JP3316093B2 - Photosensitive laminated material and method for producing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensitive laminated material in which a photosensitive layer is laminated on a substrate and a method for producing the same.

[0002]

2. Description of the Related Art A photosensitive laminated material obtained by laminating a photosensitive layer such as a photosensitive resin layer on a substrate such as a glass substrate or a hard resin substrate is used as a photosensitive material used for manufacturing a printed wiring board and a color filter. I have. As a method for producing such a photosensitive laminated material, a long laminated sheet in which a photosensitive material layer and a plastic film for protecting the photosensitive material layer are laminated on a long flexible plastic sheet (support). Is prepared, and a rectangular substrate is sequentially bonded to the surface of the photosensitive material layer of the long laminated sheet along the length direction thereof, and then the long laminated sheet is cut between the substrates to form a plastic. A method of separating each substrate on which a sheet and a photosensitive layer are laminated has been proposed. When using the photosensitive laminated material thus manufactured, first, the uppermost plastic sheet is peeled off, and then the photosensitive layer is subjected to pattern exposure, then the photosensitive layer is developed, and a cured resin pattern is formed on the substrate. A method of forming is used.

[0003]

In general photosensitive laminated materials, the photosensitive layer (photosensitive material layer) is often formed of a soft resin having no self-supporting property. Therefore, in the case of using the above-mentioned method, the uppermost plastic sheet (which serves as a support in the state of a long laminated sheet and serves as a protective cover in the photosensitive laminated material) is used as the photosensitive layer. There is a problem that the operation of stripping without impairing the skill requires skill.

[0004]

The present invention comprises a rectangular substrate,
A photosensitive material layer in which a photosensitive material layer and a flexible plastic sheet are laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are protruded from both ends of the substrate, and The material layer is cut and separated at a position inside the substrate end, and a plastic film is disposed between the lower surface of the photosensitive material layer outside the cut position and the substrate end surface. A photosensitive laminated material (hereinafter referred to as photosensitive laminated material A). While the photosensitive laminated material A is running a long laminated sheet in which a flexible plastic sheet, a photosensitive material layer, and a plastic film are laminated in this order,
The laminate of the photosensitive material layer and the plastic film
At the positions on both side edges of the substrate bonding area
After continuous cutting in the direction of
Continuously remove the plastic film, then add
The surface of the photosensitive material layer in the area from which the tick film has been removed,
A separately prepared rectangular substrate is joined, and then the laminated sheet is
It can be easily manufactured by a method including cutting in the width direction at the end of the substrate .

The present invention also provides a rectangular substrate, a photosensitive material layer,
A flexible plastic sheet is a photosensitive laminated material laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are protruded from one end of the substrate, and the photosensitive material layer is Is cut and separated at a position inside the substrate end, and a plastic film is disposed between the lower surface of the photosensitive material layer outside the cut position and the surface of the substrate end. (Hereinafter referred to as photosensitive laminated material B). The photosensitive laminated material B is a flexible plastic sheet,
While running the photosensitive material layer, and a long laminated sheet in which the plastic film is laminated in this order, the laminate portion of the photosensitive material layer and the plastic film,
At the position on the edge on one side of the substrate bonding area, the length
After continuous cutting in the direction of
The plastic film is continuously removed, then the plastic
The surface of the photosensitive material layer in the area where the stick film has been removed
Is bonded to a separately prepared rectangular substrate, and then the laminated sheet is bonded.
The substrate can be easily manufactured by using a method of cutting the substrate in the width direction at the end of the substrate .

FIG. 1 shows the basic structure of the photosensitive laminate material A. The photosensitive laminated material A has a basic structure in which a rectangular (including rectangular and square) substrate 11, a photosensitive material layer 12, and a flexible plastic sheet 13 are laminated in this order. Part of each of the plastic sheets 13 (12a, 12b, 13a, 13b)
Are protruded from both ends of the substrate, and the photosensitive material layer 12 is cut and separated at positions 14a and 14b inside the ends of the substrate, and the photosensitive material layer 12 is provided outside the cut position. Is characterized in that plastic films 15a and 15b are disposed between the lower surface of the substrate and the end surface of the substrate.

FIG. 2 shows the basic structure of the photosensitive laminated material B. The photosensitive laminated material B has a basic configuration in which a rectangular (including similarly rectangular and square) substrate 21, a photosensitive material layer 22, and a flexible plastic sheet 23 are laminated in this order. Each part (22a, 23a) of the flexible plastic sheet 23 is protruded from one end of the substrate, and the photosensitive material layer 22 is
It is cut and separated at a position 24a inside the end of the substrate, and a plastic film 25a is disposed between the lower surface of the photosensitive material layer outside the cut position and the surface of the end of the substrate. It is characterized by.

Next, an example of a method for producing the photosensitive laminated material A will be described with reference to the drawings. FIG. 3 is a schematic view of an example of an apparatus (photosensitive layer laminating apparatus) that can be used for producing the photosensitive laminated material A. The photosensitive layer laminating apparatus is composed of a sheet substrate turning section, a sheet substrate heating section, a protective film / photosensitive layer cutting section, a protective film removing section, a photosensitive layer thermocompression bonding section, a strip-shaped support cutting section, and a sheet substrate turning section. I have.

In the sheet substrate turning-over portion, the sheet substrate 32 sent by the conveying roller 33 from left to right in FIG.
Is held from below by an upside-down arm 35, lifted, and the arm is rotated, turned over, and placed on the transport roller 33, so that the thermocompression bonding surface of the sheet substrate 32 faces downward. The substrate holding of the inverted arm 35 is performed using vacuum suction, a mechanical hand, or the like, but the back side or the end surface of the sheet substrate is always held and the surface is not in contact. Instead of the transport roller 33, roller transport, belt transport, carrier transport, robot transport, or the like may be used. Until the sheet substrate 32 is turned over, the back contact conveyance may be performed. After the sheet substrate 32 is turned over, the conveyance roller 33 is attached to the lower surface.
The sheet is conveyed by edge contact of the sheet substrate 32 so as not to come into contact.

In the sheet substrate heating section, the sheet substrate 32 is heated by the heater 34 to a temperature of about 50 to 110 ° C. As the heater 34, a far infrared heater, a nichrome wire heater,
A hot air heater or the like can be used. The heater 34 is a sheet substrate 3
2 may be provided above, below, or both of them. Examples of the sheet substrate 32 include a copper-clad glass epoxy resin substrate for a printed circuit board and a glass substrate.

A belt-like support (elongated laminated sheet) 31 with a photosensitive layer (photosensitive material layer) attached with a protective film is unwound from a separately provided roll 43, and the protective film is run while running. In the photosensitive layer cutting portion, the protective film and the photosensitive layer are cut together at the boundary between the laminated region (region to be bonded to the substrate) and the non-laminated region (region not bonded to the substrate) (the support is not cut). Then, the protective film in the laminated region (region to be bonded to the substrate) is removed in the protective film removing section.

The protective film / sensitive material layer cutting section includes a fixed base 39 movable in the conveying direction of the photosensitive layer-attached band support while holding and holding the photosensitive layer-attached band-shaped support 31; And a slide table 40 to which a cutter blade 41 is fixed.

A fixing base 3 for fixing a belt-shaped support having a photosensitive layer.
Reference numeral 9 denotes a belt-like support with a photosensitive layer while holding the belt-like support with a photosensitive layer fixedly when cutting the protective film and the photosensitive layer.
It moves at the same speed as the traveling speed, and when the protection film / photosensitive layer cutting is completed, the belt-shaped support 31 with the photosensitive layer is released,
Then return to the starting position.

The slide table 40 has a cutter blade 41 oriented perpendicular to the moving direction of the belt-like support 31 with the photosensitive layer.
Are arranged in accordance with the width of the area where the protective film is to be left, and are brought into contact with the surface of the protective film on the photosensitive layer-attached support 31 with a constant adjustable blade pressure using, for example, a cylinder or a spring. And fix it.

The cutting of the protective film and the photosensitive layer is performed as follows. First, the fixing table 39 holds the band-shaped support 31 with the photosensitive layer, and while moving at the same speed as the traveling speed of the band-shaped support 31, the cutter blade 41 of the slide table 40 moves the band-shaped support 31 on the fixed table 39. Is pressed against the surface of the protective film and moves in the cutting direction. The cutter blade 41 acts so as to cut only the protective film and the photosensitive layer on the photosensitive layer-attached support 31. Then, when the cutter blade 41 of the slide table 40 moves to at least the end of the band-shaped support 31 with the photosensitive layer, the cutter blade 41 retreats.

In the above-described protective film / photosensitive layer cutting step, the fixing table 39 is moved in synchronization with the movement of the photosensitive layer-attached band-shaped support 31, so that the protective film and the photosensitive layer are cut with the photosensitive layer. Even when the belt-shaped support is running and moving, the operation is performed at right angles to the width direction of the belt-shaped support 31 with the photosensitive layer.

At the time of cutting the protective film and the photosensitive layer, it is preferable to take a clean countermeasure, such as suctioning dust generated by vacuum, or flushing dust generated by a down-flow clean air downstream without any problem of contamination. Further, in order to improve the sharpness of the cutter blade 41 and reduce the generation of chips in the photosensitive layer, the cutter blade 41 and the fixing table 39 and / or the belt-shaped support 31 with the photosensitive layer are heated to about 50 to 100 ° C. May be.

Next, the protective film removing section is located after the protective film / photosensitive layer cutting section in the transport system of the belt-shaped support with the photosensitive layer, and the unwinding roller 44b of the adhesive tape.
The protective film removing unit, which includes a collecting roller 44a and a pressing roller 44c against the protective film, moves in a direction substantially perpendicular to the plane of the photosensitive layer-attached support.

When the cutting line at the head of the protective film of the belt-like support 31 with a photosensitive layer (the leading end of the lamination area on the substrate) is conveyed to the protective film removing section, the protective film removing unit presses the adhesive tape. The roller 44c is pressed against the protective film, and the protective film and the adhesive tape come into close contact. The unwinding roller 44b, the collecting roller 44a, and the pressing roller 44c of the adhesive tape are rotated at the same speed as the belt-shaped support 31 with the photosensitive layer, and the protective film is removed so as to be wound around the collecting roller 44a while peeling off the protective film from the photosensitive layer. To go. Then, when the protective film removing unit comes to a position just before the cutting portion, which is the boundary with the next non-lamination region, the protective film removing unit is separated from the surface of the belt-like support 31 with the photosensitive layer. Therefore, only the protective film in the laminated region (region to be joined) is removed, and the protective film in the non-laminated region remains on the photosensitive layer without being wound up by the adhesive roll.

As a method for removing the protective film from the photosensitive layer of the belt-like support 31, other methods such as an electrostatic method, a vacuum method, and a welding method can be used. A pickup, a non-contact type that blows air or the like can be used. As a method for removing the protective film using a vacuum, a method using a vacuum drum having a high vacuum chamber and a low vacuum chamber can be exemplified. That is,
In this method, only the portion of the protective film to be removed (that is, the lamination region) under running is brought into contact with the surface connected to the high vacuum chamber of the rotating vacuum drum, and this is attracted and peeled off from the photosensitive layer. The protective film in the non-laminated area that subsequently appears travels in contact with the surface of the vacuum drum that connects to the low vacuum chamber, and thus moves to the apparatus for laminating the substrate sheet while being held on the photosensitive layer.

Next, in the thermocompression roller section, a pair of thermocompression rollers is provided at a position where the upper thermocompression roller 38 and the lower thermocompression roller 37 below the sheet substrate oppose each other. Both ends of the pressure roller 38 have a structure in which pressure is applied downward by a cylinder or the like. The upper and lower thermocompression rollers 37 and 38 cooperate to thermocompress the photosensitive layer of the band-shaped support 31 with a photosensitive layer on the sheet substrate 32 and to support and transport the sheet substrate 32. The upper and lower thermocompression rollers 37 and 38 are connected to the sheet substrate 32.
When they are not sandwiched, they face each other in a non-contact state with a gap smaller than the thickness of the sheet substrate. Thermocompression rollers 37, 3
Numeral 8 is preferably a roller made of stainless steel or the like whose roller surface is coated with an elastic material such as silicone rubber or the like.
Heat to ~ 150 ° C.

The belt-shaped support 31 with a photosensitive layer is first wound around a lower thermocompression roller 37, and its tip is held by a belt 45 with suction at the outlet side of the thermocompression rollers 37 and 38. The suction-equipped belt 45 moves at the same moving speed as the photosensitive layer-equipped belt-shaped support 31, and the vicinity of the tip of the photosensitive layer-equipped belt-shaped support 31 is moved by the action of a vacuum chamber 46 installed below the perforated conveyor belt. Suction is held. When the sheet substrates 32 are not continuous, the thermocompression rollers 37 and 38 and the belt 45 with the suction are rotating in synchronization with the moving speed while holding the belt-like support 31 with the photosensitive layer.

Next, the step of bonding (thermocompression bonding) the photosensitive layer to the sheet substrate will be described. When the preheated and inverted sheet substrate 32 is sent from the left, the sheet substrate pushing mechanism temporarily stops and waits. The sheet substrate extruding mechanism is provided at a portion where the protective film is removed from the belt-like support 31 with the photosensitive layer (an area where the protective film is not present).
With a photosensitive layer conveyed at a constant speed such that the end of the protective film is located at a predetermined position on the sheet substrate 32 by sensing the edge of the sheet using a change in reflectance or transmittance. The sheet substrate 32 is extruded between the thermocompression rollers 37 and 38 at an appropriate timing by an extruding mechanism 36 in synchronization with the belt-shaped support 21 . At the same time as the sheet substrate 32 enters the gap, pressure is applied from above by the thermocompression roller 38, and the band support 31 with the photosensitive layer and the sheet substrate 32 are thermocompressed. And the sheet substrate 3
When the belt-shaped support 31 with the photosensitive layer is thermocompression-bonded to the rear end position of 2, the pressure of the upper thermocompression roller 38 is released and the support slightly moves away from the surface of the sheet substrate 32.

On the other hand, the next sheet substrate is pre-heated and then turned over, and stands by in the sheet substrate pushing mechanism. When the above steps are completed and the sheet substrate extruding mechanism detects the leading end of the next protective film removed portion of the belt-shaped support 31 with the photosensitive layer, the leading end of the protective film removed portion is similarly placed at a predetermined position on the sheet substrate. So that the sheet substrate can be moved in time with the thermocompression bonding roller 3 in synchronization with the belt-like support 31 with the photosensitive layer running at a constant speed.
Extrude into the gap between 7 and 38. As described above, the belt-like support 31 with a photosensitive layer and the sheet substrate are successively thermocompression-bonded without stopping the running of the support 31 with a photosensitive layer.

The holding of the leading end of the photosensitive layer-attached belt-shaped support 31 by the belt 45 with suction is a temporary holding when the sheet substrate 32 is not continuously put into the thermocompression rollers 37, 38. When 32 is supplied and lamination is continuously performed, the vacuum chamber of the belt with suction 45 is inoperative. Then, the sheet substrate 32 is conveyed to the right side in FIG.

A fixed blade 4 is provided on the lower side of the band-shaped support cutting portion.
8, a rotary blade 47 is installed on the upper side, and when the belt-like support 31 with the photosensitive layer to which the sheet substrate 32 is joined moves, the protective film and the photosensitive film in the region between the sheet substrate and the next sheet substrate are exposed. The portion where the layer and the layer remain is cut, and the sheet substrate is sequentially cut.

The belt-shaped support 31 with a photosensitive layer is thermocompression-bonded,
The detached sheet substrate 32 is conveyed to the sheet substrate reversing portion with the belt-like support projecting from both ends of the substrate, and the thermocompression bonding member is moved from above to the substrate reversing arm 4.
9 and hold the back surface, lift the substrate reversing arm 49, turn the thermocompression-bonded body over, and place the thermocompression-bonded body on the transport roller, so that the thermocompression-bonded surface of the sheet substrate 32 faces upward. It is transported to the next step (not shown) or collected in a sheet substrate cassette (not shown).

FIG. 4 shows the above-mentioned belt-shaped support 31 with a photosensitive layer.
It is sectional drawing of an example. That is, a photosensitive layer (photosensitive material layer) 51 is provided on one surface of the belt-shaped support 50, and a protective film 52 for protecting the photosensitive layer 51 is provided on the surface of the photosensitive layer 51. As the belt-like support 50, a film (generally, 1-inch) generally made of polyethylene terephthalate, polypropylene or other polymer is used.
Having a thickness of 0-200 μm). The photosensitive layer 51 is usually formed of a photopolymerizable resist, and generally has a layer thickness of 1 to 3 μm. The photopolymerizable resist is not particularly limited, and may be any material. In order to improve the thermocompression bonding property, an intermediate layer may be provided between the belt-shaped support 50 and the photosensitive layer 51. This intermediate layer can be formed of, for example, a resin such as polyvinyl alcohol.
It has a layer thickness of ５０50 μm.

FIG. 5 is a diagram schematically showing the change of the laminated structure in the laminating operation shown in FIG. 3, and the patterning using the photosensitive laminated material of the present invention. (I)
Shows a cross-section of a belt-like support with a photosensitive layer including the support 50, the photosensitive layer 51, and the protective film 52 in a state where the protective film in the lamination region (joining region) is removed. The state (B) in which the photosensitive layer surface of the photosensitive layer-attached support with the sheet substrate 53 and the sheet substrate 53 are thermocompression-bonded and the photosensitive layer-attached support with the photosensitive layer is cut at both ends of the substrate sheet is shown in (B). ing. This photosensitive laminate (b) corresponds to the photosensitive laminate material A of the present invention. Patterning (imagewise exposure) using the photosensitive laminated material of (b), followed by development processing,
Step of obtaining a cured replica of the photosensitive resin layer), one of the ends (or both),
As shown in (c), when the support is lifted upward, the support is easily peeled off from the substrate sheet to which the photosensitive layer has been bonded.
Therefore, in this operation, the number of accidents in which the photosensitive layer is damaged is significantly reduced. Next, as shown in (d), the photosensitive layer 51 is exposed to ultraviolet rays via a pattern mask 54, and a pattern is printed on the photosensitive layer 51. Then
By performing a development process by a known method, the unexposed portion of the photosensitive layer 51 is dissolved in the developing solution, and only the exposed portion remains on the substrate sheet, and as shown in (e), is patterned on the sheet substrate. The formed photosensitive layer is formed. Note that, depending on the material of the photosensitive layer, the exposed portion may be developed and dissolved to leave an unexposed portion. Furthermore, a functional image can be formed using the patterned photosensitive layer, or the substrate can be etched using the remaining portion of the photosensitive layer as a resist.

Next, an example of an apparatus used for producing the photosensitive laminated material B of the present invention, that is, an auto-cut laminator for thermocompression-bonding a belt-like support with a photosensitive layer on a sheet substrate while cutting the support into a sheet shape. Will be described with reference to FIG.

First, the structure of the auto cut laminator will be described. As shown in FIG. 6A, in this apparatus, the sheet substrate 62 is transported from left to right by a transport mechanism mainly including transport rollers 63. Heaters 64 for heating the sheet substrate are provided above and below the transport roller 63.
Is installed.

The belt-like support 61 with the photosensitive layer with the protective film 82 is unwound from a roll 73, and the protective film / photosensitive layer cutter 71, the protective film peeling unit 74 and the rotary blade 77, and the vacuum plate 84
And travel between the support holding member 86 and the fixed blade 78.

The protective film / photosensitive layer cutter 71 can be moved across the belt-like support 61 with a photosensitive layer and pressed against the surface of the protective film 82 with an appropriate pressure as in the case of the apparatus shown in FIG. Then, the protective film 82 and the photosensitive layer 81 are cut together without cutting and separating the belt-shaped support 80.

The protective film peeling unit 74 includes an adhesive tape roll 74b, an adhesive tape pressing roller 74c, and a protective film collecting roll 74a. The adhesive tape 72 unwound from the adhesive tape roll 74b is wound around the adhesive tape pressing roller 74c with the adhesive layer facing outward, and is wound up by the protective film collecting roll 74a. The adhesive tape pressing roller 74c is pressed against the surface of the protective film 82 with an appropriate pressure by the action of an air cylinder or the like. Then, the protection film collecting roll 74a rotates so as to wind up the protection film 82 in accordance with the traveling speed of the belt-shaped support 61 with the photosensitive layer.

The rotary cutter is a rotary blade 77
By rotating the shaft attached with the torsion state,
The rotary blade 77 and the fixed blade 78 are engaged with each other, and cut so as to cross the belt-like support 61 with a photosensitive layer with a protective film located therebetween.

The vacuum plate 84 is connected to the belt-like support 8.
It has a function to vacuum-suck 0, and can be moved up and down by an air cylinder.
Is attached.

The support holding member 86 holds the strip-shaped support 80 by vacuum suction during the operation of the rotary blade, and is movable right and left together with the fixed blade 78.

The thermocompression roller is composed of an upper thermocompression roller 68 and a lower thermocompression roller 67. The air cylinder 88 operates to open and close according to the principle of leverage.
The pressure at the time of thermocompression bonding adjusts the air pressure of the air cylinder 88. Further, the thermocompression roller mechanism can be moved right and left in the transport direction. When thermocompression bonding of the sheet substrate 62 is performed by the thermocompression rollers 67 and 68, the thermocompression roller is moved to the left thermocompression operation position 90 to sandwich the sheet substrate 62, Otherwise, it is located at the right thermocompression roller retracting position 91.

Next, the operation of the auto cut laminator will be described. First, as shown in FIG. 6A, in preparation for laminating the belt-like support 61 with a photosensitive layer on the sheet substrate 62, the belt-like support 61 with a protective layer with the protective film 82 unwound from the upper roll 73 is used. Then, the vacuum plate 84 and the supporting body holding member 86 suction-hold. Then, the rotary blade 77 and the fixed blade 78 trim the leading end of the belt-like support 61 with a protective film in the moving direction, and peel off the protective film 82 from the leading end of the belt-like support 61 with a photosensitive layer. At this time, the tip of the protective film is brought into close contact with the pressure-sensitive adhesive tape pressing roller 74c of the protective film peeling unit 74 and the pressure-sensitive adhesive tape 72 wound around the protective film collecting roll 74a so as not to generate wrinkles. This completes the preparation for the lamination (joining) operation,
It waits for the sheet substrate 62 to be transported by the transport roller 63.

As shown in FIG. 6B, at the beginning of a series of laminating operations, the sheet substrate 62 preheated to a predetermined temperature by the heater is conveyed by the conveying roller 63.
Then, the leading end position 92 of the photosensitive layer lamination region is stopped at the thermocompression bonding operation position 90 based on a detection signal approaching the thermocompression bonding operation position 90.

Next, the support holding member 86 and the fixed blade 78
Is moved to the retreat position on the right side, and the tip of the belt-shaped support 61 with the photosensitive layer is separated from the support holding member 86. This time, the tip of the vacuum plate 84 (temporary heater section) 85 is attached to the belt with the photosensitive layer. The support 61 is held by suction,
Next, the tip of the belt-shaped support 61 with a photosensitive layer is heated by a temporary heater 85.

Next, as shown in FIG. 6C, the tip of the belt-shaped support with a photosensitive layer is pressed against the tip position 92 of the photosensitive layer lamination area of the sheet substrate 62 by a temporary heater 85 under an appropriate pressure. Then, the front end of the photosensitive laminated region of the sheet substrate and the front end of the belt-shaped support with a photosensitive layer are temporarily attached. Note that the auxiliary table 87 having the same shape as the vacuum plate 84 is raised to support the sheet substrate 62 from below so that the sheet substrate 62 is not bent by the pressing pressure at this time.

On the other hand, at the time of the temporary attachment, the cutter 71 located at the rear end position 94 of the photosensitive layer lamination area of the belt-like support 61 with a photosensitive layer is operated to cut the protective film 82 and the photosensitive layer 81.

Next, as shown in FIG. 6 (D), the suction holding of the belt-like support 61 with the photosensitive layer is released, and the vacuum plate 84 and its tip are separated from the photosensitive layer temporary attaching position. At the time when the detaching operation of the vacuum plate 84 is completed, the fixed blade 78 and the support holding member 86 are moved to the belt-like support 80.
Approach.

The thermocompression rollers 67 and 68 move from the thermocompression roller retracting position to the thermocompression operation position, and come into contact with the leading end position of the photosensitive layer lamination area of the sheet substrate 62 with an appropriate pressing force. The sheet substrate 62 is conveyed by the rotation force of the thermocompression rollers 67 and 68 and the rotation of the conveyance roller 63 is restarted, and the sheet substrate 62 is automatically supplied by the rotation of the thermocompression rollers 67 and 68 to supply the belt-shaped support 61 with the photosensitive layer. The belt-shaped support 61 with a photosensitive layer is thermocompression-bonded by a predetermined distance to the photosensitive layer bonding surface of the sheet substrate 62 from the front end position to the rear end position of the photosensitive layer lamination region.

While the sheet substrate 62 and the belt-like support 61 with the photosensitive layer are being conveyed by the thermocompression rollers 67 and 68, the peeling of the protective film 82 proceeds, and the protective film 8
2 and strip-shaped support 61 with photosensitive layer obtained by cutting photosensitive layer 81
At the rear end position 94 of the photosensitive layer lamination area of
Is completed.

By transporting the belt-like support 61 with the photosensitive layer,
When the rear end position 95 of the belt-like support with the photosensitive layer where the protective film 82 is left reaches the position of the cutter 71, the cutter 71 is operated to cut the protective film 82 and the photosensitive layer 81.

The rear end position of the area where the protective film 82 of the belt-like support 61 with a photosensitive layer is left is such that the photosensitive layer 81 is not in contact with the non-laminated area of the sheet substrate 62, and that The position is appropriately set between the rear end of the sheet substrate 62 and the position where the sheet is cut by the rotary cutter so that the protective film 82 does not remain at the front end position of the region.

Next, as shown in FIG. 6E, when the cutting line at the rear end position 95 of the area where the protective film 82 is left comes to the position of the adhesive tape pressing roller 74c, the adhesive tape pressing roller 74c is pressed again. Protective film 8
Start stripping 2.

Finally, as shown in FIG.
When the rear end position 93 of the photosensitive layer lamination area of the sheet substrate 62 reaches the thermocompression bonding operation position, the belt-like support 61 with a photosensitive layer is cut by the rotary cutter blade 77 and the fixed blade 78.

Next, the thermocompression rollers 67 and 68 open,
While each of them returns to the thermocompression roller retreat position, the thermocompression bonded sheet substrate 62 is conveyed to the right by the conveyance mechanism and is sent out to the next process by the apparatus. In the state of FIG. Wait until it is transported.

FIG. 7A is an explanatory view of a sheet substrate 62 on which a belt-like support with a photosensitive layer obtained by the auto-cut laminator of FIG. 6 is laminated. The leading end of the belt-shaped support 61 with a photosensitive layer is located at the leading end position 92 of the photosensitive layer lamination region of the sheet substrate 62. Further, the rear end position of the photosensitive layer lamination region of the belt-like support 61 with the photosensitive layer obtained by cutting the protective film 82 and the photosensitive layer 81 is located at the rear end position 93 of the photosensitive layer lamination region of the sheet substrate 62. Sheet substrate 62
In the region from the front end position 92 to the rear end position 93 of the photosensitive layer lamination region, the photosensitive layer 81 is laminated and adhered to the sheet substrate 62.

Further, the rear end of the support body is cut to the sheet substrate 6.
2 is located outside the rear end. In other words, at least the rear end position 93 of the photosensitive layer lamination region from the rear end of the sheet substrate 62.
The region of the sheet substrate 62
Is not in close contact. Further, the photosensitive layer 81 at the rear end position 93 of the photosensitive layer lamination area is cut. The photosensitive laminate of FIG. 7A corresponds to the photosensitive laminate material B of the present invention.

Next, a method of peeling the support from the photosensitive layer of the photosensitive laminated material having the structure shown in FIG.
This will be described with reference to (b). By holding the protruding portion of the support 61 with the photosensitive layer of the photosensitive laminate material having the configuration shown in FIG. 7A and pulling it upward and to the right, the rear end position of the photosensitive layer lamination region from the rear end of the sheet substrate 62. Since the protective film 82 is not in close contact with the sheet substrate 62, the region is easily peeled off at the interface. From the rear end position of the photosensitive layer lamination area where the photosensitive layer 81 is cut, the support 80 and the photosensitive layer 8 are determined by the adhesive force between the sheet substrate 62 and the photosensitive layer 81.
1 has a smaller adhesion, the photosensitive layer 81 and the support 80
Easily peeled off at the interface.

Referring to FIGS. 8 and 9, another method of peeling off the protective film of the auto-cut laminator which can be used for producing the photosensitive laminated material B of the present invention will be described. In the rotary cutter (rotary blade 117 and fixed blade 118), the protective film 122
The band-shaped support 101 with the photosensitive layer is cut in the state where the mark is attached. Next, a belt-like support 101 with a photosensitive layer is prepared for temporary attachment.
When the leading end of the belt is wound around the leading end of the vacuum plate 124, the adhesive tape pressing roller 114c around which the adhesive tape 112 is wound moves to the leading end of the vacuum plate 124 while unwinding the adhesive tape 112, and the belt-like support 101 with the photosensitive layer is moved. Press the adhesive tape 112 against the tip. The adhesive tape 112 adheres closely to the protective film 122,
While the adhesive tape pressing roller 114c moves to a fixed position, the protective film collecting roll 114a
The protective film 122 adhered to the film 12 is wound up, and the protective film up to the rear end position of the photosensitive layer laminated region cut by the protective film / photosensitive layer cutter is peeled and collected from the belt-like support with the photosensitive layer.

That is, the rotary cutter (the rotary blade 117 and the fixed blade 118) is used for the belt-shaped support 10 with the photosensitive layer.
The rear end of the region where the first protective film 122 remains and the front end of the belt-like support 101 with a photosensitive layer to be laminated on the next sheet substrate are cut at the same time. In addition, protective film
The photosensitive layer cutter only cuts the rear end position of the photosensitive layer laminated region of the belt-shaped support 101 with the photosensitive layer.

In the above-mentioned method, when cutting with the rotary cutter (the rotary blade 117 and the fixed blade 118), the belt-shaped support 101 with the photosensitive layer is in a state where the protective film 122 is attached. There is an advantage that adhesion can be prevented and defects can be reduced.

By using the photosensitive laminated material of the present invention, when performing an exposure operation for patterning or the like,
Since the front cover sheet can be easily peeled off without damaging the photosensitive layer, the patterning operation is facilitated and the reliability of the process is improved. Further, in the process of manufacturing the photosensitive laminated material A, since it is not necessary to perform an operation of cutting the photosensitive material layer in a state where its surface is exposed, a soft photosensitive material such as a photosensitive resist scatters during the cutting operation. It does not adhere to the surface of the photosensitive layer used for image formation, patterning, and the like, thereby causing deterioration in product quality. In the process of manufacturing the photosensitive laminated material B, the work of cutting the photosensitive material layer in a state where the surface is exposed is reduced, so that a soft photosensitive material such as a photosensitive resist scatters during the cutting work, It is possible to reduce the case where the product adheres to the surface of the photosensitive layer used for image formation and patterning and causes deterioration of product quality.

[Brief description of the drawings]

FIG. 1 is a schematic view showing an example of the configuration of a photosensitive laminated material of the present invention.

FIG. 2 is a schematic view showing another example of the configuration of the photosensitive laminated material of the present invention.

FIG. 3 is a schematic view of an example of a photosensitive layer laminating apparatus used for producing the photosensitive laminated material of the present invention.

FIG. 4 is a cross-sectional view of an example of a belt-shaped support with a photosensitive layer (elongated laminated sheet) used in the present invention.

FIG. 5 is an explanatory view showing an example of a substrate patterning step using the photosensitive laminated material of the present invention.

FIG. 6 is an explanatory view of an auto cut laminator which is an example of an apparatus used for producing a photosensitive laminated material in the present invention.

FIG. 7 is an explanatory diagram showing a configuration of a photosensitive laminated material obtained by the auto-cut laminator in FIG. 6 and a method of using the same.

FIG. 8 is an explanatory diagram of another example of an auto cut laminator which is an example of an apparatus used for producing a photosensitive laminated material in the present invention.

FIG. 9 is an explanatory diagram illustrating the operation of the auto cut laminator in FIG. 8;

[Explanation of symbols]

 Reference Signs List 11 substrate 12 photosensitive material layer 13 flexible plastic sheet 14a cutting / separating position 14b cutting / separating position 15a plastic film 15b plastic film 21 substrate 22 photosensitive material layer 23 flexible plastic sheet 24a cutting / separating position 25a plastic film 31 belt with photosensitive layer Support 32 Sheet substrate 33 Transport roller 34 Heater 35 Substrate turning arm 36 Substrate push-out mechanism 37 Thermo-compression roller under 38 Thermo-compression roller on top 39 Fixing base for band-shaped support with photosensitive layer 40 Slide table 41 Cutter blade 42 Adhesive tape 43 Roll of belt-like support with photosensitive layer 44a Protective film collecting roller 44b Adhesive tape unwinding roller 44c Adhesive tape pressing roller 45 Suction belt 46 Vacuum chamber 47 Rotary blade 4 Fixed blade 49 Substrate reversing arm 50 Belt support 51 Photosensitive layer 52 Protective film 53 Sheet substrate 54 Pattern mask 61 Belt support with photosensitive layer 62 Sheet substrate 63 Transport roller 64 Heater 67 Thermocompression bonding roller 68 below Roller 71 Protective film / photosensitive layer cutter 72 Adhesive tape 73 Roll of belt-shaped support with photosensitive layer 74 Protective film peeling unit 77 Rotary blade 78 Fixed blade 80 Band-shaped support 84 Vacuum plate 85 Temporary heater 86 Support holding member 101 Photosensitive layer Attached strip support 112 Adhesive tape 117 Rotary blade 118 Fixed blade 122 Protective film

Continuation of the front page (56) References JP-A-61-279847 (JP, A) JP-A-4-344237 (JP, A) JP-A-4-223164 (JP, A) JP-A-60-1884843 (JP) JP-A-4-3203031 (JP, A) JP-A-60-184844 (JP, A) JP-A-5-3388041 (JP, A) JP-A-2-15263 (JP, A) 54-27423 (JP, A) Japanese Utility Model Showa 56-66948 (JP, U) Japanese Utility Model Showa 57-19951 (JP, U) Japanese Utility Model Showa 57-11950 (JP, U) (58) Field surveyed (Int. (Cl. ⁷ , DB name) G03F 7/004 512 G03F 7/11 501

Claims (4)

(57) [Claims] 1. A photosensitive laminated material in which a rectangular substrate, a photosensitive material layer, and a flexible plastic sheet are laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are on both sides of the substrate. And the photosensitive material layer is cut and separated at a position inside the substrate end, and between the lower surface of the photosensitive material layer outside the cut position and the substrate end surface. Wherein a plastic film is disposed on the photosensitive laminated material. 2. While running a long laminated sheet in which a flexible plastic sheet, a photosensitive material layer, and a plastic film are laminated in this order, a laminate portion of the photosensitive material layer and the plastic film is attached to a substrate. Joining
Continuously in the length direction at positions on both ends of the planned area
After cutting, remove the plastic
The film is continuously removed and then the plastic
The surface of the photosensitive material layer in the area where the system was removed was prepared separately.
A rectangular substrate is bonded, and the laminated sheet is then attached to the end of the substrate.
2. The method for producing a photosensitive laminated material according to claim 1, comprising cutting the photosensitive laminate material in the width direction . 3. A photosensitive laminated material in which a rectangular substrate, a photosensitive material layer, and a flexible plastic sheet are laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are one side of the substrate. And the photosensitive material layer is cut and separated at a position inside the substrate end, and the lower surface of the photosensitive material layer outside the cut position and the surface of the substrate end are separated from each other. A photosensitive laminated material, wherein a plastic film is disposed between the two. 4. While running a long laminated sheet in which a flexible plastic sheet, a photosensitive material layer, and a plastic film are laminated in this order, a laminate of the photosensitive material layer and the plastic film is attached to a substrate. Joining
At the position on the end on one side of the planned area,
After continuous cutting, the plastic in the area where the substrate is to be bonded is
Film is continuously removed and then the plastic
Use the surface of the photosensitive material layer in the area where the film has been removed separately.
The desired rectangular substrate is joined, and then the laminated sheet is
The method for producing a photosensitive laminated material according to claim 3, comprising cutting at an end portion in a width direction .