開昭60−11840号公報)、耐めっ
き性を著しく悪化させるという問題がある。As the unsaturated compound, acrylic acid and methacrylic acid esters of aliphatic polyhydric alcohols are most common, and at least two unsaturated compounds such as trimethylolpropane triacrylate, pentaerythritol triacrylate and polyethylene glycol diacrylate are used. Those having an unsaturated group are known. However, when the above-mentioned monomer having at least two unsaturated groups is used, there is a problem that the flexibility of the cured resist is not sufficient, and the peeling is slow and the productivity is poor. It has been known that the use of a monomer having one unsaturated group in combination is effective for softening and improving the releasability of a cured resist (for example, JP-A-60-11840). In addition, there is a problem that plating resistance is remarkably deteriorated.
【0010】[0010]
【発明が解決しようとする課題】本発明は硬化レジスト
の柔軟性が良好で、剥離性、耐めっき性に優れた光重合
性樹脂積層体を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a photopolymerizable resin laminate in which the cured resist has good flexibility and excellent peelability and plating resistance.
【0011】[0011]
【課題を解決するための手段】上記の課題を解決すべく
鋭意検討を重ねた結果、モノマーとして下記一般式
〔I〕の化合物を用いた場合に、硬化レジストの柔軟性
が良好で、剥離性を損なうこと無く、耐めっき性に極め
て優れ、かつ耐エッチング性、耐テンティングにも優れ
た特性を有することを見いだし本発明を完成するに至っ
た。As a result of intensive studies to solve the above-mentioned problems, when a compound of the following general formula [I] is used as a monomer, the cured resist has good flexibility and peelability. Without impairing the plating resistance, and found to have excellent properties in terms of plating resistance, etching resistance and tenting resistance, and completed the present invention.
【0012】即ち、本発明は、 (1)カルボキシル基含有量が酸当量で100〜60
0、重量平均分子量が2万〜50万の重合体 20〜
90重量%、 (2) 下記化学式〔I〕で示される光重合性モノマー
2〜30重量%、That is, the present invention relates to the following: (1) The carboxyl group content is 100 to 60 in acid equivalent.
0, a polymer having a weight average molecular weight of 20,000 to 500,000
90% by weight, (2) 2 to 30% by weight of a photopolymerizable monomer represented by the following chemical formula [I],
【0013】[0013]
【化2】 Embedded image
【0014】 (3)少なくとも二つの末端エチレン基を持つ光重合性
モノマー 5〜40重量%、 (4)光重合開始剤 0.01〜20重量%、を含有
し、かつ(2)の光重合性モノマーと、(3)の光重合
性モノマーとの合計が7〜60重量%であることを特徴
とする光重合性組成物からなる光重合性層と支持層とか
らなるプリント配線板作成用の光重合性樹脂積層体を提
供するものである。(3) 5 to 40% by weight of a photopolymerizable monomer having at least two terminal ethylene groups, (4) 0.01 to 20% by weight of a photopolymerization initiator, and the photopolymerization of (2) The sum of the photo-polymerizable monomer and the photo-polymerizable monomer of (3) is 7 to 60% by weight, for making a printed wiring board comprising a photo-polymerizable layer composed of a photo-polymerizable composition and a support layer . there is provided a photopolymerizable resin laminate.
【0015】また、本発明は、ラミネータを用い、印刷
回路板用基板の金属表面に、前記の光重合性樹脂積層体
を加熱圧着して積層し、マスクフィルムを通して活性光
により画像露光し、次に必要により支持層を剥離し、露
光後光重合性樹脂層上に支持層がある場合には必要に応
じてこれを除き、次いで、アルカリ水溶液の現像液を用
いて未露光部を除去し、現像により露出した金属面にエ
ッチング法またはめっき法を施すことにより金属の画像
パターンを形成し、その後、現像で用いたアルカリ水溶
液よりも更に強いアルカリ水溶液により硬化レジスト画
像を剥離することを特徴とするプリント配線板の作成方
法、を提供するものである。上記式〔I〕で示される光
重合性モノマーのAは下記化3に示される両方の繰り返
し単位を含むことが必須要件であり、繰り返し単位の合
計は2〜15であり、ランダムでもブロックでも構わな
い。Further, according to the present invention, the above photopolymerizable resin laminate is laminated on a metal surface of a substrate for a printed circuit board by heating and pressing, using a laminator, and is image-exposed to active light through a mask film. The support layer is peeled off as necessary, and if there is a support layer on the photopolymerizable resin layer after exposure, if necessary, remove the support layer, and then remove an unexposed portion using a developing solution of an alkaline aqueous solution, A metal image pattern is formed by performing an etching method or a plating method on a metal surface exposed by development, and thereafter, the cured resist image is peeled off with an alkaline aqueous solution stronger than the alkaline aqueous solution used in the development. A method for producing a printed wiring board is provided. It is essential that A of the photopolymerizable monomer represented by the formula [I] contains both repeating units represented by the following formula 3, and the total of repeating units is 2 to 15, and may be random or block. Absent.
【0016】[0016]
【化3】 Embedded image
【0017】上記化合物〔I〕は、アルキル置換、もし
くは無置換のフェノールに、エチレンオキサイドおよび
プロピレンオキサイドを公知の方法により付加した変性
モノオールと、アクリル酸またはメタクリル酸とのエス
テル化反応により得ることができる。この変性モノオー
ルはノニオン系界面活性剤として知られており、例えば
ディスパノールLS−100〔日本油脂(株)製 商品
名〕が市販されている。The above compound [I] can be obtained by an esterification reaction of a modified monool obtained by adding ethylene oxide and propylene oxide to an alkyl-substituted or unsubstituted phenol by a known method, and acrylic acid or methacrylic acid. Can be. This modified monol is known as a nonionic surfactant, and for example, Dispanol LS-100 (trade name, manufactured by NOF Corporation) is commercially available.
【0018】本発明の光重合性組成物には、上記式
〔I〕で示されるモノマーが2〜30重量%含まれる必
要があり、5〜15重量%がより好ましい。2重量%よ
り少ないと、柔軟性および剥離性の改良効果が充分では
なく、また30重量%を越えると耐めっき性や保存安定
性が悪化する。上記光重合性組成物には、少なくとも二
つの末端エチレン基を持つ光重合性モノマーを含むこと
が必須である。モノマーの例としては、1,6−ヘキサ
ンジオールジ(メタ)アクリレート、1,4−シクロヘ
キサンジオールジ (メタ) アクリレート、ポリプロピレ
ングリコールジ (メタ) アクリレート、ポリエチレング
リコールジ (メタ) アクリレート、2−ジ(p−ヒドロ
キシフェニル)プロパンジ (メタ) アクリレート、グリ
セロールトリ (メタ) アクリレート、トリメチロールプ
ロパントリ (メタ) アクリレート、ポリオキシプロピル
トリメチロールプロパントリ (メタ) アクリレート、ポ
リオキシエチルトリメチロールプロパントリアクリレー
ト、ジペンタエリスリトールペンタ (メタ) アクリレー
ト、トリメチロールプロパントリグリシジルエーテルト
リ (メタ) アクリレート、ビスフェノールAジグリシジ
ルエーテルジ (メタ) アクリレート、2,2−ビス(4
−メタクリロキシペンタエトキシフェニル)プロパン、
ポリオキシエチレンポリオキシプロピレングリコールジ
(メタ) アクリレート、ウレタンアクリレート、例えば
ヘキサメチレンジイソシアネート、トリレンジイソシア
ネートまたは2,2,4−トリメチルヘキサメチレンジ
イソシアネート等のジイソシアネート化合物と、一分子
中にヒドロキシル基と (メタ) アクリル基を有する化合
物(例えば、2−ヒドロキシプロピルアクリレート、オ
リゴプロピレングリコールモノメタクリレート等)との
ウレタン化合物等がある。The photopolymerizable composition of the present invention must contain 2 to 30% by weight of the monomer represented by the formula [I], and more preferably 5 to 15% by weight. If it is less than 2% by weight, the effect of improving flexibility and peelability is not sufficient, and if it exceeds 30% by weight, plating resistance and storage stability deteriorate. It is essential that the photopolymerizable composition contains a photopolymerizable monomer having at least two terminal ethylene groups. Examples of the monomer include 1,6-hexanediol di (meth) acrylate, 1,4-cyclohexanediol di (meth) acrylate, polypropylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, and 2-di ( (p-hydroxyphenyl) propanedi (meth) acrylate, glycerol tri (meth) acrylate, trimethylolpropanetri (meth) acrylate, polyoxypropyltrimethylolpropanetri (meth) acrylate, polyoxyethyltrimethylolpropanetriacrylate, dipenta Erythritol penta (meth) acrylate, trimethylolpropane triglycidyl ether tri (meth) acrylate, bisphenol A diglycidyl ether di (meth) acrylate, 2,2-bi (4
-Methacryloxypentaethoxyphenyl) propane,
Polyoxyethylene polyoxypropylene glycol di
(Meth) acrylate, urethane acrylate, for example, a diisocyanate compound such as hexamethylene diisocyanate, tolylene diisocyanate or 2,2,4-trimethylhexamethylene diisocyanate, and a compound having a hydroxyl group and a (meth) acryl group in one molecule (for example, , 2-hydroxypropyl acrylate, oligopropylene glycol monomethacrylate, etc.).
【0019】これらのうち、好ましい例としては、ポリ
エチレングリコールジ (メタ) アクリレート、2,2−
ビス(4−メタクリロキシペンタエトキシフェニル)プ
ロパン、ポリオキシエチレンポリオキシプロピレングリ
コールジ (メタ) アクリレート、ヘキサメチレンジイソ
シアネートとオリゴプロピレングリコールモノメタクリ
レートとのウレタン化合物等を挙げることができる。Of these, preferred examples are polyethylene glycol di (meth) acrylate, 2,2-
Examples thereof include bis (4-methacryloxypentaethoxyphenyl) propane, polyoxyethylene polyoxypropylene glycol di (meth) acrylate, and a urethane compound of hexamethylene diisocyanate and oligopropylene glycol monomethacrylate.
【0020】これらのモノマーは一種類でも、二種類以
上を併用することも出来る。使用量は5〜40重量%が
より好ましく、化合物〔I〕との合計は7〜60重量%
であることが必要である。7重量%未満では、感度、膜
強度の点で充分ではなく、60重量%を越えると保存時
の光重合性層のはみ出しが著しくなるため好ましくな
い。These monomers can be used alone or in combination of two or more. The use amount is more preferably 5 to 40% by weight, and the total amount with the compound [I] is 7 to 60% by weight.
It is necessary to be. If the amount is less than 7% by weight, the sensitivity and the film strength are not sufficient. If the amount exceeds 60% by weight, the photopolymerizable layer protrudes significantly during storage, which is not preferable.
【0021】本発明に用いる重合体中に含まれるカルボ
キシル基の量は酸当量で100〜600である必要があ
り、300〜400が好ましい。また分子量は2万〜5
0万である必要があり、より好ましくは4万〜20万で
ある。ここで酸当量とは、その中に1当量のカルボキシ
ル基を有するポリマーの重量をいう。重合体中のカルボ
キシル基はアルカリ水溶液に対し現像性や剥離性を有す
るために必要である。酸当量が100以下では、塗工溶
媒または他の組成物、例えばモノマーとの相溶性が低下
し、600以上では現像性や剥離性が低下する。また、
分子量が50万以上であると現像性が低下し、2万以下
では光重合性樹脂積層体に用いたとき光重合性層の厚み
を均一に維持することが困難になるし、現像液に対する
耐性が悪化する。The amount of the carboxyl group contained in the polymer used in the present invention must be 100 to 600 in terms of acid equivalent, and preferably 300 to 400. The molecular weight is 20,000-5
It is necessary to be 100,000, more preferably 40,000 to 200,000. Here, the acid equivalent refers to the weight of a polymer having one equivalent of a carboxyl group therein. The carboxyl group in the polymer is necessary for having developability and releasability in an aqueous alkali solution. If the acid equivalent is 100 or less, the compatibility with the coating solvent or another composition, for example, a monomer is reduced, and if the acid equivalent is 600 or more, the developability and the releasability are reduced. Also,
When the molecular weight is 500,000 or more, the developability decreases, and when the molecular weight is 20,000 or less, it becomes difficult to maintain a uniform thickness of the photopolymerizable layer when used in a photopolymerizable resin laminate, and the resistance to a developer is increased. Worsens.
【0022】なお酸当量の測定は、平沼レポーティング
タイトレーター COMTITE−7を用い、0.1N
水酸化ナトリウムで電位差滴定法により行われる。ま
た、分子量は日本分光製ゲルパ−ミエーションクロマト
グラフィー(ポンプ:TRIROTAR−V、カラム;
Shodex A−80M 2本直列、移動相溶媒;T
HF、ポリスチレン標準サンプルによる検量線使用)に
より重量平均分子量として求められる。The acid equivalent was measured using a Hiranuma reporting titrator COMMITE-7 at 0.1 N
It is performed by potentiometric titration with sodium hydroxide. The molecular weight was determined by gel permeation chromatography (Pump: TRIROTAR-V, column;
Shodex A-80M 2 in series, mobile phase solvent; T
HF, using a calibration curve with a polystyrene standard sample) as the weight average molecular weight.
【0023】該重合体は、下記の2種類の単量体の中よ
り各々一種またはそれ以上の単量体を共重合させること
により得られる。第一の単量体は分子中に重合性不飽和
基を一個有するカルボン酸または酸無水物である。例え
ば (メタ) アクリル酸、フマル酸、ケイ皮酸、クロトン
酸、イタコン酸、マレイン酸無水物、マレイン酸半エス
テル等である。第二の単量体は非酸性で、分子中に重合
性不飽和基を一個有し、光重合性層の現像性、エッチン
グおよび、めっき工程での耐性、硬化膜の可とう性等の
種々の特性を保持するように選ばれる。例えば、メチル
(メタ) アクリレート、エチル (メタ) アクリレートブ
チル (メタ) アクリレート、2−エチルヘキシル (メ
タ) アクリレート等のアルキル (メタ) アクリレート類
がある。また酢酸ビニル等のビニルアルコールのエステ
ル類や、スチレンまたは重合可能なスチレン誘導体等が
ある。また上記の重合性不飽和基を分子中に一個有する
カルボン酸または酸無水物のみの重合によっても得るこ
とができる。The polymer is obtained by copolymerizing one or more of the following two types of monomers. The first monomer is a carboxylic acid or acid anhydride having one polymerizable unsaturated group in the molecule. For example, (meth) acrylic acid, fumaric acid, cinnamic acid, crotonic acid, itaconic acid, maleic anhydride, maleic acid half ester and the like. The second monomer is non-acidic, has one polymerizable unsaturated group in the molecule, and has various properties such as developability of the photopolymerizable layer, resistance in the etching and plating steps, and flexibility of the cured film. Is selected to maintain the characteristics of For example, methyl
There are alkyl (meth) acrylates such as (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, and 2-ethylhexyl (meth) acrylate. Further, there are esters of vinyl alcohol such as vinyl acetate, and styrene or a polymerizable styrene derivative. It can also be obtained by polymerization of only a carboxylic acid or acid anhydride having one polymerizable unsaturated group in the molecule.
【0024】光重合性組成物に含有される重合体の量
は、20〜90重量%の範囲でなければならず、好まし
くは30〜70重量%である。重合体の量が90重量%
以上または20重量%未満では、露光によって形成され
る硬化画像が十分にレジストとしての特性、例えばテン
ティング、エッチング、各種めっき工程において十分な
耐性を有しない。The amount of the polymer contained in the photopolymerizable composition must be in the range of 20 to 90% by weight, preferably 30 to 70% by weight. 90% by weight of polymer
When the content is above or less than 20% by weight, a cured image formed by exposure does not have sufficient properties as a resist, for example, sufficient resistance in tenting, etching, and various plating steps.
【0025】本発明の光重合性組成物には光重合開始剤
を必須成分として含んでいる。本発明に用いる光重合開
始剤は各種の活性光線、例えば紫外線などにより活性化
され重合を開始する公知のあらゆる化合物である。例え
ば、2−エチルアントラキノン、オクタエチルアントラ
キノン、1,2−ベンズアントラキノン、2,3−ベン
ズアントラキノン、2−フェニルアントラキノン、2,
3−ジフェニルアントラキノン、1−クロロアントラキ
ノン、2−クロロアントラキノン、2−メチルアントラ
キノン、1,4−ナフトキノン、9,10−フェナント
ラキノン、2−メチル−1,4−ナフトキノン、9,1
0−フェナントラキノン、2−メチル−1,4−ナフト
キノン、2,3−ジメチルアントラキノン、3−クロロ
−2−メチルアントラキノンなどのキノン類、ベンゾフ
ェノン、ミヒラーズケトン〔4,4′−ビス(ジメチル
アミノ)ベンゾフェノン〕、4,4′−ビス(ジエチル
アミノ)ベンゾフェノンなどの芳香族ケトン類、ベンゾ
イン、ベンゾインエチルエーテル、ベンゾインフェニル
エーテル、メチルベンゾイン、エチルベンゾインなどの
ベンゾインエーテル類、ベンジルジメチルケタール、ベ
ンジルジエチルケタール、2−(o−クロロフェニル)
−4,5−ジフェニルイミダゾリル二量体等のビイミダ
ゾール化合物、チオキサントン類とアルキルアミノ安息
香酸の組み合わせ、例えばエチルチオキサントンとジメ
チルアミノ安息香酸エチル、2−クロルチオキサントン
とジメチルアミノ安息香酸エチル、イソプロピルチオキ
サントンとジメチルアミノ安息香酸エチルとの組み合わ
せ、また2−(o−クロロフェニル)−4,5−ジフェ
ニルイミダゾリル二量体とミヒラーズケトンとの組み合
わせ、さらに2−(o−クロロフェニル)−4,5−ジ
フェニルイミダゾリル二量体とベンジルジメチルケター
ルとミヒラーズケトンとの組み合わせ、9−フェニルア
クリジン等のアクリジン類、1−フェニル−1,2−プ
ロパンジオン−2−o−ベンゾイルオキシム、1−フェ
ニル−1,2−プロパンジオン−2−(o−エトキシカ
ルボニル)オキシム等のオキシムエステル類等がある。
これらの開始剤は、それぞれ単独で用いても、併用して
用いても構わない。The photopolymerizable composition of the present invention contains a photopolymerization initiator as an essential component. The photopolymerization initiator used in the present invention is any known compound that is activated by various kinds of actinic rays, for example, ultraviolet rays, and starts polymerization. For example, 2-ethylanthraquinone, octaethylanthraquinone, 1,2-benzanthraquinone, 2,3-benzanthraquinone, 2-phenylanthraquinone, 2,2
3-diphenylanthraquinone, 1-chloroanthraquinone, 2-chloroanthraquinone, 2-methylanthraquinone, 1,4-naphthoquinone, 9,10-phenanthraquinone, 2-methyl-1,4-naphthoquinone, 9.1
Quinones such as 0-phenanthraquinone, 2-methyl-1,4-naphthoquinone, 2,3-dimethylanthraquinone, 3-chloro-2-methylanthraquinone, benzophenone, Michler's ketone [4,4'-bis (dimethylamino) A) benzophenone], aromatic ketones such as 4,4'-bis (diethylamino) benzophenone, benzoin ethers such as benzoin, benzoin ethyl ether, benzoin phenyl ether, methyl benzoin and ethyl benzoin, benzyl dimethyl ketal, benzyl diethyl ketal, 2- (o-chlorophenyl)
Biimidazole compounds such as -4,5-diphenylimidazolyl dimer, combinations of thioxanthones and alkylaminobenzoic acid, for example, ethylthioxanthone and ethyl dimethylaminobenzoate, 2-chlorothioxanthone and ethyl dimethylaminobenzoate, and isopropylthioxanthone A combination with ethyl dimethylaminobenzoate, a combination of 2- (o-chlorophenyl) -4,5-diphenylimidazolyl dimer and Michler's ketone, and a further combination of 2- (o-chlorophenyl) -4,5-diphenylimidazolyl dimer Of isomers, benzyldimethyl ketal and Michler's ketone, acridines such as 9-phenylacridine, 1-phenyl-1,2-propanedione-2-o-benzoyloxime, 1-phenyl-1,2-propene There are Panjion-2-(o-ethoxycarbonyl) oxime esters such as oxime.
These initiators may be used alone or in combination.
【0026】開始剤の好ましい例としては、ベンゾフェ
ノン、4,4′−ビス(ジメチルアミノ)ベンゾフェノ
ン、4,4′−ビス(ジエチルアミノ)ベンゾフェノ
ン、2−(o−クロロフェニル)−4,5−ジフェニル
イミダゾリル二量体、およびこれらの組み合わせをあげ
ることができる。本発明の光重合性組成物に含有される
光重合開始剤の量は、0.01〜20重量%であり、好
ましくは、0.05〜10重量%である。光重合開始剤
が20重量%以上では光重合性組成物の活性吸収率が高
くなり、光重合積層体として用いた時光重合性層の底の
部分の重合による硬化が不十分になる。また0.01重
量%未満では充分な感度が出なくなる。Preferred examples of the initiator include benzophenone, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone and 2- (o-chlorophenyl) -4,5-diphenylimidazolyl. And dimers, and combinations thereof. The amount of the photopolymerization initiator contained in the photopolymerizable composition of the present invention is 0.01 to 20% by weight, preferably 0.05 to 10% by weight. When the amount of the photopolymerization initiator is 20% by weight or more, the active absorbance of the photopolymerizable composition becomes high, and when used as a photopolymerized laminate, the curing of the bottom portion of the photopolymerizable layer by polymerization becomes insufficient. If it is less than 0.01% by weight, sufficient sensitivity cannot be obtained.
【0027】本発明の光重合性組成物の熱安定性、保存
安定性を向上させるために、光重合組成物に重合禁止剤
を含有させることは好ましいことである。例えば、p−
メトキシフェノール、ハイドロキノン、ピロガロール、
ナフチルアミン、tert.−ブチルカテコール、塩化
第一銅、2,6−ジ−tert.−ブチル−p−クレゾ
ール、2,2′−メチレンビス(4−エチル−6−te
rt.ブチルフェノール)、2,2′−メチレンビス
(4−メチル−6−tert.ブチルフェノール、ニト
ロソフェニルヒドロキシアミンアルミニウム塩、ジフェ
ニルニトロソアミン等が挙げられる。In order to improve the thermal stability and storage stability of the photopolymerizable composition of the present invention, it is preferable that the photopolymerizable composition contains a polymerization inhibitor. For example, p-
Methoxyphenol, hydroquinone, pyrogallol,
Naphthylamine, tert. -Butylcatechol, cuprous chloride, 2,6-di-tert. -Butyl-p-cresol, 2,2'-methylenebis (4-ethyl-6-te
rt. Butylphenol), 2,2'-methylenebis (4-methyl-6-tert.butylphenol), nitrosophenylhydroxyamine aluminum salt, diphenylnitrosamine and the like.
【0028】本発明の光重合性組成物には、染料、顔料
等の着色物質を含有してもよい。例えばフクシン、フタ
ロシアニングリーン、オーラミン塩基、カルコキシドグ
リーンS、パラマジェンタ、クリスタルバイオレット、
メチルオレンジ、ナイルブルー2B、ビクトリアブル
ー、マラカイトグリーン、ベイシックブルー20、ダイ
ヤモンドグリーン等が挙げられる。The photopolymerizable composition of the present invention may contain coloring substances such as dyes and pigments. For example, fuchsin, phthalocyanine green, auramine base, chalcoxide green S, paramagenta, crystal violet,
Methyl Orange, Nile Blue 2B, Victoria Blue, Malachite Green, Basic Blue 20, Diamond Green and the like.
【0029】また光照射により発色する発色系染料を含
有してもよい。発色系染料としては、ロイコ染料または
フルオラン染料と、ハロゲン化合物との組み合わせがあ
る。例えば、トリス(4−ジメチルアミノ−2−メチル
フェニル)メタン〔ロイコクリスタルバイオレット〕、
トリス(4−ジメチルアミノ−2−メチルフェニル)メ
タン〔ロイコマラカイチグリーン〕等が挙げられる。一
方、ハロゲン化合物としては、臭化アミル、臭化イソア
ミル、臭化イソブチレン、臭化エチレン、臭化ジフェニ
ルメチル、臭化ベンザル、臭化メチレン、トリブロモメ
チルフェニルスルフォン、四臭化炭素、トリス(2,3
−ジブロモプロピル)ホスフェート、トリクロロアセト
アミド、ヨウ化アミル、ヨウ化イソブチル、1,1,1
−トリクロロ−2,2−ビス(p−クロロフェニル)エ
タン、ヘキサクロロエタン等が挙げられる。また、ビイ
ミダゾール化合物とロイコ染料との組み合わせも有用で
ある。Further, a coloring dye which develops a color upon irradiation with light may be contained. Examples of the color-forming dye include a combination of a leuco dye or a fluoran dye and a halogen compound. For example, tris (4-dimethylamino-2-methylphenyl) methane [leuco crystal violet],
Tris (4-dimethylamino-2-methylphenyl) methane [leucomalachite green] and the like. On the other hand, examples of the halogen compound include amyl bromide, isoamyl bromide, isobutylene bromide, ethylene bromide, diphenylmethyl bromide, benzal bromide, methylene bromide, tribromomethylphenylsulfone, carbon tetrabromide, tris (2 , 3
-Dibromopropyl) phosphate, trichloroacetamide, amyl iodide, isobutyl iodide, 1,1,1
-Trichloro-2,2-bis (p-chlorophenyl) ethane, hexachloroethane and the like. Further, a combination of a biimidazole compound and a leuco dye is also useful.
【0030】さらに、該光重合性組成物には、必要に応
じて可塑剤等の添加剤を含有してもよい。例えばジエチ
ルフタレート等のフタル酸エステル類、p−トルエンス
ルホンアミド、トリエチレングリコールジアセテート類
が例示できる。本発明は、上記光重合性組成物からなる
光重合性層と、該光重合性層を支持する支持層とからな
る。支持層としては、活性光を透過する透明なものが望
ましい。Further, the photopolymerizable composition may contain additives such as a plasticizer, if necessary. Examples thereof include phthalic esters such as diethyl phthalate, p-toluenesulfonamide, and triethylene glycol diacetates. The present invention comprises a photopolymerizable layer comprising the above photopolymerizable composition, and a support layer for supporting the photopolymerizable layer. The support layer is desirably a transparent layer that transmits active light.
【0031】活性光を透過する支持層としては、ポリエ
チレンテレフタレートフィルム、ポリビニルアルコール
フィルム、ポリ塩化ビニルフィルム、塩化ビニル共重合
体フィルム、ポリ塩化ビニリデンフィルム、塩化ビニリ
デン共重合フィルム、ポリメタクリル酸メチル共重合体
フィルム、ポリスチレンフィルム、ポリアクリロニトリ
ルフィルム、スチレン共重合体フィルム、ポリアミドフ
ィルム、セルロース誘導体フィルムなどが挙げられる。
これらのフィルムは必要に応じ延伸されたものも使用可
能である。厚みは薄い方が画像形成性、経済性の面で有
利であるが、強度を維持する必要等から10〜30μm
のものが一般的である。Examples of the support layer that transmits active light include polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, and polymethyl methacrylate copolymer. Examples include a coalesced film, a polystyrene film, a polyacrylonitrile film, a styrene copolymer film, a polyamide film, and a cellulose derivative film.
These films may be stretched if necessary. A thinner thickness is advantageous in terms of image formability and economy, but it is 10 to 30 μm in order to maintain strength.
Is common.
【0032】支持層と積層した光重合性層の反対側の表
面に、必要に応じて保護層を積層する。この保護層の重
要な特性は、光重合性層との密着力について、支持層よ
りも保護層の方が充分小さく容易に剥離できることであ
る。例えばポリエチレンフィルム、ポリプロピレンフィ
ルム等がある。また、特開昭59−202457号公報
に示された剥離性の優れたフィルムを用いることができ
る。光重合性層の厚みは用途において異なるが、印刷回
路板作製用には5〜100μm、好ましくは5〜90μ
mであり、薄いほど解像度は向上する。また厚いほど膜
強度が向上する。A protective layer is laminated on the surface opposite to the photopolymerizable layer laminated with the support layer, if necessary. An important property of this protective layer is that the protective layer is sufficiently smaller than the support layer in terms of adhesion to the photopolymerizable layer and can be easily peeled off. For example, there are a polyethylene film and a polypropylene film. Further, a film having excellent releasability as disclosed in JP-A-59-202457 can be used. Although the thickness of the photopolymerizable layer varies depending on the application, it is 5 to 100 μm, preferably 5 to 90 μm for producing a printed circuit board.
m, and the thinner, the higher the resolution. Also, the film thickness increases as the thickness increases.
【0033】次に、本発明の光重合性樹脂積層体を用い
た印刷回路板の作成工程は、従来技術に準ずるものであ
るが簡単に述べる。まず、ラミネーターを用い、保護層
がある場合は、保護層を剥離した後、光重合性層を印刷
回路板用基板の金属表面に加熱圧着し積層する。この時
の加熱温度は一般的に40〜160℃である。次に必要
ならば支持層を剥離しマスクフィルムを通して活性光に
より画像露光する。次に、露光後光重合層上に支持層が
ある場合には必要に応じてこれを除き、続いてアルカリ
水溶液の現像液を用いて未露光部を現像除去する。アル
カリ水溶液としては、炭酸ナトリウム、炭酸カリウム、
水酸化ナトリウム、水酸化カリウム等の水溶液を用い
る。Next, the process for producing a printed circuit board using the photopolymerizable resin laminate of the present invention is based on the prior art, but will be briefly described. First, using a laminator, if there is a protective layer, after peeling off the protective layer, the photopolymerizable layer is laminated on the metal surface of the printed circuit board substrate by heating and pressing. The heating temperature at this time is generally 40 to 160 ° C. Next, if necessary, the support layer is peeled off, and image exposure is performed with actinic light through a mask film. Next, if there is a support layer on the photopolymerized layer after exposure, the support layer is removed if necessary, and then the unexposed portion is developed and removed using a developing solution of an alkaline aqueous solution. As the alkaline aqueous solution, sodium carbonate, potassium carbonate,
An aqueous solution of sodium hydroxide, potassium hydroxide or the like is used.
【0034】これらは光重合性層の特性に合わせて選択
されるが、0.5%〜3%の炭酸ナトリウム水溶液が一
般的である。次に現像により露出した金属面をエッチン
グ法または、めっき法のいずれか既知の方法をもちいて
金属の画像パターンを形成する。その後、硬化レジスト
画像は一般的に現像で用いたアルカリ水溶液よりも更に
強いアルカリ性水溶液により剥離される。剥離用のアル
カリ水溶液についても特に制限はないが、1〜5%の水
酸化ナトリウム、水酸化カリウムの水溶液が一般的に用
いられる。さらに現像液や剥離液に少量の水溶性溶媒を
加える事は可能である。These are selected in accordance with the characteristics of the photopolymerizable layer, and a 0.5% to 3% aqueous sodium carbonate solution is generally used. Next, a metal image pattern is formed on the metal surface exposed by the development by using a known method such as an etching method or a plating method. Thereafter, the cured resist image is generally stripped off with an aqueous alkaline solution that is stronger than the aqueous alkaline solution used for development. The aqueous alkali solution for peeling is not particularly limited, but an aqueous solution of 1 to 5% sodium hydroxide or potassium hydroxide is generally used. Further, it is possible to add a small amount of a water-soluble solvent to a developer or a stripper.
【0035】[0035]
【実施例】以下に実施例を示す。Examples are shown below.
【0036】[0036]
【実施例1】表1の実施例1の欄に記載の化合物を均一
に溶解した。次にこの混合溶液を厚さ25μmのポリエ
チレンテレフタレートフィルムにバーコーターを用いて
均一に塗布し、90℃の乾燥機中で5分間乾燥して光重
合性層の厚さ50μmの光重合性樹脂積層体を得た。そ
の後光重合性層の、ポリエチレンテレフタレートフィル
ムを積層していない表面上に35μmのポリエチレンフ
ィルムを張り合わせて積層フィルムを得た。一方、35
μm圧延銅箔を積層した銅張積層板を湿式バフロール
(スリーエム社製、商品名スコッチブライト#6002
連)研磨した表面にこの積層フィルムのポリエチレンフ
ィルムを剥しながら光重合層をホットロールラミネータ
ーにより105℃でラミネートして積層体を得た。Example 1 The compounds described in Example 1 of Table 1 were uniformly dissolved. Next, this mixed solution is uniformly applied to a 25 μm-thick polyethylene terephthalate film using a bar coater, and dried in a drier at 90 ° C. for 5 minutes to laminate a 50 μm-thick photopolymerizable resin layer. I got a body. Thereafter, a 35 μm polyethylene film was laminated on the surface of the photopolymerizable layer on which the polyethylene terephthalate film was not laminated to obtain a laminated film. On the other hand, 35
A copper-clad laminate obtained by laminating a μm rolled copper foil is wet-buffered (trade name: Scotch Bright # 6002, manufactured by 3M).
Continuously) The photopolymerized layer was laminated at 105 ° C. with a hot roll laminator while peeling off the polyethylene film of the laminated film on the polished surface to obtain a laminated body.
【0037】この積層体にマスクフィルムを通して、超
高圧水銀ランプ(オーク製作所、HMW−201KB)
により80mj/cm2 で光重合性層を露光した。続い
てポリエチレンテレフタレートフィルムを剥離した後、
60℃の1重量%炭酸ナトリウム水溶液を約70秒スプ
レーして、未露光部分を溶解除去したところ良好な硬化
画像を得た。以下の方法で評価した。評価結果を表1に
示す。剥離性評価試験結果は48秒で剥離可能であっ
た。An ultra-high pressure mercury lamp (Oak Seisakusho, HMW-201KB) is passed through a mask film through this laminate.
To expose the photopolymerizable layer at 80 mj / cm 2 . Then, after peeling off the polyethylene terephthalate film,
A 1% by weight aqueous solution of sodium carbonate at 60 ° C. was sprayed for about 70 seconds to dissolve and remove the unexposed portions, thereby obtaining a good cured image. Evaluation was made by the following method. Table 1 shows the evaluation results. The result of the peelability evaluation test was that peeling was possible in 48 seconds.
【0038】(1)感度試験 上記の方法で銅張積層基板に光重合性層を積層した後、
ステップタブレット(ストウファー社製21段ステップ
タブレット)を通し、上記の超高圧水銀ランプにより1
00mj/cm2 で露光した。次いでポリエチレンテレ
フタレートフィルムを剥離した後、上記と同様の方法に
より現像した。この時のステップタブレットの、完全に
膜が残っている最大段数を読む。 (2)柔軟性試験 フレキシブル銅張積層板(ニカフレックスF−30T、
ニッカン工業)に光重合層を積層した後、上記と同様の
方法により露光、現像し、幅20cm、長さ20cmの
硬化レジストパターンを作り、直径2mmから10mm
の金属棒に当て、おり曲げて数回しごき、レジストパタ
ーンを観察する。柔軟性の良好な組成物では2mmの金
属棒でも、割れ、浮きは発生せず、この時は2mmと評
価する。即ち数値の小さいほど柔軟性が良好ということ
になる。 (3)めっき性試験 上記と同様の方法でラミネートした積層体に、ポジ型マ
スクを通して、超高圧水銀ランプにより60mj/cm
2 で露光した。同様の方法で現像した後、更に下記のめ
っき工程を実施した。硬化レジスト剥離後、光学顕微鏡
で観察する。 脱脂工程; 酸性クリーナーFR(シェーリング社、商標) 20
%、硫酸10% 40℃ 4分間浸漬 水洗工程 常温、浸漬、及びスプレー ソフトエッチング工程; 過硫酸アンモニウム水溶液200g/l、常温 60秒 水洗工程; 常温、浸漬、及びスプレー 硫酸処理工程; 硫酸10% 室温 2分 硫酸銅めっき工程; めっき液組成 硫酸銅 70g/l 硫酸(98%) 190g/l 塩酸(36%) 0.12g/l カッパーグリームPCM (ジャパンロナール社商標) 10cc/l 純水にて全量1リットルにする。(1) Sensitivity test After laminating a photopolymerizable layer on a copper-clad laminated substrate by the above method,
After passing through a step tablet (21-step step tablet manufactured by Stouffer), 1
Exposure was performed at 00 mj / cm 2 . Next, after peeling off the polyethylene terephthalate film, development was carried out in the same manner as described above. At this time, read the maximum number of steps on the step tablet where the film remains completely. (2) Flexibility test Flexible copper-clad laminate (Nicaflex F-30T,
After laminating the photopolymerization layer on Nikkan Kogyo Co., Ltd., it is exposed and developed by the same method as described above to form a cured resist pattern having a width of 20 cm and a length of 20 cm, and has a diameter of 2 mm to 10 mm.
, And bend it several times, and iron it several times to observe the resist pattern. In the case of a composition having good flexibility, even a metal rod of 2 mm does not crack or float, and is evaluated as 2 mm at this time. That is, the smaller the numerical value, the better the flexibility. (3) Plating property test A laminate was laminated in the same manner as described above, and passed through a positive mask through an ultra-high pressure mercury lamp at 60 mj / cm.
Exposure at 2 . After developing by the same method, the following plating step was further performed. After peeling off the cured resist, observe with an optical microscope. Degreasing step; Acid cleaner FR (trademark, Schering) 20
%, Sulfuric acid 10% immersion for 4 minutes at 40 ° C. water washing process room temperature, immersion and spray soft etching process; ammonium persulfate aqueous solution 200 g / l, normal temperature for 60 seconds water washing process; normal temperature, immersion and spray sulfuric acid treatment process; sulfuric acid 10% room temperature 2 Minute Copper sulfate plating process; Plating solution composition Copper sulfate 70 g / l Sulfuric acid (98%) 190 g / l Hydrochloric acid (36%) 0.12 g / l Copper glyme PCM (trademark of Japan Ronal Company) 10 cc / l Total amount with pure water 1 To liters.
【0039】 電流密度 1.2A/dm2 常温 30分 水洗工程; 常温、浸漬、及びスプレー 半田めっき工程; めっき液組成 ホウフッカ第一錫(45%) 64cc/l ホウフッカ第一鉛(45%) 22cc/l ホウフッカ水素酸 200cc/l プルティンLAコンダクティビティソルト (ジャパンリーロナール社商標) 20g/l プルティンLAスターター 40cc/l (ジャパンリーロナール社商標) 純水にて全量1リットルにする。Current density 1.2 A / dm 2 Room temperature 30 minutes Rinse step; Room temperature, immersion and spray Solder plating step; Plating composition Hoofuka stannous (45%) 64 cc / l Hoofuka lead (45%) 22 cc / L Houfukka Hydroic Acid 200cc / l Plutin LA Conductivity Salt (trademark of Japan Lee Ronal Co.) 20g / l Plutin LA Starter 40cc / l (trademark of Japan Lei Ronal) Make up to 1 liter with pure water.
【0040】電流密度 1.0A/dm2 10分 (4)剥離性評価試験 上記と同様の方法により得た硬化レジストパターンを、
3%水酸化ナトリウム水溶液、50℃に浸漬し、硬化レ
ジストパターンが基板から剥離するまでの最小時間を測
定する。Current density: 1.0 A / dm 2 10 minutes (4) Peelability evaluation test The cured resist pattern obtained by the same method as above
It is immersed in a 3% aqueous sodium hydroxide solution at 50 ° C., and the minimum time until the cured resist pattern is peeled from the substrate is measured.
【0041】○;50秒未満で剥離可能 △;50秒以上65秒未満で剥離可能 ×;65秒以上で剥離可能○: Peelable in less than 50 seconds Δ: Peelable in 50 seconds or more and less than 65 seconds ×: Peelable in 65 seconds or more
【0042】[0042]
【実施例2〜4、比較例1〜4】実施例1と同様の方法
により表1記載の組成の光重合性樹脂積層体を得た。感
度試験、柔軟性試験、めっき性試験、剥離性試験を行っ
た。結果を表1及び表2に示す。なお、表1および表2
で用いられている記号は下記のとおりである。 B−1;メタクリル酸メチル 57重量%、メタアクリ
ル酸 23重量%、アクリル酸ブチル 10重量%の三
元共重合体のメチルエチルケトン溶液(固形分濃度 3
2%、重量平均分子量 8.5万) M−1;ヘキサメチレンジイソシアネートとオリゴプロ
ピレングリコールモノメタクリレートとの反応物 M−2〜M−8;Examples 2 to 4 and Comparative Examples 1 to 4 Photopolymerizable resin laminates having the compositions shown in Table 1 were obtained in the same manner as in Example 1. A sensitivity test, a flexibility test, a plating property test, and a peelability test were performed. The results are shown in Tables 1 and 2. Table 1 and Table 2
The symbols used in are as follows. B-1: Methyl methacrylate 57% by weight, methacrylic acid 23% by weight, butyl acrylate 10% by weight of a terpolymer in methyl ethyl ketone (solid content 3
2%, weight average molecular weight 85,000) M-1; reaction product of hexamethylene diisocyanate and oligopropylene glycol monomethacrylate M-2 to M-8;
【0043】[0043]
【化4】 Embedded image
【0044】M−9;2,2−ビス(4−メタクリロキ
シペンタエトキシフェニル)プロパン A−1;ベンゾフェノン A−2;4,4′−ジエチルアミノベンゾフェノン A−3;マラカイトグリーン A−4;ロイコクリスタルバイオレット A−5;トリブロモメチルフェニルスルフォン A−6;2−(o−クロロフェニル)−4,5−ジフェ
ニルイミダゾリル二量体M-9; 2,2-bis (4-methacryloxypentaethoxyphenyl) propane A-1; benzophenone A-2; 4,4'-diethylaminobenzophenone A-3; malachite green A-4; leuco crystal Violet A-5; Tribromomethylphenylsulfone A-6; 2- (o-chlorophenyl) -4,5-diphenylimidazolyl dimer
【0045】[0045]
【表1】 [Table 1]
【0046】[0046]
【表2】 [Table 2]
【0047】[0047]
【発明の効果】本発明の光重合性樹脂積層体は、特に耐
めっき性、柔軟性、剥離性に優れた性能を示し、アルカ
リ現像型回路板作製用ドライフィルムレジストとして非
常に有用である。Industrial Applicability The photopolymerizable resin laminate of the present invention exhibits particularly excellent performance in plating resistance, flexibility and peelability, and is very useful as a dry film resist for producing an alkali-developed circuit board.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−202740(JP,A) 特開 平4−195050(JP,A) 特開 昭61−98716(JP,A) 特開 昭63−197939(JP,A) 特開 昭62−208042(JP,A) (58)調査した分野(Int.Cl.7,DB名) G03F 7/027 501 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-202740 (JP, A) JP-A-4-195050 (JP, A) JP-A-61-98716 (JP, A) JP-A-63-98716 197939 (JP, A) JP-A-62-208042 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G03F 7/027 501
Claims (2)
100〜600、重量平均分子量が2万〜50万の重合
体 20〜90重量%、 (2)下記化学式〔I〕で示される光重合成モノマー
2〜30重量%、 【化1】 (3)少なくとも二つの末端エチレン基を持つ光重合性
モノマー 5〜40重量%、 (4)光重合開始剤 0.01〜20重量%、 を含有し、かつ(2)の光重合性モノマーと、(3)の
光重合性モノマーとの合計が7〜60重量%であること
を特徴とする光重合性組成物からなる光重合性層と支持
層とからなるプリント配線板作成用の光重合性樹脂積層
体。(1) 20 to 90% by weight of a polymer having a carboxyl group content of 100 to 600 as an acid equivalent and a weight average molecular weight of 20,000 to 500,000, and (2) a light represented by the following chemical formula [I]. Heavy synthetic monomer
2 to 30% by weight, (3) 5 to 40% by weight of a photopolymerizable monomer having at least two terminal ethylene groups, (4) 0.01 to 20% by weight of a photopolymerization initiator, and (2) a photopolymerizable monomer. Wherein the total of the photopolymerizable monomers of (3) and (3) is 7 to 60% by weight, wherein the photopolymerization for preparing a printed wiring board comprises a photopolymerizable layer comprising a photopolymerizable composition and a support layer. Resin laminate.
金属表面に、請求項1記載の光重合性樹脂積層体を加熱
圧着して積層し、次に必要により支持層を剥離し、マス
クフィルムを通して活性光により画像露光し、露光後光
重合性樹脂層上に支持層がある場合には必要に応じてこ
れを除き、次いで、アルカリ水溶液の現像液を用いて未
露光部を除去し、現像により露出した金属面にエッチン
グ法またはめっき法を施すことにより金属の画像パター
ンを形成し、その後、現像で用いたアルカリ水溶液より
も更に強いアルカリ水溶液により硬化レジスト画像を剥
離することを特徴とするプリント配線板の作成方法。2. A laminator is used to laminate the photopolymerizable resin laminate according to claim 1 on a metal surface of a substrate for a printed circuit board by thermocompression bonding. Through an image exposure with active light through, if the support layer on the photopolymerizable resin layer after exposure, if necessary, remove this, then remove the unexposed parts using a developing solution of an alkaline aqueous solution, and develop Forming a metal image pattern by subjecting the exposed metal surface to an etching method or a plating method, and then peeling off the cured resist image with an alkaline aqueous solution stronger than the alkaline aqueous solution used in the development. How to make a wiring board.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31048492A JP3267703B2 (en) | 1992-11-19 | 1992-11-19 | New photopolymerizable resin laminate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31048492A JP3267703B2 (en) | 1992-11-19 | 1992-11-19 | New photopolymerizable resin laminate |
Publications (2)
Publication Number | Publication Date |
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JPH06161103A JPH06161103A (en) | 1994-06-07 |
JP3267703B2 true JP3267703B2 (en) | 2002-03-25 |
Family
ID=18005793
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Application Number | Title | Priority Date | Filing Date |
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JP31048492A Expired - Lifetime JP3267703B2 (en) | 1992-11-19 | 1992-11-19 | New photopolymerizable resin laminate |
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JP (1) | JP3267703B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08240908A (en) * | 1994-12-29 | 1996-09-17 | Tokyo Ohka Kogyo Co Ltd | Photosensitive resin composition, photosensitive planographic printing plate using the same and production of printing plate material for planographic printing |
JPH10161308A (en) * | 1996-11-26 | 1998-06-19 | Asahi Chem Ind Co Ltd | Photopolymerizable resin composition and its use |
JPH10198027A (en) * | 1997-01-14 | 1998-07-31 | Asahi Chem Ind Co Ltd | Photopolymerizable resin and its use |
JP4517257B2 (en) * | 2000-04-25 | 2010-08-04 | 日立化成工業株式会社 | Photosensitive resin composition, photosensitive element using the same, resist pattern manufacturing method, and printed wiring board manufacturing method |
JP4488601B2 (en) * | 2000-07-13 | 2010-06-23 | 旭化成イーマテリアルズ株式会社 | Photosensitive resin laminate |
JP4519356B2 (en) * | 2001-04-26 | 2010-08-04 | 旭化成イーマテリアルズ株式会社 | Photosensitive resin laminate |
JP3883540B2 (en) * | 2002-03-12 | 2007-02-21 | 旭化成エレクトロニクス株式会社 | Photosensitive resin composition and use thereof |
-
1992
- 1992-11-19 JP JP31048492A patent/JP3267703B2/en not_active Expired - Lifetime
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JPH06161103A (en) | 1994-06-07 |
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